JPS5972005A - Light interference type optical fiber sensor - Google Patents
Light interference type optical fiber sensorInfo
- Publication number
- JPS5972005A JPS5972005A JP57182339A JP18233982A JPS5972005A JP S5972005 A JPS5972005 A JP S5972005A JP 57182339 A JP57182339 A JP 57182339A JP 18233982 A JP18233982 A JP 18233982A JP S5972005 A JPS5972005 A JP S5972005A
- Authority
- JP
- Japan
- Prior art keywords
- light
- optical fiber
- sensor
- fiber
- transmission
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K5/00—Measuring temperature based on the expansion or contraction of a material
- G01K5/48—Measuring temperature based on the expansion or contraction of a material the material being a solid
- G01K5/50—Measuring temperature based on the expansion or contraction of a material the material being a solid arranged for free expansion or contraction
- G01K5/52—Measuring temperature based on the expansion or contraction of a material the material being a solid arranged for free expansion or contraction with electrical conversion means for final indication
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Measuring Magnetic Variables (AREA)
- Measuring Instrument Details And Bridges, And Automatic Balancing Devices (AREA)
- Light Guides In General And Applications Therefor (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は、各種物理量(たとえば、温度、圧力、音波、
振動、電界、e&界など)に対するセンナとして使用す
る光の干渉境板ヲ利用した元ファイバセンサに関するも
のである。DETAILED DESCRIPTION OF THE INVENTION The present invention provides various physical quantities (for example, temperature, pressure, sound waves,
The present invention relates to an original fiber sensor that utilizes an optical interference boundary plate used as a sensor for vibration, electric field, e&field, etc.).
、 ゛
元ファイバを利用した光干渉型ファイバセンサとして、
従来から光学の分野で知られているマ、ソバツエンダ−
型、マイケルソン型、フチプリーベロー型などの各春光
干渉計を利用したものがある。, As an optical interference type fiber sensor using original fiber,
Soba Tsuender, which has long been known in the field of optics.
There are various types of spring light interferometers, such as type, Michelson type, and Fuchipre-Bello type.
このうちマツハツエンダ−型およびマイケルソン型干渉
計を利用するセンサけ、参照元用ファイバと信号光用フ
ァイバの2つのファイバアーム’(r−必要とし、セン
サとして構成が複雑になるという欠点がある。また、フ
チプリーベロー型は、参照光用アームは不用で一本の7
了イパアームでよいが、元ファイバーに入力する光の元
諒′ft宵く場所と受光器を置く観測点とが元ファイバ
アームの両極端に分散しているため遠隔百↑測に不同き
であるという欠点があった〇
本発明の目的Vi従来の元7プイバ干渉計が有する上記
欠点を解決し、一本の元ファイバアームの同一端部に光
源と受光器とが配置された構成の簡車な遠隔計測に適し
た元干渉型元ファイバセンサ全提供することにある。Among these, a sensor using a Matsuhatsu-ender type interferometer and a Michelson type interferometer requires two fiber arms, a reference fiber and a signal light fiber, which has the drawback of complicating the configuration of the sensor. In addition, the edge-ply bellows type does not require a reference beam arm and only has a single 7
Although it is possible to use an optical fiber arm, it is said that it is not suitable for remote measurement because the source of the light input to the fiber arm and the observation point where the receiver is placed are dispersed at the opposite ends of the fiber arm. 〇Object of the present inventionVi To solve the above-mentioned drawbacks of the conventional original 7-source interferometer, we have developed a simple light source and a light receiver arranged at the same end of one original fiber arm. Our objective is to provide a full range of interferometric fiber sensors suitable for remote sensing.
