[go: up one dir, main page]

JPS60116239U - Power MOSFET mounting structure - Google Patents

Power MOSFET mounting structure

Info

Publication number
JPS60116239U
JPS60116239U JP1984002858U JP285884U JPS60116239U JP S60116239 U JPS60116239 U JP S60116239U JP 1984002858 U JP1984002858 U JP 1984002858U JP 285884 U JP285884 U JP 285884U JP S60116239 U JPS60116239 U JP S60116239U
Authority
JP
Japan
Prior art keywords
mounting structure
power mosfet
mosfet mounting
metal piece
wiring layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1984002858U
Other languages
Japanese (ja)
Inventor
冨永 保
高辻 吉明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissan Motor Co Ltd
Original Assignee
Nissan Motor Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissan Motor Co Ltd filed Critical Nissan Motor Co Ltd
Priority to JP1984002858U priority Critical patent/JPS60116239U/en
Publication of JPS60116239U publication Critical patent/JPS60116239U/en
Pending legal-status Critical Current

Links

Classifications

    • H10W72/30
    • H10W72/5363
    • H10W72/59
    • H10W72/884
    • H10W72/934
    • H10W90/24
    • H10W90/736
    • H10W90/756

Landscapes

  • Wire Bonding (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来の実装構造を示す断面図、第2図は同平面
図、第3図は同素子断面図、第4図は本考案に係わるパ
ワーMOSチップの素子断面図、第5図は同平面図、第
6図は本考案に係わる実装構造の断面図である。 13・・・ドレイン層、14・・・ゲート5in2膜、
16・・・パワーMOSチップ、17・・・ソース領域
、18・・・ゲート層、19・・・絶縁層、20・・・
ソース配線層、21・・・ゲートパッド、22・・・素
子形成領域、23・・・ドレイン側の放熱板、25・・
・軟ろう材または導電性接着剤、26・・・金属片、2
7・・・ソース電極となるリードフレーム、28・・・
細線、29・・・ゲース電極となるリードフレーム、3
0・・・細線。
Fig. 1 is a sectional view showing a conventional mounting structure, Fig. 2 is a plan view thereof, Fig. 3 is a sectional view of the same element, Fig. 4 is a sectional view of an element of a power MOS chip according to the present invention, and Fig. 5 is a sectional view of the element. The same plan view and FIG. 6 are cross-sectional views of the mounting structure according to the present invention. 13...Drain layer, 14...Gate 5in2 film,
16... Power MOS chip, 17... Source region, 18... Gate layer, 19... Insulating layer, 20...
Source wiring layer, 21... Gate pad, 22... Element formation region, 23... Drain side heat sink, 25...
・Soft brazing material or conductive adhesive, 26...Metal piece, 2
7...Lead frame serving as a source electrode, 28...
Thin wire, 29...Lead frame serving as a gate electrode, 3
0...Thin line.

Claims (1)

【実用新案登録請求の範囲】 半導体基体の1主面をドレインとし、他の主面にゲート
とソースを形成する縦型パワーMO3FETにおいて; 前記ゲート、ソースが形成されている領域面上に、絶縁
層を介してソース配線層を形成するとともに、該ソース
配線層上には金属片を接着し、該金属片とリードフレー
ムとの間をワイヤボンディングで接続することを特徴と
するパワーMO8FETの実装構造。
[Claims for Utility Model Registration] In a vertical power MO3FET in which a drain is formed on one main surface of a semiconductor substrate and a gate and a source are formed on the other main surface; A mounting structure of a power MO8FET characterized in that a source wiring layer is formed through a layer, a metal piece is bonded on the source wiring layer, and the metal piece and a lead frame are connected by wire bonding. .
JP1984002858U 1984-01-12 1984-01-12 Power MOSFET mounting structure Pending JPS60116239U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984002858U JPS60116239U (en) 1984-01-12 1984-01-12 Power MOSFET mounting structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984002858U JPS60116239U (en) 1984-01-12 1984-01-12 Power MOSFET mounting structure

Publications (1)

Publication Number Publication Date
JPS60116239U true JPS60116239U (en) 1985-08-06

