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JPS60148388A - Supersonic vibrator of twisting mode - Google Patents

Supersonic vibrator of twisting mode

Info

Publication number
JPS60148388A
JPS60148388A JP59003641A JP364184A JPS60148388A JP S60148388 A JPS60148388 A JP S60148388A JP 59003641 A JP59003641 A JP 59003641A JP 364184 A JP364184 A JP 364184A JP S60148388 A JPS60148388 A JP S60148388A
Authority
JP
Japan
Prior art keywords
resonator
vibration
torsional
twisting
vibrator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59003641A
Other languages
Japanese (ja)
Other versions
JPH0514512B2 (en
Inventor
Akio Kumada
熊田 明生
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Maxell Ltd
Original Assignee
Hitachi Maxell Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Maxell Ltd filed Critical Hitachi Maxell Ltd
Priority to JP59003641A priority Critical patent/JPS60148388A/en
Priority to US06/688,947 priority patent/US4663556A/en
Priority to DE3500607A priority patent/DE3500607C2/en
Publication of JPS60148388A publication Critical patent/JPS60148388A/en
Publication of JPH0514512B2 publication Critical patent/JPH0514512B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001Driving devices, e.g. vibrators
    • H02N2/0045Driving devices, e.g. vibrators using longitudinal or radial modes combined with torsion or shear modes

Landscapes

  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

PURPOSE:To efficiently generate a strong and stable twisting vibration by integrally coupling a piezoelectric thickness vibrator, a vertical resonator, a twisting coupler and a twisting mode resonator. CONSTITUTION:A vertical mode resonator 2 of cylindrical aluminum, a twisting coupler 3 having 8 twisting teeth on the peripheral surface near one opening of a cylindrical aluminum pipe, and a twisting resonator 4 of trapezoidal shape in the longitudinal section are superposed on thickness vibrators 11, 12. A stainless steel washer 5 is contacted with the other end face side of the vibrator 11, a hexagonal cap bolt 6 is passed through its central hole, engaged with threaded hole opened at the central hole of the upper surface of the resonator 4, and clamped by the bolt 6. A high frequency voltage is applied to lead wirings 7, 8 soldered to terminal boards 91, 92 to excite the vibrators 11, 12. Then, the vibration of twisting mode is generated at the outside end face of the resonator 4.

Description

【発明の詳細な説明】 〔技術分野・発明の目的〕 本発明は1.:ムリモードの超音波振動子の改良に係り
、暎力で安定した捻り振動を効率よく発化し得る超音波
振動子を提供することを目的とする。
[Detailed Description of the Invention] [Technical Field/Object of the Invention] The present invention comprises 1. : The purpose of the present invention is to provide an ultrasonic vibrator that can efficiently generate stable torsional vibrations using a straining force, in relation to the improvement of an ultrasonic vibrator in a strain mode.

〔背景技術〕[Background technology]

従来捻りモードの超音波振!1IIIは超音波加工技術
に利用されて来たが、たて振動と違って、捻り4hp動
子というものが余り知られていないため、たて振動子を
超音波加工用ホーン、コーンなどの軸のまわりに直角に
複数個取り付けて捻り振りσIを生じさせているのが普
通である。したがって、振動系が複雑でなりコンパクト
にまとまらないため効率も低く、使い勝手が悪いなどの
ような欠点があった。
Ultrasonic vibration in conventional torsion mode! 1III has been used in ultrasonic machining technology, but unlike the vertical vibration, the torsional 4HP vibrator is not well known. Usually, a plurality of pieces are attached at right angles around the body to generate torsion σI. Therefore, the vibration system is complicated and cannot be assembled compactly, resulting in low efficiency and poor usability.

