JPS60102098A - Ultrasonic wave probe - Google Patents

Abstract

PURPOSE:To attain uniform productivity and quality by making a reflecting electrode formed to the ultrasonic wave vibrator conductive to a lead electrode formed to the reinforced plate by means of the wire bonding method to eliminate fault of conduction due to adhering of a foreign material such as solder. CONSTITUTION:The ultrasonic wave vibrator 1 is bonded with heating to a back plate 4 and reinforced plates 20, 21 are provided to both sides of the back plate 4 in order to prevent thermal deformation of the back plate 4. The signal extraction electrodes 20A, 21A are provided to use the ultrasonic wave vibrator 1 as a transmission/reception vibrator at the outside of the outerface of the reinforced plates 20, 21, and the electrode 20A and the electrode of each vibrator formed by dividing minutely the ultrasonic vibrator 1 are connected. Since the electrodes of each vibrator and the extraction electrodes 20A are connected by the wire bonding of a lead wire 40, no foreign material such as solder is not adhered and the leads of the same condition are connected to each vibrator, the vibrating conditions of each vibrator are the same and the ultrasonic wave of uniform strength is outputted.

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical field to which the invention pertains] The present invention relates to an ultrasonic probe, and particularly to an ultrasonic probe that is frequently used for precision measurement in medical equipment and other devices.

[Prior art and its problems]

There are various kinds of radial elements that can be loaded into an ultrasonic probe, such as disc-shaped ones and rectangular ones. On the other hand, as ultrasonic probes for medical use and precision measurements, there are many that precisely measure the root measurement object over a wide range, process the changes in signals, and record them on recording paper. Therefore, in order to improve the measurement accuracy, it is necessary to satisfy various requirements, such as good resolution or approximately average level ultrasonic output from the entire output side. .

FIGS. 1 to 2 show an example of a conventionally used probe for medical or precision measurement.

In this conventional example, a high-frequency temporary transducer is first used with the intention of improving resolution, and a matching layer 3 and an acoustic lens 2 are used to improve the ultrasonic output and prevent beam fractionation.
are installed on each. Further, on the rear side of the vibrator 1, a back &4 as a vibrator holder is fixedly attached. Note that 5 indicates a case.

As shown in FIGS. 3 to 5, the vibrator 1 has electrodes 11 and 12 attached to a piezoelectric element 10 made of titanium zirconate or the like in the shape shown in the figure, and a lead wire 13. .14 is often used in Issei with soldering as shown in each figure. In this case, the &move l is the 6th
As shown in the figure, books are used that have been cut into pieces by the guising process.

However, each of the transducers IA, IA, . Since the value is 0.021 mπm], the transducers IA are adjacent to each other due to the soldering process.

Because some of the IA's were short-circuited and it was difficult to uniformly attach the lead wires 13 and 14 to each transducer, the work required a lot of skill. Not only was it necessary, but it was also inconvenient in terms of productivity.

[Purpose of the invention]

The present invention is an ultrasonic probe for precision measurements that improves the disadvantages of the prior art, improves productivity and uniformity of quality, and is capable of outputting ultrasonic waves of approximately uniform intensity from the entire surface of the transducer. Its purpose is to provide all.

[Summary of the invention]

Therefore, in the present invention, in an ultrasonic probe in which the transducer is fixed to the entire back plate of the transducer, the transducer is segmented by a guising process, and a matching layer and a lens body are laminated on the outer surface of the transducer. A reinforcing plate is fixed to both sides of the back plate, a plurality of electrodes for signal extraction are formed on this reinforcing plate, and electrical conduction is established between these electrodes and the folded-over electrode at the end of the vibrator side by wire bonding, etc. The purpose of the present invention is to achieve the above object by employing the following configuration.

[Embodiments of the invention]

Hereinafter, a first embodiment of the present invention will be described based on FIGS. 7 to 11.