Family

ID=30476928

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984002858U Pending JPS60116239U (en) 1984-01-12 1984-01-12 Power MOSFET mounting structure

Country Status (1)

Country Link
JP (1) JPS60116239U (en)

Cited By (60)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6844615B1 (en) 2003-03-13 2005-01-18 Amkor Technology, Inc. Leadframe package for semiconductor devices
US6846704B2 (en) 2001-03-27 2005-01-25 Amkor Technology, Inc. Semiconductor package and method for manufacturing the same
US6873041B1 (en) 2001-11-07 2005-03-29 Amkor Technology, Inc. Power semiconductor package with strap
US6873032B1 (en) 2001-04-04 2005-03-29 Amkor Technology, Inc. Thermally enhanced chip scale lead on chip semiconductor package and method of making same
US6879034B1 (en) 2003-05-01 2005-04-12 Amkor Technology, Inc. Semiconductor package including low temperature co-fired ceramic substrate
US6893900B1 (en) 1998-06-24 2005-05-17 Amkor Technology, Inc. Method of making an integrated circuit package
US6897550B1 (en) 2003-06-11 2005-05-24 Amkor Technology, Inc. Fully-molded leadframe stand-off feature
US6919620B1 (en) 2002-09-17 2005-07-19 Amkor Technology, Inc. Compact flash memory card with clamshell leadframe
US6921967B2 (en) 2003-09-24 2005-07-26 Amkor Technology, Inc. Reinforced die pad support structure
US6953988B2 (en) 2000-03-25 2005-10-11 Amkor Technology, Inc. Semiconductor package
US6965159B1 (en) 2001-09-19 2005-11-15 Amkor Technology, Inc. Reinforced lead-frame assembly for interconnecting circuits within a circuit module
US6965157B1 (en) 1999-11-09 2005-11-15 Amkor Technology, Inc. Semiconductor package with exposed die pad and body-locking leadframe
US6967395B1 (en) 2001-03-20 2005-11-22 Amkor Technology, Inc. Mounting for a package containing a chip
US6995459B2 (en) 2002-09-09 2006-02-07 Amkor Technology, Inc. Semiconductor package with increased number of input and output pins
US7001799B1 (en) 2003-03-13 2006-02-21 Amkor Technology, Inc. Method of making a leadframe for semiconductor devices
US7005326B1 (en) 1998-06-24 2006-02-28 Amkor Technology, Inc. Method of making an integrated circuit package
US7008825B1 (en) 2003-05-27 2006-03-07 Amkor Technology, Inc. Leadframe strip having enhanced testability
US7030474B1 (en) 1998-06-24 2006-04-18 Amkor Technology, Inc. Plastic integrated circuit package and method and leadframe for making the package
US7045396B2 (en) 1999-12-16 2006-05-16 Amkor Technology, Inc. Stackable semiconductor package and method for manufacturing same
US7045883B1 (en) 2001-04-04 2006-05-16 Amkor Technology, Inc. Thermally enhanced chip scale lead on chip semiconductor package and method of making same
US7045882B2 (en) 2000-12-29 2006-05-16 Amkor Technology, Inc. Semiconductor package including flip chip
US7057280B2 (en) 1998-11-20 2006-06-06 Amkor Technology, Inc. Leadframe having lead locks to secure leads to encapsulant
US7057268B1 (en) 2004-01-27 2006-06-06 Amkor Technology, Inc. Cavity case with clip/plug for use on multi-media card
US7064009B1 (en) 2001-04-04 2006-06-20 Amkor Technology, Inc. Thermally enhanced chip scale lead on chip semiconductor package and method of making same
US7067908B2 (en) 1999-10-15 2006-06-27 Amkor Technology, Inc. Semiconductor package having improved adhesiveness and ground bonding
US7071541B1 (en) 1998-06-24 2006-07-04 Amkor Technology, Inc. Plastic integrated circuit package and method and leadframe for making the package
US7091594B1 (en) 2004-01-28 2006-08-15 Amkor Technology, Inc. Leadframe type semiconductor package having reduced inductance and its manufacturing method
US7095103B1 (en) 2003-05-01 2006-08-22 Amkor Technology, Inc. Leadframe based memory card