それ故、捻りモードの振動そのものを発生する超音波振
動子の出現が期待されていたが、最近圧電モータが提案
され、その実用化が検fitされるに至って捻りモード
の超音波振動子は圧電モータ実用のためのキイー〇デバ
イスであるとされている。、〔発明の概要〕 この発明は上述した従来技術の欠点を解消するもので、
圧電厚み振動子、たてモード共振子、捻り結合子および
捻りモード共振子を一体に連結したことを特徴とする捻
りモードの超音波振動子によって目的を達成したもので
ある。以下本発明の実施例を図面に従って説明する。
Therefore, the emergence of an ultrasonic vibrator that generates torsional mode vibration itself was expected, but recently piezoelectric motors have been proposed and their practical application has been tested. It is said to be a key device for practical use in motors. , [Summary of the Invention] This invention solves the above-mentioned drawbacks of the prior art.
The object is achieved by a torsional mode ultrasonic vibrator characterized by integrally connecting a piezoelectric thickness vibrator, a longitudinal mode resonator, a torsional coupler, and a torsional mode resonator. Embodiments of the present invention will be described below with reference to the drawings.

〔実施例〕〔Example〕

実施例1 第1図は本発明の捻りモードの超音波振動子の一実施例
を示したものである。1..12はノアさ2關、内径1
5mm、外径35+mmのPb(Zr′rt)03系圧
電セラミツクからなるドーナツ状の厚み振動子で、両面
に銀電極をコーティング1−で分極処理されている。2
枚の振動子11.12のく+)分極側電極同志を対向さ
せ、その間に厚さ02閂で内径15闘、外径35露のド
ーナツ状の燐青銅板9を挾む。
Embodiment 1 FIG. 1 shows an embodiment of the torsional mode ultrasonic transducer of the present invention. 1. .. 12 is Noah size 2, inner diameter 1
It is a doughnut-shaped thickness vibrator made of Pb(Zr'rt)03 piezoelectric ceramic having a diameter of 5 mm and an outer diameter of 35+ mm, and is coated with silver electrodes on both sides and polarized with 1-. 2
The polarized side electrodes of the vibrators 11 and 12 are opposed to each other, and a donut-shaped phosphor bronze plate 9 with a thickness of 0.2 mm and an inner diameter of 15 mm and an outer diameter of 35 mm is sandwiched between them.

この厚み振動子11.12に、外径35龍、内径151
Il、厚さ20酩の円筒状アルミニウムのたてモード共
振子2と、外径35 *+x、 、内径17 ml +
 Jνさ13間の円筒状のアルミニウムパイプの一方の
開口付近の周面に8枚の捻り歯のイ」いた捻り結合子3
と、縦断面が台形をしており上miの直径が35順、下
面の直径が50朋、高さ55 mm 、肉厚7 yn+
llの捻り共振子4を重ねる。そして比重厚み振動子1
1の他端面側に外径35閂、高さ15朋のステンレス座
金5を当接し、それの中心孔に直径10FM、長さ65
+lInの六角キャップボルト6を通し、捻り共振子4
の上面の中心に穿設されたネジ化に螺挿して、’200
に、p程度の1−ルクでボルト6を、諦めつげることに
より、上述の全部品を一体に連結した捻りモードの超音
波振動子を組み立てた。
For this thickness vibrator 11.12, the outer diameter is 35 mm and the inner diameter is 151 mm.
Il, cylindrical aluminum vertical mode resonator 2 with thickness 20 mm, outer diameter 35 * + x, , inner diameter 17 ml +
Twisted connector 3 with eight torsion teeth on the circumference near one opening of a cylindrical aluminum pipe with length 13
The longitudinal section is trapezoidal, the diameter of the upper mi is 35 mm, the diameter of the lower surface is 50 mm, the height is 55 mm, and the wall thickness is 7 yn+.
ll torsional resonators 4 are overlapped. And specific gravity thickness oscillator 1
A stainless steel washer 5 with an outer diameter of 35 mm and a height of 15 mm is brought into contact with the other end surface of 1, and a stainless steel washer 5 with a diameter of 10 FM and a length of 65 mm is inserted into the center hole of
+lIn hexagonal cap bolt 6 and torsion resonator 4.
Screw it into the threaded hole drilled in the center of the top of the
Then, by tightening the bolts 6 with a force of 1-l on the order of p, a torsional mode ultrasonic transducer in which all the above-mentioned parts were connected together was assembled.

