JPS60199586A - Laser working device - Google Patents

Abstract

PURPOSE:To perform stable laser working without change in light condensability according to the position of a working head by moving the moving distance of a laser light inverter in the same direction in the specific relation with the moving distance of the working head. CONSTITUTION:When a working head 3 is moved leftward from the position D to the position E, a laser inverter 9 existing in the position F is pulled by a wire 12 extended to a pulley 10 and moves to the position G by overcoming the force of a tension spring 13. The moving distance between the head 3 and the inverter 9 is the displacement between the head 3 and the inverter 9 by a differential movement via the wire 12 and the pulley 10 and therefore and displacement of the inverter 9 is 1/2 the displacement L of the head 3. The changing length of the distance to a laser oscillator 1 according to the movement of the head 3 and the length of the optical path moving back and forth invertedly between the inverter 9 and the head 3 are offset so that the optical path maintains the specified length regardless of the movement in the position of the head 3.

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to transmission of laser light of a laser processing device.

[Prior art]

Conventionally, there is a heel device shown in FIG. 1. In the figure, (1) is a laser oscillator, (23 is a plane mirror,
(3) is the processing head, (48! lens, (5) is the laser beam, (6) is the workpiece, the plane mirror (2) and the processing head (6 eyes) are fixed to the housing, and the laser oscillator (1 ) output from the laser beam (51) is reflected by a plane mirror (2), is incident on a lens (4) provided in the processing head (6), and is condensed by this lens +41. A workpiece (61) is placed at the focal point U of the laser beam (5).

Next, the operation of the above device will be explained. In the configuration shown in Fig. 1, when the laser beam (51) focused by the lens (4) irradiates the workpiece (6) at the focal position, the laser beam (5) irradiates the workpiece (6). ) is absorbed by the surface layer of the workpiece (6) and converted into heat energy, which melts the workpiece (6) and performs processing such as drilling or cutting.For example, while irradiating the workpiece (61 with a laser beam (51), When the position of the head (6) is moved from A shown in the diagram to B shown by the broken line, the laser light (5)
The length of the trajectory irradiated onto the workpiece (6), that is, L in the figure
It is possible to cut the length corresponding to . Further, by controlling and moving the processing head 131' and the NC device described above, processing into an arbitrary shape can be performed.

However, as shown in Fig. 2, the laser beam (5) emitted from the laser oscillator (11) has a characteristic of having a divergence angle indicated by θ, so the distance from the laser oscillator (1) , the diameter of the laser beam (5) increases.This divergence angle θ
is about 2 milliradial in single mode, but for example, when the distance from the laser oscillator (1) is IQm,
The laser beam (51) with an exit diameter of 20 fg has a diameter of 40 m, resulting in a large difference in diameter.

Figure 6 shows the laser beam at position A in Figure 2 (-).

It shows the difference in light convergence between the lens (4) and the laser beam at position B (5b). In other words, the condensing diameter at the focal point C is such that the laser beam (5&) with a large diameter becomes the laser beam (5&) with a narrow diameter.
b) smaller. Furthermore, in Figure 4, which shows the difference in the condensing diameter in detail, the laser beam (
Differences in light focusing performance between 5a) and laser light (5b) are recognized.

Since the conventional laser processing apparatus is configured as described above, the diameter of each laser beam differs at positions at different distances from the laser oscillator.

Since the spot diameter of the laser beam irradiated onto the workpiece is not uniform due to the difference in light focusing ability, there is a drawback that processing cannot be performed under the same conditions.

[Summary of the invention]

This invention was made to solve the drawbacks of the conventional ones as described above, and by keeping the optical path length from the laser oscillator to the processing head constant even when the processing head moves, the light focusing ability is improved during processing. This invention provides a laser processing device V that does not cause any slight change in the position of the head.

[Embodiments of the invention]

Hereinafter, an explanation will be given of an exemplary embodiment of the present invention.

In Figure 5, +71.181 is a plane mirror, (9) is a plane mirror 17L (81 is a fixed laser beam inverter, and 5
As you can see from the diagram, it can be moved freely left and right.

