JPS60148389A - Drive piezoelectric device - Google Patents
Drive piezoelectric deviceInfo
- Publication number
- JPS60148389A JPS60148389A JP59004151A JP415184A JPS60148389A JP S60148389 A JPS60148389 A JP S60148389A JP 59004151 A JP59004151 A JP 59004151A JP 415184 A JP415184 A JP 415184A JP S60148389 A JPS60148389 A JP S60148389A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- piezoelectric element
- electrode plate
- piezoelectric device
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 claims description 3
- 239000004020 conductor Substances 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 7
- 239000002861 polymer material Substances 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 229920001577 copolymer Polymers 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 2
- BQCIDUSAKPWEOX-UHFFFAOYSA-N 1,1-Difluoroethene Chemical compound FC(F)=C BQCIDUSAKPWEOX-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 229920002313 fluoropolymer Polymers 0.000 description 1
- 229920001519 homopolymer Polymers 0.000 description 1
- 208000013403 hyperactivity Diseases 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000615 nonconductor Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229910052573 porcelain Inorganic materials 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
- H02N2/023—Inchworm motors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/206—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using only longitudinal or thickness displacement, e.g. d33 or d31 type devices
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
【発明の詳細な説明】
技術分野
本発明はたとえばN’C工作機器の工具の微動調整装置
などに好適に用いられる駆動用圧電装置に関する。DETAILED DESCRIPTION OF THE INVENTION Technical Field The present invention relates to a driving piezoelectric device suitably used in, for example, a fine adjustment device for tools of N'C machine tools.
背景技術
従来からのリニアモータを形成する駆動用圧電装置は、
第1図に示されるように第1圧電素子部2と、その長手
方向の両端にそれぞれ形成された第2圧電素子部3.第
3圧電素子部4とから構成される。この圧電装置1の動
作過程はまず圧電装置lを溝ブロツク5内に挿入し、第
2圧電素子部3を伸長させて第1図(1)のように溝ブ
ロック5の内壁6に圧接して固定する。次に第3圧電素
子部4を縮小した後、第1圧電素子部2を伸長させると
第3圧電素子部4は第1図(2)のように第1圧電素子
部2の伸長に等しい距離りだけ移動する。次に第1圧東
素子部2を伸長させて内壁6に固定して第2圧電素子部
3を縮小した後、第1圧電素子部2を縮小させる。これ
によって圧電装置ff lは第1図(3)のように第1
図の右方に距Iηl Lだけ移動したこ′ととなる。こ
のような第1図(1)から第1図(4)までの動作の繰
返しによって圧電装置lを溝ブロック5の内壁6に沿っ
て一方向に移動している。BACKGROUND ART Conventional drive piezoelectric devices that form linear motors are
As shown in FIG. 1, there is a first piezoelectric element section 2, and second piezoelectric element sections 3 formed at both longitudinal ends of the first piezoelectric element section 2. It is composed of a third piezoelectric element section 4. The operating process of this piezoelectric device 1 is to first insert the piezoelectric device 1 into the groove block 5, extend the second piezoelectric element portion 3, and press it against the inner wall 6 of the groove block 5 as shown in FIG. 1(1). Fix it. Next, after shrinking the third piezoelectric element part 4, when the first piezoelectric element part 2 is expanded, the third piezoelectric element part 4 is moved by a distance equal to the extension of the first piezoelectric element part 2, as shown in FIG. 1(2). move as much as possible. Next, the first piezoelectric element part 2 is expanded and fixed to the inner wall 6, the second piezoelectric element part 3 is reduced, and then the first piezoelectric element part 2 is reduced. As a result, the piezoelectric device ffl is moved to the first position as shown in FIG.
This means that it has moved by a distance IηlL to the right in the figure. By repeating the operations from FIG. 1(1) to FIG. 1(4), the piezoelectric device 1 is moved in one direction along the inner wall 6 of the groove block 5.