In these figures, l indicates an ultrasonic transducer as in the case of the conventional example described above, and 4 indicates a back plate as a transducer holder. The ultrasonic transducer 1 may be made of a piezoelectric element such as zirconate lead titanate, and the back plate 4 may be made of the same plastic or rubber material as the conventional example described above. used as a material. This back plate 4.

Although both corners 4A and 4B of the surface on which the ultrasonic transducer 1 is mounted are chamfered as shown in the figure, they may not necessarily be processed in this way. Furthermore,
Reinforcement plates 20 and 21 are fixed to both sides of the back plate 4. The reinforcing plates 20 and 21 are made of an elastic member 1 having a small coefficient of thermal expansion, such as a metal oxide. 1, each reinforcing plate 20
, 21 is provided with a signal extraction polarization 20A for using the first sonic wave transducer 1 as a transmitting/receiving transducer.

20 people, . . . , 21A, 21A, . . . are provided at multiple locations.

Then, the reinforcing plates 20 and 21 come into contact with the back plate 4 as shown by arrows A and A in FIG. It is designed to be heated at ft. Therefore, thermal deformation of the back plate 4 is suppressed by the action of the reinforcing plate 20.21, so that the ultrasonic transducer 1 maintains a completely flat state and is firmly fixed to the back plate 4. FIG. 9 shows a state in which the ultrasonic transducer 1 is divided into ffJl by guising processing after the ultrasonic transducer 1 is fixed. In this case, 6 oscillator IA.

The dimension l of IA, . . . and the distance S between them are set to be the same as in the conventional one. In addition, each of these oscillators IA
, lA, . . . are formed in advance as shown in FIG. The piezoelectric element 10 which is notched has its end 10A, IOB
The rounding process is completed, which results in the folded electrode surface 31
The adhesion strength of A and 32 A is significantly enhanced. According to the equation, the child IA of this vibration L1 is located at the effective vibration area U or the inner center j of the entire piezoelectric element 10-1 of the vibrator IA.
The directional beam is also set so that it is always on the center line of the probe.

Figures 10 and 11 show Pi! The folded electrode surfaces 31A, 32A of the J-Kiya vibrator IA and the lead electrodes 20A, 208, . show. As a result, the inconveniences associated with conventional non-tapering have been significantly improved. In this case, in the non-embodiment, the vibrators IA are divided into blocks into multiple groups and are formed so that a voltage pulse of a predetermined frequency is applied. The valley information extraction electrode on the reinforcement plate 21 side 21A, 21A,...V
Even if you get stuck, it's exactly the same. Each of the lead wires 40, 41 formed by this wire bonding is installed so as to be bent as a whole toward the back plate 4 as shown in the figure, so that the lead wires 40, 41 in the subsequent process. 41 breakaway accidents have been significantly reduced.

Equably, each of the lead wires 40 and 41 is entirely covered with a molding member 50 as shown in FIG. , light-reflecting electrodes 31A, 32
4Lt missing due to foreign matter in 8 parts! There is an advantage that this can also be eliminated. Furthermore, since the i+1 leads 40 and 41 are arranged along the back plate 4 as shown in the figure, a small amount of molding member 50 is also sufficient to adhere, and this prevents unnecessary foreign matter from attaching to each vibrator IA. The advantage is that there will be no more 4F.

A second embodiment is shown in Fig. 12 of the Era. This example has a lead win of 40.41% - the same No. 415 extraction electrode 2oA, t is conductive to 21A, multiple θ oscillators IA, multiple oscillators IA in groups of seven are shown in the overall diagram. Glue it with a contact-type separator using dielectric adhesive 42. This knitting and wire bonding of the lead wires 40 may be omitted to two wires as shown in the figure, for example. The other configurations are the same as those of the first embodiment described above.

In addition to having the same function and effect as the 7ζ first embodiment described above, the wire bonding work 1
Is it an advantage that 1tjj can be made even shorter?

