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JPS59229499A - Plating method - Google Patents

Plating method

Info

Publication number
JPS59229499A
JPS59229499A JP10238583A JP10238583A JPS59229499A JP S59229499 A JPS59229499 A JP S59229499A JP 10238583 A JP10238583 A JP 10238583A JP 10238583 A JP10238583 A JP 10238583A JP S59229499 A JPS59229499 A JP S59229499A
Authority
JP
Japan
Prior art keywords
plating
rack
electrolytic
copper
stripping solution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10238583A
Other languages
Japanese (ja)
Inventor
Sumio Uragami
浦上 純生
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SANWA BOUSEI KK
Original Assignee
SANWA BOUSEI KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SANWA BOUSEI KK filed Critical SANWA BOUSEI KK
Priority to JP10238583A priority Critical patent/JPS59229499A/en
Publication of JPS59229499A publication Critical patent/JPS59229499A/en
Pending legal-status Critical Current

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  • Manufacturing Of Printed Wiring (AREA)

Abstract

PURPOSE:To form a plating film always having a uniform thickness on a material to be plated in the stage of copper plating by incorporating a stage for removing the copper deposited on a rack for suspending the material to be plated into a plating line. CONSTITUTION:A stage for removing the copper deposited on a rack for suspending a printed wiring board is incorporated in a plating line and the rack from which the deposited copper is thoroughly removed in always used in the stage of electroplating copper on the printed wiring board, etc. The rack from which the wiring board completed of plating is removed is subjected to an electrolytic treatment in an electrolytic stripping liquid contg. >=0.3mol/l oxidixing agent such as HNO3, >=0.3mol/l halogenic acid such as HCl or the salt thereof and >=0.3mol/l short chain carboxylic acid or oxycarboxylic acid such as formic acid as an anode and is further dipped in a dipping and stripping soln. contg. 150ml/l concd. HNO3 to strip and remove thoroughly the deposited copper sticking on the rack. Such rack is used for the succeeding plating. The less number of the racks are required and the plating film of always a uniform thickness is formed on the wiring board to be plated.

Description

【発明の詳細な説明】 本発明は特にプリント配線基板のめつきに好適に採用さ
れるめっき方法に関し、更に詳述するとプリント配線基
板等の被めっき物を吊持するめっき用ラックに析゛出し
た不要な析出物を短時間で完全にかつ連続的に剥離する
ことにより、不要な析出物が剥離除去されて再生された
ラックを用いて連続的にめっきを行なう方法に関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a plating method that is particularly suitable for plating printed wiring boards. The present invention relates to a method of continuously performing plating using a regenerated rack from which unnecessary precipitates have been peeled off and removed, by completely and continuously peeling off unnecessary precipitates in a short period of time.