このような圧電装置1では圧電素子部2,3゜4の伸長
の長さが極めて小さいため圧電装置1の移動が遅<、シ
かも溝ブロック5の幅の精度の正確さに起因して圧電装
置61の移動を円滑に行なうことができなかった。In such a piezoelectric device 1, the extension length of the piezoelectric element portions 2, 3 and 4 is extremely small, so the movement of the piezoelectric device 1 is slow. The device 61 could not be moved smoothly.
目 的
本発明は上述の技術的課題を解決し、構成が簡単でしか
もその移−動一速度を高めた駆動用圧電装置を提供する
ことである。OBJECTS OF THE INVENTION The present invention solves the above-mentioned technical problems and provides a driving piezoelectric device which has a simple structure and has an increased movement speed.
実施例
第2図は本発明に従う圧電装置lOの斜視図である。圧
電装置910はH字状に形成されており、基本的には第
1電極としての共通電極板11と、その両表面に固着包
め号1の圧電素子12とを含む。Embodiment FIG. 2 is a perspective view of a piezoelectric device IO according to the invention. The piezoelectric device 910 is formed in an H-shape and basically includes a common electrode plate 11 as a first electrode, and piezoelectric elements 12 of the number 1 fixed to both surfaces thereof.
この圧電素子12は共通電極板11の表面に固着される
一対の圧電体13.14と共通電極板11に臨む一面と
は反対側の他面にそれぞれ固着される第2電極部15.
46とを含む。導電性材料y)zら成る共通電極板11
はH字状に形成されており、本装置10の進行方向に延
びる延材部11aと、それの長手方向の両端にそれぞれ
対称的に形成された垂直部11b、llcとから成る誂
通電極板11の両表面に固着される一対の圧i[f+:
13 、14はH字状に構成され形成されている。一
方の圧電体13は共通電極板11の前記延材部11aに
対応rる延材部13aと、共通7株極板11の前記垂直
部11b、llcにそれぞれ対応する垂直部13 b
、 ]、 3 cとから成り、他方の圧電体14は圧電
体13と同様第1電極板11の前記延利部11aに対応
する延材部1’4aと、第1電極板11の前記垂直部1
1b、llcにそれぞれ対応4−る垂直部14b、’1
4cとから成る。This piezoelectric element 12 includes a pair of piezoelectric bodies 13, 14 fixed to the surface of the common electrode plate 11, and a second electrode part 15, fixed to the other surface opposite to the one surface facing the common electrode plate 11.
46. Common electrode plate 11 made of conductive material y)z
is formed in an H-shape, and is composed of an elongated part 11a extending in the direction of movement of the device 10, and vertical parts 11b and llc formed symmetrically at both longitudinal ends of the elongated part 11a. A pair of pressures i[f+:
13 and 14 are formed in an H-shape. One piezoelectric body 13 has an elongated portion 13a corresponding to the elongated portion 11a of the common electrode plate 11, and a vertical portion 13b corresponding to the vertical portions 11b and llc of the common seven electrode plate 11, respectively.
, ], 3c, and the other piezoelectric body 14, like the piezoelectric body 13, has a stretched part 1'4a corresponding to the stretched part 11a of the first electrode plate 11, and the vertical part of the first electrode plate 11. 1
Vertical portions 14b and 14b corresponding to 1b and llc, respectively.
4c.
圧電体13の共通電極板11の一表面とは反対側の他面
に第2電極部15が固着される。第2電極部15は圧電
体13の上記延材部13aに対応する第2電極板15a
と第2電極板15aに分断されて圧電体13の前記垂直
部13b、13cがそれぞれ対応する第2電極板15b
、15cとから成る。他の圧電体14の共通電極板11
に臨む一面と反対側の他面には第2電極部15と同様な
構成を有する第2電極部16が固着される。第2電極部
16は圧電体14の前記延拐部14a1こ対応する第2
電極板16aと第2電極板16bに分断されて圧電体1
4の前記垂直部14b、14cにそれぞれ対応する第2
電極板1−6b、16cとから成る。このようにして化
1市極としての共通電極板11を映みこんだ一対の圧電
体13.14の両表面に第2電極部゛t 5 、16が
配置されてサンドイッチ状に溝成さねたイ・め圧電末f
12は、共通電極板11と圧電体13.14の各延材部
13a+14aと第2電極部15.16の各第2電極板
15a、16aとによって第1圧電素子部12aが形成
され、共通電極板11と圧′電体13 、.14の各垂
直部13b、14bと第2電極部15.16の各第2電
極板15b、16bとによって第2圧電素子部12bが
形成され、共通電極板11と圧電体13.14の各垂直
部13c、14cと第2電極部15.16の各第2電極
板15c、16cとによって第3圧電素子部12が形成
される。A second electrode portion 15 is fixed to the other surface of the piezoelectric body 13 opposite to the one surface of the common electrode plate 11 . The second electrode portion 15 is a second electrode plate 15a corresponding to the elongated material portion 13a of the piezoelectric body 13.
