JPS60136004A - Manufacturing method of perpendicular magnetization recording head - Google Patents

Abstract

PURPOSE:To manufacture an integrated head consisting of a recording head and a floating slider for improving the reliability by adhering a nonmagnetic ceramic substrate and a magnetic ferrite substrate in one body and then forming a main magnetic pole and a slider surface thereupon. CONSTITUTION:A groove 71 is formed in a flank 72 of a polished magnetic ferrite block 7 in parallel to the lateral axis. Then, a nonmagnetic ceramic block 8 having a polished surface is adhered to the surface 72 with glass. The adhered blocks 7 and 8 are cut in parallel to the depth direction of the groove 71 while crossing the adhesion surface at right angles, and the cut surface is polished to obtain a single block; and the main magnetic pole 3 is formed crossing the center groove 71 on the top surface X of the substrate so that the tip part 31 of the main magnetic pole 3 is at the ceramic part 8 and the base part is at the ferrite part 7. Further, a work protection film is formed on the top surface of the main magnetic pole 3, and then the substrate is cut and polished so that the tip part 31 of the main magnetic pole 3 is exposed to the opposite surface of a recording body 6 and the Y surface of the substrate is a floating surface, thus forming the slider 9. Then, the main magnetic pole 3 and magnetic ferrite 2 are wound with a coil 5 through the groove 71.

Description

Detailed Description of the Invention (al) Technical Field of the Invention The present invention relates to a method of manufacturing a perpendicular magnetization recording head used in a magnetic disk device, and particularly relates to a method of manufacturing a perpendicular magnetization recording head integrally formed with a floating slider. .

Prior Art and Problems In recent years, as the amount of recorded information has increased in magnetic disk drives, there has been a demand for higher recording densities.

Therefore, a perpendicular magnetization recording method that can achieve higher recording density is being researched as an alternative to the general-purpose horizontal magnetization recording method, and the shape, materials used, and manufacturing method of the perpendicular magnetization recording head used in this new method are also being studied. Research is also underway.

FIG. 1 is a perspective view showing the basic structure of a perpendicular magnetic recording head. That is, the basic structure of the perpendicular magnetization recording head is a main magnetic pole 3 that performs magnetic recording on a recording medium 6, as shown in the figure.
a non-magnetic ceramic 4 that holds the magnetic pole tip 31, a magnetic ferrite 2 that sandwiches the magnetic pole portion other than the tip 31 with the non-magnetic ceramic 4, and a coil that winds the sandwiched portion. It is more like Ile 5.

The operation is such that the main magnetic pole 3 is magnetized through the magnetic ferrite 2 by passing a recording signal current through the coil 5, and this magnetization generates a strong and sharp recording magnetic field from the tip 31 of the main magnetic pole 3. High-density magnetization recording is performed on the medium 6.

This perpendicular magnetization recording head is often applied to rigid disks, and FIG. 2 shows a perspective view of the perpendicular magnetization recording head in a conventional rigid disk. As shown in this figure, the perpendicular magnetization recording head has a shape in which the tip 31 of the main magnetic pole 3 is adhered to the rear end 11 of the floating slider 1 so as to correspond to the recording medium.

To manufacture this head, the head section including the main pole 3 and the magnetic ferrite 2 is created, and then this is adhered to the rear end 11 of the flying slider I as described above, and the coil 5 is further wound around the head section. I was using a method. However,
The main magnetic pole 3 is made of a ferromagnetic material such as permalloy with a film thickness of 1 μm or less, and excessive heating during adhesion causes deterioration of its magnetic properties. For this reason, glass bonding, which has strong adhesive strength but requires high temperature bonding, cannot be used, and resin bonding has to be used. Therefore, resin adhesion, which has lower adhesive strength than glass adhesion, has the disadvantage of significantly deteriorating the reliability of the adhesion.

(C1 Purpose of the Invention In view of the above-mentioned conventional situation, an object of the present invention is to provide a method for manufacturing a perpendicular magnetization recording head integrated with a recording head and a flying slider in order to improve the reliability of the perpendicular magnetization recording head. The purpose is to

fdl Structure and object of the invention According to the invention, there is provided a method for manufacturing a perpendicular magnetization recording head paired with a slider, the method comprising forming a groove in the width direction on one surface of a non-magnetic ceramic substrate. The process of bonding the magnetic ferrite substrates with their surfaces overlapped, and the tip of the main magnetic pole for magnetic recording is attached to the magnetic ferrite substrate on the side facing the non-magnetic ceramic substrate on the adjacent surface of both bonded substrates. forming a main magnetic pole such that a base end portion of the main magnetic pole is located on a side surface;
cutting off the main magnetic pole forming surfaces of both substrates until the groove is exposed leaving the main magnetic pole portion, and polishing the surface of the nonmagnetic ceramic substrate to use it as an air bearing surface for the magnetic recording medium; This is achieved by a method of manufacturing a perpendicular magnetization recording head, which comprises the step of applying a coil to the main pole through the magnetic ferrite substrate.

tel Preferred embodiments of the invention will now be described in detail with reference to the accompanying drawings.