従来、プリント配線基板のめつき方法としては、銅張積
層板の所用部分をドリリングしてスルーホールを形成し
、このスルーホール内を化学銅めっきにより導電化した
後銅張積層板の全体に電気銅めっきを施したり、或いは
化学銅めっき後、銅張積層板の所用部分をレジスト躾に
よりマスキングすると共に、非マスキング部分に電気銅
めっきを施す方法が広く採用されている。この場合、電
気−2− 銅めっき被膜の厚さは各部分においてできるだ【プ均一
であることが望まれ、このため邪摩板等の補助具を用い
たり、陽極板の配置位置、個数、形状、或いはプリント
配線基板を吊持するめっき用ラックの形状、プリント配
線基板に対する接点のとり方などが種々工夫されている
。即ち、電気めっきにおいては、被めっき物にどうして
も高電流密度部分と低電流密度部分が生じるので、これ
に起因してめっき膜厚の厚い部分と薄い部分が生じるが
、その膜厚差が大きすぎる場合、とりわけ低電流密度部
分に所定時間めっきを行なっても所望するめつき膜厚が
得られない場合は、プリント配線基板の品質に問題が生
じ、また電気銅めっき後、銅エツチング処理を行なう場
合において、エツチング不足やオーバーエツチングの問
題が生じるため、電気銅めっき被膜の厚さをプリント配
線基板の各部分において可及的に均一化することが求め
られていた。
Conventionally, the method for plating printed wiring boards is to drill the required part of a copper-clad laminate to form a through hole, make the through hole conductive by chemical copper plating, and then apply electricity to the entire copper-clad laminate. A widely used method is to apply copper plating or, after chemical copper plating, to mask the required portions of the copper-clad laminate using a resist, and to apply electrolytic copper plating to the unmasked portions. In this case, it is desirable that the thickness of the copper plating film be uniform in each part, and for this reason, it is necessary to use an auxiliary tool such as a sacrificial plate, or to adjust the position, number, and position of the anode plates. Various improvements have been made to the shape, the shape of the plating rack that suspends the printed wiring board, the way to make contact with the printed wiring board, etc. In other words, in electroplating, there are inevitably high current density areas and low current density areas on the object to be plated, which results in thicker and thinner areas of the plating film, but the difference in thickness is too large. If the desired plating film thickness cannot be obtained even after plating for a certain period of time, especially in low current density areas, problems may arise in the quality of the printed wiring board. Since problems of insufficient etching and overetching occur, it has been desired to make the thickness of the electrolytic copper plating film as uniform as possible in each part of the printed wiring board.

更に、めっき毎にめつき膜厚が相違することも望ましい
ことではなく、このため常に一定の膜厚−3− にめっきすることにより、プリント配線基板の品質を一
定化することも求められていた。
Furthermore, it is not desirable for the plating film thickness to vary from plating to plating, and for this reason, it has been required to maintain a constant quality of printed wiring boards by always plating to a constant film thickness. .

本発明者は、プリント配線基板にめっきを行なうに際し
、プリント配線基板の各部分におけるめっき膜厚を可及
的に均一化すると共に、めっき毎に膜厚がばらつかず、
常にほぼ一定の膜厚にめっきすることについて鋭意検討
を行なった結果、陽極板の配置位置などやプリント配線
基板を吊持するめっき用ラックの形状、プリント配線基
板に対する接点のとり方などを考慮する必要があること
は勿論であるが、とりわけてめっき用ラックに析出した
析出物がめつき膜厚を均一化し、一定化する上で大きな
影響を及ぼしていることを知見した。
When plating a printed wiring board, the inventor of the present invention aims to make the plating film thickness as uniform as possible in each part of the printed wiring board, and to prevent the film thickness from varying from plating to plating.
As a result of intensive study on plating to a nearly constant thickness at all times, we found that it was necessary to consider factors such as the placement of the anode plate, the shape of the plating rack that suspends the printed wiring board, and how to make contact with the printed wiring board. Of course, the present inventors found that precipitates deposited on the plating rack have a great influence on making the plating film thickness uniform and constant.

即ち、ラックはプリント配線基板をめっき液中に保持す
ると共に陰極ブスバーからの電気をプリント配線基板に
伝える仲介となるものであるため、金属材料により形成
されているが、その表面の大部分はプラスチックゾル等
の絶縁物で被覆され、めっきが析出しないようになって
いる。しかしながら、ラックのプリント配線基板を保持
する部分−4− などは金属材料が露呈されており、これらの金属露呈部
分にはめっきが析出する。このめっきの析出したラック
をそのまま析出物を剥離することなく再三再四使用する
場合は、プリント配線基板の各部分におけるめつき膜厚
に大きな差が生じたり、電流密度やめつき時間等の条件
を一定にしておいてもめつき毎にめつき膜厚にかなりの
差が生じるなどの不都合が起り易いことを知見した。
In other words, the rack holds the printed wiring board in the plating solution and serves as an intermediary for transmitting electricity from the cathode busbar to the printed wiring board, so it is made of metal, but most of its surface is made of plastic. It is coated with an insulator such as sol to prevent plating from depositing. However, the metal material is exposed in the portions -4- of the rack that hold the printed wiring boards, and plating is deposited on these exposed metal portions. If the rack with this plating deposited on it is used again and again without peeling off the deposits, there may be large differences in the plating film thickness on each part of the printed wiring board, and conditions such as current density and plating time may be changed. It has been found that even if the thickness is kept constant, problems such as considerable differences in the plating film thickness between platings are likely to occur.

