JPS5994056A - Humidity sensor - Google Patents
Humidity sensorInfo
- Publication number
- JPS5994056A JPS5994056A JP57205079A JP20507982A JPS5994056A JP S5994056 A JPS5994056 A JP S5994056A JP 57205079 A JP57205079 A JP 57205079A JP 20507982 A JP20507982 A JP 20507982A JP S5994056 A JPS5994056 A JP S5994056A
- Authority
- JP
- Japan
- Prior art keywords
- humidity sensor
- humidity
- electrolyte
- moisture
- org
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims abstract description 17
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims abstract description 16
- 239000003792 electrolyte Substances 0.000 claims abstract description 14
- 239000011521 glass Substances 0.000 claims abstract description 14
- 150000001412 amines Chemical class 0.000 claims abstract description 12
- 238000001514 detection method Methods 0.000 claims abstract description 6
- 239000011347 resin Substances 0.000 claims description 9
- 229920005989 resin Polymers 0.000 claims description 9
- 239000002253 acid Substances 0.000 claims description 8
- 125000000524 functional group Chemical group 0.000 claims description 7
- 239000000203 mixture Substances 0.000 abstract description 8
- JOXIMZWYDAKGHI-UHFFFAOYSA-N toluene-4-sulfonic acid Chemical compound CC1=CC=C(S(O)(=O)=O)C=C1 JOXIMZWYDAKGHI-UHFFFAOYSA-N 0.000 abstract description 6
- 239000011259 mixed solution Substances 0.000 abstract description 5
- 239000004925 Acrylic resin Substances 0.000 abstract description 3
- 229920000178 Acrylic resin Polymers 0.000 abstract description 3
- 238000000034 method Methods 0.000 abstract description 3
- 239000000126 substance Substances 0.000 abstract description 2
- 230000000630 rising effect Effects 0.000 abstract 1
- 238000007740 vapor deposition Methods 0.000 abstract 1
- 238000001723 curing Methods 0.000 description 4
- 239000010408 film Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 2
- OMIGHNLMNHATMP-UHFFFAOYSA-N 2-hydroxyethyl prop-2-enoate Chemical compound OCCOC(=O)C=C OMIGHNLMNHATMP-UHFFFAOYSA-N 0.000 description 2
- HRPVXLWXLXDGHG-UHFFFAOYSA-N Acrylamide Chemical compound NC(=O)C=C HRPVXLWXLXDGHG-UHFFFAOYSA-N 0.000 description 2
- 239000004372 Polyvinyl alcohol Substances 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- VOZRXNHHFUQHIL-UHFFFAOYSA-N glycidyl methacrylate Chemical compound CC(=C)C(=O)OCC1CO1 VOZRXNHHFUQHIL-UHFFFAOYSA-N 0.000 description 2
- 239000000178 monomer Substances 0.000 description 2
- 229920002451 polyvinyl alcohol Polymers 0.000 description 2
- 230000004043 responsiveness Effects 0.000 description 2
- IMNIMPAHZVJRPE-UHFFFAOYSA-N triethylenediamine Chemical compound C1CN2CCN1CC2 IMNIMPAHZVJRPE-UHFFFAOYSA-N 0.000 description 2
- XFNJVJPLKCPIBV-UHFFFAOYSA-N trimethylenediamine Chemical compound NCCCN XFNJVJPLKCPIBV-UHFFFAOYSA-N 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- DKEGCUDAFWNSSO-UHFFFAOYSA-N 1,8-dibromooctane Chemical compound BrCCCCCCCCBr DKEGCUDAFWNSSO-UHFFFAOYSA-N 0.000 description 1
- UWFRVQVNYNPBEF-UHFFFAOYSA-N 1-(2,4-dimethylphenyl)propan-1-one Chemical compound CCC(=O)C1=CC=C(C)C=C1C UWFRVQVNYNPBEF-UHFFFAOYSA-N 0.000 description 1
- ZMARGGQEAJXRFP-UHFFFAOYSA-N 1-hydroxypropan-2-yl 2-methylprop-2-enoate Chemical compound OCC(C)OC(=O)C(C)=C ZMARGGQEAJXRFP-UHFFFAOYSA-N 0.000 description 1
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 1
- GWZMWHWAWHPNHN-UHFFFAOYSA-N 2-hydroxypropyl prop-2-enoate Chemical compound CC(O)COC(=O)C=C GWZMWHWAWHPNHN-UHFFFAOYSA-N 0.000 description 1
- BQZJOQXSCSZQPS-UHFFFAOYSA-N 2-methoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OC)C(=O)C1=CC=CC=C1 BQZJOQXSCSZQPS-UHFFFAOYSA-N 0.000 description 1
