JPS6010543A - Production of input surface for image multiplier tube - Google Patents
Production of input surface for image multiplier tubeInfo
- Publication number
- JPS6010543A JPS6010543A JP11933383A JP11933383A JPS6010543A JP S6010543 A JPS6010543 A JP S6010543A JP 11933383 A JP11933383 A JP 11933383A JP 11933383 A JP11933383 A JP 11933383A JP S6010543 A JPS6010543 A JP S6010543A
- Authority
- JP
- Japan
- Prior art keywords
- boat
- input surface
- ball
- phosphor layer
- input
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims abstract description 13
- 239000000758 substrate Substances 0.000 claims abstract description 6
- 238000001704 evaporation Methods 0.000 claims abstract description 5
- 238000010438 heat treatment Methods 0.000 claims abstract description 5
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 claims abstract description 5
- 238000000034 method Methods 0.000 claims description 6
- BLBNEWYCYZMDEK-UHFFFAOYSA-N $l^{1}-indiganyloxyindium Chemical compound [In]O[In] BLBNEWYCYZMDEK-UHFFFAOYSA-N 0.000 claims 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 2
- 229910052593 corundum Inorganic materials 0.000 abstract 2
- 230000008021 deposition Effects 0.000 abstract 2
- 229910001845 yogo sapphire Inorganic materials 0.000 abstract 2
- 239000011888 foil Substances 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 230000001603 reducing effect Effects 0.000 description 1
- 238000010079 rubber tapping Methods 0.000 description 1
- 238000010025 steaming Methods 0.000 description 1
- 230000009747 swallowing Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/12—Manufacture of electrodes or electrode systems of photo-emissive cathodes; of secondary-emission electrodes
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)
Abstract
Description
【発明の詳細な説明】 〔発明の技術分野〕 この発明は、像増倍管用入力面の製造方法に関する。[Detailed description of the invention] [Technical field of invention] The present invention relates to a method of manufacturing an input surface for an image intensifier tube.
一般に像増倍管例えはＸ線螢光増倍管は、真空外囲器内
の入力側に入力面全有している。この入力面は１球曲状
のＡｌからなる基板の出力側（凹面側）にＣ８Ｉからな
る入力螢光体層が形成され、この入力螢光体層の上に更
に光電面が形成されている。Generally, an image intensifier tube, such as an X-ray fluorophore tube, has its entire input surface on the input side within a vacuum envelope. For this input surface, an input phosphor layer made of C8I is formed on the output side (concave side) of a substrate made of spherically curved Al, and a photocathode is further formed on this input phosphor layer. .
この場合−Ｃ８Ｉ入力螢光体に会は柱状結晶に成長させ
、光の直進性全利用し、高解像度化企図っている。従っ
て、第１図に示すようにＡ７基板１上に形成されたＣ、
Ｉ入力螢光体ｊ曽２の表面は凹凸全有しており、そのた
めこの上に形成される光電面の導電性不足奮起こし、そ
の欠陥をｔ山う必要がある。In this case, the -C8I input phosphor is grown into a columnar crystal, making full use of the linear propagation of light to achieve high resolution. Therefore, as shown in FIG. 1, C formed on the A7 substrate 1,
The surface of the I-input phosphor 2 is completely uneven, so that the photocathode formed thereon lacks conductivity, and it is necessary to remove the defects.
その手段として４束にの方法かあるか、その一つにＣ８
■入力螢光体層上−・のＩｎ２０Ｂ膜の被覆化がある。Is there a way to do that by making four bundles? One of them is C8.
(2) The input phosphor layer is coated with an In20B film.
このＩｎ２Ｏ３膜を形成する蒸着法には。The vapor deposition method for forming this In2O3 film is as follows.
抵抗加熱方式とビーム蒸着方式とがあるが、簡単で作業
能率がよいという点で前者の方式が使用される場合が多
い。この抵抗加熱方式は、バスケット状のコイルにＡｌ
ｈｏｓｋｋ布したものを用い、この中にＩｎ球を入れて
加熱蒸発させる。There are resistance heating methods and beam evaporation methods, but the former method is often used because it is simple and has high work efficiency. This resistance heating method uses aluminum in a basket-shaped coil.
Using a hosk cloth, put an In bulb into it and heat it to evaporate.
ところで、Ｉｎ球を蒸発させる場合＊ ＡＡ！２０ｇに
より還元作用全受け、０２雰囲気中での蒸着にても完全
な酸化インジクムとはならず、一部低級酸化物の形で飛
び出すことになる。それに伴い、コイル中のＩｎ球への
Ａ７，０．の溶は込み現象か現われ、回数を車ねるに従
い蒸着効率の低下が起こり、Ｉｎ球の残量を有している
にもかかわらず使用かできなくなる。By the way, when evaporating an In bulb * AA! At 20g, the entire reducing effect is applied, and even when deposited in an 02 atmosphere, complete indicum oxide is not obtained, and a portion of the indicium oxide is ejected in the form of lower oxides. Accordingly, A7,0. A phenomenon of melt penetration appears, and as the number of times increases, the evaporation efficiency decreases, making it impossible to use even though there is a remaining amount of In bulbs.
この発明の目的は、Ｉｎ球が最後まで蒸着可能であり、
燕右効率を著しく向上した像増倍管用入力面の製造方法
全提供することである。The purpose of this invention is to enable In spheres to be evaporated to the end,
An object of the present invention is to provide an entire method for manufacturing an input surface for an image intensifier tube with significantly improved swallowing efficiency.