このため、めっき毎にめっき析出物のないラックを使用
することが望まれたが、従来行なわれているラックから
のめつき析出物剥離方法を採用することは効率的ではな
く、めっき作業の能率化を損なう結果となることが認め
られた。この点につき更に詳述すると、従来より種々の
めつき剥離液が提案されている。しかし、これらの剥離
液は剥離液が新しいうちは剥離速度も比較的大きいが、
直ぐに老化し易く、老化すると剥離速度の低下が生じる
ものであった。また従来、ラックに析出した析出物の剥
離除去は、通常めっきラインとは別個に剥離槽を設け、
めっき作業とは無関係にめつ−5− き作業の終了後やラックを数回使用した後などに長時間
剥離液中にラックを放置していたちのであるが、このよ
うな剥離方法は効率が悪く、また多数のラックを必要と
するものであった。
For this reason, it was desirable to use racks free of plating precipitates for each plating process, but the conventional method of removing plating precipitates from racks was not efficient, and the efficiency of plating work was reduced. It was recognized that this would result in a loss of quality. To explain this point in more detail, various plating stripping solutions have been proposed in the past. However, these stripping solutions have relatively high stripping speeds when they are new;
It tends to age quickly, and aging causes a decrease in peeling speed. In addition, in the past, peeling and removal of precipitates deposited on racks was usually done by setting up a peeling tank separate from the plating line.
Regardless of the plating process, the racks are left in the stripping solution for a long time after finishing the plating job or after using the rack several times, but this stripping method is not efficient. This was bad and required a large number of racks.

本発明者は、ラックに析出した析出物の剥離除去工程を
めっきラインに組み込み、めっき毎に析出物が除去され
て再止されたラックを使用することにより、めつき膜厚
の均一化、一定化を計ることについて鋭意検討を行なっ
た結果、最終めっき工程後、めっき物を取りはずしため
つき用ラックを電解剥離液に浸漬してラックに析出した
析出物の一部を電解的に剥離し、次に残った析出物を浸
漬剥離液で溶解除去することにより、剥離液の負担が軽
減されてラックの析出物が短時間で効率よく確実に除去
され、上記目的が良好に達成されることを知見し、本発
明をなすに至ったものである。
The present inventor has incorporated a peeling and removal process for the precipitates deposited on the rack into the plating line, and by using a rack in which the precipitates are removed and re-stopped after each plating, the thickness of the plating film can be made uniform and constant. As a result of intensive study on how to remove the plating material after the final plating process, the plating rack was immersed in an electrolytic stripping solution to electrolytically remove some of the precipitate deposited on the rack. It has been found that by dissolving and removing the precipitates remaining on the rack with an immersion stripping solution, the load on the stripping solution is reduced, the precipitates on the rack are efficiently and reliably removed in a short time, and the above objectives are successfully achieved. However, the present invention has been completed.

以下、本発明につき更に詳しく説明する。     ゛
本発明は、最終のめつき工程後、めっき物が取りはずさ
れたラックを電解剥離液中に浸漬してラックに析出した
析出物の一部を電解的に剥離し、−6− 更に浸漬剥離液中に浸漬して残った析出物を完全に溶解
除去するようにしたものである。
The present invention will be explained in more detail below. In the present invention, after the final plating step, the rack from which the plated material has been removed is immersed in an electrolytic stripping solution to electrolytically peel off a portion of the precipitate deposited on the rack, and -6- further immersed. The remaining precipitates are completely dissolved and removed by immersion in a stripping solution.

ここで、本発明は特にプリント配線基板のめつきに好適
に採用され、とりわけ最終のめつき工程としてビロリン
酸相めっきや硫酸銅めっきを行なう場合、非常に有効に
適用されるものである。
Here, the present invention is particularly suitably adopted for plating printed wiring boards, and is particularly effectively applied when birophosphoric acid phase plating or copper sulfate plating is performed as the final plating step.