〔Effect of the invention〕

As described above, according to the invention, the ultrasonic transducer formed into a rectangular shape is fixed to a plate, and then the ultrasonic transducer is divided into pieces by the D/F marking process. In an ultrasonic probe in which a matching layer and a lens body are laminated on the outer surface of an ultrasonic probe, reinforcing plates are fixed on both sides of the J register board in the longitudinal direction. The reinforcing plate is provided with a plurality of signal extraction electrodes that are electrically connected to an external circuit, and the folded electrodes formed in advance on the ultrasonic transducer and the signal extraction electrodes are electrically connected by a wire bonding method. composition? This eliminates the disadvantages of conventional technology associated with soldering lead wires.
Therefore, there is no conduction caused by the adhesion of solder or other foreign matter and the contact between the vibrators, which is the case in the past. Since the lead wires are attached under exactly the same conditions, the vibration conditions are the same for all six transducers. Therefore, it is possible to output ultrasonic waves of uniform intensity overall at this point, and at the same time, the working time is reduced. This results in an unprecedented and excellent effect of significantly shortening the heating time, further improving quality, and thereby sufficiently improving medium pressure properties.

In addition, by bending the valley lead wire formed by the wire bonding described above to the back plate (11. Even less;
At the same time, it is possible to provide an unprecedented and excellent ultrasonic probe that requires only a small amount of molding material and has significantly increased overall durability.

[Brief explanation of the drawing]

Figure 1 is an external view showing a conventional example, and Figure 2 is from ■ to ■ in Figure 1.
3 to 6 are explanatory diagrams showing conventional examples, FIG. 7 is an exploded perspective view showing the first embodiment of the present invention, and FIG. 8 is a cross-sectional view taken before dicing. FIG. 9 is a perspective view showing the state of the ultrasonic lifter after guising processing; FIG. 10 is a perspective view showing the state of lead wire mounting by wire bonding; FIG. 11 is a perspective view showing the sonic vibrator; 1j, swing in figure 10! FIG. 12 is a longitudinal sectional view including the iiυ child portion and a perspective view showing the second embodiment. 1. IA... Ultrasonic transducer, 2... Lens body, 3.
... Matching layer, 4... Back plate, 20.21... Reinforcement plate,
20A, 21A...Signal extraction electrode, 31A, 32°
Person: Folded back, 50: Mold member. Figure 1 Figure 2 Figure 1I 10 ',,'> Figure 6 Figure 7 Figure 6! Figure 9

Claims (2)

[Claims] (1) After fixing the rectangular ultrasonic transducer to the back plate, the ultrasonic transducer is completely segmented by a guising process, and a matching layer and lens are placed on the outer surface of each ultrasonic transducer thus formed. In an ultrasonic probe formed by laminating bodies, reinforcing plates are fixed to both sides in the longitudinal direction of the back plate, and the reinforcing plates are provided with a plurality of signal extraction electrodes that are electrically connected to an external circuit, An ultrasonic probe characterized in that the pre-formed folded electrode of the ultrasonic transducer V and the signal extraction electrode are electrically connected by a wire bonding method. (2) After fixing the rectangular ultrasonic transducer to the back plate, the ultrasonic transducer is divided into one phase by a guising process, and a matching layer is formed on the outer surface of each ultrasonic transducer. In an ultrasonic probe formed by laminating a glass body and a glass body, 1tCFil on both sides in the longitudinal direction of the back plate.
In addition to firmly fixing the reinforcing plate, a plurality of signal extraction electrodes are provided on the reinforcing plate, and four signal extraction electrodes are connected to the two external circuits. fl
The folded electrodes formed in advance on the ultrasonic attenuator and the signal extraction electrodes are electrically connected by a wire bonding method, and at the same time, each lead wire is bent toward the back plate, and the entire lead wire portion is An ultrasonic probe characterized by being coated with a mold.