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JPS60100148U - polishing equipment - Google Patents

polishing equipment

Info

Publication number
JPS60100148U
JPS60100148U JP1983192375U JP19237583U JPS60100148U JP S60100148 U JPS60100148 U JP S60100148U JP 1983192375 U JP1983192375 U JP 1983192375U JP 19237583 U JP19237583 U JP 19237583U JP S60100148 U JPS60100148 U JP S60100148U
Authority
JP
Japan
Prior art keywords
polishing
polishing plate
arm
polishing equipment
abstract
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1983192375U
Other languages
Japanese (ja)
Inventor
重伸 和田
原田　藤男
Original Assignee
日本電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電気株式会社 filed Critical 日本電気株式会社
Priority to JP1983192375U priority Critical patent/JPS60100148U/en
Publication of JPS60100148U publication Critical patent/JPS60100148U/en
Pending legal-status Critical Current

Links

Landscapes

  • Grinding Of Cylindrical And Plane Surfaces (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は従来の研摩装置の一例を示す正面図である。第
２図は本考案の研摩装置の一実施例を示す正面図である
。 図において１０１は本体、１０２は研摩皿、１０３は容
器、１０４は研摩液、１０５は揺動アーム、１０６は揺
動軸、１０７はアーム、ｉｏｓは支点、１０９は保持棒
、１１０は研摩ホルダー、１１１は半導体基板、２０１
は押え板、２０２はおもり棒、２０３はおもりを示す。FIG. 1 is a front view showing an example of a conventional polishing apparatus. FIG. 2 is a front view showing an embodiment of the polishing apparatus of the present invention. In the figure, 101 is the main body, 102 is a polishing plate, 103 is a container, 104 is a polishing liquid, 105 is a rocking arm, 106 is a rocking shaft, 107 is an arm, ios is a fulcrum, 109 is a holding rod, 110 is a polishing holder, 111 is a semiconductor substrate, 201
202 is a weight bar, and 203 is a weight.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 回転する研摩皿と被研摩物を接触させて被研摩物の研摩
加工を行なう装置において、支点によって保持された水
平軸のまわりに回転可能なアームとアームの先端に被研
摩物を接着した研摩ホルダーを研摩皿に対向させて保持
する機構とアニムの他方の端に位置調整可能なおもりを
備えることを特徴とする研摩装置。A polishing holder that has an arm that can rotate around a horizontal axis held by a fulcrum and an object to be polished attached to the tip of the arm, in a device that polishes an object by bringing a rotating polishing plate into contact with the object. A polishing device comprising: a mechanism for holding the polishing plate facing the polishing plate; and a weight whose position can be adjusted at the other end of the polishing plate.
JP1983192375U 1983-12-14 1983-12-14 polishing equipment Pending JPS60100148U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1983192375U JPS60100148U (en) 1983-12-14 1983-12-14 polishing equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1983192375U JPS60100148U (en) 1983-12-14 1983-12-14 polishing equipment

Publications (1)

Publication Number Publication Date
JPS60100148U true JPS60100148U (en) 1985-07-08

Family

ID=30414030

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1983192375U Pending JPS60100148U (en) 1983-12-14 1983-12-14 polishing equipment

Country Status (1)

Country Link
JP (1) JPS60100148U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62140764A (en) * 1985-12-14 1987-06-24 Daikin Ind Ltd floating type tool
JPH02144839A (en) * 1988-11-25 1990-06-04 Oyo Gijutsu Kenkyusho:Kk Sample polishing device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62140764A (en) * 1985-12-14 1987-06-24 Daikin Ind Ltd floating type tool
JPH02144839A (en) * 1988-11-25 1990-06-04 Oyo Gijutsu Kenkyusho:Kk Sample polishing device

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