JPS5965846A - Developing device - Google Patents
Developing deviceInfo
- Publication number
- JPS5965846A JPS5965846A JP17595082A JP17595082A JPS5965846A JP S5965846 A JPS5965846 A JP S5965846A JP 17595082 A JP17595082 A JP 17595082A JP 17595082 A JP17595082 A JP 17595082A JP S5965846 A JPS5965846 A JP S5965846A
- Authority
- JP
- Japan
- Prior art keywords
- tank
- developer
- conduit
- reducing agent
- reducing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003638 chemical reducing agent Substances 0.000 claims abstract description 45
- 239000003002 pH adjusting agent Substances 0.000 claims abstract description 5
- 238000011161 development Methods 0.000 claims description 40
- 239000000463 material Substances 0.000 claims description 27
- 238000012545 processing Methods 0.000 claims description 22
- 229910021645 metal ion Inorganic materials 0.000 claims description 17
- 150000002736 metal compounds Chemical class 0.000 claims description 14
- 230000009467 reduction Effects 0.000 claims description 10
- 238000005259 measurement Methods 0.000 claims description 3
- 230000004044 response Effects 0.000 claims description 2
- 239000007788 liquid Substances 0.000 abstract description 15
- 238000000034 method Methods 0.000 abstract description 15
- 230000008569 process Effects 0.000 abstract description 7
- 238000002156 mixing Methods 0.000 abstract description 3
- 230000001105 regulatory effect Effects 0.000 abstract 1
- 239000000243 solution Substances 0.000 description 35
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 19
- 229910052751 metal Inorganic materials 0.000 description 17
- 239000002184 metal Substances 0.000 description 17
- 150000003839 salts Chemical class 0.000 description 11
- 150000001875 compounds Chemical class 0.000 description 10
- 238000006722 reduction reaction Methods 0.000 description 10
- 125000000664 diazo group Chemical group [N-]=[N+]=[*] 0.000 description 9
- 229910052759 nickel Inorganic materials 0.000 description 8
- 239000007864 aqueous solution Substances 0.000 description 7
- IVRMZWNICZWHMI-UHFFFAOYSA-N azide group Chemical group [N-]=[N+]=[N-] IVRMZWNICZWHMI-UHFFFAOYSA-N 0.000 description 7
- 239000011230 binding agent Substances 0.000 description 7
- 239000011248 coating agent Substances 0.000 description 7
- 238000000576 coating method Methods 0.000 description 7
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 6
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 6
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 6
- 229910001385 heavy metal Inorganic materials 0.000 description 6
- 150000002500 ions Chemical class 0.000 description 6
- 239000000126 substance Substances 0.000 description 6
- 238000007747 plating Methods 0.000 description 5
- 239000002253 acid Substances 0.000 description 4
- -1 etc. Polymers 0.000 description 4
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 4
- 229910052753 mercury Inorganic materials 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- KWSLGOVYXMQPPX-UHFFFAOYSA-N 5-[3-(trifluoromethyl)phenyl]-2h-tetrazole Chemical compound FC(F)(F)C1=CC=CC(C2=NNN=N2)=C1 KWSLGOVYXMQPPX-UHFFFAOYSA-N 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 229910021529 ammonia Inorganic materials 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 235000008429 bread Nutrition 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 239000003795 chemical substances by application Substances 0.000 description 3
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 230000003247 decreasing effect Effects 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- 229910052763 palladium Inorganic materials 0.000 description 3
- 229910001379 sodium hypophosphite Inorganic materials 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 2
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 2
- AEMRFAOFKBGASW-UHFFFAOYSA-N Glycolic acid Chemical compound OCC(O)=O AEMRFAOFKBGASW-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 239000012190 activator Substances 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000007598 dipping method Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 238000007772 electroless plating Methods 0.000 description 2
- 150000004679 hydroxides Chemical class 0.000 description 2
- JVTAAEKCZFNVCJ-UHFFFAOYSA-N lactic acid Chemical compound CC(O)C(O)=O JVTAAEKCZFNVCJ-UHFFFAOYSA-N 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 229920006267 polyester film Polymers 0.000 description 2
- 238000001556 precipitation Methods 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- SQGYOTSLMSWVJD-UHFFFAOYSA-N silver(1+) nitrate Chemical compound [Ag+].[O-]N(=O)=O SQGYOTSLMSWVJD-UHFFFAOYSA-N 0.000 description 2
- 239000011734 sodium Substances 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 239000011550 stock solution Substances 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- JIAARYAFYJHUJI-UHFFFAOYSA-L zinc dichloride Chemical compound [Cl-].[Cl-].[Zn+2] JIAARYAFYJHUJI-UHFFFAOYSA-L 0.000 description 2
- TXUICONDJPYNPY-UHFFFAOYSA-N (1,10,13-trimethyl-3-oxo-4,5,6,7,8,9,11,12,14,15,16,17-dodecahydrocyclopenta[a]phenanthren-17-yl) heptanoate Chemical compound C1CC2CC(=O)C=C(C)C2(C)C2C1C1CCC(OC(=O)CCCCCC)C1(C)CC2 TXUICONDJPYNPY-UHFFFAOYSA-N 0.000 description 1
- AAWZDTNXLSGCEK-LNVDRNJUSA-N (3r,5r)-1,3,4,5-tetrahydroxycyclohexane-1-carboxylic acid Chemical compound O[C@@H]1CC(O)(C(O)=O)C[C@@H](O)C1O AAWZDTNXLSGCEK-LNVDRNJUSA-N 0.000 description 1
- BJEPYKJPYRNKOW-REOHCLBHSA-N (S)-malic acid Chemical compound OC(=O)[C@@H](O)CC(O)=O BJEPYKJPYRNKOW-REOHCLBHSA-N 0.000 description 1
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 1
- 229920002134 Carboxymethyl cellulose Polymers 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910021584 Cobalt(II) iodide Inorganic materials 0.000 description 1
- AAWZDTNXLSGCEK-UHFFFAOYSA-N Cordycepinsaeure Natural products OC1CC(O)(C(O)=O)CC(O)C1O AAWZDTNXLSGCEK-UHFFFAOYSA-N 0.000 description 1
- RGHNJXZEOKUKBD-SQOUGZDYSA-N D-gluconic acid Chemical compound OC[C@@H](O)[C@@H](O)[C@H](O)[C@@H](O)C(O)=O RGHNJXZEOKUKBD-SQOUGZDYSA-N 0.000 description 1
- RGHNJXZEOKUKBD-UHFFFAOYSA-N D-gluconic acid Natural products OCC(O)C(O)C(O)C(O)C(O)=O RGHNJXZEOKUKBD-UHFFFAOYSA-N 0.000 description 1
- FEWJPZIEWOKRBE-JCYAYHJZSA-N Dextrotartaric acid Chemical compound OC(=O)[C@H](O)[C@@H](O)C(O)=O FEWJPZIEWOKRBE-JCYAYHJZSA-N 0.000 description 1
- KCXVZYZYPLLWCC-UHFFFAOYSA-N EDTA Chemical compound OC(=O)CN(CC(O)=O)CCN(CC(O)=O)CC(O)=O KCXVZYZYPLLWCC-UHFFFAOYSA-N 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 108010010803 Gelatin Proteins 0.000 description 1
- 229920000084 Gum arabic Polymers 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- CKLJMWTZIZZHCS-REOHCLBHSA-N L-aspartic acid Chemical compound OC(=O)[C@@H](N)CC(O)=O CKLJMWTZIZZHCS-REOHCLBHSA-N 0.000 description 1
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 108010058846 Ovalbumin Proteins 0.000 description 1
- 229910019142 PO4 Inorganic materials 0.000 description 1
- 229920003171 Poly (ethylene oxide) Polymers 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 1
- AAWZDTNXLSGCEK-ZHQZDSKASA-N Quinic acid Natural products O[C@H]1CC(O)(C(O)=O)C[C@H](O)C1O AAWZDTNXLSGCEK-ZHQZDSKASA-N 0.000 description 1
- 241000978776 Senegalia senegal Species 0.000 description 1
- 229920001800 Shellac Polymers 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 description 1
- FEWJPZIEWOKRBE-UHFFFAOYSA-N Tartaric acid Natural products [H+].[H+].[O-]C(=O)C(O)C(O)C([O-])=O FEWJPZIEWOKRBE-UHFFFAOYSA-N 0.000 description 1