US7102208B1 (en) 1999-10-15 2006-09-05 Amkor Technology, Inc. Leadframe and semiconductor package with improved solder joint strength
US7112474B1 (en) 1998-06-24 2006-09-26 Amkor Technology, Inc. Method of making an integrated circuit package
US7115445B2 (en) 1999-10-15 2006-10-03 Amkor Technology, Inc. Semiconductor package having reduced thickness
US7144517B1 (en) 2003-11-07 2006-12-05 Amkor Technology, Inc. Manufacturing method for leadframe and for semiconductor package using the leadframe
US7170150B2 (en) 2001-03-27 2007-01-30 Amkor Technology, Inc. Lead frame for semiconductor package
US7183630B1 (en) 2002-04-15 2007-02-27 Amkor Technology, Inc. Lead frame with plated end leads
US7190062B1 (en) 2004-06-15 2007-03-13 Amkor Technology, Inc. Embedded leadframe semiconductor package
US7192807B1 (en) 2002-11-08 2007-03-20 Amkor Technology, Inc. Wafer level package and fabrication method
US7202554B1 (en) 2004-08-19 2007-04-10 Amkor Technology, Inc. Semiconductor package and its manufacturing method
US7211879B1 (en) 2003-11-12 2007-05-01 Amkor Technology, Inc. Semiconductor package with chamfered corners and method of manufacturing the same
US7245007B1 (en) 2003-09-18 2007-07-17 Amkor Technology, Inc. Exposed lead interposer leadframe package
US7253503B1 (en) 1999-11-05 2007-08-07 Amkor Technology, Inc. Integrated circuit device packages and substrates for making the packages
US7332375B1 (en) 1998-06-24 2008-02-19 Amkor Technology, Inc. Method of making an integrated circuit package
US7361533B1 (en) 2002-11-08 2008-04-22 Amkor Technology, Inc. Stacked embedded leadframe
US7473584B1 (en) 2004-10-22 2009-01-06 Amkor Technology, Inc. Method for fabricating a fan-in leadframe semiconductor package
US7485952B1 (en) 2001-09-19 2009-02-03 Amkor Technology, Inc. Drop resistant bumpers for fully molded memory cards
US7507603B1 (en) 2005-12-02 2009-03-24 Amkor Technology, Inc. Etch singulated semiconductor package
US7572681B1 (en) 2005-12-08 2009-08-11 Amkor Technology, Inc. Embedded electronic component package
US7598598B1 (en) 2003-02-05 2009-10-06 Amkor Technology, Inc. Offset etched corner leads for semiconductor package
US7906855B1 (en) 2008-01-21 2011-03-15 Amkor Technology, Inc. Stacked semiconductor package and method of making same
US8072050B1 (en) 2008-11-18 2011-12-06 Amkor Technology, Inc. Semiconductor device with increased I/O leadframe including passive device
US8853836B1 (en) 1998-06-24 2014-10-07 Amkor Technology, Inc. Integrated circuit package and method of making the same
US8900995B1 (en) 2010-10-05 2014-12-02 Amkor Technology, Inc. Semiconductor device and manufacturing method thereof
US8937381B1 (en) 2009-12-03 2015-01-20 Amkor Technology, Inc. Thin stackable package and method
US8981572B1 (en) 2011-11-29 2015-03-17 Amkor Technology, Inc. Conductive pad on protruding through electrode semiconductor device
US9129943B1 (en) 2012-03-29 2015-09-08 Amkor Technology, Inc. Embedded component package and fabrication method
US9159672B1 (en) 2010-08-02 2015-10-13 Amkor Technology, Inc. Through via connected backside embedded circuit features structure and method
US9184148B2 (en) 2013-10-24 2015-11-10 Amkor Technology, Inc. Semiconductor package and method therefor
US9184118B2 (en) 2013-05-02 2015-11-10 Amkor Technology Inc. Micro lead frame structure having reinforcing portions and method
US9275939B1 (en) 2011-01-27 2016-03-01 Amkor Technology, Inc. Semiconductor device including leadframe with a combination of leads and lands and method
US9324614B1 (en) 2010-04-06 2016-04-26 Amkor Technology, Inc. Through via nub reveal method and structure
US9362210B2 (en) 2000-04-27 2016-06-07 Amkor Technology, Inc. Leadframe and semiconductor package made using the leadframe