and a second electrode plate 15a to which the vertical portions 13b and 13c of the piezoelectric body 13 correspond, respectively.
, 15c. Common electrode plate 11 of other piezoelectric bodies 14
A second electrode section 16 having a configuration similar to that of the second electrode section 15 is fixed to the other surface opposite to the one surface facing the second electrode section 15 . The second electrode portion 16 corresponds to the extending portion 14a1 of the piezoelectric body 14.
The piezoelectric body 1 is divided into an electrode plate 16a and a second electrode plate 16b.
4, respectively corresponding to the vertical portions 14b and 14c.
It consists of electrode plates 1-6b and 16c. In this way, the second electrode parts t5 and 16 were arranged on both surfaces of the pair of piezoelectric bodies 13 and 14, which reflected the common electrode plate 11 as the electrode, forming a sandwich-like groove. I/Me piezoelectric terminal f
12, a first piezoelectric element portion 12a is formed by the common electrode plate 11, each elongated member portion 13a+14a of the piezoelectric body 13.14, and each second electrode plate 15a, 16a of the second electrode portion 15.16, and the common electrode Plate 11 and piezoelectric body 13, . The second piezoelectric element part 12b is formed by each of the vertical parts 13b and 14b of the common electrode part 11 and each of the second electrode plates 15b and 16b of the second electrode part 15.16. The third piezoelectric element section 12 is formed by the sections 13c, 14c and the second electrode plates 15c, 16c of the second electrode section 15.16.
圧電体12の材料には、たとえば無機材料と高分子材料
との複合物が用いられる。複合物としては圧電性磁器粉
末、たとえばチタン酸バリウム。As the material of the piezoelectric body 12, for example, a composite of an inorganic material and a polymer material is used. Composites include piezoelectric porcelain powders, such as barium titanate.
チタン酸ジルコン酸鉛(PZT)などを均一分散して含
んだ高分子材料が好ましく、高分子材料としてはフッ化
ビニリデンの単独重合体やフッ化ビニリデン−37フ化
工チレン共重合体などのフッ化ビニリデン共重合体が好
適である。A polymer material containing lead zirconate titanate (PZT) uniformly dispersed is preferable, and examples of the polymer material include fluorinated polymers such as vinylidene fluoride homopolymer and vinylidene fluoride-37-fluorinated tyrene copolymer. Vinylidene copolymers are preferred.
第3図は圧電装置10の結線状態を示すブロック図であ
る。圧電装置10の各圧電素子部12a112b、12
cはコントロール回路17.18 e19にそれぞれ並
列的に接続される。これによって第1圧電素子部12a
と、第2圧電素子部12bと、第3圧電素子部12cと
のそれぞれ独立した結線状態が達成される。FIG. 3 is a block diagram showing the wiring state of the piezoelectric device 10. Each piezoelectric element portion 12a112b, 12 of the piezoelectric device 10
c are connected in parallel to control circuits 17, 18 and e19, respectively. As a result, the first piezoelectric element portion 12a
Thus, an independent connection state between the second piezoelectric element section 12b and the third piezoelectric element section 12c is achieved.
第4図は本発明の一実施例の平面図であり、第5図はそ
の正面図であり、第6図はその側面図であり、7A7図
は第5図のセクション〜11の拡大斜視図である。圧電
装置10は第4図の左右方向にQilEびる溝ブロック
20の内壁21に囲まれた凸状の断面を有する中空部2
2に挿入される。このように一方向のみの移動が許容さ
れた圧電装置101こ、第4図に示される駆動パルスを
与えた場合を想定4−る。このとき3分割された!7!