また、ラックの材質は必ずしも制限されないが、ステン
レススチールが好適に用いられる。
Further, the material of the rack is not necessarily limited, but stainless steel is preferably used.

本発明において、電解剥離液としては従来から知られた
種々のものが使用し得るが、特に酸化剤、ハロゲン酸又
はその塩、及び短鎖のカルボン酸もしくはヒドロキシカ
ルボン酸又はこれらの塩を含み、−が6〜8程度に調整
されたものが好ましく用いられる。この場合、酸化剤と
しては硝酸、硝酸ナトリウムや硝酸アンモニウム等の硝
酸塩、過酸化水素、二酸化マンガンなどが挙げられ、こ
れらは0.25モル/j!以上、好ましくは0.3〜0
.7モル/I!程度の濃度で使用され得る。また、ハロ
ゲン酸又はその塩としては、塩酸、塩化アンモニウムな
どが挙げられ、これらは0.3モル/−7− 1以上、好ましくは0.4〜1モル/l!程度の濃度で
使用され得る。更に、短鎖カルボン酸、オキシカルボン
酸、これらの塩としては、ギ酸、酢酸、ヒドロキシ酢酸
、これらのナトリウム塩、アンモニウム塩などが挙げら
れ、0.3モル/p以上、好ましくは0.3〜1モル/
p程度の濃度で使用され得る。なお、この電解液中には
EDTAや乳酸などの錯化剤を添加することができる。
In the present invention, various conventionally known electrolytic stripping solutions can be used, but particularly include an oxidizing agent, a halogen acid or a salt thereof, and a short-chain carboxylic acid or hydroxycarboxylic acid or a salt thereof, - is preferably adjusted to about 6 to 8. In this case, examples of the oxidizing agent include nitric acid, nitrates such as sodium nitrate and ammonium nitrate, hydrogen peroxide, and manganese dioxide, all of which contain 0.25 mol/j! or more, preferably 0.3 to 0
.. 7 mol/I! It can be used in certain concentrations. Further, examples of the halogen acid or its salt include hydrochloric acid and ammonium chloride, and these have a rate of 0.3 mol/-7-1 or more, preferably 0.4 to 1 mol/l! It can be used in certain concentrations. Further, examples of short-chain carboxylic acids, oxycarboxylic acids, and salts thereof include formic acid, acetic acid, hydroxyacetic acid, sodium salts and ammonium salts thereof, and 0.3 mol/p or more, preferably 0.3 to 1 mole/
It can be used in concentrations as low as p. Note that a complexing agent such as EDTA or lactic acid can be added to this electrolytic solution.

この電解剥離液を用いてラック析出物を電解剥離する場
合は、ラックを陽極にして電解を行なうもので、この場
合陽極電流密度は5〜40A/dイ、特に30〜4OA
/dnとすることができる。なお、液温は室温〜60℃
、特に40〜50℃とすることができる。また、剥離に
際しては空気撹拌を行なうことが好適である。
When electrolytically stripping rack deposits using this electrolytic stripping solution, electrolysis is carried out using the rack as an anode. In this case, the anode current density is 5 to 40 A/d, especially 30 to 4 OA.
/dn. In addition, the liquid temperature is room temperature to 60℃
, in particular 40 to 50°C. Furthermore, it is preferable to perform air agitation during peeling.

更に、この電解剥離液は連続循環濾過により沈殿物を除
去すると共に、消耗する薬品を補給しつつ使用すること
が好適であり、これにより電解剥離液を廃棄することな
く使用し得るものである。
Furthermore, it is preferable to use this electrolytic stripping solution while removing precipitates through continuous circulation filtration and replenishing consumable chemicals, so that the electrolytic stripping solution can be used without being discarded.