3 to 5 are structural perspective views for explaining the first embodiment of the present invention in the order of steps. In the process shown in Figure 3,
First, a groove 71 having a predetermined shape is formed in a predetermined position on the side surface of the polished magnetic ferrite I block 7 in parallel with the horizontal axis by a technique such as etching, machining, or laser processing.
form. Next, a non-magnetic ceramic block 8 whose surface has been polished is bonded to the grooved surface of the magnetic ferrite block 7 with glass without blocking the groove.

In this figure, the grooves 71 are formed only on one side of the magnetic ferrite block 7, but after forming grooves on both sides in alignment with each other, non-magnetic ceramic blocks 8 are aligned on both sides, and glass is bonded. It's okay. Also,
Two magnetic ferrite blocks 7 provided with grooves 71 may be aligned and bonded to both surfaces of the non-magnetic ceramic block 8. In these modifications, two blocks can be obtained by cutting the magnetic ferrite block 7 or the non-magnetic ceramic block 8 at the center of its width.

In the next manufacturing process shown in FIG. 4, after cutting both of the bonded blocks 7.8 parallel to the depth direction of the groove 71 and across the bonded surface as shown by the chain arrow, The cut surface is polished to form a single block of predetermined dimensions, which is used as a slider substrate. The main magnetic pole 3 is arranged perpendicularly to the groove 71 in the center of the upper surface form. This main magnetic pole 3 uses a ferromagnetic thin film having high saturation magnetic flux density and high magnetic permeability, such as permalloy or amorphous (Go/Zr).
It is formed by plating, sputtering, vapor deposition, etc. After forming the main pole 3, it is patterned by photo-etching.

In the following manufacturing process shown in FIG. 5, after forming a processing protection film such as silicon dioxide (S402) or alumina (Al2O2) on the upper surface of the main magnetic pole 3 by sputtering or the like, the tip 31 of the main magnetic pole 3 is The substrate is cut so that it is exposed to the surface facing the medium 6 (see FIG. 1) and the Y surface of the slider substrate becomes the floating surface, and the surface of the substrate 7 is polished to form a floating surface in the shape shown in FIG. A mold slider 9 is formed. Thereafter, the coil 5 is placed around the main pole 3 and the magnetic ferrite 2 through the groove 71 formed in FIG. 3, and a perpendicular magnetization recording head integrated with the floating slider is completed.

6, 7, and 8 are perspective views for explaining the manufacturing process of other embodiments of the present invention, and FIGS. Each figure corresponds to Figure 5. The difference from the above embodiment is that the angle between the glass bonding surfaces of the magnetic ferrite block 7 and the non-magnetic ceramic block 8 and the main magnetic pole forming surface is set between 90° and 75°. In this embodiment, as shown in FIG. 8, the winding hole 71 of the coil 5 of the completed slider 9 is
Since the thickness of the ceramic portion between the main magnetic pole 3 and the air bearing surface Y increases as the distance from the main magnetic pole 3 increases, the strength increases and reliability is further improved.

Note that if the angle is less than 75 degrees, the coil 5 will be too far away from the air bearing surface Y, and recording and reproducing efficiency will decrease.

lfl Effects of the Invention As is clear from the above description, according to the present invention, it is possible to provide a high quality perpendicular magnetization recording head that is an integrated structure of a recording head and a floating slider.

[Brief explanation of the drawing]

FIG. 1 is a perspective view showing the basic structure of a perpendicular magnetization recording head, FIG. 2 is a perspective view of a perpendicular magnetization recording head in a conventional rigid disk, and FIGS. 3, 4, and 5 are in accordance with the present invention. FIGS. 6, 7, and 8 are perspective views for explaining other embodiments of the present invention in the order of steps. This is a perspective view. In the figure, 1 is a floating slider, 2 is a magnetic ferrite, 3 is a main magnetic pole, 4 is a non-magnetic ceramic, 5 is a coil,
6 is a recording medium, 7 is a magnetic ferrite block, 8 is a non-magnetic ceramic block, 9 is a slider, 11 is the rear end of the floating slider, 31 is the tip of the main magnetic pole, 71 is a groove, 72 is a magnetic ferrite first Figure 2, Figure 3, Figure 4, Figure 5 @6r17! J Figure 7 Figure 8

Claims (1)

[Claims] A method for manufacturing a perpendicular magnetization recording head paired with a fi+ slider, the method comprising: manufacturing a magnetic ferrite substrate in which widthwise grooves are formed on one surface of a non-magnetic ceramic substrate; The tip of the main magnetic pole for magnetic recording is placed on the side facing the non-magnetic ceramic substrate, and the main magnetic pole is placed on the side facing the magnetic ferrite substrate. forming a main magnetic pole so that the base end portion of the substrate is located; cutting off the main magnetic pole forming surfaces of both substrates until the groove is exposed, leaving the main magnetic pole portion; and removing the surface of the non-magnetic ceramic substrate. A method for manufacturing a perpendicular magnetization recording head, comprising the steps of: polishing a magnetic recording medium to form an air bearing surface; and applying a coil to the main pole through the magnetic ferrite substrate. (2) The adhesive surface between the non-magnetic ceramic substrate and the magnetic ferrite substrate is inclined in the range of 75 degrees to 90 degrees toward the magnetic ferrite substrate with respect to the main pole forming surface. A method for manufacturing a perpendicular magnetization recording head according to scope (1).