JPS60133332A - Pressure sensor - Google Patents
Pressure sensorInfo
- Publication number
- JPS60133332A JPS60133332A JP24272083A JP24272083A JPS60133332A JP S60133332 A JPS60133332 A JP S60133332A JP 24272083 A JP24272083 A JP 24272083A JP 24272083 A JP24272083 A JP 24272083A JP S60133332 A JPS60133332 A JP S60133332A
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- movable plate
- plate
- fixed plate
- slits
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005484 gravity Effects 0.000 claims description 6
- 206010034719 Personality change Diseases 0.000 abstract 2
- 238000001514 detection method Methods 0.000 description 11
- 230000005284 excitation Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 239000012528 membrane Substances 0.000 description 4
- 238000005192 partition Methods 0.000 description 4
- 125000006850 spacer group Chemical group 0.000 description 4
- 210000000078 claw Anatomy 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
- G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の属する技術分野〕
本発明は、圧力変化を可動板を支持する支持部の固有振
動数の変化として検出する圧力センサに閑ナスこのずネ
スーＷＫ詳１バ杜一本発明は１例えば０．０１ ｐｍ
水柱といった程度の微小圧力測定を行なう場合に使用し
て特に有効が圧力センサに関するものである。DETAILED DESCRIPTION OF THE INVENTION [Technical field to which the invention pertains] The present invention relates to a pressure sensor that detects pressure changes as changes in the natural frequency of a support part that supports a movable plate. One example of the present invention is 0.01 pm.
Pressure sensors are particularly effective when measuring minute pressures such as those in the water column.
従来、微小圧力測定の可能な圧力センナとして、コンデ
ンサマイクロホンが知られている。これは、圧力を受け
る金属膜と、この金属膜に対向設置された固定電極とで
構成されており、圧力による金属膜の変位を金属膜と固
定電極の間の静電容量変化として検出するものである。Conventionally, a condenser microphone is known as a pressure sensor capable of measuring minute pressure. This device consists of a metal membrane that receives pressure and a fixed electrode placed opposite the metal membrane, and detects displacement of the metal membrane due to pressure as a change in capacitance between the metal membrane and the fixed electrode. It is.
しかしながら、この装置においては、金属膜を全面に亘
って均一に張力がかかるように張ら々いと、検出感度に
ばらつきを生じ良好な特性が得られないという問題点が
ある。また、検出感度が高いが故に、振動雑音や姿勢変
化の影響を受けやすいという欠点がある。However, in this device, there is a problem that if the metal film is stretched so that tension is uniformly applied over the entire surface, detection sensitivity will vary and good characteristics cannot be obtained. Furthermore, since the detection sensitivity is high, there is a drawback that it is easily affected by vibration noise and changes in posture.
本発明は、従来技術におけるこれらの問題点や欠点に鑑
みてなされたもので、構成が簡単で振動雑音や姿勢変化
の影響を受けにくい、高感度の圧力センサを実現しよう
とするものである。The present invention has been made in view of these problems and shortcomings in the prior art, and aims to realize a highly sensitive pressure sensor that has a simple configuration, is less susceptible to vibration noise and changes in posture.
本発明に係る装置は、スリット孔を有した固定板と、こ
の固定板と対向配置され測定すべき圧力が与えられる可
動板と、この可動板が回転てきるようにその重心を通る
直線上の２点で当該可動板を支持する支持部と、この支
持部をその固有振動数で励振させるとともに当該支持部
の固有振動数の変化を検出する検出手段とで構成される
。The device according to the present invention includes a fixed plate having a slit hole, a movable plate placed opposite to the fixed plate and to which pressure to be measured is applied, and a straight line passing through the center of gravity of the movable plate so that the movable plate can rotate. It is comprised of a support part that supports the movable plate at two points, and a detection means that excites the support part at its natural frequency and detects a change in the natural frequency of the support part.
第１図は、本発明に係る圧力センサの一例を示す構成断
面図、ｔｌｃ２図は一部を断面で示す要部斜視図、第５
図は要部の組立構成図である。ここでは圧力ｐ□と圧力
ｐ２の差圧を検出する場合を例示する。これらの図にお
いて、１は容器、２１．２２はこの容器内を２部分に仕
切る隔壁である。隔壁２１゜２２で仕切られた各部屋１
ａ＋ ｌｂ内には、圧力導入孔１１ 、１２から測定す
べき圧力ｐｌＰが導入されてい２
る。FIG. 1 is a configuration cross-sectional view showing an example of a pressure sensor according to the present invention, FIG.
