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JPS60150025A - Optical superposition system for laser beam - Google Patents

Optical superposition system for laser beam

Info

Publication number
JPS60150025A
JPS60150025A JP663684A JP663684A JPS60150025A JP S60150025 A JPS60150025 A JP S60150025A JP 663684 A JP663684 A JP 663684A JP 663684 A JP663684 A JP 663684A JP S60150025 A JPS60150025 A JP S60150025A
Authority
JP
Japan
Prior art keywords
laser beams
laser beam
laser
beams
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP663684A
Other languages
Japanese (ja)
Inventor
Sadao Seki
関 貞夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP663684A priority Critical patent/JPS60150025A/en
Publication of JPS60150025A publication Critical patent/JPS60150025A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10Beam splitting or combining systems
    • G02B27/14Beam splitting or combining systems operating by reflection only
    • G02B27/143Beam splitting or combining systems operating by reflection only using macroscopically faceted or segmented reflective surfaces
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/0014Monitoring arrangements not otherwise provided for
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/005Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Couplings Of Light Guides (AREA)

Abstract

PURPOSE:To reduce loss of superposition and to improve its precision by using an optical element which has plural total reflecting surfaces so coated as to obtain total reflection to laser beams when plural laser beams are superposed. CONSTITUTION:Parallel laser beams (a) and (a') emitted from individual laser oscillators are reflected totally by the V-shaped optical element 11 which has reflecting surfaces 11a and 11a' so coated as to obtain total reflection to the respective incident laser beams, thereby obtaining beams which travel in the same direction and have optical axes in parallel to each other. Those beams are incident to a lens system 2 for convergence. The laser beam projected from the lens system 2 is converged on the core part 31 of an optical fiber transmission line 3 and passed through the optical fiber transmission line 3, so that the incident laser beams (a) and (a') are superposed on the same optical path. Thus, plural laser beams are superposed on the same optical path with low loss and high precision.

Description

【発明の詳細な説明】 本究明は複数のレーザビームを同一光路上に重ね合わせ
ることを目的とじた、多ビーム重ね合わせ型光学系に関
する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a multi-beam superposition type optical system that aims to superimpose a plurality of laser beams on the same optical path.

近年レーザビームは、計測機器、医療用機器。In recent years, laser beams have been used in measurement equipment and medical equipment.

加工装置等さまざまな方面に利用されるよりになって来
ておシ、使用されるレーザ発振器モ、CO2レーザ、A
rレーザ、 He −Ne レーザ、YAGL/−ザ発
振器等々に渡っている。さらにレーザの発振形態も、連
続発振、パルス発振、Qスイッチ発振等が有り、利用目
的により種々選択が可能となっている。
Laser oscillators, CO2 lasers, A
r laser, He-Ne laser, YAGL/- laser oscillator, etc. Furthermore, the oscillation mode of the laser includes continuous oscillation, pulse oscillation, Q-switch oscillation, etc., and various choices can be made depending on the purpose of use.

上述のように多様化したレーザビームを、同一光路上に
重ね合わせることができれば、今まで実現のできなかっ
た応用分野を拓くことができる。
If the diversified laser beams mentioned above can be superimposed on the same optical path, it will be possible to open up fields of application that have not been possible until now.

従来、複数のレーザビームを同一光路上に重ね合わすに
は半透鏡が用いられているが、この方法は損失が50%
と極めて大きいために利用される範囲も一部かぎられた
領域のみであった。
Conventionally, a semi-transparent mirror has been used to superimpose multiple laser beams on the same optical path, but this method has a loss of 50%.
Because of its extremely large size, it was only used in a limited area.

本発明の目的は、複数のレーザビームを同一光路上に低
損失、高精度で重ね合わせることのできる光学系を提供
することである。
An object of the present invention is to provide an optical system that can superimpose a plurality of laser beams on the same optical path with low loss and high precision.