- 229910021626 Tin(II) chloride Inorganic materials 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000000205 acacia gum Substances 0.000 description 1
- 235000010489 acacia gum Nutrition 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- BJEPYKJPYRNKOW-UHFFFAOYSA-N alpha-hydroxysuccinic acid Natural products OC(=O)C(O)CC(O)=O BJEPYKJPYRNKOW-UHFFFAOYSA-N 0.000 description 1
- 235000003704 aspartic acid Nutrition 0.000 description 1
- CJPQIRJHIZUAQP-MRXNPFEDSA-N benalaxyl-M Chemical compound CC=1C=CC=C(C)C=1N([C@H](C)C(=O)OC)C(=O)CC1=CC=CC=C1 CJPQIRJHIZUAQP-MRXNPFEDSA-N 0.000 description 1
- OQFSQFPPLPISGP-UHFFFAOYSA-N beta-carboxyaspartic acid Natural products OC(=O)C(N)C(C(O)=O)C(O)=O OQFSQFPPLPISGP-UHFFFAOYSA-N 0.000 description 1
- 239000008280 blood Substances 0.000 description 1
- 210000004369 blood Anatomy 0.000 description 1
- 239000000872 buffer Substances 0.000 description 1
- 150000001735 carboxylic acids Chemical class 0.000 description 1
- 239000005018 casein Substances 0.000 description 1
- BECPQYXYKAMYBN-UHFFFAOYSA-N casein, tech. Chemical compound NCCCCC(C(O)=O)N=C(O)C(CC(O)=O)N=C(O)C(CCC(O)=N)N=C(O)C(CC(C)C)N=C(O)C(CCC(O)=O)N=C(O)C(CC(O)=O)N=C(O)C(CCC(O)=O)N=C(O)C(C(C)O)N=C(O)C(CCC(O)=N)N=C(O)C(CCC(O)=N)N=C(O)C(CCC(O)=N)N=C(O)C(CCC(O)=O)N=C(O)C(CCC(O)=O)N=C(O)C(COP(O)(O)=O)N=C(O)C(CCC(O)=N)N=C(O)C(N)CC1=CC=CC=C1 BECPQYXYKAMYBN-UHFFFAOYSA-N 0.000 description 1
- 235000021240 caseins Nutrition 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 150000001805 chlorine compounds Chemical class 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- GRWVQDDAKZFPFI-UHFFFAOYSA-H chromium(III) sulfate Chemical compound [Cr+3].[Cr+3].[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O GRWVQDDAKZFPFI-UHFFFAOYSA-H 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- GVPFVAHMJGGAJG-UHFFFAOYSA-L cobalt dichloride Chemical compound [Cl-].[Cl-].[Co+2] GVPFVAHMJGGAJG-UHFFFAOYSA-L 0.000 description 1
- AVWLPUQJODERGA-UHFFFAOYSA-L cobalt(2+);diiodide Chemical compound [Co+2].[I-].[I-] AVWLPUQJODERGA-UHFFFAOYSA-L 0.000 description 1
- 229940097267 cobaltous chloride Drugs 0.000 description 1
- 239000008139 complexing agent Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 150000008049 diazo compounds Chemical class 0.000 description 1
- 150000001991 dicarboxylic acids Chemical class 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 238000010828 elution Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 239000008273 gelatin Substances 0.000 description 1
- 229920000159 gelatin Polymers 0.000 description 1
- 235000019322 gelatine Nutrition 0.000 description 1
- 235000011852 gelatine desserts Nutrition 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229950006191 gluconic acid Drugs 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000003112 inhibitor Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 239000004310 lactic acid Substances 0.000 description 1
- 235000014655 lactic acid Nutrition 0.000 description 1
- 238000012886 linear function Methods 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 239000002932 luster Substances 0.000 description 1
- 239000001630 malic acid Substances 0.000 description 1
- 235000011090 malic acid Nutrition 0.000 description 1
- 229910001507 metal halide Inorganic materials 0.000 description 1
- 150000005309 metal halides Chemical class 0.000 description 1
- 239000012046 mixed solvent Substances 0.000 description 1
- 150000002763 monocarboxylic acids Chemical class 0.000 description 1
- 229920005615 natural polymer Polymers 0.000 description 1
- 229910001120 nichrome Inorganic materials 0.000 description 1
- 150000002823 nitrates Chemical class 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 239000004745 nonwoven fabric Substances 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- PIBWKRNGBLPSSY-UHFFFAOYSA-L palladium(II) chloride Chemical compound Cl[Pd]Cl PIBWKRNGBLPSSY-UHFFFAOYSA-L 0.000 description 1
- 239000000123 paper Substances 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 1
- 239000010452 phosphate Substances 0.000 description 1
- ACVYVLVWPXVTIT-UHFFFAOYSA-N phosphinic acid Chemical compound O[PH2]=O ACVYVLVWPXVTIT-UHFFFAOYSA-N 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- 229920002689 polyvinyl acetate Polymers 0.000 description 1
- 239000011118 polyvinyl acetate Substances 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 229920000036 polyvinylpyrrolidone Polymers 0.000 description 1
- 239000001267 polyvinylpyrrolidone Substances 0.000 description 1
- 235000013855 polyvinylpyrrolidone Nutrition 0.000 description 1
- 229940072033 potash Drugs 0.000 description 1
- BWHMMNNQKKPAPP-UHFFFAOYSA-L potassium carbonate Substances [K+].[K+].[O-]C([O-])=O BWHMMNNQKKPAPP-UHFFFAOYSA-L 0.000 description 1
- 235000015320 potassium carbonate Nutrition 0.000 description 1
- 230000001376 precipitating effect Effects 0.000 description 1
- 239000003755 preservative agent Substances 0.000 description 1
- 230000035484 reaction time Effects 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000004208 shellac Substances 0.000 description 1
- ZLGIYFNHBLSMPS-ATJNOEHPSA-N shellac Chemical compound OCCCCCC(O)C(O)CCCCCCCC(O)=O.C1C23[C@H](C(O)=O)CCC2[C@](C)(CO)[C@@H]1C(C(O)=O)=C[C@@H]3O ZLGIYFNHBLSMPS-ATJNOEHPSA-N 0.000 description 1
- 235000013874 shellac Nutrition 0.000 description 1
- 229940113147 shellac Drugs 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 229910001961 silver nitrate Inorganic materials 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- AKHNMLFCWUSKQB-UHFFFAOYSA-L sodium thiosulfate Chemical compound [Na+].[Na+].[O-]S([O-])(=O)=S AKHNMLFCWUSKQB-UHFFFAOYSA-L 0.000 description 1
- 235000019345 sodium thiosulphate Nutrition 0.000 description 1
- GGCZERPQGJTIQP-UHFFFAOYSA-N sodium;9,10-dioxoanthracene-2-sulfonic acid Chemical compound [Na+].C1=CC=C2C(=O)C3=CC(S(=O)(=O)O)=CC=C3C(=O)C2=C1 GGCZERPQGJTIQP-UHFFFAOYSA-N 0.000 description 1
- 239000001119 stannous chloride Substances 0.000 description 1
- 235000011150 stannous chloride Nutrition 0.000 description 1
- RCIVOBGSMSSVTR-UHFFFAOYSA-L stannous sulfate Chemical compound [SnH2+2].[O-]S([O-])(=O)=O RCIVOBGSMSSVTR-UHFFFAOYSA-L 0.000 description 1
- 239000011975 tartaric acid Substances 0.000 description 1
- 235000002906 tartaric acid Nutrition 0.000 description 1
- 229910000375 tin(II) sulfate Inorganic materials 0.000 description 1
- 238000004448 titration Methods 0.000 description 1
- ILJSQTXMGCGYMG-UHFFFAOYSA-N triacetic acid Chemical compound CC(=O)CC(=O)CC(O)=O ILJSQTXMGCGYMG-UHFFFAOYSA-N 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
- 239000011592 zinc chloride Substances 0.000 description 1
- 235000005074 zinc chloride Nutrition 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03D—APPARATUS FOR PROCESSING EXPOSED PHOTOGRAPHIC MATERIALS; ACCESSORIES THEREFOR
- G03D3/00—Liquid processing apparatus involving immersion; Washing apparatus involving immersion
- G03D3/02—Details of liquid circulation
- G03D3/06—Liquid supply; Liquid circulation outside tanks
- G03D3/065—Liquid supply; Liquid circulation outside tanks replenishment or recovery apparatus
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Photographic Processing Devices Using Wet Methods (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は還元、現像等のプロセスを経て画像形成材料を
現像処理するだめの装置に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an apparatus for developing an image forming material through processes such as reduction and development.