Cited By (79)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7071541B1 (en) 1998-06-24 2006-07-04 Amkor Technology, Inc. Plastic integrated circuit package and method and leadframe for making the package
US8963301B1 (en) 1998-06-24 2015-02-24 Amkor Technology, Inc. Integrated circuit package and method of making the same
US7030474B1 (en) 1998-06-24 2006-04-18 Amkor Technology, Inc. Plastic integrated circuit package and method and leadframe for making the package
US7112474B1 (en) 1998-06-24 2006-09-26 Amkor Technology, Inc. Method of making an integrated circuit package
US6893900B1 (en) 1998-06-24 2005-05-17 Amkor Technology, Inc. Method of making an integrated circuit package
US7560804B1 (en) 1998-06-24 2009-07-14 Amkor Technology, Inc. Integrated circuit package and method of making the same
US7332375B1 (en) 1998-06-24 2008-02-19 Amkor Technology, Inc. Method of making an integrated circuit package
US7005326B1 (en) 1998-06-24 2006-02-28 Amkor Technology, Inc. Method of making an integrated circuit package
US9224676B1 (en) 1998-06-24 2015-12-29 Amkor Technology, Inc. Integrated circuit package and method of making the same
US8853836B1 (en) 1998-06-24 2014-10-07 Amkor Technology, Inc. Integrated circuit package and method of making the same
US7564122B2 (en) 1998-11-20 2009-07-21 Amkor Technology, Inc. Semiconductor package and method of making using leadframe having lead locks to secure leads to encapsulant
US7057280B2 (en) 1998-11-20 2006-06-06 Amkor Technology, Inc. Leadframe having lead locks to secure leads to encapsulant
US7321162B1 (en) 1999-10-15 2008-01-22 Amkor Technology, Inc. Semiconductor package having reduced thickness
US7067908B2 (en) 1999-10-15 2006-06-27 Amkor Technology, Inc. Semiconductor package having improved adhesiveness and ground bonding
US7102208B1 (en) 1999-10-15 2006-09-05 Amkor Technology, Inc. Leadframe and semiconductor package with improved solder joint strength
US7535085B2 (en) 1999-10-15 2009-05-19 Amkor Technology, Inc. Semiconductor package having improved adhesiveness and ground bonding
US7115445B2 (en) 1999-10-15 2006-10-03 Amkor Technology, Inc. Semiconductor package having reduced thickness
US7253503B1 (en) 1999-11-05 2007-08-07 Amkor Technology, Inc. Integrated circuit device packages and substrates for making the packages
US6965157B1 (en) 1999-11-09 2005-11-15 Amkor Technology, Inc. Semiconductor package with exposed die pad and body-locking leadframe
US7045396B2 (en) 1999-12-16 2006-05-16 Amkor Technology, Inc. Stackable semiconductor package and method for manufacturing same
US6953988B2 (en) 2000-03-25 2005-10-11 Amkor Technology, Inc. Semiconductor package
US9362210B2 (en) 2000-04-27 2016-06-07 Amkor Technology, Inc. Leadframe and semiconductor package made using the leadframe
US7045882B2 (en) 2000-12-29 2006-05-16 Amkor Technology, Inc. Semiconductor package including flip chip
US6967395B1 (en) 2001-03-20 2005-11-22 Amkor Technology, Inc. Mounting for a package containing a chip
US7170150B2 (en) 2001-03-27 2007-01-30 Amkor Technology, Inc. Lead frame for semiconductor package
US6846704B2 (en) 2001-03-27 2005-01-25 Amkor Technology, Inc. Semiconductor package and method for manufacturing the same
US7521294B2 (en) 2001-03-27 2009-04-21 Amkor Technology, Inc. Lead frame for semiconductor package
US7064009B1 (en) 2001-04-04 2006-06-20 Amkor Technology, Inc. Thermally enhanced chip scale lead on chip semiconductor package and method of making same
US6873032B1 (en) 2001-04-04 2005-03-29 Amkor Technology, Inc. Thermally enhanced chip scale lead on chip semiconductor package and method of making same
US7045883B1 (en) 2001-04-04 2006-05-16 Amkor Technology, Inc. Thermally enhanced chip scale lead on chip semiconductor package and method of making same
US6965159B1 (en) 2001-09-19 2005-11-15 Amkor Technology, Inc. Reinforced lead-frame assembly for interconnecting circuits within a circuit module
US6998702B1 (en) 2001-09-19 2006-02-14 Amkor Technology, Inc. Front edge chamfer feature for fully-molded memory cards
US7485952B1 (en) 2001-09-19 2009-02-03 Amkor Technology, Inc. Drop resistant bumpers for fully molded memory cards
US7176062B1 (en) 2001-09-19 2007-02-13 Amkor Technology, Inc. Lead-frame method and assembly for interconnecting circuits within a circuit module
US6873041B1 (en) 2001-11-07 2005-03-29 Amkor Technology, Inc. Power semiconductor package with strap
US7183630B1 (en) 2002-04-15 2007-02-27 Amkor Technology, Inc. Lead frame with plated end leads
US6995459B2 (en) 2002-09-09 2006-02-07 Amkor Technology, Inc. Semiconductor package with increased number of input and output pins
US7211471B1 (en) 2002-09-09 2007-05-01 Amkor Technology, Inc. Exposed lead QFP package fabricated through the use of a partial saw process