本発明のレーザビーム重ね合わせ光学系は、入射レーザ
ビームに対して全反射コーティングを施された複数の反
射面を有する光学素子と、前記反射面によυ反射された
複数本のレーザビームを集束するためのレンズ系と、こ
のレンズ系により集束されたレーザビームを導くための
光フアイバー伝送路とによ多構成されている。
The laser beam superimposition optical system of the present invention includes an optical element having a plurality of reflective surfaces coated with a total reflection coating for an incident laser beam, and a plurality of laser beams reflected by the reflective surfaces. The laser beam is composed of a lens system and an optical fiber transmission line for guiding the laser beam focused by the lens system.

本発明によれば、従来半透鏡により実現させていた複数
のレーザビームの重ね合わせを、損失の大きな半透鏡を
使用せずに、レーザビームに対する全反射コーティング
を施した複数の全反射面を持つ光学素子を使用すること
で損失を極めて少なく押えることを可能とし、また複数
の全反射面で反射された複数のレーザビームを集束レン
ズ系により光フアイバー内に導くことによシ簡単に同一
光路上にビームを重ね合わせることが可能となる。
According to the present invention, the superposition of multiple laser beams, which was conventionally achieved using a semi-transparent mirror, can be achieved by using a plurality of total reflection surfaces coated with total reflection coating for laser beams, without using a semi-transparent mirror with a large loss. By using optical elements, it is possible to keep loss to an extremely low level, and by guiding multiple laser beams reflected by multiple total reflection surfaces into an optical fiber using a focusing lens system, it is possible to easily align them on the same optical path. It becomes possible to superimpose the beams on each other.

さらにこの光フアイバー伝送路を用いることの効果は、
電子通信学会1979年7月19日発行、0QE79−
58 、第43頁乃至第47頁、柳瀬。
Furthermore, the effect of using this optical fiber transmission line is
Institute of Electronics and Communication Engineers, published July 19, 1979, 0QE79-
58, pp. 43-47, Yanase.

白根両氏の論文「光ファイバを用いた高出力レーザ光伝
送」、特に46頁左欄「〔3〕加工への応用」の項に述
べられているように、ファイバーから出射されたレーザ
ビームのエネルギー強度分布は、ファイバー内でレーザ
ビームのモード変換が行なわれるため、使用するファイ
バーの屈折率分布に近い形状になることを示している。
As stated in Mr. Shirane's paper "High-power laser beam transmission using optical fiber", especially in the section "[3] Application to processing" in the left column of page 46, the energy of the laser beam emitted from the fiber This shows that the intensity distribution has a shape close to the refractive index distribution of the fiber used because the mode conversion of the laser beam takes place within the fiber.

このことは、本発明によるレーザビーム重ね合わせ光学
系を使用することにより、該光学系より出射されるレー
ザビームの強度分布は、入射されるレーザビームのエネ
ルギー強度分布に関係なく常に一定の強度分布を有する
レーザビームを提供できることを示している。
This means that by using the laser beam superimposition optical system according to the present invention, the intensity distribution of the laser beam emitted from the optical system is always constant regardless of the energy intensity distribution of the incident laser beam. This shows that it is possible to provide a laser beam with

したかっ”C1本発明によるレーザビーム重ね合わせ光
学系により、エネルギーの小さな枚数のレーザビームを
1ね合わせることによシ容易に高エネルギーのレーザビ
ームを得ることが可能であり、またレーザビームの重ね
合わせ精度が高いことがら、発振波長の異なるレーザビ
ームや発振形態の異なるレーザビームを重ね合わせるこ
とにより、さまざまな条件が要求される微細加工、医療
、化学実験等々の分野の開拓に新た々手段を提供するこ
とが可能となる。
C1 The laser beam stacking optical system according to the present invention makes it possible to easily obtain a high-energy laser beam by combining a number of laser beams with low energy, and it is also possible to easily obtain a high-energy laser beam by combining a number of laser beams with low energy. Due to its high alignment accuracy, by superimposing laser beams with different oscillation wavelengths or different oscillation forms, new means can be developed in fields such as microfabrication, medical care, and chemical experiments that require various conditions. It becomes possible to provide

次にこの発明の実施例について図面を参照して説明する
Next, embodiments of the invention will be described with reference to the drawings.

