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JPS60152677A - Method for manufacturing cubic boron nitride coated hard body - Google Patents

Method for manufacturing cubic boron nitride coated hard body

Info

Publication number
JPS60152677A
JPS60152677A JP704384A JP704384A JPS60152677A JP S60152677 A JPS60152677 A JP S60152677A JP 704384 A JP704384 A JP 704384A JP 704384 A JP704384 A JP 704384A JP S60152677 A JPS60152677 A JP S60152677A
Authority
JP
Japan
Prior art keywords
boron nitride
coated
cubic boron
hard body
hard
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP704384A
Other languages
Japanese (ja)
Other versions
JPH0542509B2 (en
Inventor
Katsuhiro Mitsusaka
三坂 勝弘
Shuji Yatsu
矢津 修示
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP704384A priority Critical patent/JPS60152677A/en
Publication of JPS60152677A publication Critical patent/JPS60152677A/en
Publication of JPH0542509B2 publication Critical patent/JPH0542509B2/ja
Granted legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/34Nitrides
    • C23C16/342Boron nitride
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23BTURNING; BORING
    • B23B27/00Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
    • B23B27/14Cutting tools of which the bits or tips or cutting inserts are of special material
    • B23B27/148Composition of the cutting inserts

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 〔本発明の技術分野〕 本発明は切削工具として使用するのに適する耐摩耗性に
優れた立方晶窒化硼素(Cubic BoronNit
ride以下CBNと略す。)の表面層で被覆さ些た硬
質体およびその製造方法に関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention is directed to the use of cubic boron nitride (Cubic BoronNit), which has excellent wear resistance and is suitable for use as a cutting tool.
ride is abbreviated as CBN below. ) and a method for producing the same.

〔従来の切削工具〕[Conventional cutting tools]

現在、主として結合金属と共に少なくとも1種の膨化物
を含有する焼結された硬質基体の表面に、 Ti(j、
TiN又はA/203等を被覆した工具が使用されてい
る。この現状の被覆工具は、靭性の高い基体にこれより
も高硬度で耐摩耗性忙優れた前記被覆層をつけることに
より、靭性と耐摩耗性の双方に優れたものである。
Currently, Ti(j,
Tools coated with TiN or A/203 are used. This current coated tool has excellent both toughness and wear resistance by attaching the coating layer, which has higher hardness and excellent wear resistance, to a base having high toughness.

しかし、切削速度の高速化に伴い刃先温度が上昇するが
、前記被覆層では1)化学的安定性による被剛材との反
応を少なくする2)高熱伝導率による刃先温度を下げる
ことができない。その結果、前記被覆層からなる切削工
具では、その寿命を伸ばすことが不可能であった。
However, as the cutting speed increases, the temperature of the cutting edge increases, but the coating layer cannot 1) reduce the reaction with the rigid material due to its chemical stability, and 2) reduce the temperature of the cutting edge due to its high thermal conductivity. As a result, it has been impossible to extend the life of the cutting tool made of the coating layer.

本発明者らは前記の1)、2)Kついて被覆層のs類を
検討することKよって、高速切削で優れた性能を発揮す
る工具材質を開発すべく研究を重ねた結果、本発明を完
成したものである。
The present inventors studied the above-mentioned types 1) and 2) of the coating layer, and as a result of repeated research to develop a tool material that exhibits excellent performance in high-speed cutting, the present invention was developed. It is completed.

〔本発明の目的〕[Object of the present invention]

すなわち、本発明の目的は、高速で切削した場合であっ
ても、刃先温度が大きく上昇せず、また、被剛材との反
応による摩耗も少ない被覆硬質体及びその製造方法を提
供するにある。
That is, an object of the present invention is to provide a coated hard body that does not cause a large increase in the temperature of the cutting edge even when cutting at high speed, and also has less wear due to reaction with the rigid material, and a method for manufacturing the same. .