2電極板15の第2電極部15aと、第2電極部15’
b、15c。FIG. 4 is a plan view of one embodiment of the present invention, FIG. 5 is a front view thereof, FIG. 6 is a side view thereof, and FIG. 7A7 is an enlarged perspective view of sections to 11 in FIG. It is. The piezoelectric device 10 includes a hollow portion 2 having a convex cross section surrounded by an inner wall 21 of a groove block 20 extending in the left-right direction in FIG.
2 is inserted. Assume that the piezoelectric device 101, which is allowed to move in only one direction, is given a drive pulse as shown in FIG. 4. At this time, it was divided into three parts! 7!
The second electrode part 15a and the second electrode part 15' of the two-electrode plate 15
b, 15c.
゛ 第2電極板16の第2電極部16aと、第2電極部
16bl16cとは、それぞれ同一幅mを有する間隔を
あけて配置されているものと4−る。圧電装置lOには
、第8図の電圧波形図に示すように第2圧電素子部12
bに対してコントロール回路17によって第8図(1)
の波形の電圧を印加し、第1圧電素子部12aに対して
コントロール回路18によって第8図(2)の波形の電
圧を印加し、第3圧電素子部12cに対してコントロー
ル回路19によって第8図(3)の波形の電圧を印加し
て、■方向に直進させるものであって、逆進の場合は(
1)。It is assumed that the second electrode portion 16a and the second electrode portion 16bl16c of the second electrode plate 16 are spaced apart from each other and have the same width m. The piezoelectric device IO includes a second piezoelectric element portion 12 as shown in the voltage waveform diagram of FIG.
FIG. 8(1) by the control circuit 17 for b.
The control circuit 18 applies a voltage with the waveform of FIG. A voltage with the waveform shown in Figure (3) is applied to cause the vehicle to travel straight in the ■ direction, and in the case of reverse travel, (
1).
+21 、 +31の波形を正反対にする。いわゆるバ
イモルフを構成する各圧電素子部12a、12b、12
Cには第15図に示されるように、電気極性の異なった
圧電体13.14が用いられており、従って所定電圧の
印加によって矢符Rの方向に撓むことができる。第9図
(1)では各圧電素子部12a。Make the waveforms of +21 and +31 exactly opposite. Each piezoelectric element portion 12a, 12b, 12 forming a so-called bimorph
As shown in FIG. 15, piezoelectric bodies 13 and 14 having different electrical polarities are used for C, and can therefore be bent in the direction of arrow R by application of a predetermined voltage. In FIG. 9(1), each piezoelectric element portion 12a.
12b、12cはすべて無印加の状態にあり、時間T1
からT2の間では第9図(2)のように第2圧電素子部
12bのみに所定電圧が印加されて屈曲し、このため第
2圧電素子部12bは(#¥ブロック20内の直進通路
22の内壁21に固足される。12b and 12c are all in a non-applied state, and the time T1
to T2, a predetermined voltage is applied only to the second piezoelectric element portion 12b, as shown in FIG. 9(2), and the second piezoelectric element portion 12b bends. It is fixed to the inner wall 21 of.