本発明で処理される画像形成材料は第1図に示すように
、支持体(10)に画像形成Jil(12)を設けてな
る。As shown in FIG. 1, the image-forming material processed in the present invention comprises a support (10) provided with an image-forming layer (12).
支持体としては、ガラス、紙、プラスチックフィルム、
不織布等の任意の材料が用いられるが、なかでもポリエ
ステルフィルム、トリアセテートフィルム等が好適であ
る。これら支持体には、必要に応じてコロナ放電処理、
プライマー処理等の接着性改良処理を行なってから画像
形成層を設ける。Supports include glass, paper, plastic film,
Any material such as nonwoven fabric can be used, but polyester film, triacetate film, etc. are particularly suitable. These supports may be treated with corona discharge, if necessary.
An image forming layer is provided after performing adhesion improving treatment such as primer treatment.
画像形成層は、親水性バインダー中に、還元されて金属
現像核となる金属化合物及びジアゾ基あるいはアジド基
を有する化合物を分散、好ましくは溶解させてなる。The image forming layer is formed by dispersing, preferably dissolving, in a hydrophilic binder, a metal compound which is reduced to become metal development nuclei and a compound having a diazo group or an azide group.
バインダーとしては、ゼラチン、カゼイン、グルー、ア
ラビアゴム、セラックなどの天然高分子、カルボキシル
メチルセルロース、卵白アルブミン、ポリビニルアルコ
ール(部分ケン化ポリ酢酸ビニル)、ポリビニルピロリ
ドン、ポリエチレンオキサイド、などが用いられ、更に
は画像形成層を形成して、現像液に接触した際現像液が
侵透して物理現像が可能とlIる程度の親水性があれば
上記以外のものも使用可能である。As the binder, natural polymers such as gelatin, casein, glue, gum arabic, shellac, etc., carboxyl methyl cellulose, egg albumin, polyvinyl alcohol (partially saponified polyvinyl acetate), polyvinylpyrrolidone, polyethylene oxide, etc. are used. Materials other than those mentioned above can be used as long as they form an image forming layer and have such hydrophilicity that when they come into contact with a developer, the developer penetrates and physical development is possible.
還元されて金属現像核を与える金属化合物としては、パ
ラジウム、金、銀、白金、銅等の責なる金属の塩化物、
硝酸塩などの水溶性塩、たとえば無電解メッキのアクヅ
ベータ液中に含まれる塩化パラジウム、硝酸銀、4塩化
水素金などの水溶性塩が用いられる。なかでもパラジウ
ム、金、白金、銅の水溶性塩、特にパラジウムの水溶性
塩が好ましく用いられる。Metal compounds that are reduced to give metal development nuclei include chlorides of responsible metals such as palladium, gold, silver, platinum, and copper;
Water-soluble salts such as nitrates, such as palladium chloride, silver nitrate, gold tetrahydrogen chloride, etc., which are contained in the activator solution for electroless plating, are used. Among these, water-soluble salts of palladium, gold, platinum, and copper, particularly water-soluble salts of palladium, are preferably used.
画像形成層は、好ましくは上述した金属化合物の水溶液
(市販される無電解メッキ用のアクチペータ液をそのま
ま用いることができる)を、ジアゾ基又はアジド基を有
する化合物とともにバインダー水溶液と混合し、塗布に
適した粘度lO〜1000センチボイズ程度の液とし、
これを支持体上に塗布し、乾燥することによシ、通常0
.1〜30μm厚さの塗膜として得られる。The image forming layer is preferably formed by mixing an aqueous solution of the above-mentioned metal compound (a commercially available actipator liquid for electroless plating can be used as is) with an aqueous binder solution together with a compound having a diazo group or an azide group, and applying the mixture. A liquid with a suitable viscosity of 10 to 1000 centiboise,
By coating this on a support and drying it, it is usually
.. It is obtained as a coating film with a thickness of 1 to 30 μm.
溶媒としては上述した水以外にも、水と低級アルコール
、ケトン、エーテル等の水混和性溶媒との混合溶媒も用
いられる。In addition to the water mentioned above, a mixed solvent of water and a water-miscible solvent such as a lower alcohol, ketone, or ether may also be used as the solvent.
ジアゾ基又はアジド基を有する化合物としては、たとえ
ば、ジアゾ基を有するものとして、ジアゾ基を有する水
溶性の塩化亜鉛複塩、硫酸塩、リン酸塩あるいはこれら
から得られるジアゾ樹脂が好ましく用いられる。As the compound having a diazo group or an azide group, for example, a water-soluble zinc chloride double salt, sulfate, or phosphate having a diazo group, or a diazo resin obtained from these are preferably used.
画像形成層(12)中には、上記し、たバインダ100
部に対して:金属化合物を0.1〜100部、特に1〜
10部、ジアゾ基又klアジド基を有する化合物を1〜
100部、特に20〜50部の割合で含ませることが好
ましい。The image forming layer (12) contains the binder 100 described above.
part: 0.1 to 100 parts of metal compound, especially 1 to 100 parts
10 parts, 1 to 10 parts of a compound having a diazo group or a kl azide group
It is preferably included in a proportion of 100 parts, particularly 20 to 50 parts.