US6919620B1 (en) 2002-09-17 2005-07-19 Amkor Technology, Inc. Compact flash memory card with clamshell leadframe
US8952522B1 (en) 2002-11-08 2015-02-10 Amkor Technology, Inc. Wafer level package and fabrication method
US8691632B1 (en) 2002-11-08 2014-04-08 Amkor Technology, Inc. Wafer level package and fabrication method
US7420272B1 (en) 2002-11-08 2008-09-02 Amkor Technology, Inc. Two-sided wafer escape package
US7192807B1 (en) 2002-11-08 2007-03-20 Amkor Technology, Inc. Wafer level package and fabrication method
US7247523B1 (en) 2002-11-08 2007-07-24 Amkor Technology, Inc. Two-sided wafer escape package
US7361533B1 (en) 2002-11-08 2008-04-22 Amkor Technology, Inc. Stacked embedded leadframe
US9406645B1 (en) 2002-11-08 2016-08-02 Amkor Technology, Inc. Wafer level package and fabrication method
US7598598B1 (en) 2003-02-05 2009-10-06 Amkor Technology, Inc. Offset etched corner leads for semiconductor package
US6844615B1 (en) 2003-03-13 2005-01-18 Amkor Technology, Inc. Leadframe package for semiconductor devices
US7001799B1 (en) 2003-03-13 2006-02-21 Amkor Technology, Inc. Method of making a leadframe for semiconductor devices
US7095103B1 (en) 2003-05-01 2006-08-22 Amkor Technology, Inc. Leadframe based memory card
US6879034B1 (en) 2003-05-01 2005-04-12 Amkor Technology, Inc. Semiconductor package including low temperature co-fired ceramic substrate
US7008825B1 (en) 2003-05-27 2006-03-07 Amkor Technology, Inc. Leadframe strip having enhanced testability
US6897550B1 (en) 2003-06-11 2005-05-24 Amkor Technology, Inc. Fully-molded leadframe stand-off feature
US7245007B1 (en) 2003-09-18 2007-07-17 Amkor Technology, Inc. Exposed lead interposer leadframe package
US6921967B2 (en) 2003-09-24 2005-07-26 Amkor Technology, Inc. Reinforced die pad support structure
US7214326B1 (en) 2003-11-07 2007-05-08 Amkor Technology, Inc. Increased capacity leadframe and semiconductor package using the same
US7144517B1 (en) 2003-11-07 2006-12-05 Amkor Technology, Inc. Manufacturing method for leadframe and for semiconductor package using the leadframe
US7211879B1 (en) 2003-11-12 2007-05-01 Amkor Technology, Inc. Semiconductor package with chamfered corners and method of manufacturing the same
US7057268B1 (en) 2004-01-27 2006-06-06 Amkor Technology, Inc. Cavity case with clip/plug for use on multi-media card
US7091594B1 (en) 2004-01-28 2006-08-15 Amkor Technology, Inc. Leadframe type semiconductor package having reduced inductance and its manufacturing method
US7190062B1 (en) 2004-06-15 2007-03-13 Amkor Technology, Inc. Embedded leadframe semiconductor package
US7202554B1 (en) 2004-08-19 2007-04-10 Amkor Technology, Inc. Semiconductor package and its manufacturing method
US7473584B1 (en) 2004-10-22 2009-01-06 Amkor Technology, Inc. Method for fabricating a fan-in leadframe semiconductor package
US7507603B1 (en) 2005-12-02 2009-03-24 Amkor Technology, Inc. Etch singulated semiconductor package
US7572681B1 (en) 2005-12-08 2009-08-11 Amkor Technology, Inc. Embedded electronic component package
US7906855B1 (en) 2008-01-21 2011-03-15 Amkor Technology, Inc. Stacked semiconductor package and method of making same
US8072050B1 (en) 2008-11-18 2011-12-06 Amkor Technology, Inc. Semiconductor device with increased I/O leadframe including passive device
US8937381B1 (en) 2009-12-03 2015-01-20 Amkor Technology, Inc. Thin stackable package and method
US9324614B1 (en) 2010-04-06 2016-04-26 Amkor Technology, Inc. Through via nub reveal method and structure
US9159672B1 (en) 2010-08-02 2015-10-13 Amkor Technology, Inc. Through via connected backside embedded circuit features structure and method
US8900995B1 (en) 2010-10-05 2014-12-02 Amkor Technology, Inc. Semiconductor device and manufacturing method thereof
US9275939B1 (en) 2011-01-27 2016-03-01 Amkor Technology, Inc. Semiconductor device including leadframe with a combination of leads and lands and method
US9508631B1 (en) 2011-01-27 2016-11-29 Amkor Technology, Inc. Semiconductor device including leadframe with a combination of leads and lands and method
US8981572B1 (en) 2011-11-29 2015-03-17 Amkor Technology, Inc. Conductive pad on protruding through electrode semiconductor device
US9431323B1 (en) 2011-11-29 2016-08-30 Amkor Technology, Inc. Conductive pad on protruding through electrode
US9129943B1 (en) 2012-03-29 2015-09-08 Amkor Technology, Inc. Embedded component package and fabrication method
US9184118B2 (en) 2013-05-02 2015-11-10 Amkor Technology Inc. Micro lead frame structure having reinforcing portions and method
US9184148B2 (en) 2013-10-24 2015-11-10 Amkor Technology, Inc. Semiconductor package and method therefor
US9543235B2 (en) 2013-10-24 2017-01-10 Amkor Technology, Inc. Semiconductor package and method therefor