本発明によれば、光源と、その光源からの光子一端へ入
射する伝送用元ファイバと、一端に反射鏡ヲ有するセン
サ胴元ファイバと、上記伝送用光ファイバと七ンサ用元
ファイバの他端との間に位置する半透鏡と、上記伝送用
元ファイバに入射する入射光のうち半透説で反射された
光?参照元とし、半透鏡を透過してセンサ月光ファイバ
中に導かれセンサ胴元ファイバのもう一部の端面に設け
た反射鏡によって反射し、再び半透鏡全透過して伝送用
元ファイバに導かれた元會信号元とし、これら参照元と
信号光との光の干渉を検出する手段とを含み、センサ用
光フアイバ設置される場所の物理量を測定することを特
徴とする元干渉型元ファイバセンサが得られる。According to the present invention, a light source, a source fiber for transmission into which photons from the light source are incident on one end, a sensor body fiber having a reflecting mirror at one end, and the other ends of the optical fiber for transmission and the source fiber for seven sensors. Of the incident light that enters the semi-transparent mirror located between and the source fiber for transmission, the light that is reflected by the semi-transparent theory? As a reference source, it is transmitted through a semi-transparent mirror, guided into the sensor moonlight fiber, reflected by a reflecting mirror installed on the other end of the sensor body fiber, completely transmitted through the semi-transparent mirror again, and guided to the source fiber for transmission. An original interference type original fiber sensor is characterized in that it measures a physical quantity at a location where a sensor optical fiber is installed, and includes means for detecting optical interference between these reference sources and the signal light. can get.
次に本発明の実施例について図面を参照して詳細に説明
する〇
第1図は、本発明の基本的な構成を説明するための図で
ある。図中、レーザ光源1からのレーザ出射光は、ビー
ムスプリッタ−2を通って、干渉計の元伝送部をなす元
ファイバ3へ入射する。元ファイバ3へ入射した元の一
部は半透鏡5で反射してファイバ3内を戻り、ビームス
プリッター2によって参照元として受光器8へ導かれる
。・−万、半透鏡5全浦過した光は、干渉計のセンサ部
分なしコネクター4によって伝送用元ファイバ3と結合
している元ファイバ6内ケ伝搬する。元ファイバ6は干
渉削のセンサ部を構成するものでその先端に反射鏡7が
位置している。センサ部ファイバケ伝搬したyt、は反
射鏡7によって反射されるが、外界から元ファイバ6に
加えられる各種の物理的刺激(たとえば、温度、EE力
、廿波、振動、を界。Next, embodiments of the present invention will be described in detail with reference to the drawings. FIG. 1 is a diagram for explaining the basic configuration of the present invention. In the figure, laser light emitted from a laser light source 1 passes through a beam splitter 2 and enters a source fiber 3 that forms the source transmission section of the interferometer. A part of the original light incident on the original fiber 3 is reflected by the semi-transparent mirror 5, returns within the fiber 3, and is guided by the beam splitter 2 to the light receiver 8 as a reference source. -The light that has completely passed through the semi-transparent mirror 5 is propagated within the source fiber 6 which is coupled to the source fiber 3 for transmission by the connector 4 without the sensor portion of the interferometer. The original fiber 6 constitutes a sensor section for interference cutting, and a reflecting mirror 7 is located at its tip. The yt propagated through the sensor fiber is reflected by the reflector 7, but it is not affected by various physical stimuli (for example, temperature, EE force, waves, vibrations, etc.) applied to the original fiber 6 from the outside world.
磁界など)に応じて元路長や偏光面が変化した信号光と
なる。この信号光は、半透鏡5を〕出して再び伝送用元
ファイバ3に導かれ、ビームスプリッタ−2VCよって
受光器81C導かれ、上記参照光と東ね合わされる・受
光器8からは、参照元と信号光との干渉の結果として、
センサ胴元ファイバ6に加えられた物理量が、電気信号
として検出される。The signal light has its original path length and polarization plane changed depending on the magnetic field (magnetic field, etc.). This signal light exits the semi-transparent mirror 5 and is again guided to the original transmission fiber 3, guided to a light receiver 81C by a beam splitter 2VC, and combined with the reference light. As a result of the interference between the signal light and the
The physical quantity applied to the sensor body fiber 6 is detected as an electrical signal.