ゞ画像形成層を形成後、物理現像処理中の現像液へのバ
インダーの溶出を抑制するため、望ましくは硬膜処理を
行う。硬膜処理は、例えばカリ明パン、アンモニウム明
パン等のAA化合物ニクロム明パン、硫酸クロム等のC
r化合物等の化合物を画像形成層の形成用塗布液中にパ
イングー100部に対してたとえば0.1〜50部の割
合で混合するか、あるいはその水溶液を画像形成層上に
塗布することによシ行われる。After forming the image forming layer, hardening treatment is desirably performed in order to suppress elution of the binder into the developer during physical development. Hardening treatment is performed using AA compounds such as potash bright bread, ammonium bright bread, nichrome bright bread, C such as chromium sulfate, etc.
By mixing a compound such as r compound in the coating solution for forming the image forming layer at a ratio of, for example, 0.1 to 50 parts per 100 parts of the paint, or by coating the aqueous solution on the image forming layer. will be carried out.
次に、前記画像形成材料を用いる画像形成法について説
明すると、第2図に示すようにまず画像形成層(12)
にたとえば透過原稿(【4)を介して、パターン露光を
行う。これにより、露光部(16)において、選択的に
且つ露光部に応じてジアゾ基又はアジド基を有する化合
物を分解させる。光源としては、前記したジアゾ化合物
またはアジド化合物を分壊できる光源からは任意のもの
が用いられる。例えば、超高圧水銀灯、高圧水銀灯、低
圧水銀灯、メタルハライド灯、アーク灯、ケミカルラン
プ、キセノン灯、Arレザなどが使用できる。所望の画
像階調に応じて、たとえば中心波長が4050mの紫外
光を用いた場会、I W/n11〜300 W/m’の
強度で10〜200秒露光すればよい。Next, to explain an image forming method using the image forming material, first, as shown in FIG.
For example, pattern exposure is performed through a transparent original ([4)]. As a result, the compound having a diazo group or an azide group is selectively decomposed in the exposed area (16) depending on the exposed area. As the light source, any light source that can decompose the diazo compound or azide compound described above can be used. For example, an ultra-high pressure mercury lamp, a high pressure mercury lamp, a low pressure mercury lamp, a metal halide lamp, an arc lamp, a chemical lamp, a xenon lamp, an Ar laser, etc. can be used. Depending on the desired image gradation, for example, when using ultraviolet light having a center wavelength of 4050 m, exposure may be performed for 10 to 200 seconds at an intensity of I W/n11 to 300 W/m'.
次いでこのようにしてパターン露光によシ、ジアゾ基又
はアジド基を有する化合物がパターン状に分壊された潜
像を有する画像形成層(12)に還元剤水溶液を浸漬な
いしは塗布により接触させて第3図のように画像形成層
中にほぼ一様に金属現像核を発生させる。還元剤として
は、塩化第1スズ、硫酸第1スズ、水累化ホウ累ナトリ
ウム等の強力な還元剤を使用する。この還元処理は、還
元剤の強度によっても異るが一般に還元剤を0.1〜5
0 Vlの濃度で含む還元剤溶液を用い、常温ないし加
温下でlO秒〜400秒程度行われる。Next, the image forming layer (12) having a latent image in which a compound having a diazo group or an azide group is broken up in a pattern is brought into contact with the aqueous reducing agent solution by dipping or coating. As shown in Figure 3, metal development nuclei are generated almost uniformly in the image forming layer. As the reducing agent, a strong reducing agent such as stannous chloride, stannous sulfate, or sodium borohydrate is used. This reduction treatment varies depending on the strength of the reducing agent, but generally the reducing agent is
Using a reducing agent solution containing a concentration of 0 Vl, the reaction is carried out at room temperature or under heating for about 10 seconds to 400 seconds.
更に、このようにして得られた金属現像核とジアゾ基又
はアジド基を有する化合物の選択的分解による潜像を有
する画像形成層(12)に、物理現像液を浸漬ないし塗
布により接触させて、露光部に金属現像核を中心として
現像液中の金属が還元により析出した第4図に示すよう
な可視像(18)を形成する。Further, a physical developer is brought into contact with the thus obtained image forming layer (12) having a latent image formed by selective decomposition of the compound having a diazo group or an azide group by dipping or coating, A visible image (18) as shown in FIG. 4 is formed in the exposed area, in which the metal in the developer is precipitated by reduction, centering on metal development nuclei.
物理現像液としては、水溶性の被還元性重金属塩および
還元剤を含む水溶液が必要に応じて加温した状態で使用
される。As the physical developer, an aqueous solution containing a water-soluble reducible heavy metal salt and a reducing agent is used, if necessary, in a heated state.
被還元性重金属塩としては、例えばニッケル、コバルト
、鉄及びクロム等の■b族金属、釦等のlb族金属の水
溶性塩が単独で又は混合して使用される。適当な水溶性
の被還元性重金属塩としては、例えば塩化第一コバルト
、ヨウ化第−コバルトが用いられる。As the reducible heavy metal salt, for example, water-soluble salts of Group IB metals such as nickel, cobalt, iron and chromium, and Group IB metals such as button are used alone or in combination. Suitable water-soluble reducible heavy metal salts include, for example, cobaltous chloride and cobaltous iodide.
これら被還元性重金属塩は物理現像液中に、たとえば1
.0〜100 Vlの割合で含まれる。These reducible heavy metal salts are contained in a physical developer solution, for example, 1
.. It is contained in a proportion of 0 to 100 Vl.
還元剤としては、例えば次亜リン酸、次亜リン酸すトリ
ウム等を使用しうる。As the reducing agent, for example, hypophosphorous acid, sodium hypophosphite, etc. can be used.
これら還元剤は、物理現像液中に、たとえば0.1〜5
0 f!/lの割合で用いられる。These reducing agents may be added in the physical developer, for example, from 0.1 to 5
0 f! /l is used.
物理現像液中に含まれる有効な還ン1;剤のいくつかは
、金属現像核の発生のだめの還元剤と重複するものであ
る。したがって、比較的強い還元剤を含む物理現像液を
用いる場合は5露光後に金属現像核発生のだめの還元処
理を行わず、直接に物理現像液で処理して、金属現像核
の発生と物理現像を実質的に同時に行うこともできる。Some of the effective reducing agents contained in the physical developer overlap with the reducing agents responsible for the generation of metal development nuclei. Therefore, when using a physical developer that contains a relatively strong reducing agent, do not perform reduction treatment to prevent the generation of metal development nuclei after 5 exposures, but directly process with the physical developer to prevent the generation of metal development nuclei and physical development. They can also be done substantially simultaneously.
ただし、二段階に分けて行うと、還元反応と金属析出反
応をそれぞれ温度、反応時間で正確にコントロール出来
る利点がある。However, if the reaction is carried out in two stages, there is an advantage that the reduction reaction and the metal precipitation reaction can be controlled accurately by adjusting the temperature and reaction time, respectively.
物理現像液中には、前記した被還元性重金属塩の溶解に
より生成する重金属イオンが水酸化物として沈澱するの
を防止するために、たとえばモノカルボン酸;ジカルボ
ン酸:リンゴ酸、乳酸等のヒドロキンカルボン酸;コノ
1り酸、クエン酸、アスパラギン酸、グリコール酸、酒
石酸、エチレンジアミンテトラ酢酸、グIレコン酸、糖
酸、キニン酸等の有機カルボン酸からなる錯塩化剤の一
種又は二種以上を含ませることができる。これら錯塩化
剤は、物理現像液中にたとえば1〜l Q OVlの割
合で用いられる。In order to prevent the heavy metal ions generated by dissolving the reducible heavy metal salts from precipitating as hydroxides in the physical developer, for example, monocarboxylic acids; dicarboxylic acids: hydroxides such as malic acid and lactic acid are used. Quinicarboxylic acid; one or more complexing agents consisting of organic carboxylic acids such as conolilic acid, citric acid, aspartic acid, glycolic acid, tartaric acid, ethylenediaminetetraacetic acid, glyconic acid, sugar acid, and quinic acid. can be included. These complex chloride forming agents are used in the physical developer in a proportion of, for example, 1 to 1 Q OVl.