時間T2からT 4の間では第9図(2)のように前記
第2圧電素子部12bに続いて第1圧電素子部12aも
電圧印加されて彎曲状になり、このため第1圧電素子部
12aは直進通路22内で縮小状12月となる。これに
よって第3圧′a5;素子部L2cは第2圧電素子部1
2b側に向って第1圧′1ニ素子部12aの縮小した分
だけ移動4−る。時間T 4からT5の間では各圧電素
子部12a、12b、12cがすべて電圧印加され、圧
電装置10は溝ブロック20の内壁21に固定される9
時間T5から′r6の間では第9図(5)のように第2
圧電素子部12bの電圧印加が解除され、時間′r6か
らT7の間では第9図(6)のように第1圧電素子部1
2aの電圧印加が解除される。このように7F;3圧心
素子部12cのみを電圧印加して内壁21に固定するこ
とによって、圧電装置10は第9図の左方に向つて第1
圧電素子部12aの前記縮小分だけ移動したこととなる
。時間T7から′r8の間では第9図(7)のように第
2圧′「区素子部12bが再び電圧印加される。上記動
作状態の繰返しによって圧電装置10は、溝ブロック2
0の直進通路22内を1方向に移動することができる。Between time T2 and T4, as shown in FIG. 9(2), the first piezoelectric element part 12a is also applied with a voltage following the second piezoelectric element part 12b and becomes curved, so that the first piezoelectric element part 12a becomes curved. 12a becomes a reduced shape in the straight passage 22. As a result, the third pressure 'a5; the element portion L2c becomes the second piezoelectric element portion 1
It moves toward the 2b side by the amount by which the first pressure '12 element part 12a is reduced. Between time T4 and T5, voltage is applied to all the piezoelectric element parts 12a, 12b, and 12c, and the piezoelectric device 10 is fixed to the inner wall 21 of the groove block 20.
Between time T5 and 'r6, the second
The voltage application to the piezoelectric element part 12b is released, and between time 'r6 and T7, the first piezoelectric element part 1 is turned off as shown in FIG. 9(6).
The voltage application to 2a is released. In this way, by applying a voltage to only the 7F; 3 pressure core element portion 12c and fixing it to the inner wall 21, the piezoelectric device 10 is moved to the left in FIG.
This means that the piezoelectric element portion 12a has moved by the amount of reduction described above. Between time T7 and 'r8, the second voltage is again applied to the groove block element part 12b as shown in FIG.
0 can move in one direction within the straight path 22.
このような圧電装置10の進行方向とは反対側の一端に
は、圧電装置10の運動を溝ブロック20の外部に伝達
する手段をなすロッド(図示せず)が取付けられており
、これによって圧電装置IOはりニアモータとしての1
幾能を果たすことができる。A rod (not shown) serving as a means for transmitting the movement of the piezoelectric device 10 to the outside of the groove block 20 is attached to one end of the piezoelectric device 10 on the opposite side to the direction of movement. 1 as a device IO beam near motor
Can perform many functions.
第4図示の溝ブロック2oに形成された直進通路22の
幅りは、圧電装+i¥lOの第2圧心素子部12bおよ
び第3圧電素子部12cの厚みよりも大きく、かつ第1
圧電素子部12aが電圧印加によって彎曲しても溝ブロ
ック20の内壁21に接触しない程度の大きさに選ばれ
ており、直進通路22の高さHは第5図に示されるよう
に第2圧電素子部12bおよび第3圧電素子部12cの
高さよりも大きく選ばれている。したがって第2圧電素
子部12bおよび第3圧電素子部13cを電圧の印加・
解除によって屈曲・伸長させることによって、圧電装置
lOの移動・停止状態を達成することができる。The width of the straight path 22 formed in the groove block 2o shown in FIG.
The size is selected so that even if the piezoelectric element part 12a bends due to voltage application, it will not come into contact with the inner wall 21 of the groove block 20, and the height H of the straight path 22 is set as shown in FIG. The height is selected to be larger than the height of the element portion 12b and the third piezoelectric element portion 12c. Therefore, the voltage is applied to the second piezoelectric element portion 12b and the third piezoelectric element portion 13c.
By bending and extending by releasing, the moving and stopping state of the piezoelectric device IO can be achieved.
本発明者の実験結果によれば、一対の圧電素子12を3
分割したことによって、圧電装置10の第2圧電素子部
12bおよび第3圧電素子部12Cの屈曲率を任意に選
ぶことができるので、圧電装置lOの非常に大きな移動
量を1サイクルの動作で得ることができ、従来技術で示
した圧電装j41に比べ約10倍以上の移動量を得るこ
とができた。According to the inventor's experimental results, the pair of piezoelectric elements 12 are
By dividing the piezoelectric device 10, the curvature of the second piezoelectric element portion 12b and the third piezoelectric element portion 12C can be arbitrarily selected, so that a very large amount of movement of the piezoelectric device IO can be obtained in one cycle of operation. The amount of movement was approximately 10 times greater than that of the piezoelectric device j41 shown in the prior art.