The figure is an assembled configuration diagram of the main parts. Here, a case will be exemplified in which a differential pressure between pressure p□ and pressure p2 is detected. In these figures, 1 is a container, and 21 and 22 are partition walls that partition the inside of this container into two parts. Each room 1 separated by partition walls 21°22
A pressure plP to be measured is introduced into a+lb from pressure introduction holes 11 and 12.
３は本発明において特徴としている圧力検知部で、隔壁
２１，２２１Ｃ固定された固定板４と、スペーサ５を介
して固定板４と対向配置された可動部６とで構成されて
いる。Reference numeral 3 denotes a pressure detection section, which is a feature of the present invention, and is composed of a fixed plate 4 fixed to the partition walls 21 and 221C, and a movable section 6 disposed opposite to the fixed plate 4 with a spacer 5 interposed therebetween.
固定板４には、部屋１ｂの圧力を導びく複数個のスリッ
ト（ここでは５個のスリット）４１が設けられている。The fixed plate 4 is provided with a plurality of slits (here, five slits) 41 for guiding the pressure in the chamber 1b.
また可動部６は、フレーム６１、このフレーム６１に支
持部６３を介して支持されるとともに。Further, the movable portion 6 is supported by a frame 61 via a support portion 63.
固定板４に対して対向するように設置された可動板６２
とから成り、可動板６２には複数個のスリ、ト（ここで
は５個のスリット）６４が固定板４の複数個のスリット
４１とは対向しない位置に設けられている。ここで、可
動板６２を支持する支持部６２は、ばねとしても機能す
るものであり、この可動板が回転できるようＫ、可動５
部６２０重心Ｐ（第３図参照）を通る直線ｔ１上の２点
でこの可動板６２を支持している。A movable plate 62 installed to face the fixed plate 4
The movable plate 62 is provided with a plurality of slits (five slits in this case) 64 at positions not facing the plurality of slits 41 of the fixed plate 4. Here, the support part 62 that supports the movable plate 62 also functions as a spring, and the movable plate 62 is provided with
The movable plate 62 is supported at two points on a straight line t1 passing through the center of gravity P of the portion 620 (see FIG. 3).
なお、この例ては、可動板６２には、２つの支持部６３
を結ぶ直線１．＜回転軸に相当）に対して、左側にのみ
スリット孔６４が設けである。７１，７２は支持部６３
に取付けられた支持部６３の励振手段と、振動検出手段
で、例えば圧電素子が使用されている。In addition, in this example, the movable plate 62 has two support parts 63.
Straight line connecting 1. <corresponding to the rotating shaft), the slit hole 64 is provided only on the left side. 71 and 72 are support parts 63
For example, a piezoelectric element is used as the excitation means of the support part 63 attached to the support part 63 and the vibration detection means.
この様に構成した装置の動作を次に説明する。The operation of the apparatus configured in this way will be explained next.
圧力導入孔１１．１２に圧力を導入しない状態（部屋１
ａと１ｂ内の圧力が等しい状態）では、可動板６２は固
定板４との間でスペーサ５のＪ’７さと等しい僅かな間
隔ｄを保って保持されている。なお、スペーサ５として
は、固定板４上に設けたメッキ層を利用し、僅かな間隔
を得るようＫしてもよい。A state in which no pressure is introduced into the pressure introduction holes 11 and 12 (room 1
In a state in which the pressures in a and 1b are equal), the movable plate 62 is held with a small distance d between it and the fixed plate 4, which is equal to J'7 of the spacer 5. Incidentally, as the spacer 5, a plating layer provided on the fixed plate 4 may be used to obtain a small distance.