振動−子11.12を励振するには、燐青銅の端子板9
..92に半田付したリード線7,8に30+<bg付
近の高周波電圧を印加し、周波数を4::l整しながら
共振状聾に導けば、捻り共ノ辰子4の外(u11端而に
捻りモードの振動が生じる。1なわらDifa iir
 kまボルト6の長さに沿った方向に沖!@すると同時
に、ボルト6を回転軸とする捻り振動を合成した楕円運
動10を行う。無論、この411円の主軸は捻り共振子
40円周面と同心軸をなす円筒面内にある。
To excite the vibrator 11, 12, use the phosphor bronze terminal plate 9.
.. .. Applying a high frequency voltage around 30+<bg to the lead wires 7 and 8 soldered to 92, and guiding it to a resonant hearing while adjusting the frequency to 4::l, the twisting resonance outside Tatsuko 4 (U11) Torsional mode vibration occurs.
Off in the direction along the length of kma bolt 6! At the same time, an elliptical motion 10 is performed which is a combination of torsional vibrations with the bolt 6 as the rotation axis. Of course, the principal axis of this 411 yen is within a cylindrical plane that is concentric with the circumferential surface of the torsional resonator 40.

なお、この捻りモードの超音波振動子において、厚みた
て振動を捻り振動に変える捻り結合子は第2図に示した
ような方□法で作ることができる。
In addition, in this torsional mode ultrasonic vibrator, the torsion coupler that changes the thickness vibration into torsional vibration can be made by the method □ as shown in FIG.

最初は第2図(α)に示すように2本の円筒12゜14
を放射状に配列した8枚の板13で結合する。
At first, as shown in Figure 2 (α), two cylinders 12°14
are connected by eight plates 13 arranged radially.

ここで円筒12.14は外g 35 vnn 、内径1
7問。
Here, the cylinder 12.14 has an outside g 35 vnn and an inside diameter of 1
7 questions.

長さ12闘、板13は幅8 w、 、長さ16.5鮪、
厚さ2間である。8枚の板13を同図(h)のように放
射状に配列して2個の円筒12.14と板13とが一体
化されている。次に円筒12と14とを中心軸のまわり
で捻り変形させると同図(C)の形状が得られ、しかる
のち中心面に沿ってカッティノブし2分すると、同図(
d、’ )に示す円筒12の端面に放射歯の付いた捻り
結合子ができ上る。
Length: 12 mm, Board 13: Width: 8 w, Length: 16.5 mm,
The thickness is between 2 and 3. Eight plates 13 are arranged radially as shown in FIG. 2(h), and the two cylinders 12, 14 and the plates 13 are integrated. Next, by twisting and deforming the cylinders 12 and 14 around their central axes, the shape shown in the figure (C) is obtained.Then, by cutting the cylinders 12 and 14 into two parts by cutting along the center plane, the shape shown in the figure (C) is obtained.
A torsion connector with radial teeth on the end face of the cylinder 12 shown in (d,') is completed.

捻り結合子は軸方向に圧縮力を作用すると、軸周りの捻
れ変位を生じ、たて振動を捻り振に変換する素子である
。捻り共振子4は捻り結合子3の捻りトルクを受けて、
パイプの捻り振動に共振させ捻り振幅を増幅する素子で
あり、共振周波数はパイプの長さで決まる。ここでは長
さ65闘のパイプを用いたので31.5 Kl−Lyで
共振した。
A torsional connector is an element that generates torsional displacement around the axis when a compressive force is applied in the axial direction, converting vertical vibration into torsional vibration. The torsional resonator 4 receives the torsional torque of the torsional coupler 3, and
This is an element that resonates with the torsional vibration of the pipe and amplifies the torsional amplitude, and the resonant frequency is determined by the length of the pipe. Here, a pipe with a length of 65 mm was used, so it resonated at 31.5 Kl-Ly.