〔本発明の構成〕[Configuration of the present invention]

そして、本発明は上記目的を達成する手段として、被覆
層としてCBNを選定したものであり、また、この被覆
層を硬質基体表面、または、予柘中間被覆層を施こした
硬質基体表面に形成させる手段として、まず、アモルフ
ァス状の留化硼素を被覆させ、次いで、これをCB l
(K変換させる点にある。すなわち、本発明は、(1)
結合剤金属と共に少なくとも1種の炭化物を含有する焼
結された硬質基体に、直接または中間層を介して厚さo
、5〜20μの立方晶窒化釦素の被覆層を有することを
特徴とする立方晶窒化硼素被覆硬質体、および (2)結合剤金属と共に少なくとも1釉の炭化物を含有
する焼結された硬質基体または予め周期律表の第4a、
5a族金属の炭化物、窒化物、酸化物及び硼化物の1種
又はそれ以上の被覆が施された上記硬質基体表面に、厚
さ0.5〜20μのアモルファス状の窒化硼素を気相法
により被覆し、この被覆された硬質体をA/および/又
はAI!化合物と接した状態で立方晶窒化鉤素の熱力学
的安定領域に保持することKよって、アモルファス状の
窒化硼素の全てを立方晶窒化硼素忙変換することを特徴
とする立方晶窒化硼素被覆硬質体の製造方法 である。
As a means for achieving the above object, the present invention selects CBN as a coating layer, and also forms this coating layer on the surface of a hard substrate or on the surface of a hard substrate on which an intermediate coating layer has been applied. First, amorphous boron distillate is coated, and then this is coated with CB l
(K conversion. That is, the present invention is based on (1)
A sintered hard substrate containing at least one carbide along with a binder metal is coated directly or through an intermediate layer with a thickness o
, a cubic boron nitride-coated hard body characterized by having a coating layer of 5 to 20 microns of cubic boron nitride, and (2) a sintered hard substrate containing at least one glaze carbide together with a binder metal. or 4a of the periodic table in advance,
Amorphous boron nitride with a thickness of 0.5 to 20 μm is applied by a vapor phase method to the surface of the hard substrate coated with one or more of group 5a metal carbides, nitrides, oxides, and borides. A/and/or AI! A cubic boron nitride-coated hard material characterized by converting all amorphous boron nitride into cubic boron nitride by keeping it in the thermodynamically stable region of cubic boron nitride in contact with a compound. It is a method of manufacturing the body.

以下、本発明の詳細な説明すると、本発明者らは、OB
Nが、ダイヤモンドに次ぐ高硬度の物質であり、また、
熱伝導性に優れ、高温における鉄族金属との反応性が少
ない物質であることを知り、そして、OBNが、結合金
属と共に少なくとも1種の炭化物を含有する焼結された
硬質基体に直接に又は周期律表の第4a、5a族金属の
炭化物、窒化物、酸化物、硼化物の1種又はそれ以上の
被覆の1層又はそれ以上の中間層を介して厚さ0.5〜
20μに被覆された硬質体が従来にない性能を有してい
ることを見い出した。
Hereinafter, to explain the present invention in detail, the present inventors have discovered that OB
N is a substance with the highest hardness next to diamond, and
We found that OBN is a material with excellent thermal conductivity and low reactivity with iron group metals at high temperatures, and that OBN can be directly or Thickness 0.5 to 0.5 through one or more intermediate layers of one or more coatings of carbides, nitrides, oxides, and borides of metals from groups 4a and 5a of the periodic table.
It has been discovered that a hard body coated with 20μ has unprecedented performance.

ところで、CBNを気相合成する研究は広く行われてい
るが、未だ雫実な方法が見い出きれていない。ただ、ア
モルファス状の窃化硼率は、プラズマcvn、イオンブ
レーティング、イオンビーム蒸着などの手段により均一
な膜を作ることは比較的容易である。本発明者らはこの
点に着目したものであって、一旦アモルファス状の窒化
硼素薄膜(勿論部分的にOBNを含んだものであっても
良いが)を被覆し、これをA7及び/またはAI! 化
合物と接触した状態で、OBNの安定領域である高圧、
高温にさらすことにより、(38Nの膜に転換せしめる
ものである。この手段によれば、容易にCBNのみから
なる強固な被覆層が得られ、かつ、硬質基体との密着強
度も高いものである。
Incidentally, although research on vapor phase synthesis of CBN has been widely conducted, no practical method has yet been found. However, it is relatively easy to form an amorphous film with a uniform porosity by means of plasma CVN, ion blating, ion beam evaporation, or the like. The present inventors focused on this point, and first coated with an amorphous boron nitride thin film (of course, it may partially contain OBN), and then coated it with A7 and/or AI. ! In contact with the compound, the high pressure that is the stable region of OBN,
By exposing it to high temperature, it is converted into a 38N film. By this means, a strong coating layer consisting only of CBN can be easily obtained, and the adhesion strength to the hard substrate is also high. .