- AXYQEGMSGMXGGK-UHFFFAOYSA-N 2-phenoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(=O)C(C=1C=CC=CC=1)OC1=CC=CC=C1 AXYQEGMSGMXGGK-UHFFFAOYSA-N 0.000 description 1
- CPELXLSAUQHCOX-UHFFFAOYSA-M Bromide Chemical compound [Br-] CPELXLSAUQHCOX-UHFFFAOYSA-M 0.000 description 1
- RPNUMPOLZDHAAY-UHFFFAOYSA-N Diethylenetriamine Chemical compound NCCNCCN RPNUMPOLZDHAAY-UHFFFAOYSA-N 0.000 description 1
- PIICEJLVQHRZGT-UHFFFAOYSA-N Ethylenediamine Chemical compound NCCN PIICEJLVQHRZGT-UHFFFAOYSA-N 0.000 description 1
- WOBHKFSMXKNTIM-UHFFFAOYSA-N Hydroxyethyl methacrylate Chemical compound CC(=C)C(=O)OCCO WOBHKFSMXKNTIM-UHFFFAOYSA-N 0.000 description 1
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 1
- 238000003848 UV Light-Curing Methods 0.000 description 1
- XSQUKJJJFZCRTK-UHFFFAOYSA-N Urea Chemical compound NC(N)=O XSQUKJJJFZCRTK-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 239000004202 carbamide Substances 0.000 description 1
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 1
- 125000002843 carboxylic acid group Chemical group 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010828 elution Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 125000003055 glycidyl group Chemical group C(C1CO1)* 0.000 description 1
- -1 hexadiamine Chemical compound 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- KYZHGEFMXZOSJN-UHFFFAOYSA-N isobutyl benzoate Chemical compound CC(C)COC(=O)C1=CC=CC=C1 KYZHGEFMXZOSJN-UHFFFAOYSA-N 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
- RPQRDASANLAFCM-UHFFFAOYSA-N oxiran-2-ylmethyl prop-2-enoate Chemical compound C=CC(=O)OCC1CO1 RPQRDASANLAFCM-UHFFFAOYSA-N 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 125000001174 sulfone group Chemical group 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000009281 ultraviolet germicidal irradiation Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/121—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Non-Adjustable Resistors (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Abstract
Description
【発明の詳細な説明】
この発明はｐ−）ルエンスルホン酸と有機アミンよシな
る混合物を電解質として含有する有機高分子物質を感湿
部材とした湿度センサに関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a humidity sensor using an organic polymeric material as a moisture sensing member containing a mixture of p-)luenesulfonic acid and an organic amine as an electrolyte.
従来、スルホン基やカルボン酸基などの電解性官能基を
有する単量体、化合物をポリビニルアルコールなどの吸
湿性樹脂に混入させて、これを絶縁基板上に焼付ける方
法で湿度センサが得られていた。Conventionally, humidity sensors have been obtained by mixing monomers or compounds with electrolytic functional groups such as sulfone groups or carboxylic acid groups into a hygroscopic resin such as polyvinyl alcohol, and then baking this onto an insulating substrate. Ta.
しかしながら、この方法では感湿部材を焼付けするのに
少なくとも１２０℃で３０分以上の時間がかかるという
製造上の問題のほか、ポリビニルアルコールが水に溶け
るため感湿性が低下し、究極的にはセンサとしての機能
が失なわれるなどの欠点があった。However, this method has manufacturing problems in that it takes at least 30 minutes or more at 120°C to bake the moisture-sensitive member, and because polyvinyl alcohol dissolves in water, moisture sensitivity decreases, and ultimately the sensor There were drawbacks such as loss of functionality.
この発明は上記の点に鑑みて検討の結果、ｐ−ト、ルエ
ンスールホン酸と有機アミンの混合物を電解質として重
合性官能基を有する吸湿性樹脂とともにアルコールに混
合して、これを感湿部材として使用することによシ、薄
膜であシながら高湿度においても電解質の溶出がなく、
シかも抵抗値が低く感湿応答性にすぐれた湿度センサが
得られることを見出し、この発明に至ったものである。As a result of studies in view of the above points, this invention was developed by mixing a mixture of pt, luenesulfonic acid and an organic amine with alcohol as an electrolyte along with a hygroscopic resin having a polymerizable functional group, and using this as a moisture-sensitive member. As a result, there is no electrolyte elution even in high humidity, even though the film is thin.