第1図はこの発明の実施例を示す断面図で、別々のレー
ザ発振器よシ出射されたレーザビーム(平行ビーム) 
a 、 a’は、それぞれの入射レーザビームに対して
全反射コーティングが施された反射面11 a t 1
1 a’を有するV字形の光学素子1により全反射され
てそれぞれ向きが同じでかつ光軸が互いに平行なビーム
となり、これらレーザビームを集束するためのレンズ系
2へ入射する。レンズ系2から出射されるビームは光フ
アイバー伝送路3のコア部31に集束され、光フアイバ
ー伝送路3を通ることにより入射レーザビームa 、 
a’は全て同一光路上に重なり合う。図中32は光ファ
イバーのクラッド層である。
Figure 1 is a cross-sectional view showing an embodiment of the present invention, in which laser beams (parallel beams) are emitted from separate laser oscillators.
a, a' are reflective surfaces 11 a t 1 each coated with a total internal reflection coating for each incident laser beam.
The laser beams are totally reflected by the V-shaped optical element 1 having an angle of 1 a' to form beams having the same direction and optical axes parallel to each other, and enter a lens system 2 for focusing these laser beams. The beam emitted from the lens system 2 is focused on the core portion 31 of the optical fiber transmission line 3, and passes through the optical fiber transmission line 3 to become an incident laser beam a,
a' all overlap on the same optical path. In the figure, 32 is a cladding layer of the optical fiber.

第2図は本発明の実施例の使用例を示すブロック図で、
それぞれ発振波長の異なる2台のレーザ発振器からの出
射レーザビームを、光フアイバー伝送路により、離れた
場所にあ番v−ザ光照射部位に導き、被照射物に対して
2種類の波長の異なるレーザビームを、おのおの単独、
あるいは重ね合わせて照射するシステムを示す。
FIG. 2 is a block diagram showing an example of the use of the embodiment of the present invention.
Laser beams emitted from two laser oscillators, each with a different oscillation wavelength, are guided to the irradiation site at a separate location via an optical fiber transmission line, and the irradiated object is irradiated with two different wavelengths. Laser beams, each singly,
Alternatively, a system for superimposing irradiation is shown.

発振波長がそれぞれ異なるレーザ発振器100゜100
′から出射されたレーザビームa、a’は、結合光学系
部200.200’によりそれぞれ光フアイバー伝送路
3,3′に結合される。この光フアイバ伝送路で伝送さ
れた光は、平行ビーム出射光学系4.4′で平行ビーム
に変換され、レーザ発振器100.100’に対して離
れた場所にあるレーザビーム重ね合わせ光学系部5に入
射する。レーザビーム重ね合わせ光学系部5は第1図に
示す光学系から成り、平行ビーム出射光学系4.4′か
らそれぞれ出射されるレーザビームa 、 a’を同一
光路上に重ね合わせ、光フアイバ伝送路3から出射され
る重ね合わされたレーザビームbを照射レンズ系6へ出
射する。照射レンズ6はレーザビームbを被照射物7へ
集光する。
Laser oscillators with different oscillation wavelengths 100°100
The laser beams a and a' emitted from the optical fibers 200 and 200' are coupled to the optical fiber transmission lines 3 and 3', respectively, by the coupling optical system sections 200 and 200'. The light transmitted through this optical fiber transmission line is converted into a parallel beam by a parallel beam output optical system 4.4', and a laser beam superimposing optical system section 5 located at a distance from the laser oscillator 100, 100' incident on . The laser beam superimposing optical system section 5 consists of the optical system shown in FIG. 1, and superimposes the laser beams a and a' emitted from the parallel beam emitting optical systems 4 and 4' on the same optical path, and transmits them through an optical fiber. The superimposed laser beam b emitted from the path 3 is emitted to the irradiation lens system 6. The irradiation lens 6 focuses the laser beam b onto the object 7 to be irradiated.