これらの部品を組み合わせ、捻りモードの超音波振動子
の組み立てると第1図に示した形状となり、リード線7
および8の間に31.5 K1−1gの正弦波電圧を1
0ボルト程度印加すると、端面が矢印10で示したよう
な惰円運ybが発生する。なお、たて振動子2と捻り共
振子3とを一体加工してもあるいは捻り共振子4と捻り
爾13とを一体加工しても同じ結果が得られる。なお捻
り爾13の板の枚数は上記の実施例では8枚としたが、
8枚に限らず、捻り変形と圧縮変形の強度のバランスか
ら板の厚みと長さに応じてノミ4適fZ枚数が選らばれ
る。
When these parts are combined to assemble a torsion mode ultrasonic transducer, it will have the shape shown in Figure 1, and the lead wire 7
and a sinusoidal voltage of 31.5 K1-1g between 1 and 8
When approximately 0 volts are applied, an inertial motion yb as shown by the arrow 10 occurs on the end face. Note that the same result can be obtained even if the vertical vibrator 2 and the torsional resonator 3 are integrally formed, or the torsional resonator 4 and the torsional ring 13 are integrally formed. Note that the number of plates in the twister 13 was 8 in the above embodiment, but
The number of chisels is not limited to eight, but the appropriate number of chisels fZ is selected depending on the thickness and length of the board from the balance of strength of torsional deformation and compressive deformation.

実施例2 捻り共振子4の高さだけが実施例1の55朋と異り65
vrgで他は実施例1の場曾と全く同じ捻りモードの超
音波振動子を作り、2 G、 4 KN、9の正弦波電
圧で励振したところ、第3図に示す如く共振子4の端面
(=J近の円筒面に3次の広がりモードが歪んだ屈曲振
動4′が生じた。振動の節20は円筒の周囲に沿つC6
0°ごとに六等分した位[σに現られれ、各区分ごとに
振動が逆相になっており、波数3の定在波と考えられる
。振動の節と腹の位置は一定しているので定在波であろ
うが、歪んでいるためか腹は%Iと節の中間ではなく一
方の節の近くで楕円運動30をしている。
Example 2 The only difference is the height of the torsional resonator 4 from 55 in Example 1, which is 65.
When an ultrasonic transducer with the same torsion mode as in Example 1 was made using vrg and excited with a sinusoidal voltage of 2 G, 4 KN, and 9, the end face of the resonator 4 as shown in Fig. 3 was created. (=Bending vibration 4' with distorted third-order spreading mode occurred on the cylindrical surface near J. The vibration node 20 is located at C6 along the circumference of the cylinder.
Appears in six equal parts [σ] of 0°, and the vibrations have opposite phases in each division, and are considered to be standing waves with a wave number of 3. Since the positions of the nodes and antinodes of the vibration are constant, it is probably a standing wave, but perhaps because it is distorted, the antinodes move in an ellipse 30 near one of the nodes rather than between the %I and nodes.

このため、外周または内周に円筒状のロータの回転軸を
捻り共振子の軸と316行に圧接するとかなりの高速で
回転するが、ロータと共振子との接線の位置を共1辰子
の円周に沿って移動させると600ごとに逆回転をする
For this reason, if the rotating shaft of a cylindrical rotor is twisted around the outer or inner periphery and pressed into contact with the axis of the resonator in 316 rows, it will rotate at a fairly high speed, but the position of the tangent line between the rotor and the resonator will be the same as the 1st circle. When moved along the circumference, it rotates in the opposite direction every 600 degrees.

以上説明したように本発明の捻りモードの超音波振動子
では捻り共振子の定位置で楕円運動を生じさせることが
できる。なお、この楕円運動の波数は共振子の直径およ
び共振子の肉厚で変わるので、任意に設i1することが
できる。
As explained above, in the torsional mode ultrasonic vibrator of the present invention, elliptic motion can be caused at a fixed position of the torsional resonator. Note that since the wave number of this elliptical motion changes depending on the diameter of the resonator and the thickness of the resonator, it can be set i1 arbitrarily.

