JPS60194333U - temperature control device - Google Patents
temperature control deviceInfo
- Publication number
- JPS60194333U JPS60194333U JP8248484U JP8248484U JPS60194333U JP S60194333 U JPS60194333 U JP S60194333U JP 8248484 U JP8248484 U JP 8248484U JP 8248484 U JP8248484 U JP 8248484U JP S60194333 U JPS60194333 U JP S60194333U
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- control device
- temperature control
- sensors
- interrupting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Control Of Temperature (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図はウェハチャックの温度制御を行った場合の本考
案の一実施例の縦断面図である。 −１・・・ウェハ、
２・・・ウェハチャック、３，４・・・温度センサ、５
・・・温度変更手段、６・・・温度制御回路。FIG. 1 is a longitudinal sectional view of an embodiment of the present invention in which the temperature of the wafer chuck is controlled. -1... wafer,
2... Wafer chuck, 3, 4... Temperature sensor, 5
... Temperature changing means, 6... Temperature control circuit.
Claims (4)
いずれか一方の温度を検出するためのセンサを複数個有
する温度制御装置。(1) A temperature control device having a plurality of sensors for detecting the temperature of both or one of a mask and a wafer of a semiconductor manufacturing device.
値が所定の領域外の時に制御を中断する手段を有するこ
とを特徴とする実用新案登録請求の範囲第１項記載の温
度制御装置。(2) The temperature control device according to claim 1, further comprising means for interrupting control when the temperature values detected by the plurality of temperature sensors are outside a predetermined range.
温度のうち少く□とも１つが所定の温度領域外になっ
た時に制御を中断する手段を有することを特徴とする実
用新案登録請求の範囲第１項記載の温度制御装置。(3) Detected by the plurality of temperature sensors
2. The temperature control device according to claim 1, further comprising means for interrupting control when at least one of the temperatures falls outside a predetermined temperature range.
よって検出された温度差が所定値以上のときに制御を中
断する手段を有することを特徴とする実用新案登録請求
の範囲第１項記載の温度制御装置。(4) There are two temperature sensors, and the utility model has a means for interrupting control when the temperature difference detected by the temperature sensors exceeds a predetermined value. Temperature control device as described.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8248484U JPS60194333U (en) | 1984-06-05 | 1984-06-05 | temperature control device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8248484U JPS60194333U (en) | 1984-06-05 | 1984-06-05 | temperature control device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60194333U true JPS60194333U (en) | 1985-12-24 |
Family
ID=30630240
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8248484U Pending JPS60194333U (en) | 1984-06-05 | 1984-06-05 | temperature control device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60194333U (en) |
Cited By (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06102943A (en) * | 1992-04-24 | 1994-04-15 | Daikin Ind Ltd | Electric carpet temperature controller |
| CN105916642A (en) * | 2014-01-14 | 2016-08-31 | 吉列公司 | Shaving cartridges with thermal sensor |
| WO2018066220A1 (en) * | 2016-10-03 | 2018-04-12 | 株式会社デンソー | Radiation heater device |
| US11247357B2 (en) | 2017-01-20 | 2022-02-15 | The Gillette Company Llc | Heating delivery element for a shaving razor |
| US11558931B2 (en) | 2016-06-22 | 2023-01-17 | The Gillette Company Llc | Personal consumer product with thermal control circuitry |
| US11577417B2 (en) | 2018-03-30 | 2023-02-14 | The Gillette Company Llc | Razor handle with a pivoting portion |
| US11590669B2 (en) | 2018-03-30 | 2023-02-28 | The Gillette Company Llc | Razor handle with movable members |
| US11607820B2 (en) | 2018-03-30 | 2023-03-21 | The Gillette Company Llc | Razor handle with movable members |
| US11691307B2 (en) | 2018-03-30 | 2023-07-04 | The Gillette Company Llc | Razor handle with a pivoting portion |
| US11766795B2 (en) | 2018-03-30 | 2023-09-26 | The Gillette Company Llc | Razor handle with a pivoting portion |
| US11780105B2 (en) | 2018-03-30 | 2023-10-10 | The Gillette Company Llc | Razor handle with a pivoting portion |
| US11806885B2 (en) | 2018-03-30 | 2023-11-07 | The Gillette Company Llc | Razor handle with movable members |
| USD1021248S1 (en) | 2018-03-30 | 2024-04-02 | The Gillette Company Llc | Shaving razor cartridge |