即ち、従来はこの種の電解剥離液は老化すると廃−8− 棄していたものであるが、上記方法を採用することによ
り、廃棄せずに使用することができ、従って自動めつき
ラインにこの電解剥離液を組み入れることができるもの
である。
In other words, conventionally, this type of electrolytic stripper was discarded as it aged, but by adopting the above method, it can be used without being discarded, and therefore it can be used in automatic plating lines. This electrolytic stripping solution can be incorporated.

この場合、電解剥離液の循環速度は、電解剥離槽中の剥
離液が1時間に1〜3回入れ換わる程度が好まじり。ま
た、濾過は通常の濾過機を用いて行なうこともできるが
、電解剥離液を沈降槽に導びき、ここで沈殿物を自然沈
降さける方式が好適であり、これにより濾過機の濾過体
に目詰りを生じさせるなどの不都合がなく、連続的に沈
殿物を自然沈降させて除去し、沈殿物が除去された剥離
液を電解剥離槽に返送することができる。
In this case, the circulation speed of the electrolytic stripping solution is preferably such that the stripping solution in the electrolytic stripping tank is replaced 1 to 3 times per hour. Although filtration can be carried out using a normal filter, it is preferable to introduce the electrolytic stripping solution into a sedimentation tank and allow the precipitate to settle there naturally. There is no inconvenience such as clogging, and the precipitate can be continuously removed by natural settling, and the stripping solution from which the precipitate has been removed can be returned to the electrolytic stripping tank.

上記の電解剥離液を使用し、上述した条件で電解剥離を
行なう場合、その剥離時間は、ラックの析出物の種類や
厚さにより相違するが、プリント配線基板に35μm程
度の電気銅めっきを行なう場合であれば、15〜30分
程度の程度剥離時間とすることができる。この場合、こ
の電解剥1111程において、ラックの析出物が完全に
剥離除去さ・−〇  − れる必要はなく、析出物の90〜98%が除去されてい
れば十分であり、残った析出物は次の浸漬剥離工程で除
去するものである。
When performing electrolytic stripping using the above electrolytic stripping solution under the above conditions, the stripping time will vary depending on the type and thickness of the deposits on the rack, but electrolytic copper plating of about 35 μm is applied to the printed wiring board. If necessary, the peeling time can be about 15 to 30 minutes. In this case, it is not necessary that the precipitates on the rack be completely peeled off and removed in this electrolytic stripping step 1111. It is sufficient that 90 to 98% of the precipitates are removed, and the remaining precipitates are removed. is to be removed in the next immersion stripping process.

本発明では、ラック析出物の電解剥離を行なった後、浸
漬剥離を行なうものであるが、浸漬剥離液としては特に
ラック析出物が銅であや場合、硝酸溶液、過酸化水素溶
液、塩化第2!溶液などが用いられる。これらのうちで
は硝酸溶液が好ましいが、硝酸溶液を用いる場合、その
濃度は濃硝酸150猷/J以上、特に200〜400w
1/jとすることがよい。、このように浸漬剥離液とし
て硝酸を使用し、かつ電解剥離液として上述したような
剥離液を使用した場合、浸漬剥離液として用いた硝酸溶
液を電解剥離液に加えることができ、それ故浸漬剥離液
(硝酸溶液)の廃棄処理がなくなり、少なくとも軽減で
きるので便利である。
In the present invention, immersion stripping is performed after electrolytic stripping of rack deposits, and the immersion stripping solution may be a nitric acid solution, a hydrogen peroxide solution, dichloromethane solution, especially when the rack deposits are copper. ! A solution or the like is used. Among these, nitric acid solution is preferable, but when using nitric acid solution, its concentration is 150 w/J or more of concentrated nitric acid, especially 200 to 400 w
It is preferable to set it to 1/j. In this way, when nitric acid is used as the immersion stripping solution and the above-mentioned stripping solution is used as the electrolytic stripping solution, the nitric acid solution used as the immersion stripping solution can be added to the electrolytic stripping solution. This is convenient because it eliminates the need to dispose of the stripping solution (nitric acid solution) and at least reduces the need for disposal.