(10) t integrally with the laser beam inverter (9) using the j2 pulley;
A supporting piece (9a') supporting R is pivotally supported at one end of OJ. (11a) and (11b) are fixed points, (12) is a wire, one end of the wire (12) is connected to the fixed point (Ila), the other end is connected to the housing of the processing head (31), and the pulley (10)
6. (13) is a tension spring, one end of which is fixed to the fixed point (11b) and the other end to the support piece (9a), which always pulls the light inverter (9) to the right when looking at the diagram. There is.

Next, the operation of the present invention will be explained. Processing head (6)
? When the D position shown in the figure moves to the 9E position indicated by the broken line on the left, the laser inverter (9) that was in the F position is stretched on the pulley (10) while resisting the tension spring (13). It is pulled by the wire (12) and moves to the yhG position shown by the broken line. This processing head (61 and laser inverter (
91, that is, D-B and F'-G, are the displacements of the processing head 131 and the laser inverter (9) due to the differential movement via the wire (12) and the pulley (10).

The displacement of the laser inverter (9) is 1/2 of the displacement of the processing head (31). Therefore, when the processing head (61) moves, the laser inverter (91) and the processing head (31 are inverted and reciprocated). Since the length of the optical path cancels out each other, the processing head (6
) The optical path length remains constant regardless of the movement of the position.

In the above embodiment, a case has been described in which the processing head (3) moves in a -dimensional direction, but as shown in FIG. 6, a laser device capable of processing an arbitrary two-dimensional shape may be used.

Processing table (14 Y, which is attached to an X-axis table (15X) that moves in the longitudinal direction and moves in the orthogonal direction, similar to 15Y)
) is attached to the processing head (6), and the laser beam inverters (9X) and (9F) are each attached to the
You can move in the same direction as Y 1lII 515Y), and this movement is done using a pulley (10X).

(10Y) and tension springs (13X) and (13Y), the X and Y axis moving table (15X) (15YX7
Since the travel distance is 1/2 of -3, the optical path length is constant regardless of the position of the processing head (3), similar to the embodiment shown in FIG.

7, the pitch of the ball screw (17) that moves the processing head (3) and the ball screw (18) that moves the optical inverter (91), or the pitch of the gear train (19)
) processing head (6) and optical inverter (9) depending on the gear ratio.
The amount of movement may be set to 2:1. Furthermore, the motors (20) and (21) are connected to the NC device (22) in the workpiece 5 shown in FIG.
) etc. to control the rotation ratio and set the above-mentioned movement amount to 2:1, the same effect as in the embodiment described above can be obtained.

〔Effect of the invention〕

As described above, according to the present invention, even if the processing head moves, the optical path length from the laser oscillator to the processing head can always be kept constant, so that the light focusing ability does not change depending on the position of the processing head and is stable. This has the effect of providing a laser processing device.

[Brief explanation of the drawing]

FIG. 1 is a configuration diagram showing a conventional laser processing device, FIG. 2, FIG. 3, and FIG. 4 are explanatory diagrams showing the operation of a conventional laser processing device. FIG. Figures 6, 7 and 8 are all of the other embodiments of this invention. FIG. In the figure, (1) is a laser oscillator, (2) is a plane mirror,
(3) is the processing head, (4) is the lens, (51 is the laser beam, (6) is the workpiece, +71. +81 is the plane mirror, [
91 is a laser beam inverter. (10) H pulley - (11a), (11b) l; El'
j fixed point, (12) is '71 Y, (13) is a tension spring. Note that the same group numbers in Figure 1 are the same, and fc indicates the corresponding parts. Agent Patent Attorney Mitsuro Kimura Diagram 1 〉 Sue U, 1 stem (mm) 15 Diagram 6 1 3X

Claims (1)

[Claims] (1) In a device that makes a laser beam from a laser oscillator enter a processing head provided with a lens and moves the processing head to process a workpiece, the laser beam from the laser oscillator is inverted and the processing head 1. A laser processing apparatus comprising: a laser beam inverter for causing a laser beam to enter the laser beam; the laser beam inverter moves in the same direction at a distance of 1/2 of the movement distance of the processing head. (A pulley pivotally supported on a support piece fixed to two light inverters,
A wire with one end connected to the first fixed point and the other end connected to the processing head and stretched around the pulley, and a tongue and groove tension spring connected one end to the 20J fixed point and the other end connected to the support piece? A laser processing apparatus according to claim 1.