The inventors have discovered that a humidity sensor with a low resistance value and excellent humidity responsiveness can be obtained, leading to the present invention.
即ち、この発明はｐ−）ルエンスルホン酸ト有機アミン
の混合物を電解質とし、該電解質をその支持物質である
重合性官能基を有する吸湿性樹脂とともにアルコールに
溶かした混合溶液を感湿部材として、一対の検出電極を
形成したガラス基板上に塗布し、紫外線硬化によって硬
化感湿層を構成した仁とを特徴とするものである。That is, the present invention uses a mixture of organic amines of p-)luenesulfonic acid as an electrolyte, and uses a mixed solution in which the electrolyte is dissolved in alcohol together with a supporting material of a hygroscopic resin having a polymerizable functional group as a moisture-sensitive member. It is characterized by a moisture-sensitive layer that is coated on a glass substrate on which a pair of detection electrodes are formed and cured by ultraviolet curing.
この発明で電解質としては、さきＫも述べたよ’５Ｋｐ
−）ルエンスルホン酸と有機アミンの混合物を用いるも
のであシ、有機アミンには例えばエチレンジアミン、ト
リエチルアミン、トリエチレンジアミン、トリメチレン
ジアミン、ヘキサジアミン、ジエチレントリアミンや尿
素、アクリルアミドなどが適当である。In this invention, the electrolyte is 5Kp as mentioned earlier.
-) A mixture of luenesulfonic acid and an organic amine is used. Suitable organic amines include, for example, ethylenediamine, triethylamine, triethylenediamine, trimethylenediamine, hexadiamine, diethylenetriamine, urea, and acrylamide.
そしてこの電解質は、重合性官能基を有する吸湿性樹脂
とともにアルコール混合溶液とする時にＴ）−）ルエン
スルホン酸と有機アミンとをその適正ｔを個々に加えて
やっても差支えない０次にこの電解質の支持物質となる
重合性官能基をを有する吸湿性樹脂としては、グリシジ
ル基、水酸基、カルボキシル基などの官能基を有するア
クリル系樹脂が適当である。When this electrolyte is made into an alcohol mixed solution together with a hygroscopic resin having a polymerizable functional group, T)-)luenesulfonic acid and an organic amine may be added individually to the appropriate amount. As the hygroscopic resin having a polymerizable functional group that serves as a support material for the electrolyte, an acrylic resin having a functional group such as a glycidyl group, a hydroxyl group, or a carboxyl group is suitable.
そのような樹脂を構成する単量体としては、例えばグリ
シジルアクリレート、グリシジルメタクリレート、β−
メチルグリシジルメタクリレート、２−ヒドロキシエチ
ルアクリレート、２−ヒドロキシエチルメタクリレート
、２−ヒドロキシプロピルアクリレート、２−ヒドロキ
シエチルアクリレート、２−ヒドロキシ−１−メチルエ
チルメタクリレート、アクリル酸、メタクリル酸などか
あシ、それらの１種またはそれ以上を適宜用いればよい
。また他の共重合可能なアクリル酸アルキルエステル、
メタクリル酸アルキルエステルなどとの化合物であって
もよい。Monomers constituting such resins include, for example, glycidyl acrylate, glycidyl methacrylate, β-
Methyl glycidyl methacrylate, 2-hydroxyethyl acrylate, 2-hydroxyethyl methacrylate, 2-hydroxypropyl acrylate, 2-hydroxyethyl acrylate, 2-hydroxy-1-methylethyl methacrylate, acrylic acid, methacrylic acid, etc. One or more types may be used as appropriate. Also other copolymerizable acrylic acid alkyl esters,
It may also be a compound with methacrylic acid alkyl ester or the like.
次いで、上記の構成からなる樹脂とｐ−）ルエンスルホ
ン酸および有機アミンの電解質はそれらの共通溶剤であ
るアルコールに溶解する。。Next, the resin having the above structure and the electrolyte of p-)luenesulfonic acid and organic amine are dissolved in alcohol, which is a common solvent thereof. .
アルコールとしては揮発性がよく、また絶縁基板である
ガラス板にも濡れやすいエタノールが好ましい。As the alcohol, ethanol is preferred because it has good volatility and also easily wets the glass plate, which is an insulating substrate.