この浸漬剥離液の処理温度は室温とすることができ、ま
た浸漬時間は3〜15分程度程度ることができる。
The treatment temperature of this immersion stripping solution can be room temperature, and the immersion time can be about 3 to 15 minutes.

以上のようにして析出物が剥離除去されたラツー  1
〇  − りは、必要により苛性アルカリ等により中和し、水洗さ
れた後、プリント配線基板等の被めっき物を吊下し、再
度めっきに使用される。
Ratu 1 with precipitates peeled off and removed as described above
〇 - After being neutralized with caustic alkali etc. if necessary and washed with water, the object to be plated such as a printed wiring board is suspended and used for plating again.

本発明のめっき方法によれば、最終のめっき工程後、め
・〕き物が取りはずされたラックを電解剥離液中に浸漬
してラックに析出した析出物の一部を電解的に剥離し、
次に浸漬剥離液中に浸漬して残った析出物を完全に溶解
除去するようにしたので、剥離液の負1nが軽減されて
比較的短時間でラックの析出物が確実に除去される。即
ち、ラックの析出物を電解剥離のみによって完全に除去
しようとする場合、1時間以上の時間を要し、しかもこ
の場合ラックの析出物の厚さは均一でなく、場所によっ
て相違しているため、ラック析出物の大半以上が電解剥
離された後でも析出物の厚い部分が完全に除去されずに
残っており、これを除去するためにかなりの時間がかか
る(通常90〜98%程度までは比較的剥離され易いが
、残りを完全に除去するには非常な時間を要するもので
ある)。
According to the plating method of the present invention, after the final plating process, the rack from which the plating and plating have been removed is immersed in an electrolytic stripping solution to electrolytically peel off a portion of the precipitate deposited on the rack. ,
Next, the rack is immersed in a stripping solution to completely dissolve and remove the remaining precipitates, so that the negative 1n of the stripping solution is reduced and the precipitates on the rack are reliably removed in a relatively short time. In other words, if you try to completely remove the deposits on the rack by electrolytic stripping alone, it will take more than one hour, and in this case, the thickness of the deposits on the rack is not uniform and varies depending on the location. Even after most of the lac deposits have been electrolytically removed, a thick part of the deposits remains without being completely removed, and it takes a considerable amount of time to remove it (usually up to 90-98%). It is relatively easy to peel off, but it takes a lot of time to completely remove the rest).

また、大半の析出物が除去され、ただわずかに残−11
一 つた2〜10%程度の析出物を除去するために電解を行
なうので、電解剥離液はいわば長時間空電解される如き
状態となり、かつこの場合の電流密麿も高いため、電解
剥離液中の薬品が無駄に消耗される上、電気も無駄に消
費されるものである。
In addition, most of the precipitates were removed, and only a small amount of -11
Since electrolysis is performed to remove a single precipitate of about 2 to 10%, the electrolytic stripping solution is in a state similar to being subjected to dry electrolysis for a long time, and the current density in this case is also high. In addition to wasting chemicals, electricity is also wasted.

更に、浸漬剥離液のみによってラック析出物を完全に剥
離する場合も長時間を要し、しかも液が急速に老化し、
除去スピードが箸しく低下するものである。これに対し
、本発明ではラックの析出物を電解剥離液が完全に除去
する必要がなく、析出物の大半、好ましくは90〜98
%程度を除去すればよいので、この電解剥離液での処理
時間が短かくなる上、薬品の無駄な消耗が少なくなり、
電解剥離液の負担が軽減されると共に、残ったわずかな
析出物を浸漬剥離液によって除去するだけであるので、
浸漬剥離液の負担が軽減し、浸漬剥離液が急速に老化し
て除去スピードが低下することがなく、短時間で残った
析出物が確実に除去される。
Furthermore, it takes a long time to completely remove lac deposits using only an immersion stripping solution, and the solution ages rapidly.
The removal speed is significantly reduced. In contrast, in the present invention, it is not necessary for the electrolytic stripping solution to completely remove the deposits on the rack, and most of the deposits, preferably 90 to 98
Since it is only necessary to remove about %, the processing time with this electrolytic stripper is shortened, and wasteful consumption of chemicals is reduced.
The load on the electrolytic stripper is reduced, and only a small amount of remaining deposits are removed by the immersion stripper.
The burden on the immersion stripping solution is reduced, the immersion stripping solution does not age rapidly and the removal speed decreases, and the remaining precipitates are reliably removed in a short time.