第1()図は本発明の他の実施例の斜視図である。FIG. 1() is a perspective view of another embodiment of the present invention.
第10図は第2図の構成に類似し、対応する部分には同
一の参照符を付す。注目ずべきは第1電極としての共通
電極板11を第2電極板15の各第2電極部15a、1
5b、1.5cにそれぞれ対応して分割したことである
。・′このように共通電極板11・を3分割することに
よって、各圧電素子部12a、12b、12cを任意に
選ぶことができ、圧型装置lOの1多動量の増大を図る
ことができる。FIG. 10 is similar to the configuration of FIG. 2, and corresponding parts are given the same reference numerals. What should be noted is that the common electrode plate 11 as the first electrode is connected to each second electrode part 15a, 1 of the second electrode plate 15.
5b and 1.5c, respectively. By dividing the common electrode plate 11 into three in this way, each piezoelectric element portion 12a, 12b, 12c can be arbitrarily selected, and the amount of hyperactivity per piezoelectric device IO can be increased.
第11図は本発明のさらに他の実施例の斜視図である。FIG. 11 is a perspective view of still another embodiment of the present invention.
第11図は第2図のl#It成に類似し、対応する部分
には同一の参照符を付す。注目すべきは金属製の共通電
極板11に厚みをもたせ、その中央部および両端部に第
1圧電末子部12a、第2圧電素子部12b、第3圧電
素子部13cをそれぞれ個別的に固着したことである。FIG. 11 is similar to the l#It structure of FIG. 2, and corresponding parts are given the same reference numerals. What should be noted is that the common electrode plate 11 made of metal is made thicker, and the first piezoelectric terminal part 12a, the second piezoelectric element part 12b, and the third piezoelectric element part 13c are individually fixed to the central part and both ends thereof. That's true.
共通電極板11に厚みをもたせることによって圧電装置
10の機械的強度性が増加し、また圧電素子部12a。By increasing the thickness of the common electrode plate 11, the mechanical strength of the piezoelectric device 10 is increased, and the piezoelectric element portion 12a is increased.
12b、12cを完全に3分割することによって共通電
極板J1の圧電素子切欠き部50,51のばね定数を小
さく!ることかでき、第1圧電素子郡12aの撓みを太
き(とることができる。これによって圧電装置10の移
動准をさらに大きくすることができる。By completely dividing 12b and 12c into three parts, the spring constant of the piezoelectric element notches 50 and 51 of the common electrode plate J1 can be reduced! Therefore, the deflection of the first piezoelectric element group 12a can be made thicker.Thereby, the movement of the piezoelectric device 10 can be further increased.
第12図は本発明の他の実姉例の側面図であり、第13
図はその正面図である。注目すべきは本発明に従う圧電
装+tioを2枚屯ねにして圧電体13.14の電極部
52.53を接着材54 、55によって相互に固着し
たことであろうこれによって第14図に示されるように
一対の圧電装置10の第1圧電素子部12a、第2圧電
素子部12b。FIG. 12 is a side view of another sister example of the present invention, and FIG.
The figure is its front view. What should be noted is that the piezoelectric device +tio according to the present invention is stacked together, and the electrode portions 52, 53 of the piezoelectric body 13, 14 are fixed to each other by adhesives 54, 55, as shown in FIG. The first piezoelectric element part 12a and the second piezoelectric element part 12b of the pair of piezoelectric devices 10 are arranged so that the piezoelectric element part 12a and the second piezoelectric element part 12b of the pair of piezoelectric devices 10 are separated.
第3圧電素子部12cをそれぞれ相Ifこシ(4反する
方向へ・彎曲することによって前記実姉例の2倍の彎曲
を得ることができるとともに、一対の圧電装置は対称形
であるので移動動1・lがが定〔7、シたがって昔ブロ
ック2oのjtI 弗11W IP(t l 2の幅決
めを大略的に行なうことができるので作業性が向上され
る。By bending the third piezoelectric element portions 12c in opposite directions, it is possible to obtain twice the curvature of the actual sister example, and since the pair of piezoelectric devices are symmetrical, the movement movement 1・L is fixed [7, therefore, the width of jtI 弗 11W IP (t l 2) of the old block 2o can be roughly determined, so the work efficiency is improved.