このアルコール溶液の感湿部材は、真空蒸着でＡｕ、
Ｎｉ、 Ｃｒなどの電極を形成したガラス基板上に塗布
され、その後紫外線にて硬化される。This alcohol solution moisture-sensitive member is made of Au by vacuum deposition.
It is applied onto a glass substrate on which electrodes such as Ni and Cr are formed, and then cured with ultraviolet light.
紫外線硬化はベンゾインメチルエーテル、イソグロボキ
シベンゾイン、ｐ−ペンソイルベンジルブロミト、ベン
ゾインフェニルエーテル、ベンゾインイソブチルエーテ
ルなどの紫外線増感剤を用いて、数１０秒の紫外線照射
によって行なわれる。Ultraviolet curing is carried out by UV irradiation for several tens of seconds using an ultraviolet sensitizer such as benzoin methyl ether, isogloboxybenzoin, p-pensoylbenzyl bromide, benzoin phenyl ether, benzoin isobutyl ether.
なお、基板にガラスを用いたのは、この紫外線硬化は塗
布した感湿部材の表面から起シ、内部まで充分硬化され
ないことも考えられるので、ガラス基板裏面から再度紫
外線照射を行えばガラス基板を通して膜の内部をも硬化
させることが可能であるためである。The reason for using glass as the substrate is that this ultraviolet curing occurs from the surface of the coated moisture-sensitive member and may not be sufficiently cured to the inside, so if ultraviolet rays are irradiated again from the back of the glass substrate, it will pass through the glass substrate. This is because it is possible to harden the inside of the film as well.
そして硬化を促進したシ、得られる膜の強度を高めたい
時には上記のアルコール樹脂溶液中にペンタエリスリト
ール−ポリアクリライトやトリメチロールプロパン−ポ
リアクリライトなどを用いれはよいが、その量はあまシ
多いと膜が割れたシ感湿部材として硬くなりすぎて応答
性が劣るなどの欠陥がでるので極く少、量にとどめるこ
とが好ましい。If you want to accelerate the curing or increase the strength of the resulting film, you can use pentaerythritol-polyacrylite or trimethylolpropane-polyacrylite in the alcohol resin solution, but the amount is too large. It is preferable to limit the amount to an extremely small amount since cracks in the film may cause defects such as the moisture-sensitive member becoming too hard and having poor responsiveness.
以下この発明をその一実施例を示す図面に基づいて説明
する。The present invention will be explained below based on the drawings showing one embodiment thereof.
第１図はこの発明にかかる湿度センサの構造例を示す断
面図、第２図はその斜視図である。FIG. 1 is a sectional view showing an example of the structure of a humidity sensor according to the present invention, and FIG. 2 is a perspective view thereof.
図においてｌはガラス基板、２はガラス基板上に設けた
一対の検出電極であシ、これはガラス板上にＡｕ、 Ｎ
ｉ１Ｃｒ等を真空蒸着によシ設けたものである。そして
３はｐ−トルエンスルホン酸と有機アミンの混合物から
なる電解質を含有した有機高分子物質を用いて形成した
硬化感湿層である。In the figure, l is a glass substrate, and 2 is a pair of detection electrodes provided on the glass substrate.
I1Cr or the like is provided by vacuum deposition. 3 is a cured moisture-sensitive layer formed using an organic polymer material containing an electrolyte consisting of a mixture of p-toluenesulfonic acid and an organic amine.
次に、このような構成からなる湿度センサの作成の一例
についてのべると、重量比にてエチレングリコールジグ
リシジルエーテル １．０メタクリル酸グリシジル
１．Ｏｐ−トルエンスルホン酸
０．８アクリルアミド
０゜０３ペンタエリスリトール−ポルア
クリライト０．４エタノール
５．０よシなる配合のエタノール混合溶液に紫外線増感
剤としてベンゾイルイソブチルエーテルを重量比にて０
．０３加え、これを検出ｔａＺを形成しであるガラス基
板ｌ上に塗布したのち、紫外１ｇ ａ Ｋｗを２０秒間
照射して硬化感湿層３を形成した０かくして得られた湿
度センサについて相対湿度−抵抗特性を測定したところ
第３図に示すような結果が得られ、湿度上昇に伴って抵
抗減少特性を写し、特に低湿度における特性の良好な湿
度センナが得られていることが認められた。Next, an example of the production of a humidity sensor having such a structure will be described.The weight ratio is ethylene glycol diglycidyl ether: 1.0 glycidyl methacrylate: 1. Op-toluenesulfonic acid 0.8 acrylamide
0゜03 Pentaerythritol-Poracrylite 0.4 Ethanol
Add benzoyl isobutyl ether as an ultraviolet sensitizer to an ethanol mixed solution with a weight ratio of 0 to 5.0.