圧力導入孔１１から圧力ｐ□が、圧力導入孔１２から圧
力ｐ２が導入された場合（ｐ□〈Ｐ２とする）、部屋１
ｂの圧力ｐ２は固定板４に−けた複数個のスリット孔４
１を矢印に示すように通り、可動板６２のスリット孔の
ない片側裏面に加わる。また、部Ｊｌｌａの圧力Ｐ□は
、可動板６２の表面全体に亘って加わるとともに、可動
板６２のスリット孔６４を通って可動板６２のスリット
孔６４が設けられている片側裏面にも加わる。第４図は
、この状態における可動板６２に加わる圧力の状態を示
している。When pressure p□ is introduced from pressure introduction hole 11 and pressure p2 is introduced from pressure introduction hole 12 (p□<P2), room 1
The pressure p2 of b is applied to a plurality of slit holes 4 in the fixed plate 4.
1 as shown by the arrow, and joins the back surface of one side of the movable plate 62 where there is no slit hole. Further, the pressure P□ of the portion Jlla is applied to the entire surface of the movable plate 62, and is also applied to the rear surface of one side of the movable plate 62 through the slit hole 64 of the movable plate 62 where the slit hole 64 is provided. FIG. 4 shows the pressure applied to the movable plate 62 in this state.
このため、可動板６２において、スリット孔６４が設け
られている片側はスリット孔６４を介して表側と、裏側
との圧力はｐ□となＣ）ルクは生じない。Therefore, in the movable plate 62, on one side where the slit hole 64 is provided, the pressure between the front side and the back side through the slit hole 64 is p□, and C) no torque is generated.
これに対して、スリット孔６４が設けられていない他方
の片側は、表側と裏側とでは圧力ｐ１とｐ２がそれぞれ
与えられるため、ｐ□とＰ２の差に比例したトルクが支
持部６３に加わる。支持部６３は、ばねとしても機能し
ておシ、このトルクによって捩れ、可動板６２がｐｌと
ｐ２の差に対応した角度だけ傾斜する。On the other hand, on the other side where the slit hole 64 is not provided, pressures p1 and p2 are applied to the front side and the back side, respectively, so that a torque proportional to the difference between p□ and P2 is applied to the support portion 63. The support portion 63 also functions as a spring and is twisted by this torque, causing the movable plate 62 to incline by an angle corresponding to the difference between pl and p2.
なお、ここで、可動板６２にはスリット孔６４が設けら
れており、また可動板６２とフレーム６１との間は分離
されているので、部屋１ａと１ｂ内の流体（気体又は液
体）がこれらを通して漏れるが、スリ。Note that here, the movable plate 62 is provided with a slit hole 64, and the movable plate 62 and the frame 61 are separated, so that the fluid (gas or liquid) in the rooms 1a and 1b is It leaks through, but pickpockets.
卜孔４１やスリット孔６４の大きさ、可動板６２とフレ
ーム６１との間の空隙幅ｄ□、固定板４と可動板６との
間隔ｄを小さくすることによシ、各部分での流体抵抗が
大きくなシ、可動板６２を圧力差に対応させて傾斜させ
ることができる。By reducing the sizes of the holes 41 and slit holes 64, the gap width d□ between the movable plate 62 and the frame 61, and the distance d between the fixed plate 4 and the movable plate 6, fluid flow in each part can be reduced. If the resistance is large, the movable plate 62 can be tilted in response to the pressure difference.
可動板６２が傾斜すると、これを支持している支持部が
捩れる。When the movable plate 62 is tilted, the support portion supporting it is twisted.
第５図は支持部６３に取付けられている励振手段７１と
振動検出手段７２とが接続される電気回路の−例を示す
構成ブロック図である。ここでは励振手段７１、振動検
出手段７２として、いずれも圧電素子を使用したもので
あって、これらはアンプ７３の出力端及び入力端に接続
され、アンプ７３を含んで自励振回路を構成し−ている
。従って、支持部６３は機械振動子として機能し、その
固有振動数で振動する・そして、この固有振動数は、支
持部６３に与えられる捩れによる歪に対応して変化する
。カウンタ７４は、ケンプ７３を含んで形成されている
自励振回路からの周波数信号を計数するもので、この計
数値は、可動板６２の傾斜角に対応したものとなシ。FIG. 5 is a configuration block diagram showing an example of an electric circuit to which the excitation means 71 attached to the support part 63 and the vibration detection means 72 are connected. Here, piezoelectric elements are used as both the excitation means 71 and the vibration detection means 72, and these are connected to the output end and the input end of an amplifier 73, and a self-oscillation circuit including the amplifier 73 is constructed. ing. Therefore, the support part 63 functions as a mechanical vibrator and vibrates at its natural frequency, and this natural frequency changes in response to the distortion caused by the torsion applied to the support part 63. The counter 74 counts the frequency signal from the self-oscillation circuit formed including the Kemp 73, and this count value corresponds to the inclination angle of the movable plate 62.