前述した如<OBNは、硬度、熱伝導性及び高温におけ
る化学的安定性の各性質が非常に優れているため、OB
Nを表面に被覆した硬質体は高速で切削した場合におい
ても、刃先温度が大きく上昇せず又被剛材との反応によ
る摩耗も少ないものである。
As mentioned above, OBN has excellent properties such as hardness, thermal conductivity, and chemical stability at high temperatures.
Even when a hard body coated with N on its surface is cut at high speed, the temperature of the cutting edge does not rise significantly and there is little wear due to reaction with the rigid material.

本発明において、基体としては、結合剤金属と共に少な
くともiaiの炭化物を含有する焼結された硬質基体を
用いるものであり、例えば、wa基とか(Mo、W) 
G超超硬合金、Tieを主体とするサーメット等公知の
ものから任意に選ぶことができる。
In the present invention, a sintered hard substrate containing at least iai carbide together with a binder metal is used as the substrate, for example, a wa group (Mo, W), etc.
It can be arbitrarily selected from known materials such as G cemented carbide and Tie-based cermets.

本発明において、表面のOBN被覆層の厚みハ0.5〜
20μの範囲とするが、その埋山は0.5μ未満では、
硬度、熱伝導性、被剛材に対する化学的安定性等の特性
が充分でなく製品間のバラツキも大きくなるからであり
、また20μを超えると、被覆層内での歪が発生し易く
層自体の強度が低くなり、切削時に被覆層に微小欠損が
生じ工具性能が低下してしまうからである。
In the present invention, the thickness of the OBN coating layer on the surface is 0.5 to
The range is 20μ, but if the buried peak is less than 0.5μ,
This is because properties such as hardness, thermal conductivity, and chemical stability for the rigid material are not sufficient, leading to large variations between products.If the thickness exceeds 20μ, distortion is likely to occur within the coating layer, causing the layer itself to deteriorate. This is because the strength of the coating layer decreases, and micro-defects occur in the coating layer during cutting, resulting in a decrease in tool performance.

また、本発明において、CBN層をNo基超超硬合金被
覆する場合、アモルファス状窒化硼素を直接に被覆する
と密着度の弱いものしか得られず、下地として予め周期
律表の第4 a、Sa族金属の炭化物、審化物、酸化物
、硼化物の1種又はそれ以上の被覆の1層又はそれ以上
の中間層の被覆を行い、その上にアモルファス状窒化硼
素の被覆を行えばよい。しかし例えば硬質基体がTiO
、TiNを含有する場合には、直接にアモルファス状情
化硼素を密着度よく被覆することが可能である。
In addition, in the present invention, when coating the CBN layer with No-based cemented carbide, if amorphous boron nitride is directly coated, only a weak adhesion will be obtained, and as a base material, the substrate may be prepared using One or more intermediate layers of one or more of group metal carbides, carbides, oxides, and borides may be applied, and then amorphous boron nitride may be applied thereon. However, for example, if the hard substrate is TiO
, TiN, it is possible to directly coat amorphous boron oxide with good adhesion.

この中間層の厚みは、その有利な性質を保持する一定限
界内で変えることができる。本発明により好適な中間層
を得るためKは、厚みは少なくとも0.5μである。最
良の結果は1〜10μで見出された。この中間層は、良
く知られているPVD、CVD等の方法で被覆を行う。
The thickness of this intermediate layer can be varied within certain limits while retaining its advantageous properties. To obtain an intermediate layer suitable according to the invention, K has a thickness of at least 0.5 microns. Best results were found between 1 and 10μ. This intermediate layer is coated by well-known methods such as PVD and CVD.