更に、物理現像液には、現像液の保存性および操作性な
らびに得られる画像の質を改善するために、酸及び塩基
等のPI−(調節剤、緩衝剤、防腐剤、増白剤、界面活
性剤などが常法に従い必要に応じて添加される。In addition, the physical developer contains PI- (regulators, buffers, preservatives, brighteners, interfacial agents, etc.) such as acids and bases to improve the storage stability and operability of the developer and the quality of the resulting images. An activator and the like are added as necessary according to a conventional method.
或いは上記した以外にも第1図に示したような画像形成
材料に、金属現像核発生のだめの還元処理、パターン露
光処理、物理現像処理をこの順序で逐次に行なってもよ
い。この方法は、前述の画像形成法に比べて、露光前に
水洗乾燥が必要なため、工程が多くなるという問題がち
るが、いずれも同様の画像が得られる。Alternatively, in addition to the above, the image forming material shown in FIG. 1 may be sequentially subjected to reduction treatment to prevent generation of metal development nuclei, pattern exposure treatment, and physical development treatment in this order. Compared to the image forming method described above, this method requires washing with water and drying before exposure, so there is a problem that the number of steps is increased, but the same image can be obtained in either case.
以上のような画像形成材料、画像形成法は次のような多
くの利点を有する。The image forming materials and image forming methods described above have many advantages as follows.
即ち、光透過濃度が4以上もあり必要に応じて階調のあ
る黒色画像が形成可能であり、現像抑制剤の溶解系を用
いるため解像力も高く、銀塩写真法による画像と代替し
得る画像が得られる。又、画像は、金属画像であるため
、赤血塩とチオ硫酸ナトリウムからなるファーマー減力
液、コダックR−4などの減力液を用いて修正が可能で
ある。このような特徴を生かして上記画像材料は、リス
フィルムの代替物あるいはマスク月などとして使用1]
能である。まだ物理現像を、たとえば第1現像をホウ素
系還元剤を用いたニッケルメッキ浴で、第2現像を次亜
リン酸ナトリウムを還元剤を用いた65℃から90℃の
高温ニッケルメッキ浴又は銅メッキで高速メッキする条
件で行えば、バインダー表面に金属光沢を持つ金属画像
を形成できる。しかも得られた画像を、たとえば塩酸5
チ又は硝酸の5チ水溶液で5分間処理することにょシ非
画像部のバインダーを選択的に除去できるためプリント
基板としても使用が可能である。In other words, it has a light transmission density of 4 or more, and can form a black image with gradations as required. Also, since it uses a development inhibitor dissolution system, it has high resolution, and can be used as an alternative to images produced by silver salt photography. is obtained. Furthermore, since the image is a metal image, it can be corrected using a reducing solution such as Farmer's reducing solution consisting of red blood salt and sodium thiosulfate, or Kodak R-4. Taking advantage of these characteristics, the above image materials can be used as a substitute for lithium film or as a mask.
It is Noh. For example, the first development is performed in a nickel plating bath using a boron-based reducing agent, and the second development is performed in a high temperature nickel plating bath at 65 to 90°C using a reducing agent containing sodium hypophosphite or copper plating. If plating is performed under high-speed plating conditions, a metallic image with metallic luster can be formed on the binder surface. Moreover, the obtained image can be used for example with hydrochloric acid 5
Since the binder in the non-image area can be selectively removed by treating with a 5-chloride or nitric acid aqueous solution for 5 minutes, it can also be used as a printed circuit board.
以上のような画像形成材料に対して現像処理を自動的に
行なうための装置を本発明者等は実願昭57−239F
14号において提案してし)る。The present inventors have developed a device for automatically carrying out development processing on the above image forming materials.
14).
この装置は還元剤を含んでなる還元液を貯溜した槽、還
元剤及び金属化合物を含んでなる現像液を貯溜した槽等
を一方向に連設して各検問および各槽内に多数のローラ
とガイドからなる画像形成材料の搬送路を形成してなり
、上記ローラを駆動させることにより潜像の形成された
画像形成材料を走行させつつ上記各槽中の処理液に浸漬
しようというものである。This device consists of a tank that stores a reducing solution containing a reducing agent, a tank that stores a developer solution that contains a reducing agent and a metal compound, etc., which are connected in one direction, and a large number of rollers are installed in each tank. By driving the rollers, the image forming material on which the latent image has been formed travels and is immersed in the processing liquid in each tank. .
この装置を用いる事により、シート状又は連続状の画像
形成材料を自動的に現像処理し、かつ良好な画像が得ら
れるものの、各貯溜槽は処理液を単に溜め置くだけの構
成となっているから処理枚数の増加と共に、還元剤、金
属の消費によシ、画像濃度の低下が生じる。・又現像液
は一般に金属の析出速度を高める為、アンモニア、Na
OH等によるアルカリ系のものが多く用し)られ、上記
画像材料の現像においても、上記のアルカリ系のもので
、カプリのない高濃度の画像が迅速に得られる。[2か
しながら、このアルカリ糸、とくにアンモニアを用いる
場合は、pHを一定に保たなければ、現像速度を制御で
きず良好な画像が得られない。By using this device, sheet-like or continuous image-forming materials can be automatically developed and good images can be obtained, but each storage tank is configured to simply store processing liquid. As the number of sheets processed increases, the reducing agent and metal are consumed, resulting in a decrease in image density.・Also, the developer generally contains ammonia, Na, etc. to increase the metal precipitation rate.
Alkaline materials such as OH are often used), and in the development of the above-mentioned image materials, high-density images without capri can be quickly obtained using the above-mentioned alkaline materials. [2] However, when using this alkaline thread, especially ammonia, unless the pH is kept constant, the development speed cannot be controlled and good images cannot be obtained.
本発明は、以」−のような処理液の疲労に伴なう諸問題
を解消せんとするものであり、前記の現像液中の金属イ
オン濃度、PIIを測定し5その値により現像浴に対し
て、金属化合物、還元剤。The present invention aims to solve the following problems associated with fatigue of the processing solution.The present invention measures the metal ion concentration and PII in the developer described above, and uses the values to determine the concentration of the developing bath. On the other hand, metal compounds and reducing agents.
pH制御剤を補給しかつ並行して還元浴中の還元剤をも
補給する事により、8槽の成分をある一定範囲に制御す
るようにしたことを特徴とするものである。The system is characterized in that the components in the eight tanks are controlled within a certain range by replenishing the pH control agent and, at the same time, replenishing the reducing agent in the reducing bath.
以下、図面に基いて本発明に係る現像処理装置の一実施
態様につき説明する。 ゛第5図は現像処理装置の
概略図である。DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a developing processing apparatus according to the present invention will be described below based on the drawings.゛FIG. 5 is a schematic diagram of the developing processing apparatus.
図において、 (20)は還元剤溶液を貯溜した還元槽
、(22)は還元剤及び金属化合物等を含んでなる現像
液を貯溜した現像槽である。この各槽中に潜像を有する
画像形成材料(第2図)が順次浸漬され、現像処理がガ
される。In the figure, (20) is a reducing tank in which a reducing agent solution is stored, and (22) is a developing tank in which a developing solution containing a reducing agent, a metal compound, etc. is stored. An image forming material (FIG. 2) having a latent image is sequentially immersed in each tank and subjected to development processing.