本発明に従う圧電装置は、NC工作機器の工具。The piezoelectric device according to the present invention is a tool for NC machine equipment.
工作物などの位置決め、顕微鏡の標本類の微動送り、光
学系反射鏡その他の反射鏡の微角度調整、その他各種の
微動調整装置だけでなく、その他の技術分野においても
広汎団に実施するこきができる。We conduct a wide range of activities not only for the positioning of workpieces, fine movement of microscope specimens, fine angle adjustment of optical system reflectors and other reflecting mirrors, and various other fine adjustment devices, but also for other technical fields. can.
前述の実施例では、一対の圧電素子を並列的に接続した
けれども、共通電極板11を取り去ることによって直列
的な接続をすることも可能である。In the above embodiment, a pair of piezoelectric elements are connected in parallel, but it is also possible to connect them in series by removing the common electrode plate 11.
又第16図に示されるように共通電極板1.00゜10
1を、電気絶縁体102によって遮断するような構成と
してもよい。Also, as shown in Fig. 16, the common electrode plate is 1.00°10
1 may be cut off by an electrical insulator 102.
効果
以上のように本発明によれば、二枚取ねの圧電素子を3
分割して、1個の直進用圧電素子と2個の伸縮用圧電素
子とを8字形に組んだことによって、駆動用圧電装置の
移動速度の増大を図ることができる。Effects As described above, according to the present invention, a two-layer piezoelectric element can be
The moving speed of the drive piezoelectric device can be increased by dividing the drive piezoelectric device into a figure-eight shape with one linear piezoelectric element and two expansion and contraction piezoelectric elements.
第1図は先行技術の圧電装置1の、駆動説明図、第2図
は本発明に従う圧電装置lOの斜視図、第3図は圧電装
置10の結線状態を示す簡略図、第4図は本発明の一実
施例の平面図、第5図はその正面図、f:J番6図はそ
の側面図、第7図は第5図のセクション7から6た拡大
斜視図、第8図は第1圧電素子部11 a# L 2圧
’ii素子部12b、第3圧電素子部12cに加える電
圧波形図、第9図は圧電装置10の駆動状態を示す簡略
図、第10図は本発明の他の実施例の斜視図、第11図
は杏発明のさらに他の実施例の斜視図、第12図は本発
明の他の実施例の側面図、J13図はその正面図、第1
4図は第11図の一対の圧電装置#、 10 、10a
の駆動説明図、第15図はバイiルフの拡大断面図、第
16図は本発明の他の実施例を示す断面図である。
l、10・・・圧電装置ffi、l 1・・・共通電極
板、12・・・圧電素子、13.14・・・圧電体、1
5.16・・・第2電極板、20・・・溝ブロック、2
2・・・直進通路代理人 弁理士 西教圭一部
第4図
第7図
第8図
第9図
2
(力 ::::
第10 F
1
第11図
[2C
−二
第12図
第13図
第14図FIG. 1 is a driving explanatory diagram of a piezoelectric device 1 according to the prior art, FIG. 2 is a perspective view of a piezoelectric device IO according to the present invention, FIG. 3 is a simplified diagram showing the connection state of the piezoelectric device 10, and FIG. A plan view of one embodiment of the invention, FIG. 5 is a front view, FIG. 6 is a side view, FIG. 7 is an enlarged perspective view of sections 7 to 6 in FIG. 1 Piezoelectric element part 11 a# L 2 Voltage waveform diagram applied to the 2-voltage 'ii element part 12b and the 3rd piezoelectric element part 12c, FIG. 9 is a simplified diagram showing the driving state of the piezoelectric device 10, and FIG. 10 is a diagram showing the driving state of the piezoelectric device 10. FIG. 11 is a perspective view of still another embodiment of the invention, FIG. 12 is a side view of another embodiment of the invention, and FIG. J13 is a front view thereof.