第2図は、不発明の一実施例である温朋センサ分示す断
面図である。センサ胴元ファイバ6は、ファイバの温屁
と共に光学的長さが変化し、それがセンサ胴元ファイバ
6を伝搬する信号光の位相の変化となって、参照元と重
ね合わされて干渉することによって温度が検出される0
伝送用元ファイバ3の温度変化に対して信号光、参照光
はともに同じ位相変化を受けるので、測定に影響を与え
ず、センサ胴元ファイバ6の温度のみが測定される。ま
た、センサ胴元ファイバ6は、曲げなどの外力の影響を
除去するために保護用の中空容器9の中に収納されてい
る・
第3図は不発明の別の一実施例である音響センサ全説明
するための図である0図において10は音波の媒体とな
る液体、11はその容器である0音源として音響発生累
子12で発生した音波を七ンサ用元ファイバ6が受ける
ことvcよって、ファイバのブL学的長さが変化し、位
相変化ケ受けた信号光が伝送用ファイバ3へ送られて参
照元と重ね5−
合わされて干渉することにより音波が検出される。FIG. 2 is a cross-sectional view showing the Onho sensor, which is an embodiment of the invention. The optical length of the sensor body fiber 6 changes with the temperature of the fiber, which causes a change in the phase of the signal light propagating through the sensor body fiber 6, which overlaps with the reference source and interferes with it, thereby increasing the temperature. 0 detected
Since both the signal light and the reference light undergo the same phase change in response to a temperature change in the transmission source fiber 3, only the temperature of the sensor body fiber 6 is measured without affecting the measurement. In addition, the sensor body fiber 6 is housed in a protective hollow container 9 to eliminate the influence of external forces such as bending. In Figure 0, which is a diagram for explanation, 10 is a liquid serving as a medium for sound waves, and 11 is a container thereof.The source fiber 6 for seven sensors receives the sound waves generated by the sound generating element 12 as a sound source. The optical length of the fiber changes, and the signal light that has undergone a phase change is sent to the transmission fiber 3, overlapped with the reference source, and interfered, whereby a sound wave is detected.
第4図r1本発明の別の一実施例である電流センサを説
明するための図である。図において被測定電流はセンサ
胴元ファイバ6の囲りにソレノイド状1c巻いた電It
il131c流され、その電流によって発生した磁界に
よるファラデー効果のためにセンサ胴元ファイバ6を伝
搬する光波(信号光)の偏光面が回転する。この信号光
の偏光面の回転は参照元のもつ偏光面との相対的な偏光
面の方向の違いとしぞ検出し、その結果電線13に流れ
るt流が測定される。FIG. 4 r1 is a diagram for explaining a current sensor which is another embodiment of the present invention. In the figure, the current to be measured is a solenoid-shaped electric current It
The polarization plane of the light wave (signal light) propagating through the sensor body fiber 6 rotates due to the Faraday effect caused by the magnetic field generated by the current. The rotation of the polarization plane of this signal light is detected as a difference in the direction of the polarization plane relative to the polarization plane of the reference source, and as a result, the t current flowing through the electric wire 13 is measured.
以上の説明に工って明らかなように、本発明によれば従
来の型の光フアイバ干渉計に比べて構成が簡単で、参照
元とセンサ胴元ファイバを伝搬した信号光とが同一の伝
送用元ファイバ中に導かれるために測定対象以外の周囲
の環境の変化に強く、また元の干渉現象を利用している
ためにきわめて高感度の、しかも遠隔計測に適した光干
渉型の光ファイバセンサが可能となり、その実用上の効
果はきわめて顕著である。As is clear from the above description, the present invention has a simpler configuration than conventional optical fiber interferometers, and the reference source and the signal light propagated through the sensor body fiber are used for the same transmission. An optical interference type optical fiber sensor that is resistant to changes in the surrounding environment other than the measurement target because it is guided into the original fiber, and has extremely high sensitivity because it uses the original interference phenomenon, and is suitable for remote measurement. has become possible, and its practical effects are extremely significant.
6−6-
第1図は本発明の基本的な構成を説明するための図であ
る。第2図Vi、本発明の一冥施例である温度センサ全
説明するための図、第3図は本発明の他の実施例である
音響センサ全説明するための図、第4図は本発明の他の
実施例である電流センサを説明するための図である。
■・・・・・・レーザ光源、2・・・・・・ビームスグ
リツメ、3・・・・・・伝送用元ファイバ、4・・・・
・・コネクタ、5・・・・・・半透鏡、6・・・・・・
センサ月光ファイバ、7・・・・・・反射鏡、8・・・
・・・受光器、9・・・・・・保護用中空容器、10・
・・・・・音響媒体(液体)、11・・・・・・容器、
12・・・・・・音響発生素子、13・・・・・・電線
。
躬2区
83閃
84図FIG. 1 is a diagram for explaining the basic configuration of the present invention. FIG. 2 Vi is a diagram for fully explaining the temperature sensor which is one embodiment of the present invention, FIG. 3 is a diagram fully explaining the acoustic sensor which is another embodiment of the present invention, and FIG. It is a figure for explaining the current sensor which is another example of the invention. ■... Laser light source, 2... Beam grip, 3... Source fiber for transmission, 4...