| US11945128B2 (en) | 2018-03-30 | 2024-04-02 | The Gillette Company Llc | Razor handle with a pivoting portion |
| US12208531B2 (en) | 2018-03-30 | 2025-01-28 | The Gillette Company Llc | Razor handle with a rigid member |
| US12226922B2 (en) | 2018-03-30 | 2025-02-18 | The Gillette Company Llc | Razor handle with a pivoting portion |
| US12240135B2 (en) | 2018-03-30 | 2025-03-04 | The Gillette Company Llc | Razor handle with a pivoting portion |
| US12280513B2 (en) | 2018-03-30 | 2025-04-22 | The Gillette Company Llc | Shaving razor system |
-
1984
- 1984-06-05 JP JP8248484U patent/JPS60194333U/en active Pending
Cited By (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06102943A (en) * | 1992-04-24 | 1994-04-15 | Daikin Ind Ltd | Electric carpet temperature controller |
| CN105916642A (en) * | 2014-01-14 | 2016-08-31 | 吉列公司 | Shaving cartridges with thermal sensor |
| JP2017502780A (en) * | 2014-01-14 | 2017-01-26 | ザ ジレット カンパニー リミテッド ライアビリティ カンパニーＴｈｅ Ｇｉｌｌｅｔｔｅ Ｃｏｍｐａｎｙ Ｌｌｃ | Shaving cartridge with thermal sensor |
| US11558931B2 (en) | 2016-06-22 | 2023-01-17 | The Gillette Company Llc | Personal consumer product with thermal control circuitry |
| WO2018066220A1 (en) * | 2016-10-03 | 2018-04-12 | 株式会社デンソー | Radiation heater device |
| JPWO2018066220A1 (en) * | 2016-10-03 | 2019-03-14 | 株式会社デンソー | Radiation heater device |
| US11247357B2 (en) | 2017-01-20 | 2022-02-15 | The Gillette Company Llc | Heating delivery element for a shaving razor |
| US11691307B2 (en) | 2018-03-30 | 2023-07-04 | The Gillette Company Llc | Razor handle with a pivoting portion |
| US11590669B2 (en) | 2018-03-30 | 2023-02-28 | The Gillette Company Llc | Razor handle with movable members |
| US11607820B2 (en) | 2018-03-30 | 2023-03-21 | The Gillette Company Llc | Razor handle with movable members |
| US11577417B2 (en) | 2018-03-30 | 2023-02-14 | The Gillette Company Llc | Razor handle with a pivoting portion |
| US11766795B2 (en) | 2018-03-30 | 2023-09-26 | The Gillette Company Llc | Razor handle with a pivoting portion |
| US11780105B2 (en) | 2018-03-30 | 2023-10-10 | The Gillette Company Llc | Razor handle with a pivoting portion |
| US11806885B2 (en) | 2018-03-30 | 2023-11-07 | The Gillette Company Llc | Razor handle with movable members |
| USD1021248S1 (en) | 2018-03-30 | 2024-04-02 | The Gillette Company Llc | Shaving razor cartridge |
| US11945128B2 (en) | 2018-03-30 | 2024-04-02 | The Gillette Company Llc | Razor handle with a pivoting portion |
| US12208531B2 (en) | 2018-03-30 | 2025-01-28 | The Gillette Company Llc | Razor handle with a rigid member |
| US12226922B2 (en) | 2018-03-30 | 2025-02-18 | The Gillette Company Llc | Razor handle with a pivoting portion |
| US12240135B2 (en) | 2018-03-30 | 2025-03-04 | The Gillette Company Llc | Razor handle with a pivoting portion |
| US12280513B2 (en) | 2018-03-30 | 2025-04-22 | The Gillette Company Llc | Shaving razor system |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS60194333U (en) | temperature control device | |
| JPS63188559U (en) | ||
| JPS60129903U (en) | Pulse checker | |
| JPS5835800U (en) | furnace | |
| JPS58103367U (en) | Flame abnormality detection device | |
| JPS59154667U (en) | displacement sensor | |
| JPS5832595U (en) | Abnormal temperature detection device | |
| JPS60104744U (en) | Temperature compensation circuit for semiconductor pressure sensor | |
| JPS5993090U (en) | Heat sensitive detection device | |
| JPS6218648U (en) | ||
| JPS5972437U (en) | air conditioner | |
| JPS63103101U (en) | ||
| JPS5989249U (en) | Water vapor detection device | |
| JPS5952646U (en) | semiconductor integrated circuit | |
| JPS5897849U (en) | Semiconductor device protection device | |
| JPS63153790U (en) | ||
| JPS6269741U (en) | ||
| JPS60155275U (en) | Projection tube heating prevention circuit | |
| JPS6119733U (en) | Pyroelectric infrared detector | |
| JPS5860130U (en) | Noise control device for air-cooled heat exchange equipment | |
| JPS63131533U (en) | ||
| JPS60149878U (en) | Engine intake air temperature detection device | |
| JPS5812938U (en) | semiconductor wafer | |
| JPS5984441U (en) | temperature monitoring device | |
| JPS5847913U (en) | Condensation prevention device |