CBN層の被覆においては、本発明によれば例えば硬質
基体をBC/4 およびNH3含有ガス流れ内に置いて
温度6oo〜1000tll’、圧力Oj 〜10 w
 Hg 条件下のプラズマCVD法でアモルファス状の
9化硼素を被覆し、この被覆された硬質基体とAI!お
よび/又はA77層物とをか接するようにして金属容器
、例えばMo、 W等の中に充填し、その容器を高温高
圧発生室内に配し、第1図に示したCBNの熱力学的安
定な領域すなわちA域で数分間以上曝す。(なお、第1
図において、1は立方晶−六方晶型密化硼素平衡線であ
り、Aは高正相型窒化硼素安定域であり、Bは六方晶型
密化硼素安定域である。)この間にアモルファス状窒化
硼素は、AI! および/又はA/ 化合物の触媒作用
により0BNK変換し、硬質基体の表面にClBN層が
形成される。保持終了後圧力を保持した状態で加熱のみ
を停止し、高温高圧発生室内が室温付近まで冷却された
後に、保持圧力を除々に解除して常圧に戻す。回収され
た試料は金属反応容器を酸処理することによりCBN被
覆硬質体が得られる。
In coating the CBN layer, according to the invention, for example, the rigid substrate is placed in a BC/4 and NH3-containing gas stream at a temperature of 6oo to 1000 tll' and a pressure of Oj to 10 w.
Amorphous boron 9ide is coated using a plasma CVD method under Hg conditions, and this coated hard substrate and AI! The thermodynamic stability of CBN shown in Fig. 1 is achieved by filling a metal container, such as Mo or W, in contact with the CBN and/or A77 layer material, and placing the container in a high temperature and high pressure generation chamber. Exposure for several minutes or more in a certain area, that is, area A. (In addition, the first
In the figure, 1 is the cubic-hexagonal densified boron equilibrium line, A is the highly positive phase boron nitride stability region, and B is the hexagonal densified boron stability region. ) During this period, the amorphous boron nitride was transformed into AI! and/or A/ OBNK is converted by the catalytic action of the compound, and a ClBN layer is formed on the surface of the hard substrate. After the holding is completed, only the heating is stopped while the pressure is held, and after the inside of the high temperature and high pressure generating chamber is cooled to around room temperature, the holding pressure is gradually released and the pressure is returned to normal pressure. A CBN-coated hard body is obtained by treating the recovered sample with an acid in a metal reaction vessel.

アモルファス状窒化硼素の硬質基体への被覆は、上記し
たプラズマCVD法以外に、イオンビーム蒸着、または
イオンブレーティングなどの方法も本発明で適用できる
ものである。
For coating a hard substrate with amorphous boron nitride, in addition to the plasma CVD method described above, methods such as ion beam evaporation or ion blating can also be applied in the present invention.

以下本発明の実施例をあげて、本発明をより詳細に説明
する。
EXAMPLES The present invention will be described in more detail below with reference to Examples.

〔実施例1〕 we基超超硬合金重量基準で9.5%Co、 12%T
i0 、6%TaOおよび残余we)の基体な用いて5
NG452の切削チップを作成した。これに予めCVD
法でTi(3を1μ被後したものと無被覆のものとをB
C/’ 、 NH3,H2を各々重量で15%、40%
、45%含有する混合ガス流れ内に置いて温度aooc
、圧力0.51IIIHg)条件下で15.56Mh 
2001f)高周波を用いたプラズマCVD法よりアモ
ルファス状窒化硼素の被覆処理を行った。処理時間は2
時間であった。この処理の結果、厚さ約4μのアモルフ
ァス状窒化硼素を得た。これらを被覆層とA/粉が接す
るようKしてMo 容器に充填し、容器を温度1200
C,圧力40 kb に1層分間保持した。その結果ア
モルファス状窒化硼素は全て0BNK変換していた。こ
れらのチップを表1に示す条件で切削テストを行った。
[Example 1] 9.5% Co, 12% T based on the weight of we-based cemented carbide
i0, 6% TaO and the remainder we) using 5
A cutting tip of NG452 was made. CVD on this in advance
B
C/', NH3, H2 15% and 40% by weight, respectively
, placed in a mixed gas stream containing 45% at a temperature aooc
, pressure 0.51IIIHg) under conditions of 15.56Mh
2001f) Amorphous boron nitride coating treatment was performed by plasma CVD method using high frequency. Processing time is 2
It was time. As a result of this treatment, amorphous boron nitride with a thickness of about 4 microns was obtained. These were heated so that the coating layer and A/powder were in contact with each other, and then filled into a Mo container, and the container was heated to a temperature of 1200.
C, pressure was maintained at 40 kb for 1 minute. As a result, all amorphous boron nitride was converted to 0BNK. A cutting test was conducted on these chips under the conditions shown in Table 1.

尚、比較として前記基体にCVD法で直接AI!2o3
を被覆したチップを用いた。結果を表2に示す。
For comparison, AI! was applied directly to the substrate using the CVD method. 2o3
A chip coated with was used. The results are shown in Table 2.