還元槽(20)には予備槽(24)が導管(26)を介
して連結されている。そして、槽(20)には例えば還
元用還元剤としてナイフラッド7544−2(奥野製薬
社製)の5倍希釈水溶液が貯溜され、槽(24)にはそ
の原液が貯溜されている。導管(26)には回転数又は
回転時間を制御できるポンプ(28)及び流量調整弁(
30)が設けられている。A reserve tank (24) is connected to the reduction tank (20) via a conduit (26). The tank (20) stores, for example, a 5-fold diluted aqueous solution of Knife Lad 7544-2 (manufactured by Okuno Pharmaceutical Co., Ltd.) as a reducing agent, and the tank (24) stores its undiluted solution. The conduit (26) is equipped with a pump (28) that can control the rotation speed or rotation time, and a flow rate adjustment valve (
30) is provided.
現像! (22)には三つの予備槽(32) (34)
(36)が三木の導管(38) (40) (42)
を介:して連結されるが、これらの導管は槽(22)の
手前で一本の導管(44)に合流している。これによシ
、上記三つの槽内の三種の液体は混合されつつI!(2
2)中に流入し。developing! (22) has three reserve tanks (32) (34)
(36) is Miki's conduit (38) (40) (42)
These conduits merge into a single conduit (44) before the tank (22). As a result, the three types of liquids in the three tanks are mixed and I! (2
2) Flow inside.
槽内においては均一に分散することとなる。It will be uniformly dispersed in the tank.
こノ場合、槽(22)にはノンアンモン化学ニッケルA
(奥野製薬社製)と同B(同社製)の1/1混合液の4
倍希釈水溶液が入れられており、予備槽(34)には現
像用還元剤であるノンアンモン化学ニッケルBの原液が
、予備槽(36)には現像用金属化合物溶液であるノン
アンモン化学ニッケルAの原液が、予備槽(32)には
pH調節剤であるNa0)4水溶液(例えばpH==
11)が入れられている。上記導管(38) (40)
(42)には各々回転数又は回転時間制御型ポンプ(
44) (46) (48)及び流量調整弁(50)
(52) (54)が設けられている。In this case, the tank (22) contains non-ammony chemical nickel A.
(manufactured by Okuno Pharmaceutical Co., Ltd.) and 1/1 mixture of the same B (manufactured by the same company).
A doubly diluted aqueous solution is placed in the reserve tank (34), and the reserve tank (34) contains a stock solution of non-ammony chemical nickel B, which is a reducing agent for development, and the stock solution of non-ammony chemical nickel A, which is a metal compound solution for development, is placed in the reserve tank (36). However, the preliminary tank (32) contains a pH adjuster Na0)4 aqueous solution (for example, pH==
11) is included. The above conduit (38) (40)
(42) are respectively rotation speed or rotation time controlled pumps (
44) (46) (48) and flow rate adjustment valve (50)
(52) (54) are provided.
また、槽(22)には現像液を循環さ−1かるだめの管
#(51)が設けられておシ、その一端は上記導%’(
44)に接続されている。導管(44)から来る液体は
一部がN4(22)の方へ直に流入し、残部が管路(5
0)中に入ってポンプ(56)により圧送され。In addition, the tank (22) is provided with a tube # (51) for circulating the developer, one end of which is connected to the above-mentioned conductor %' (
44). Part of the liquid coming from conduit (44) flows directly towards N4 (22), and the remainder flows into conduit (5).
0) and is pumped by the pump (56).
フィルタ(58)で口過されて槽(22)中に流入する
ことになる。従って、上記予備槽(32) (34)
(36)からの液体はより均一に混合されて411’/
(22)内に貯溜され、現像処理に供される。It passes through a filter (58) and flows into the tank (22). Therefore, the above preliminary tanks (32) (34)
The liquid from (36) is more uniformly mixed and 411'/
(22) and subjected to development processing.
その他、(6o)は徘液貯溜槽であシ、槽(20)(2
2)からオーバーフローした液体を受けるためのもので
ある。In addition, (6o) is a floating liquid storage tank, tank (20) (2
This is to receive the liquid that overflows from 2).
ここで、本発明は槽(2g)(22)中の処理液の疲労
に伴ない予備槽(24) (32) (34) (36
)から自動的に消費物質を槽中に供給するために、槽(
22)から現像液を一部取り出してそのpH測定及び金
属イオン濃度測定を行ない、その結果に基づいて上記ポ
ンプ(28) (44) (46) (48)を駆動さ
せ消費量を補給するようにしている。Here, in the present invention, the preliminary tank (24) (32) (34) (36
) to automatically feed consumable substances into the tank from the tank (
A portion of the developer is taken out from 22) and its pH and metal ion concentration are measured, and based on the results, the pumps (28), (44), (46), and (48) are driven to replenish the consumed amount. ing.
これは次のよう力本発明者等の知見に基づくものである
。This is based on the findings of the present inventors as follows.
すなわち、画像形成材料の現像条件は現像液のpH1全
1金属イオン濃還元剤の濃度及び還元槽中の還元剤の濃
度の主として四つの因子によシ左右される。そして、こ
のうち金属イオン濃度及び還元剤の濃度は現像面積と関
連して変化し、pHは現像中における現像液内のアルカ
リ成分の蒸発(アンモニアをl)H調節剤とした場合)
あるいは疲労(水酸化ナトリウムをpH調節剤とした場
合)に伴なって変化し、その様子は第6図で例示される
。That is, the developing conditions for the image forming material are mainly influenced by four factors: pH 1 of the developer, concentration of the metal ion-concentrated reducing agent, and concentration of the reducing agent in the reducing tank. Of these, the concentration of metal ions and the concentration of the reducing agent change in relation to the development area, and the pH is the evaporation of alkaline components in the developer during development (when ammonia is used as a H regulator).
Alternatively, it changes with fatigue (when sodium hydroxide is used as a pH adjuster), and the situation is illustrated in FIG.
第6図は水酸化ナトリウ、ム系化学ニッケル現像液およ
びシバニッケル還元液(奥野製薬社製)の画像形成材料
処理面積に対する疲労度の変化を表わしており、次のよ
うな手順で作成されている。Figure 6 shows the changes in the degree of fatigue with respect to the processing area of the image forming material using sodium hydroxide, a mu-based chemical nickel developer, and a Siba nickel reducing solution (manufactured by Okuno Pharmaceutical Co., Ltd.). There is.
(1)下記組成の感材塗液を上から順次混合調製し。(1) Mix and prepare a photosensitive material coating liquid having the following composition in order from above.
あらかじめ下引き処理されたポリエステルフィルム(東
し製、ルミラーQ、 −82)上にミャバー+36によ
シ塗布し、乾燥する。Myabar+36 was applied onto a polyester film (Lumirror Q, -82 manufactured by Toshi Co., Ltd.) that had been subbed in advance and dried.
(2)上記画像形成材料を超高圧水銀灯で露光後(50
mJ/c+li)、181nch /9)−のスピード
で現像処理する。(2) After exposing the above image forming material with an ultra-high pressure mercury lamp (50
Development processing is carried out at a speed of mJ/c+li), 181nch/9)-.
(3)連続して現像処理をするにつれて現像液中の、還
元剤濃度、Niイオン濃度及びpH並びに還元槽中の還
元剤濃度を所定の現像面積毎に測定しグラフ化する。(3) As the development process continues, the reducing agent concentration, Ni ion concentration, and pH in the developer, as well as the reducing agent concentration in the reducing tank, are measured for each predetermined development area and graphed.