...Connector, 5...Semi-transparent mirror, 6...
Sensor moonlight fiber, 7...Reflector, 8...
...Receiver, 9...Protective hollow container, 10.
...acoustic medium (liquid), 11...container,
12... Sound generating element, 13... Electric wire. 2nd ward 83 sen 84 fig.
Claims (1)
入射する元金発生する光源と、前記伝送用光7テイバの
他端に位置する半透鏡と、一端が前記半透鏡に対向し他
端に反射鏡を有するセンサ用光ファイバと、前記伝送胴
元ファイバへ入射した元のうち前配半透鋭で反射する元
と前記半透鏡全透過し前記センサ用元7アイバ中全往復
した光との干渉を検出する手段とを含み、前gピ干渉状
態の変化によって前記センサ用光ファイバが設置される
場所の物理量全測定することを特徴とする光干渉型光フ
ァイバセンサ。a transmission optical fiber, a light source that generates a principal input to one end of the transmission body fiber, a semi-transparent mirror located at the other end of the transmission light 7 taber, one end facing the semi-transparent mirror and the other end facing the transmission optical fiber; Interference between a sensor optical fiber having a reflecting mirror and the light incident on the transmission trunk fiber that is reflected by the front semi-transparent mirror and the light that is completely transmitted through the semi-transparent mirror and travels all the way back and forth through the seven sensor fibers. 1. An optical interference type optical fiber sensor, characterized in that the optical fiber sensor comprises a means for detecting the following: and measures all physical quantities at a location where the sensor optical fiber is installed based on changes in the front g-p interference state.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57182339A JPS5972005A (en) | 1982-10-18 | 1982-10-18 | Light interference type optical fiber sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57182339A JPS5972005A (en) | 1982-10-18 | 1982-10-18 | Light interference type optical fiber sensor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5972005A true JPS5972005A (en) | 1984-04-23 |
Family
ID=16116575
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP57182339A Pending JPS5972005A (en) | 1982-10-18 | 1982-10-18 | Light interference type optical fiber sensor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5972005A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62333A (en) * | 1985-06-26 | 1987-01-06 | 株式会社東芝 | Nuclear resonance imaging apparatus |
JPS6227603A (en) * | 1985-07-29 | 1987-02-05 | Hitachi Ltd | Optical displacement measurement device |
JPS646706A (en) * | 1987-03-24 | 1989-01-11 | Electricite De France | Michelson optical fiber interferometer |
WO2004029543A2 (en) * | 2002-09-25 | 2004-04-08 | Robert Bosch Gmbh | Interferometric measuring device |
KR100703629B1 (en) | 2005-11-30 | 2007-04-06 | 광주과학기술원 | Optical Differential Phase Shift Signal Demodulator |
-
1982
- 1982-10-18 JP JP57182339A patent/JPS5972005A/en active Pending
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62333A (en) * | 1985-06-26 | 1987-01-06 | 株式会社東芝 | Nuclear resonance imaging apparatus |
JPH0316855B2 (en) * | 1985-06-26 | 1991-03-06 | Tokyo Shibaura Electric Co | |
JPS6227603A (en) * | 1985-07-29 | 1987-02-05 | Hitachi Ltd | Optical displacement measurement device |
JPH0376845B2 (en) * | 1985-07-29 | 1991-12-06 | Hitachi Ltd | |
JPS646706A (en) * | 1987-03-24 | 1989-01-11 | Electricite De France | Michelson optical fiber interferometer |
WO2004029543A2 (en) * | 2002-09-25 | 2004-04-08 | Robert Bosch Gmbh | Interferometric measuring device |
WO2004029543A3 (en) * | 2002-09-25 | 2004-06-17 | Bosch Gmbh Robert | Interferometric measuring device |
KR100703629B1 (en) | 2005-11-30 | 2007-04-06 | 광주과학기술원 | Optical Differential Phase Shift Signal Demodulator |
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