表 1 表 2 〔実施例2〕 硬質基体として表5に示す6種を用いた。Table 1 Table 2 [Example 2] Six types shown in Table 5 were used as hard substrates.

表 5 表5の硬質基体を用いて、5NG452のチップを作成
し実施例1と同条件のプラズマOVD法にて被覆処理を
行った。処理時間は3時間であった。この処理の結果、
厚さ5.4μのアモルファス状窒化磯素を得た。これら
を被援層とAI!N粉が接するよ5KしてMo 容器に
充填し、容器を温度1250tZ’45kb [10分
間保持した。その結果アモルファス状窒化硼素は全てC
BNに変換していたこれらのチップを実施例1の条件1
と同条件で切削テストを行った。比較として表6に示す
ig、cの基体にOVD法にて直接Al2O3を被1し
たチップを用いた。
Table 5 Using the hard substrates shown in Table 5, 5NG452 chips were prepared and coated using the plasma OVD method under the same conditions as in Example 1. Treatment time was 3 hours. As a result of this process,
An amorphous silicon nitride with a thickness of 5.4 μm was obtained. These are the supported groups and AI! The mixture was heated to 5K until the N powder was in contact with the powder, and then filled into a Mo container, and the container was kept at a temperature of 1250 tZ'45 kb for 10 minutes. As a result, all amorphous boron nitride is C
These chips that had been converted to BN were converted to Condition 1 of Example 1.
A cutting test was conducted under the same conditions. For comparison, chips were used in which substrates ig and c shown in Table 6 were directly coated with Al2O3 by the OVD method.

(各々比較材−1,−2とする)結果を表4に示す。The results are shown in Table 4 (comparative materials -1 and -2, respectively).

表 4 〔実施例5〕 実施例2の硬質基体mAを用いて実施例1と同様にして
CBN被覆されたチップ(SNG 452)を作成した
。これらのCBN層の厚みと処理時間を表5に示す。こ
れらを実施例1の条件2゜3によって切削テストを行っ
た結果を表5に示す。尚比軟材として基体A K AI
!203を5μ被情したチップを用いた。
Table 4 [Example 5] Using the hard substrate mA of Example 2, a CBN-coated chip (SNG 452) was produced in the same manner as in Example 1. Table 5 shows the thickness and processing time of these CBN layers. Table 5 shows the results of a cutting test conducted on these under the conditions of 2°3 of Example 1. Base material A K AI as a soft material
! A chip containing 5μ of 203 was used.

表 5 〔本発明の効果〕 本発明は、以上詳記したよ5に、切削工具として使用す
るのに優れた性能、すなわち、高速切削時においても、
刃先温度が大きく上昇せず、また、被剛材との反応によ
る摩耗も少ないものが得られる効果が生するものである
Table 5 [Effects of the present invention] As described in detail above, the present invention has excellent performance when used as a cutting tool, that is, even during high-speed cutting.
This has the effect that the temperature of the cutting edge does not rise significantly and there is less wear due to reaction with the rigid material.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は高圧相型窒化硼素の圧力一温度相図上における
熱力学的な安定領域を示したものである。・ 1:立も晶−六方晶型窒化硼素平衡線 A:高圧相型窒化硼素安定域 B:六方晶型密化硼素安定域 代理人 内 1) 明 代理人 萩原亮− 第1図 湿 度 (0C)
FIG. 1 shows the thermodynamically stable region on the pressure-temperature phase diagram of high-pressure phase type boron nitride.・ 1: Standing crystal - hexagonal boron nitride equilibrium line A: High pressure phase boron nitride stability region B: Hexagonal densified boron stability region Representative 1) Akira representative Ryo Hagiwara - Figure 1 Humidity ( 0C)

Claims (1)