(4)許容光透過濃度が得られる現像面積の限界値を0
.8ηlと設定する。グラフにノ1(す実験例において
、現像液17I当り0.8 m’の画像部面積を処理す
れば、現像液中の還元剤(次亜燐酸ソーダ)の相対濃度
は0.6に減少し、還元液中の還元剤(ホウ素系)の相
対濃度は0.98に減少している。まだ、Niイオンの
相対濃度は0.88に低下し、pHは85に低下してい
る。(4) Set the limit value of the development area to obtain the allowable light transmission density to 0.
.. It is set to 8ηl. In the experimental example shown in the graph, if an image area of 0.8 m' is processed per 17 I of developer, the relative concentration of the reducing agent (sodium hypophosphite) in the developer decreases to 0.6. , the relative concentration of the reducing agent (boron-based) in the reducing solution has decreased to 0.98. Still, the relative concentration of Ni ions has decreased to 0.88 and the pH has decreased to 85.
なお、相対濃度は使用前の還元液又は現像液中における
各成分(Vl)で使用後における各成分(Vl )を夫
々割って求めている。The relative concentration is determined by dividing each component (Vl) after use by each component (Vl) in the reducing solution or developer before use.
第6図かられかるように、通常例えばリスフィルム用に
望まれる画像形成材料の光透過濃度(35以上)を得る
ために要求される現像面積Ω範囲内(0,0〜0.8
mVlりにおいては、現像液中の歯イオン濃度及び還元
剤濃度ならびに還元液中の還元剤の三者はほぼ一次関数
の関係にある。そして、一般に、金属イオン濃度の測定
は比較的簡島かつ迅速に行ないつるが、還元剤濃+Xは
測定に長時間を要する。As can be seen from FIG. 6, the development area is within the Ω range (0.0 to 0.8
In mVl, the tooth ion concentration and reducing agent concentration in the developing solution and the reducing agent in the reducing solution have an approximately linear function relationship. Generally, metal ion concentration can be measured relatively easily and quickly, but reducing agent concentration +X requires a long time to measure.
そこで本発明においては、現像液中における上記Niイ
オン等の金属イオンの濃度及びpHを継続して又は定期
的に測定し、それらの値をそれらの適正値の下限(例え
ば相対濃度0.88.PI18.5)と比較する。そし
て適正値よりも低ければポンプ(2B) (44) (
46) (48)を回転さセて各予備槽(24) (3
2) (34) (3(3)から新鮮な現像用還元剤溶
液、同金属化合物溶液およびl)H調節剤ならびに還元
用還元剤溶液を槽(20X22)の中に夫々送シ込む。Therefore, in the present invention, the concentration and pH of metal ions such as Ni ions in the developer are continuously or periodically measured, and these values are set to the lower limits of their appropriate values (for example, relative concentration 0.88. Compare with PI18.5). And if it is lower than the appropriate value, pump (2B) (44) (
46) (48) and rotate each reserve tank (24) (3
2) (34) (From 3(3), pump the fresh developing reducing agent solution, same metal compound solution, and l) H regulator and reducing reducing agent solution into the tank (20×22), respectively.
これによりイオン濃度及びpi(が適正値の上限(例え
ば相対濃度0.95. p)! 1o )に到達したこ
とが検知されればこれらポンプを停止することとしてい
る。そして、この場合流用調整弁(28) (46)
(48)の開度を第6図の三本の直線部分(A、B、C
)のこう配に応じて調整するか又はポンプの運転時間も
し7くは回転数を」二記こう配に応じて調整することと
している。As a result, if it is detected that the ion concentration and pi (reach the upper limit of the appropriate value (for example, relative concentration 0.95.p)! 1o), these pumps are stopped. In this case, the diversion control valve (28) (46)
The opening degree of (48) is determined by the three straight lines (A, B, C) in Figure 6.
), or the operating time or rotational speed of the pump is adjusted according to the gradient.
第5図において、(62)は上記金属イオンm度等を測
定するだめの導管であって、途中にポンプ(64)を備
え、またpH測定装値(66)、金属イオン濃度測定装
置(68)を備えている。測定器から排出された液は排
液貯溜槽(70)中に溜められる。In FIG. 5, (62) is a conduit for measuring the metal ion concentration, etc., and is equipped with a pump (64) in the middle, as well as a pH measuring device (66) and a metal ion concentration measuring device (68). ). The liquid drained from the measuring device is collected in a drain liquid reservoir (70).
金属イオン濃度測定装置(68)は酸化還元電位法、分
光吸収法又は滴定法等の所望の手法金利用した市販のも
の(例えば、年間理化研究所社製PP−4)に上記適正
値と比較して所定の信号を出力する比較器(同社gPp
−coN−i)等(図示せず)を付加して構成される。The metal ion concentration measuring device (68) is a commercially available device using a desired method such as redox potential method, spectroscopic absorption method, or titration method (for example, PP-4 manufactured by Rika Kenkyujo Co., Ltd.) and compared with the above appropriate value. A comparator (the company's gPp) that outputs a predetermined signal
-coN-i) etc. (not shown).
pH測定装置(66)は例えは(池田理化社製N P
H−550)で構成され上記と同様比較器等(図示せず
)を(fffiえてなるものである。For example, the pH measuring device (66) is (NP made by Ikeda Rika Co., Ltd.).
H-550) and a comparator (not shown) similar to the above.
次に、上記現像処理装置の作用について述べる。Next, the operation of the above-mentioned development processing apparatus will be described.
現像槽(22)及び還元槽(20)は予め現像液、還元
液で夫々満たされており、ポンプ(56)の作動によ、
!7現像液は循環している。The developing tank (22) and the reducing tank (20) are filled with a developing solution and a reducing solution in advance, respectively, and are filled with a developing solution and a reducing solution, respectively, by the operation of the pump (56).
! 7. The developer is circulating.
そこで、画像形成材料が還元槽(20)、現像槽(22
沖に順次漬けられて現像処理され、これが何枚か又は何
mかが繰り返される。Therefore, the image forming material is stored in the reducing tank (20) and the developing tank (22).
They are soaked one after another and developed, and this process is repeated for several sheets or meters.
また、ポンプ(64)が駆動され現像液が一部抽出され
測定装置(66) (68)においてPH1金属イオン
濃度が各々測定され適正値と比較される。Further, the pump (64) is driven to partially extract the developer, and the PH1 metal ion concentration is measured by the measuring devices (66) and (68), respectively, and compared with the appropriate value.
現像処理が繰返されることにより測定値が適正値よシも
低くなれば、各装置から出力があり、これによシポンプ
(44) (46) (48)が回転され、各予備槽(
32) (34) (36)からpH調整液、新鮮な還
元液、金属化合物溶液が現像槽(22)中に供給され、
文種(24)からも新鮮な還元液がポンプ(28)によ
υ還元槽(20)中に供給される。そしで、これらの補
給液によシ現像液中の鮮度が元の状態に復帰すれば、復
帰したということが金属イオン濃度及びpIIの値が適
正値に到達したということで捉えられ各ポンプ(28)
(44) (46) (48)の駆動が停止される。If the measured value becomes lower than the appropriate value due to repeated development processing, output is generated from each device, which rotates the pumps (44), (46), and (48), and discharges each reserve tank (
32) (34) A pH adjusting solution, a fresh reducing solution, and a metal compound solution are supplied from (36) into the developing tank (22),
Fresh reducing liquid is also supplied from the container (24) into the υ reduction tank (20) by the pump (28). Then, if the freshness in the developer solution returns to its original state with these replenishing solutions, recovery is recognized as the metal ion concentration and pII value reaching the appropriate values, and each pump ( 28)
(44), (46), and (48) are stopped.