この計数値からＰとＰの圧力差を知ることができエ ２ る。From this count value, we can know the pressure difference between P and P. Ru.
この様に構成された装置は、可動板６２がその重心を通
る直線上の２点で支持され、圧力に基づく可動板のトル
ク（あるいは可動板の傾斜）を支持部の固有振動数の変
化として検出することから、重力および外部振動による
加速度（並進運動成分）は、可動板６２を回転させる力
（トルク）と人らず、圧力を振動維音や姿勢変化（重力
）の影響を受けず測定することができる。In the device configured in this way, the movable plate 62 is supported at two points on a straight line passing through its center of gravity, and the torque of the movable plate (or the inclination of the movable plate) based on pressure is converted into a change in the natural frequency of the support part. By detecting the acceleration due to gravity and external vibration (translational motion component), the force (torque) that rotates the movable plate 62 and the pressure can be measured without being affected by vibration fiber sounds or changes in posture (gravity). can do.
なお、上記の実施例においては、励振手段と振動検出手
段として、いずれも圧電素子を用い、これを支持部６３
に取付けたものを例示したが、支持部６３を水晶のよう
々圧電材料で構成すれば、これに電極を取付けることＫ
よって圧電素子を構成でき、本発明はこの様な構成にし
てもよい。また、励振手段と振動検出手段は圧電素子を
使用するものの他、電磁力や静電力等、他の公知の手段
を用いてもよい。In the above embodiment, piezoelectric elements are used as the excitation means and the vibration detection means, and these are connected to the support part 63.
However, if the support part 63 is made of a piezoelectric material such as crystal, electrodes can be attached to it.
Therefore, a piezoelectric element can be constructed, and the present invention may have such a construction. In addition to using a piezoelectric element as the excitation means and vibration detection means, other known means such as electromagnetic force or electrostatic force may be used.
第６図及び第７図は、圧力検知部３の他の例を示す要部
平面図及び断面図である。FIGS. 6 and 7 are a plan view and a sectional view of main parts showing other examples of the pressure sensing section 3. FIG.
第６図に示す実施例は、可動板６２において、回転軸ｔ
１に対して左片方側６２ａに、はぼ全面に亘ってピッチ
Ｐで複数個（ここでは９個）のスリット孔６４ａを形成
するとともに、右片方側６２ｂの上下周縁部に、スリッ
ト孔６４ａと同じ数で、同じ形状のスリット孔６４ｂを
形成させたものである。In the embodiment shown in FIG. 6, in the movable plate 62, the rotation axis t
1, a plurality of slit holes 64a (9 in this case) are formed at a pitch P over almost the entire surface on the left side 62a, and slit holes 64a and slit holes 64a are formed on the upper and lower peripheral edges of the right side 62b. The same number of slit holes 64b having the same shape are formed.
この実施例によれば、可動板６２の左右のバランスを容
易にとることができ、回転軸ｔ、をこの可動板６２の対
称位置にもってくることができる。According to this embodiment, the left and right balance of the movable plate 62 can be easily maintained, and the rotation axis t can be brought to a symmetrical position on the movable plate 62.
第７図の実施例は、可動板６２にスリット孔を形成する
代に、固定板４において、回転軸に対して左片方側に凹
部４２を形成させ、この部分の可動板と固定板との間隔
がｄ２（ｄ２〉ｄ）となるようにしたものである◎
この実施例において、固定板４の四部４２付近の圧力は
、この付近の間隔ｄ２が、他の部分の間隔ｄに比べて大
きくなっているのでＰ１又Ｌｌ Ｐ□に近い圧力となり
、可動板６２にＰ□とＰ２の差圧に応じたトルクを発生
させることができる。In the embodiment shown in FIG. 7, instead of forming a slit hole in the movable plate 62, a recess 42 is formed in the fixed plate 4 on one side to the left with respect to the rotation axis, and the movable plate and the fixed plate are connected in this part. In this embodiment, the pressure near the four parts 42 of the fixed plate 4 is such that the distance d2 in this area is larger than the distance d in other parts. Therefore, the pressure is close to P1 or Ll P□, and it is possible to generate torque in the movable plate 62 according to the differential pressure between P□ and P2.