．． In addition, this was coated on a glass substrate l on which a detection taZ was formed, and then irradiated with ultraviolet 1 g a Kw for 20 seconds to form a cured humidity sensitive layer 3.The relative humidity of the thus obtained humidity sensor was - When the resistance characteristics were measured, the results shown in FIG. 3 were obtained, showing a resistance decreasing characteristic as the humidity increased, and it was confirmed that a humidity sensor with particularly good characteristics at low humidity was obtained.
以上のように、この発明の有機高分子物質からなる湿度
センサは、ｐ−）ルエンスルホン酸と有機アミンの混合
物を電解質として用い、これを重合可能なアクリル系樹
脂とのアルコール混合溶液としてガラス基板上に塗布し
、紫外線硬化によって得たものであって、
（１） 感湿層を紫外線硬化によ多形成するので生産
が短時間で行なえ、能率的である。As described above, the humidity sensor made of an organic polymeric substance of the present invention uses a mixture of p-)luenesulfonic acid and an organic amine as an electrolyte, and applies this to a glass substrate as an alcohol mixed solution with a polymerizable acrylic resin. (1) Since multiple moisture-sensitive layers are formed by UV curing, production can be carried out in a short time and is efficient.
（２）感湿部材をアルコール溶液として使用するため揮
発性、滴れ性がよく、薄膜とすることができる０
（３）抵抗値が低く、感湿応答性がよく、水分の吸湿に
よる再現性が得られる。(2) Since the moisture-sensitive member is used as an alcohol solution, it has good volatility and dripping properties, and can be made into a thin film. (3) Low resistance value, good moisture-sensing response, and reproducibility due to moisture absorption. is obtained.
（４） 耐汚染性にすぐれている０
（５） ガラス基板を用いているので感湿部材の紫外線
硬化を底裏両面から行なうことができ、従って強固な硬
化感湿ノーが得られる。(4) Excellent stain resistance (5) Since a glass substrate is used, the moisture-sensitive member can be cured with ultraviolet light from both sides of the bottom and back, and therefore a strong cured moisture-sensitive material can be obtained.
第１図はこの発明の湿度センサの基本的な構造の一例を
示す概略断面図、第２図はその斜視図、第３図はこの発
明の一実施例よシ得られた湿度センサの相対湿度−抵抗
特性を示すグー）７であるＯｌ・・・ガラス基板、 ２
・・・検出電極３・・・硬化感湿層FIG. 1 is a schematic sectional view showing an example of the basic structure of a humidity sensor of the present invention, FIG. 2 is a perspective view thereof, and FIG. 3 is a relative humidity of a humidity sensor obtained according to an embodiment of the present invention. -Glue exhibiting resistance characteristics) 7 Ol... glass substrate, 2
...Detection electrode 3...Cured moisture sensitive layer
Claims (1)
ン酸および有機アミンよシなる電解質を混合したアルコ
ール溶液を感湿部材に用いて一対の検出電極を形成した
ガラス基板上に硬化感湿層を構成したことを特徴とする
湿度センサ。A cured moisture-sensitive layer is formed on a glass substrate on which a pair of detection electrodes are formed using an alcohol solution containing a hygroscopic resin having a polymerizable functional group and an electrolyte such as p-)luenesulfonic acid and an organic amine as a moisture-sensing member. A humidity sensor comprising:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57205079A JPS5994056A (en) | 1982-11-22 | 1982-11-22 | Humidity sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57205079A JPS5994056A (en) | 1982-11-22 | 1982-11-22 | Humidity sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5994056A true JPS5994056A (en) | 1984-05-30 |
| JPS6236174B2 JPS6236174B2 (en) | 1987-08-05 |
Family
ID=16501069
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57205079A Granted JPS5994056A (en) | 1982-11-22 | 1982-11-22 | Humidity sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5994056A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10023362B2 (en) | 2016-03-15 | 2018-07-17 | Amg Co., Ltd. | Tube cosmetic container |
-
1982
- 1982-11-22 JP JP57205079A patent/JPS5994056A/en active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10023362B2 (en) | 2016-03-15 | 2018-07-17 | Amg Co., Ltd. | Tube cosmetic container |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6236174B2 (en) | 1987-08-05 |
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