かくして、以上のような動作が繰返されることにより自
動的に適正なる現像を常に行なうことができる。In this way, by repeating the above-described operations, proper development can always be carried out automatically.
なお、現像処理された画像形成材料はこの後必要に応じ
て硬膜、洗浄の各処理に伺される。The developed image forming material is then subjected to hardening and washing processes as required.
以上のように1本発明に係る現像処理装置は還元剤及び
金属化合物を含んでなる現像液を貯溜した現像槽と、還
元剤を含んでなる還元液を貯溜した還元槽とを備えてな
る画像形成材料の現像処理装置において、上記現像槽中
に補給するpH調整剤、還元剤及び金属化合物を夫々導
く少なくとも三本の導管を設けて、これら導管を途中で
一本の導管として上記現像槽に連結し、上記還元槽中に
補給する還元剤を導く導管を還元槽に連結し、上記現像
槽中の現像液のpH1及び金属イオン濃度を夫々測定す
るpH測定装置、金属イオン濃度61+1定装置を付設
し、上記各導管には上記pH測定装置及び金属イオン濃
度測定装置による測定値が適正値を下回れればその出力
を受けて回転するポンプを設け、さらに上記現像槽につ
寿がろ一本の導管から現像槽の他の部分に到る導管とポ
ンプとで構成される現像液循環装置を設けてなることを
特徴とするものである。As described above, the development processing apparatus according to the present invention comprises a developing tank storing a developing solution containing a reducing agent and a metal compound, and a reducing tank storing a reducing solution containing a reducing agent. In the development processing apparatus for forming materials, at least three conduits are provided to respectively guide a pH adjusting agent, a reducing agent, and a metal compound to be replenished into the developer tank, and these conduits are used as one conduit midway into the developer tank. A pH measuring device and a metal ion concentration 61+1 determining device are connected to the reducing tank, and a conduit for guiding a reducing agent to be supplied into the reducing tank is connected to the reducing tank, and a pH measuring device and a metal ion concentration 61+1 determining device are connected to the reducing tank, respectively, and measure the pH 1 and metal ion concentration of the developer in the developing tank. Each of the conduits is equipped with a pump that rotates in response to the output of the pH measuring device and the metal ion concentration measuring device when the measured values fall below the appropriate values, and a pump is attached to the developing tank. The invention is characterized in that it is provided with a developer circulation device comprising a pump and a conduit extending from the conduit to other parts of the developer tank.
従って、本発明によれば常に適正な状態にある還元法及
び現像液を現像処理に供することができるものである。Therefore, according to the present invention, it is possible to use a reduction method and a developer that are always in an appropriate state for development processing.
また、還元剤等は途中で混合して現像槽中に補給するこ
とができるので、液の補給中にも適正なる現像処理を打
力うことができる。Furthermore, since the reducing agent and the like can be mixed during the process and replenished into the developing tank, appropriate development processing can be carried out even during the replenishment of the liquid.
さらに、上記補給の一部を収り出して現像槽中に送るよ
うにしたから現像槽中での現像液の均一化を図シうると
共に、そのpH等の測定を適正に行なうことができると
いう効果を奏する。Furthermore, since a portion of the above replenishment is collected and sent to the developer tank, it is possible to make the developer solution uniform in the developer tank, and to properly measure its pH, etc. be effective.
第1図ないし第4図は本発明に係る現像処理装置で処理
される画像形成材料の一例を示すもので、第1図は画像
焼付前の画像形成44料の模式断面図、第2図は画像焼
付中の同(;0断面し1、第3図は現像処理装置で還元
処理さ)またものの同様断面図、第4図は視像処理され
たものの同様断面図である。第5図は本発明にイ、′^
ろ現像処理装置ρ−例の構成説明図であ7.)。
第6図は現像液の疲労度測定グラフの一例であり、1 to 4 show an example of an image forming material processed by the development processing apparatus according to the present invention. FIG. 1 is a schematic cross-sectional view of the image forming material 44 before image printing, and FIG. A similar cross-sectional view of the same material during image printing (;0 cross-section; FIG. 1 and FIG. 3 are subjected to reduction processing in a developing processing device), and FIG. 4 is a similar cross-sectional view of the same material subjected to visual processing. Figure 5 is related to the present invention.
FIG. 7 is an explanatory diagram of the configuration of a filter development processing apparatus ρ-example. ). Figure 6 is an example of a developer fatigue level measurement graph.
Claims (1)
現像槽と、還元剤を含んでなる還元液を貯溜した還元槽
とを備えてなる画像形成材料の現像処理装置において、
上記現像槽中に補給するPH調整剤、還元剤及び金属化
合物を夫々尋く少なくとも三本の導管を設けて、これら
導管を途中で一本の導管として上記現像槽に連結し、上
記74元槽中に補給する還元剤を導く導管を還元槽に連
結し、上記現像槽中の現像液のPH及び金属イオンa度
を夫々測定するPal測定装置、金属イオン濃度測定装
置を有膜し、上記各導管には上記py al!l定装置
及び金属イオン濃度測定装置による測定値が適正値を下
回れればその出力を受けて回転するポンプを設け、さら
に上記現像槽につながる一本の導管から現像槽の他の部
分に到る導管とポンプとで構成される現像液循環装置を
設けてなることを特徴とする上記装置。In an image forming material development processing apparatus comprising a developing tank storing a developing solution containing a reducing agent and a metal compound, and a reducing tank storing a reducing solution containing a reducing agent,
At least three conduits are provided for respectively supplying a pH adjuster, a reducing agent, and a metal compound to be supplied into the developer tank, and these conduits are connected to the developer tank as one conduit midway, and the 74-component tank is connected to the developer tank. A conduit for introducing a reducing agent to be supplied into the developer tank is connected to the reduction tank, and a Pal measurement device and a metal ion concentration measurement device are installed to measure the pH and metal ion concentration of the developer in the developer tank, respectively. The conduit contains the above py al! A pump is provided which rotates in response to the output when the measured values by the 1-determining device and the metal ion concentration measuring device fall below the appropriate values, and a conduit that connects to the developer tank leads to other parts of the developer tank. The above-mentioned device is characterized in that it is provided with a developer circulation device composed of a conduit and a pump.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17595082A JPS5965846A (en) | 1982-10-06 | 1982-10-06 | Developing device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17595082A JPS5965846A (en) | 1982-10-06 | 1982-10-06 | Developing device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5965846A true JPS5965846A (en) | 1984-04-14 |
Family
ID=16005079
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17595082A Pending JPS5965846A (en) | 1982-10-06 | 1982-10-06 | Developing device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5965846A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01140156A (en) * | 1987-11-27 | 1989-06-01 | Fuji Photo Film Co Ltd | Method for replenishing replenisher to automatic developing machine |
US5439784A (en) * | 1990-04-18 | 1995-08-08 | Eastman Kodak Company | Method and apparatus for photographic processing solution replenishment |
-
1982
- 1982-10-06 JP JP17595082A patent/JPS5965846A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01140156A (en) * | 1987-11-27 | 1989-06-01 | Fuji Photo Film Co Ltd | Method for replenishing replenisher to automatic developing machine |
US5439784A (en) * | 1990-04-18 | 1995-08-08 | Eastman Kodak Company | Method and apparatus for photographic processing solution replenishment |
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