以上説明したように、本発明によれば、揚動雑音や姿勢
変化の影響を受けにくい、高感度の圧力センサが実現で
きる。As described above, according to the present invention, it is possible to realize a highly sensitive pressure sensor that is less susceptible to the effects of lifting motion noise and posture changes.
第１図は本発明に係る圧力センサの一例を示す構成断面
図、第２図は一部を断面て示す！！！部斜視図、第３図
は要部の組立構成図、第４図れ可動板に加わる圧力の状
態を示す説明図、第５図は電気回路の一例を示す構成ブ
ロック図、第６図及び第７図は圧力検知部の他の例を示
す要部平面図及び断面図である。
１・・・容器、２Ｏ・・・ヨーク、２ａ、２ｂ・・・磁
石、５・・・圧力検知部、４・・・固定板、５・・・ス
ペーサ、６・・・可動部、６１・・・フレーム、６２・
・・可動板、６３・・・支持部、７１・・・励振手段、
７２・・・振動検出手段。
爪５図
６２
第６図
爪７図FIG. 1 is a cross-sectional view showing an example of the pressure sensor according to the present invention, and FIG. 2 is a partially cross-sectional view! ! ! FIG. 3 is an assembled configuration diagram of the main parts, FIG. 4 is an explanatory diagram showing the state of pressure applied to the movable plate, FIG. 5 is a block diagram showing an example of an electric circuit, and FIGS. 6 and 7 The figures are a plan view and a sectional view of main parts showing another example of the pressure sensing section. DESCRIPTION OF SYMBOLS 1... Container, 2O... Yoke, 2a, 2b... Magnet, 5... Pressure detection part, 4... Fixed plate, 5... Spacer, 6... Movable part, 61...・Frame, 62・
...Movable plate, 63... Support part, 71... Excitation means,
72... Vibration detection means. Claw 5 Figure 62 Figure 6 Claw Figure 7
Claims (1)
の固定板と対向配置され一方の面に第１の圧力を受ける
とともに他方の面に前記固定板のスリット孔を介して導
入された第２の圧力を受ける可動板、この可動板の重心
を通る直線上の２点で当該可動板を回動可能に支持する
支持部、この支持部をその固有振動数で励振させるとと
もに当該支持部の固有振動数の変化を検出し前記第１の
圧力と第２の圧力の差圧に対応した信号を出力する検出
手段管具備した圧力センサ。(1) A round plate with a slit hole through which pressure is introduced, which is placed opposite to this fixed plate, receives the first pressure on one side, and introduces the pressure on the other side through the slit hole in the fixed plate. a movable plate that receives the second pressure applied to the movable plate; a support that rotatably supports the movable plate at two points on a straight line passing through the center of gravity of the movable plate; A pressure sensor comprising a detecting means tube for detecting a change in the natural frequency of the support portion and outputting a signal corresponding to a differential pressure between the first pressure and the second pressure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24272083A JPS60133332A (en) | 1983-12-22 | 1983-12-22 | Pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24272083A JPS60133332A (en) | 1983-12-22 | 1983-12-22 | Pressure sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60133332A true JPS60133332A (en) | 1985-07-16 |
| JPH0365853B2 JPH0365853B2 (en) | 1991-10-15 |
Family
ID=17093237
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24272083A Granted JPS60133332A (en) | 1983-12-22 | 1983-12-22 | Pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60133332A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103308246A (en) * | 2012-03-08 | 2013-09-18 | 精工电子有限公司 | Pressure sensor |
| CN103308247A (en) * | 2012-03-08 | 2013-09-18 | 精工电子有限公司 | Pressure sensor |
-
1983
- 1983-12-22 JP JP24272083A patent/JPS60133332A/en active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103308246A (en) * | 2012-03-08 | 2013-09-18 | 精工电子有限公司 | Pressure sensor |
| CN103308247A (en) * | 2012-03-08 | 2013-09-18 | 精工电子有限公司 | Pressure sensor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0365853B2 (en) | 1991-10-15 |
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