JPS60169551U - Gas leak detection device - Google Patents
Gas leak detection deviceInfo
- Publication number
- JPS60169551U JPS60169551U JP5783284U JP5783284U JPS60169551U JP S60169551 U JPS60169551 U JP S60169551U JP 5783284 U JP5783284 U JP 5783284U JP 5783284 U JP5783284 U JP 5783284U JP S60169551 U JPS60169551 U JP S60169551U
- Authority
- JP
- Japan
- Prior art keywords
- gas leak
- detection device
- liquid level
- leak detection
- differential pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 title claims description 5
- 239000007788 liquid Substances 0.000 claims 4
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Examining Or Testing Airtightness (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
図は本考案になるガス漏れ検出装置の一実施例の概略構
成図である。
１・・・遮断弁、２・・・流入側配管、３・・・流出側
配管、４・・・フロート室、５・・・流入側バイパス配
管、６・・・流出側バイパス配管、７・・・フロート、
８・・・センサ、１０・・・電気／光変換部、１１・・
・光／電気変換部、１２・・・バルブ。The figure is a schematic diagram of an embodiment of the gas leak detection device according to the present invention. DESCRIPTION OF SYMBOLS 1... Shutoff valve, 2... Inlet side piping, 3... Outlet side piping, 4... Float chamber, 5... Inlet side bypass piping, 6... Outlet side bypass piping, 7. ··float,
8...Sensor, 10...Electrical/optical conversion unit, 11...
- Optical/electric conversion section, 12... bulb.
Claims (1)
バイパスするバイパス配管と、該バイパス配管に設けら
れ上記遮断弁の開弁前に行うガス漏れ検知時に開弁され
る弁手段と、バイパス配管途中に流入側と流出側の差圧
に応じて液面が上下するよう液を貯え該液面が所定以上
変位したことを検出して差圧検出信号を出力する液面検
知手段とを設けてなるガス漏れ検出装置。a bypass pipe that bypasses an inflow side and an outflow side of a cutoff valve provided in the gas supply pipe; a valve means provided in the bypass pipe and opened when a gas leak is detected before opening the cutoff valve; Liquid level detection means is provided in the bypass piping to store liquid so that the liquid level rises and falls according to the differential pressure between the inflow side and the outflow side, and outputs a differential pressure detection signal when the liquid level is displaced by a predetermined amount or more. A gas leak detection device is provided.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5783284U JPS60169551U (en) | 1984-04-19 | 1984-04-19 | Gas leak detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5783284U JPS60169551U (en) | 1984-04-19 | 1984-04-19 | Gas leak detection device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60169551U true JPS60169551U (en) | 1985-11-11 |
Family
ID=30582738
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5783284U Pending JPS60169551U (en) | 1984-04-19 | 1984-04-19 | Gas leak detection device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60169551U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017032435A (en) * | 2015-08-03 | 2017-02-09 | 株式会社Ｓｃｒｅｅｎホールディングス | Substrate processing device |
-
1984
- 1984-04-19 JP JP5783284U patent/JPS60169551U/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017032435A (en) * | 2015-08-03 | 2017-02-09 | 株式会社Ｓｃｒｅｅｎホールディングス | Substrate processing device |
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