実施例3 実施例1および2で本発明の捻りモードの超音波振動子
に関し例を挙げて説明したが、すiい捻りモードを発生
させるには共振子で振I回路ケ瑠11いしなければなら
ない。捻り共振の周波数はパイプの長さで決まるもので
あるから、必要ブf振動ヲ14)るのに所定の長さより
短いパイプを使うことができない。このことは振動子の
小型化に不利であり、この欠点を解決したよりコンパク
トな」:凸りlyi l1llJ子を第4図に示す。
Example 3 In Examples 1 and 2, the torsion mode ultrasonic transducer of the present invention was explained by giving an example, but in order to generate the torsion mode, the resonator must have a vibration I circuit. No. Since the frequency of torsional resonance is determined by the length of the pipe, a pipe shorter than a predetermined length cannot be used to generate the necessary vibration. This is disadvantageous in reducing the size of the vibrator, and a more compact convex vibrator that solves this drawback is shown in FIG.

−捻り共振子24は外径55 mm 、内径41朋、長
さ75mFの円筒で一端は開放、他I′tiMに7間h
’さの底がついている。このj戊の内面に#L Jrj
 !1tII子と一体化した捻り結合子23と圧11J
、セラミック振動子21゜22およびステンレス座金2
5を七ノl−1,、これらにキャノグボルト26を通じ
て共振子24の内面に強く締めつけた。なお、27.2
8はリード線である。このようにして作った捻りモード
の超音波振動子は第1図に示した振動子と同じ機能を果
たすが長さを約半分にでき、小型化に役立てることがで
きる。
- The torsion resonator 24 is a cylinder with an outer diameter of 55 mm, an inner diameter of 41 mm, and a length of 75 mF, with one end open and the other end I'tiM connected for 7 hours.
'The bottom of the sky is on. #L Jrj inside this jab
! Torsion connector 23 integrated with 1tII element and pressure 11J
, ceramic vibrator 21゜22 and stainless steel washer 2
5 were tightly tightened to the inner surface of the resonator 24 through canog bolts 26. In addition, 27.2
8 is a lead wire. The torsional mode ultrasonic transducer thus produced performs the same function as the transducer shown in FIG. 1, but its length can be reduced to about half, making it useful for miniaturization.

以上説明した捻りモードの超音波振動子は、■Jfhi
動子の端面を一様に、共振子の軸と同軸に捻り振動をさ
せること、■この捻りにたて振動を寄生させ単なる捻り
でなく端面を楕円運動させること、但し楕円の回転軸は
捻り軸と垂直面内放射状方向、■共振子に波数ルの定在
波を作り、円筒周辺を2ル分割した隣り同志逆位相の第
1′1円連動をさせること、但し輌円の回転軸は]:3
り軸と平行以上3つのモードの振動をさせることができ
る。これらは基本モードであるが、これらか組み合わさ
れると複雑な非対称撮動が生じ例えば陥部および共振子
外周面が部分的に円筒を輪切りした面内の円筒面との接
線を回転軸とする楕円運動などが現らiうれる。
The torsional mode ultrasonic transducer explained above is ■Jfhi
To make the end face of the mover undergo torsional vibration uniformly and coaxially with the axis of the resonator, ■ To parasitize vertical vibration to this torsion and cause the end face to move in an elliptical rather than a simple twist, however, the axis of rotation of the ellipse is not torsional. In the radial direction in the plane perpendicular to the axis, ■Create a standing wave with a wave number in the resonator, and interlock the 1'1st circle with the opposite phase of the adjacent comrades that divide the periphery of the cylinder into 2. However, the rotation axis of the circle is ]:3
It is possible to vibrate in three modes parallel to the axis. These are basic modes, but when they are combined, complex asymmetric imaging occurs, for example, the recess and the outer peripheral surface of the resonator form an ellipse whose axis of rotation is the tangent to the cylindrical surface within a plane obtained by slicing the cylinder. I'm happy to see exercise etc.