【特許請求の範囲】 0) 結合剤金属と共に少なくとも1種の炭化物を含有
する焼結された硬質基体に1直接または中間層を介して
厚さ0.5〜20μの立方晶窒化硼素の被覆層を有する
ことを特徴とする立方晶窒化硼素被覆硬質体。 (2) 中間層が周期律表の第4a、5a族金属の炭化
物、窒化物、酸化物及び硼化物の1種またはそれ以上の
被覆の1層またはそれ以上の層である特許請求の範囲第
1項記載の立方晶窒化硼素被覆硬質体。 (3)結合剤金属と共に少なくとも1wiの炭化物を含
有する焼結された硬質基体または予め周期律表の第4a
、5a族金属の炭化物、窒化物、酸化物及び硼化物の1
種又はそれ以上の被覆が施された上記硬質基体表面に、
厚さ0.5〜20μのアモルファス状の窒化硼素を気相
法により被覆し、この被覆された硬質体をA/および/
又はjL/化合物と接した状態で立方晶窒化硼素の熱力
学的安定領域に保持することによって、アモルファス状
の9化硼素の全てを立方晶賭化側1素に変換することを
特徴とする立方晶窒化硼素被覆硬質体の製造方法。
[Scope of Claims] 0) A coating layer of cubic boron nitride with a thickness of 0.5 to 20 μm directly or via an intermediate layer on a sintered hard substrate containing at least one carbide together with a binder metal. A cubic boron nitride-coated hard body characterized by having the following characteristics: (2) The intermediate layer is one or more layers of one or more coatings of carbides, nitrides, oxides, and borides of metals from groups 4a and 5a of the periodic table. The cubic boron nitride-coated hard body according to item 1. (3) A sintered hard substrate containing at least 1wi carbide or preliminarily 4a of the periodic table along with a binder metal.
, carbides, nitrides, oxides and borides of Group 5a metals 1
The surface of the hard substrate is coated with a seed or more,
Amorphous boron nitride with a thickness of 0.5 to 20μ is coated by a vapor phase method, and the coated hard body is coated with A/ and/
Or, by maintaining the cubic boron nitride in the thermodynamically stable region in contact with the compound, all of the amorphous boron 9ide is converted to one element on the cubic boron nitride side. A method for producing a hard body coated with crystalline boron nitride.
JP704384A 1984-01-20 1984-01-20 Method for manufacturing cubic boron nitride coated hard body Granted JPS60152677A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP704384A JPS60152677A (en) 1984-01-20 1984-01-20 Method for manufacturing cubic boron nitride coated hard body

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP704384A JPS60152677A (en) 1984-01-20 1984-01-20 Method for manufacturing cubic boron nitride coated hard body

Publications (2)

Publication Number Publication Date
JPS60152677A true JPS60152677A (en) 1985-08-10
JPH0542509B2 JPH0542509B2 (en) 1993-06-28

Family

ID=11655019

Family Applications (1)

Application Number Title Priority Date Filing Date
JP704384A Granted JPS60152677A (en) 1984-01-20 1984-01-20 Method for manufacturing cubic boron nitride coated hard body

Country Status (1)

Country Link
JP (1) JPS60152677A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0209137A2 (en) * 1985-07-17 1987-01-21 Toshiba Tungaloy Co. Ltd. Cubic boron nitride coated material and producing method of the same
JPH0297677A (en) * 1988-06-13 1990-04-10 Sandvik Ab Substrate coating that can be decarburized in the coating process
US4971851A (en) * 1984-02-13 1990-11-20 Hewlett-Packard Company Silicon carbide film for X-ray masks and vacuum windows
US5137772A (en) * 1987-03-27 1992-08-11 Nihon Sinku Gijutsu Kabusiki Kaisha Body coated with cubic boron nitride and method for manufacturing the same

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5775744A (en) * 1980-10-31 1982-05-12 Toshiba Tungaloy Co Ltd Tool containing and coated with dispersed material
JPS6063372A (en) * 1983-09-19 1985-04-11 Agency Of Ind Science & Technol Manufacture of thin boron nitride film of high hardness

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5775744A (en) * 1980-10-31 1982-05-12 Toshiba Tungaloy Co Ltd Tool containing and coated with dispersed material
JPS6063372A (en) * 1983-09-19 1985-04-11 Agency Of Ind Science & Technol Manufacture of thin boron nitride film of high hardness

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4971851A (en) * 1984-02-13 1990-11-20 Hewlett-Packard Company Silicon carbide film for X-ray masks and vacuum windows
EP0209137A2 (en) * 1985-07-17 1987-01-21 Toshiba Tungaloy Co. Ltd. Cubic boron nitride coated material and producing method of the same
US5137772A (en) * 1987-03-27 1992-08-11 Nihon Sinku Gijutsu Kabusiki Kaisha Body coated with cubic boron nitride and method for manufacturing the same
JPH0297677A (en) * 1988-06-13 1990-04-10 Sandvik Ab Substrate coating that can be decarburized in the coating process

Also Published As

Publication number Publication date
JPH0542509B2 (en) 1993-06-28

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