Similar Documents

Publication Publication Date Title
JPS60116239U (en) Power MOSFET mounting structure
JPS5820538U (en) Hybrid integrated circuit device
JPH01165133A (en) Semiconductor device
JPS60172344U (en) Mounting structure of vertical MOSFET
JPS5837152U (en) semiconductor equipment
JPS59125833U (en) semiconductor equipment
JPS5858354U (en) Lead frame for semiconductor devices
JPS60174244U (en) hybrid integrated circuit
JPS63187330U (en)
JPS58159741U (en) semiconductor equipment
JPS60103860U (en) semiconductor laser equipment
JPS5834739U (en) semiconductor equipment
JPS59200448A (en) Semiconductor device
JPS6130253U (en) semiconductor equipment
JPS5840843U (en) Resin-encapsulated semiconductor device
JPS587338U (en) Ground chip for semiconductor devices
JPS58155853U (en) Si chip mounting structure
JPS60169843U (en) Isolated semiconductor device
JPS59112954U (en) Insulator-encapsulated semiconductor device
JPS5851443U (en) semiconductor element
JPS60125754U (en) semiconductor equipment
JPS58195435U (en) semiconductor equipment
JPS6134751U (en) Semiconductor integrated circuit device
JPS59125848U (en) Vertical junction field effect semiconductor device
JPS60931U (en) semiconductor equipment