〔発明の効果〕〔Effect of the invention〕

以上説明したように、圧14L厚み振動子、たてモード
共振子、捻り結合子および捻りモード共振子を一体に連
結したから、コンパクトで効率よく、強力な捻り振動を
発生する新機能の超音波捻り振動子を実現することがで
き、一体化されて(、コる゛から使い勝手がよく小型化
の効果がある。
As explained above, since the 14L thickness vibrator, vertical mode resonator, torsional coupler, and torsional mode resonator are connected together, the ultrasonic wave has a new function that is compact, efficient, and generates strong torsional vibration. It is possible to realize a torsion oscillator, and since it is integrated, it is easy to use and has the effect of miniaturization.

なお、本発明の捻りモードの超音波4辰動子を圧゛亀モ
ータに利用したときには、摩]祭硬触面が広くできるこ
とから厚、耗を少なくすることができる。
In addition, when the ultrasonic four-axis rotor of the present invention in torsion mode is used in a pressure tortoise motor, the thickness and wear can be reduced because the friction surface can be made wider.

円筒振動子の外周にロータを接触・摺動回Ilムさせた
場合は接触位置を半波長井ずら辻て遊回私IJJ能なモ
ータを構成することができる。あるいは平水。
When the rotor contacts and slides around the outer periphery of the cylindrical vibrator, the contact position can be shifted by half a wavelength to form a motor capable of rotating. Or flat water.

棒などを接触させて直4′が的に一方向へ移動させるこ
とができること−などの効果がある。
There are effects such as being able to move the straight 4' in one direction by bringing a rod or the like into contact with it.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の捻りモードの超音波振動子の一実施例
を示す側面図、第2図(a) 、 (h) 、 (C1
、(d)は本発明の捻りモードの超音波振動子に用(・
るj2、り結合子の作り方の説明図、第3図は本発明の
捻りモードの超音波振動子の端面の運動の説明図、第4
図は本発明の捻りモードの超音波4辰動子の別の実施例
を示す断面図である。
FIG. 1 is a side view showing an embodiment of the torsional mode ultrasonic transducer of the present invention, and FIGS. 2(a), (h), (C1
, (d) is used for the torsional mode ultrasonic transducer of the present invention (・
Figure 3 is an explanatory diagram of the movement of the end face of the ultrasonic transducer in torsion mode of the present invention.
The figure is a sectional view showing another embodiment of the torsion mode ultrasonic four-axis rotor of the present invention.

Claims (1)