この発明は、Ａ１１２０３ をを布したバスケット状コ
イル円にｐｔ加工のデートラ収納し、史にこのボート内
にＩｎ球を入れて加熱蒸発させ。In this invention, a basket-shaped coil made of A11203 is housed in a PT-treated Detra, and an In bulb is placed inside the boat and heated to evaporate.
Ｃ８１入力螢光体肋上にＩｎ２０ｑ膜を形成するよう（
二した減増倍管用人力出１の製造方法である。To form an In20q film on the C81 input phosphor rib (
This is a method for producing a manual output for a demultiplier tube.
〔発明の実施ＶＡｊ ）
この発明による像増倍管用入力面の製造方法では、従来
と同様に第１図に示す如く厚さ０．５ｉ１１Ｊ＋ｌ〜１
．０日１０Ａｌ基板１上に厚さ１８０〜２００μｍのＣ
８工入力螢光体層２１ｒ、形成する。そして。[Practice of the Invention VAj] In the method of manufacturing an input surface for an image intensifier tube according to the present invention, as shown in FIG.
．． Day 0 10 C with a thickness of 180 to 200 μm on Al substrate 1
8-step phosphor layer 21r is formed. and.
このＣ８■入力螢光体１輪２の凹凸のある表面にＩｎ、
０３膜（図示せず）を形成する。In on the uneven surface of this C8 ■ input phosphor ring 2,
03 film (not shown) is formed.
この場合、この発明では第２図に示すようにＡＩＪｔＯ
ｓ’に塗布したバスケット状コイル３円に厚さ１０〜５
０μｍのＰｔ箔加工の、１／−ト４を収納し、更にこの
ボート４円（二Ｉｎ球５を入れて加熱蒸発させ、 Ｉｎ
２Ｏ３膜を形成している。尚。In this case, in this invention, as shown in FIG.
Thickness 10-5 on 3 circles of basket-shaped coil applied to s'
A 1/- boat 4 made of 0 μm Pt foil is stored, and this boat is heated and evaporated with 4 yen (two In bulbs 5).
A 2O3 film is formed. still.
Ｐｔ箔の加工は所定の型の上でバーナーで加熱し、へン
ホーで軽く叩くだけで容易に成形づき。Processing of Pt foil can be easily formed by heating it with a burner on a specified mold and tapping it lightly with a hammer.
Ｐｔは回収し丙午すれは損失はない。Pt will be recovered and there will be no loss by the end of the day.
このようにして形成されたＩ ｎ ２０ Ｂ膜上に、更
に光電面全通常の方法で形成すれは十分に導電性全有し
た入力面が完成する。A photocathode is further formed on the In 20 B film thus formed by a conventional method to complete an input surface having sufficient electrical conductivity.
この発明によれは、バスケット状コイル３とＩｎ球５と
の間にＰｔ箔加工のボート４奮介在させているので、Ｉ
ｎ＄５とコイル３のｈｌｌ、０゜が分離した状態でＩｎ
球５が蒸発する。この結果、従来、残っていたＩｎ球５
を最後まで蒸発させることができ、蒸石効率が著しく向
上する。According to this invention, since the boat 4 made of Pt foil is interposed between the basket-shaped coil 3 and the In ball 5, the I
In a state where n$5 and coil 3 hll, 0° are separated
Sphere 5 evaporates. As a result, the remaining In bulb 5
can be evaporated to the end, significantly improving the steaming efficiency.
第１図は像増倍管用入力面の要部を示す断面図、第２図
はこの発明の製造方法で用いるコイル、ボート及びＩｎ
球を示す概陥余１視図である。
１・・・Ａｌ基板、２・・・ＣＢＩ入力螢光体層、３・
・・コイル、４・・・ボート、５・−Ｉ ｎ ｇ。
出願人代理人 弁理士 鈴 江 武 彦第１図FIG. 1 is a sectional view showing the main part of the input surface for an image intensifier, and FIG. 2 is a sectional view showing the coil, boat, and In
FIG. 2 is a general perspective view of the ball. DESCRIPTION OF SYMBOLS 1... Al substrate, 2... CBI input phosphor layer, 3...
...Coil, 4...Boat, 5.-Ing. Applicant's agent Patent attorney Takehiko Suzue Figure 1
Claims (1)
囲を順次桐一層形成する微増倍管用入力面の製造方法に
おいて。 内にＩｎ球を入れて加熱蒸発させ、上記ｃ８■８■入力
螢光上に上記Ｉｎ２Ｏ，膜を形成すること葡特徴とする
像増倍管用入力面の製造方法。[Claims:] A method for manufacturing an input surface for a micromultiplier tube, in which a C8I input phosphor layer, an In2O3 film, and a light layer are sequentially formed on a substrate. A method for producing an input surface for an image intensifier tube, comprising: placing an In bulb inside the tube and heating and evaporating it to form the In2O film on the input fluorescent light.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11933383A JPS6010543A (en) | 1983-06-30 | 1983-06-30 | Production of input surface for image multiplier tube |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11933383A JPS6010543A (en) | 1983-06-30 | 1983-06-30 | Production of input surface for image multiplier tube |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6010543A true JPS6010543A (en) | 1985-01-19 |
Family
ID=14758880
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11933383A Pending JPS6010543A (en) | 1983-06-30 | 1983-06-30 | Production of input surface for image multiplier tube |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6010543A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06341586A (en) * | 1990-11-23 | 1994-12-13 | Rasmussen Gmbh | Duplex type joint for connecting pipe |
-
1983
- 1983-06-30 JP JP11933383A patent/JPS6010543A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06341586A (en) * | 1990-11-23 | 1994-12-13 | Rasmussen Gmbh | Duplex type joint for connecting pipe |
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