したがってレーザ発振器100.100’に種々の発振
形態のものを使用することにより、さまざまな重ね合わ
せビームが得られレーザビームの利用範囲が拡大される
Therefore, by using various oscillation forms for the laser oscillators 100 and 100', various superimposed beams can be obtained and the range of use of the laser beam can be expanded.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の実施例のブロック図、第2図はこの発
明の使用例を示すブロック図である。 図中、a 、 a””・・’レーザビーム、11 a 
+ 11 a’・・・・・・入射レーザビームに対して
全反射二;−ティングを施した反射面、1・・・・・・
光学素子、2・・・・・・レンズ系、3・・・・・・光
フアイバー伝送路、31・・・・・・光フアイバーコア
、32・・・・・・光ファイバーのクラッド層s 10
01100’・−・−v−ザ発振器、200−0・・・
結合光学系、3・・・・・・光フアイバー伝送路、4・
・・、・・平行ビーム出射光学系、5・・・・・・レー
ザビームlね合わせ光学系、6・・・・・・照射レンズ
系、7・・・・・・被照射物、b・・・・・・重ね合わ
されたレーザビームである。
FIG. 1 is a block diagram of an embodiment of the invention, and FIG. 2 is a block diagram showing an example of use of the invention. In the figure, a, a""...' laser beam, 11 a
+ 11 a'...Reflecting surface subjected to total reflection for the incident laser beam, 1...
Optical element, 2... Lens system, 3... Optical fiber transmission line, 31... Optical fiber core, 32... Optical fiber cladding layer s 10
01100'--v-the oscillator, 200-0...
Coupling optical system, 3... Optical fiber transmission line, 4.
... Parallel beam output optical system, 5 ... Laser beam alignment optical system, 6 ... Irradiation lens system, 7 ... Irradiated object, b. ...They are superimposed laser beams.

Claims (1)

【特許請求の範囲】[Claims] 入射レーザビームに対して全反射コーティングを施され
た複数の反射面を有する光学素子と、前記反射面により
反射された複数のレーザビームを集束するレンズ系と、
このレンズ系により集束されたレーザビームを導くため
の光フアイバー伝送路とを含むレーザビーム重ね合わせ
光学系。
an optical element having a plurality of reflective surfaces coated with a total reflection coating for an incident laser beam; a lens system that focuses the plurality of laser beams reflected by the reflective surfaces;
A laser beam superposition optical system including an optical fiber transmission line for guiding the laser beam focused by the lens system.
JP663684A 1984-01-18 1984-01-18 Optical superposition system for laser beam Pending JPS60150025A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP663684A JPS60150025A (en) 1984-01-18 1984-01-18 Optical superposition system for laser beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP663684A JPS60150025A (en) 1984-01-18 1984-01-18 Optical superposition system for laser beam

Publications (1)

Publication Number Publication Date
JPS60150025A true JPS60150025A (en) 1985-08-07

Family

ID=11643851

Family Applications (1)

Application Number Title Priority Date Filing Date
JP663684A Pending JPS60150025A (en) 1984-01-18 1984-01-18 Optical superposition system for laser beam

Country Status (1)

Country Link
JP (1) JPS60150025A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6330822U (en) * 1986-08-13 1988-02-29
EP0493365A2 (en) * 1991-08-27 1992-07-01 Kaman Aerospace Corporation Laser light beam homogenizer and imaging lidar system incorporating same
WO2001055773A3 (en) * 2000-01-27 2002-04-11 Rayteq Lasers Ind Ltd Light beam adder

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6330822U (en) * 1986-08-13 1988-02-29
EP0493365A2 (en) * 1991-08-27 1992-07-01 Kaman Aerospace Corporation Laser light beam homogenizer and imaging lidar system incorporating same
US5303084A (en) * 1991-08-27 1994-04-12 Kaman Aerospace Corporation Laser light beam homogenizer and imaging lidar system incorporating same
US5335070A (en) * 1991-08-27 1994-08-02 Kaman Aerospace Corporation Laser light beam homogenizer and imaging lidar system incorporating same
WO2001055773A3 (en) * 2000-01-27 2002-04-11 Rayteq Lasers Ind Ltd Light beam adder

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