【特許請求の範囲】 1、圧電厚み振動子、たてモード共振子、捻り結会子お
よび捻りモード共振子を一体に連結したことを特徴とす
る捻りモードの超音波振動子。 2、特許請求の範囲第1項に記載において、振動子の一
端面は円筒状捻りモード共振子の自由振動端からなり、
円筒の軸のまわりの偲り振動と同時に、軸に沿ったたて
振動をする結果、9+la向上の任怠の点の振動の軌跡
が一様に円筒の外周面と同心軸を有する円筒曲面内に主
軸を有する楕円運動をするモードを励振できることを特
徴とする超音波振動子。 3、特許請求の範囲第1項に記載において、振動子の一
端面は円筒状捻りモード共振子の自由振動端からなり、
円筒の円周に1゛aつて波数2以上の径方向振動を捻り
振fiJ11に寄生させることにより、端面上の点の振
動の軌跡が、円筒の軸と垂直な面内に主軸を有する楕円
運動をするような上記波数の定在波を励振できることを
特徴とする超音波振動子υ子。
[Scope of Claims] 1. A torsional mode ultrasonic transducer characterized by integrally connecting a piezoelectric thickness vibrator, a longitudinal mode resonator, a torsional coupling element, and a torsional mode resonator. 2. In claim 1, one end surface of the vibrator is composed of a free vibration end of a cylindrical torsional mode resonator,
As a result of the longitudinal vibration along the axis as well as the vertical vibration around the axis of the cylinder, the locus of vibration at the point of failure of 9+la improvement is uniformly within the curved cylindrical surface having an axis concentric with the outer circumferential surface of the cylinder. An ultrasonic transducer characterized in that it is capable of exciting a mode of elliptical motion having a principal axis at . 3. In claim 1, one end surface of the vibrator consists of a free vibration end of a cylindrical torsional mode resonator,
By parasiticizing the torsional vibration fiJ11 with a radial vibration having a wave number of 2 or more on the circumference of the cylinder, the locus of vibration at a point on the end face becomes an elliptical motion with its principal axis in a plane perpendicular to the axis of the cylinder. An ultrasonic transducer υ which is capable of exciting a standing wave of the above-mentioned wave number.
JP59003641A 1984-01-11 1984-01-13 Supersonic vibrator of twisting mode Granted JPS60148388A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP59003641A JPS60148388A (en) 1984-01-13 1984-01-13 Supersonic vibrator of twisting mode
US06/688,947 US4663556A (en) 1984-01-11 1985-01-04 Torsional mode ultrasonic vibrator
DE3500607A DE3500607C2 (en) 1984-01-11 1985-01-10 Torsional vibration ultrasonic vibrator and torsional vibration piezo motor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59003641A JPS60148388A (en) 1984-01-13 1984-01-13 Supersonic vibrator of twisting mode

Publications (2)

Publication Number Publication Date
JPS60148388A true JPS60148388A (en) 1985-08-05
JPH0514512B2 JPH0514512B2 (en) 1993-02-25

Family

ID=11563107

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59003641A Granted JPS60148388A (en) 1984-01-11 1984-01-13 Supersonic vibrator of twisting mode

Country Status (1)

Country Link
JP (1) JPS60148388A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63217984A (en) * 1987-03-02 1988-09-12 Honda Denshi Kk Ultrasonic driving device
JPS63236577A (en) * 1987-03-24 1988-10-03 日本特殊陶業株式会社 Wave matching method of supersonic vibrator
JPH0348390U (en) * 1989-09-18 1991-05-09
JPH0348389U (en) * 1989-09-18 1991-05-09
US5345767A (en) * 1991-03-05 1994-09-13 Aisin Seiki Kabushiki Kaisha Vibration motor
JP2003528563A (en) * 2000-03-23 2003-09-24 エリプテク・レゾナント・アクツアーター・アクチェンゲゼルシャフト Vibration motor and methods of making and using the same
JP2009235884A (en) * 2008-03-26 2009-10-15 Masatake Oshima Outflow restraining drain port for road

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55145573A (en) * 1979-04-24 1980-11-13 Sp Pk I Tekunorogichiesukoe Bi Vibrating motor

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55145573A (en) * 1979-04-24 1980-11-13 Sp Pk I Tekunorogichiesukoe Bi Vibrating motor

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63217984A (en) * 1987-03-02 1988-09-12 Honda Denshi Kk Ultrasonic driving device
JPS63236577A (en) * 1987-03-24 1988-10-03 日本特殊陶業株式会社 Wave matching method of supersonic vibrator
JPH0348390U (en) * 1989-09-18 1991-05-09
JPH0348389U (en) * 1989-09-18 1991-05-09
US5345767A (en) * 1991-03-05 1994-09-13 Aisin Seiki Kabushiki Kaisha Vibration motor
JP2003528563A (en) * 2000-03-23 2003-09-24 エリプテク・レゾナント・アクツアーター・アクチェンゲゼルシャフト Vibration motor and methods of making and using the same
JP4943618B2 (en) * 2000-03-23 2012-05-30 エリプテク・レゾナント・アクツアーター・アクチェンゲゼルシャフト Vibration motor and method of manufacturing and using the same
JP2009235884A (en) * 2008-03-26 2009-10-15 Masatake Oshima Outflow restraining drain port for road

Also Published As

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