JPS60125086U

JPS60125086U - Semiconductor wafer transport equipment

Info

Publication number: JPS60125086U
Application number: JP1123184U
Authority: JP
Inventors: 健一小島
Original assignee: 株式会社　プラズマシステム
Priority date: 1984-01-30
Filing date: 1984-01-30
Publication date: 1985-08-23
Also published as: JPS6210072Y2

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Brief explanation of drawings]

図面は本−案の一実施例を示し、第１図は全体の平面図
、第２図は同上縦断面図、第３図はホルダ一部材の拡大
平面図、第４図は同上ＩＶ−ＩＶ線に沿った断面図、第
５図はウェハーの搬送方向の説明図、第６図、第７図お
よび第８図は動作状態を示す概略的平面図である。１・・・チャンバー、１′・・・チャンバー下面、２・
・・開口部、３・・・筒状体、７・・・回転筒状体、１
１，１３・・・駆動源、１２・・・回転軸、１３′・・
・軸受体、１８．２３・・・搬送アーム、２１，２３４
・・・枢着軸、２４．２９，３３．３５・・・ホイール
、３６・・・アーム、３０．４１・・・チェーン、４２
・・・ホルダー、ａ・・・半導体ウェハー。第３図　　　　〒７−１齢べ第４−図　　　。、−−ｍ− 一　　　　　　　９　　　４５４６４８第５図°　　　
　　　　− １、’−１−ＩＩｉ　／The drawings show an embodiment of the present proposal, and FIG. 1 is an overall plan view, FIG. 2 is a vertical cross-sectional view of the same, FIG. 3 is an enlarged plan view of one member of the holder, and FIG. 4 is an IV-IV of the same. FIG. 5 is an explanatory view in the wafer transport direction, and FIGS. 6, 7, and 8 are schematic plan views showing the operating state. 1...Chamber, 1'...Bottom surface of chamber, 2.
... Opening, 3... Cylindrical body, 7... Rotating cylindrical body, 1
1, 13... Drive source, 12... Rotating shaft, 13'...
・Bearing body, 18.23...transport arm, 21,234
... Pivoting shaft, 24.29, 33.35 ... Wheel, 36 ... Arm, 30.41 ... Chain, 42
...Holder, a...Semiconductor wafer. Figure 3. 7-1st instar Figure 4. ,--m- 1 9 454648Figure 5°
-1,'-1-I Ii /

Claims

[Scope of utility model registration request]

A cylindrical body is airtightly suspended from below in the opening of the lower surface of the chamber, and receives the rotational force of the drive source in the axial direction of the cylindrical body, and receives the rotational force of the drive source in the central axis direction of the cylindrical body. A rotating cylindrical body having a rotating shaft that receives rotational force is rotatably and airtightly installed vertically, a bearing body for the rotating shaft is fixed to the upper surface of the rotating cylindrical body, and a bearing body is supported by this bearing body. A transfer arm is completely fixed to the rotating shaft, and a holder member for placing and holding a semiconductor wafer is pivotally attached to the free end of the transfer arm via another transfer arm pivotally attached.
a wheel fixed to the bearing body concentrically with the rotating shaft and a wheel fixed to the lower part of the pivot shaft at the free end of the transfer arm, and a wheel fixed to the upper part of the transfer arm pivot shaft; A semiconductor wafer transport device characterized in that a chain is suspended between the other transport arm and a wheel fixed to a pivot shaft of the holder member.
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