Figure 4 shows a pair of piezoelectric devices #, 10, 10a in Figure 11.
FIG. 15 is an enlarged cross-sectional view of the bi-leaf, and FIG. 16 is a cross-sectional view showing another embodiment of the present invention. l, 10... Piezoelectric device ffi, l 1... Common electrode plate, 12... Piezoelectric element, 13.14... Piezoelectric body, 1
5.16... Second electrode plate, 20... Groove block, 2
2... Straight Path Agent Patent Attorney Kei Nishi Part 4 Figure 7 Figure 8 Figure 9 Figure 2 (Power:::: Figure 10 F 1 Figure 11 [2C-2 Figure 12 Figure 13 Figure 14
Claims (1)
る電極板とを含む一対の圧電素子を、圧電体が背中合せ
となるように固着し、 前記電極板をそれぞれ3分割し、圧電素子の平面と直角
方向に凹又は凸に彎曲する第1圧電素子部と、 第1圧電素子部の両側に配置されており、第1圧電素子
部を支点にして屈曲Cる第2圧電素子部およびg3圧電
素子部とを形成したことを%徴とする駆動用圧電装置。[Scope of Claims] A pair of piezoelectric elements including a piezoelectric body made of a piezoelectric material and an electrode plate fixed to one surface of the piezoelectric body are fixed so that the piezoelectric bodies are back to back, and the electrode plates are fixed to each other. A first piezoelectric element part that is divided into three parts and curved concavely or convexly in a direction perpendicular to the plane of the piezoelectric element; A driving piezoelectric device characterized by forming a second piezoelectric element part and a g3 piezoelectric element part.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59004151A JPS60148389A (en) | 1984-01-11 | 1984-01-11 | Drive piezoelectric device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59004151A JPS60148389A (en) | 1984-01-11 | 1984-01-11 | Drive piezoelectric device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS60148389A true JPS60148389A (en) | 1985-08-05 |
JPH0318434B2 JPH0318434B2 (en) | 1991-03-12 |
Family
ID=11576759
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP59004151A Granted JPS60148389A (en) | 1984-01-11 | 1984-01-11 | Drive piezoelectric device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60148389A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5229679A (en) * | 1988-12-28 | 1993-07-20 | Prima Meat Packers, Ltd. | Microdrive apparatus |
US5260622A (en) * | 1989-03-24 | 1993-11-09 | Topometrix Corporation | High resolution electromechanical translation device |
US5268611A (en) * | 1992-03-16 | 1993-12-07 | Rockwell International Corporation | Anisotropic transducer |
WO2001029443A1 (en) | 1999-10-21 | 2001-04-26 | Sagem S.A. | Actuator with piezoelectric controlled piston |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS542691A (en) * | 1977-06-08 | 1979-01-10 | Hitachi Ltd | Sample fine-adjustment equipment of electrostrictive driving type |
-
1984
- 1984-01-11 JP JP59004151A patent/JPS60148389A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS542691A (en) * | 1977-06-08 | 1979-01-10 | Hitachi Ltd | Sample fine-adjustment equipment of electrostrictive driving type |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5229679A (en) * | 1988-12-28 | 1993-07-20 | Prima Meat Packers, Ltd. | Microdrive apparatus |
US5260622A (en) * | 1989-03-24 | 1993-11-09 | Topometrix Corporation | High resolution electromechanical translation device |
US5268611A (en) * | 1992-03-16 | 1993-12-07 | Rockwell International Corporation | Anisotropic transducer |
WO2001029443A1 (en) | 1999-10-21 | 2001-04-26 | Sagem S.A. | Actuator with piezoelectric controlled piston |
FR2800028A1 (en) * | 1999-10-21 | 2001-04-27 | Sfim Ind | Piezoelectrically controlled actuator piston, for, e.g. aircraft brakes, comprises several piezoelectric sections producing axial effort by cyclical expansion and contraction |
Also Published As
Publication number | Publication date |
---|---|
JPH0318434B2 (en) | 1991-03-12 |
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