特に上述したような効果は、電解剥離液として−12− 酸化剤、ハロゲン酸類、短鎖カルボン酸もしくはヒドロ
キシカルボン酸類を含むものを使用し、この剥離液中に
生じる沈殿物を連続的に除去しつつ温度40〜50℃、
陽極電流密度30〜40A/dm、空気撹拌の条件下で
電解剥離を行なう場合に効果的に達成され、例えばプリ
ント配線基板に電気銅めっきを35μm程痕施したラッ
クについては15〜30分程度の程度で銅電着物の90
〜98%が除去され、これを製鎖211150ν!/1
以上の浸漬剥離液に浸漬することにより、3〜15分程
度程度全にラックの銅電着物を除去することができるも
のである。
In particular, the above-mentioned effects can be obtained by using an electrolytic stripping solution containing an oxidizing agent, halogen acids, short-chain carboxylic acids, or hydroxycarboxylic acids, and continuously removing the precipitates generated in this stripping solution. Temperature 40-50℃,
This is effectively achieved when electrolytic stripping is performed under conditions of an anode current density of 30 to 40 A/dm and air agitation. 90% of copper electrodeposit
~98% was removed and this was made into a chain 211150ν! /1
By immersing the rack in the above-mentioned immersion stripping solution, the copper electrodeposit on the rack can be completely removed in about 3 to 15 minutes.

従って、上述した如きラック析出物の剥離工程は自動め
つきラインに組み込むこともでき、まためっき毎に析出
物が除去されて再生されたラックを使用できるので、本
発明は特にプリント配線基板のめつきに好適に採用でき
、めつき膜厚の均一化、一定化を有効に計ることができ
る。
Therefore, the process for stripping off rack deposits as described above can be incorporated into an automatic plating line, and a recycled rack with precipitates removed can be used for each plating process, making the present invention particularly useful for printed wiring boards. It can be suitably used for plating, and it is possible to effectively make the plating film thickness uniform and constant.

以下、実施例を示し、本発明を具体的に説明する。EXAMPLES Hereinafter, the present invention will be specifically explained with reference to Examples.

−13− (実施例) 下記組成 硝酸アンモニウム     20111/i)塩化アン
モニウム     15Q /1ギ酸アンモニウム  
   150 /12EDTA          1
00 /IIの電解剥離液を使用し、−を6〜8に維持
しつつ、温度45℃、陽極電流密面35A/dイ、空気
撹拌の条件でプリント配線基板の電気銅めっき(約35
μm)に使用したステンレススチール製のラックを連続
的に浸漬し、ラックに付着した電着銅の剥離除去を行な
った。
-13- (Example) Ammonium nitrate with the following composition 20111/i) Ammonium chloride 15Q/1 Ammonium formate
150 /12EDTA 1
Electrolytic copper plating of a printed wiring board was carried out using an electrolytic stripping solution of 00/II and maintaining -6 to 8 at a temperature of 45°C, anode current density surface of 35 A/d, and air agitation (approximately 35
The stainless steel racks used in the test were continuously immersed to remove the electrodeposited copper attached to the racks.

この場合、電解剥離槽よりも内容積がほぼ2倍の沈降槽
に電解剥離槽中の電解剥離液が1時間に2回入れ換わる
循環速度で電解剥離液を導入し、剥離槽中で沈殿物を沈
降分離し、その上澄液を剥離槽に戻すと共に、沈降槽中
の沈殿物を適宜抜き出し、ケーク中の水分を空気を圧搾
することにより押し出し除去するタイプのフィルタープ
レス機を用いて処理し、また電解剥離液には硝酸、アン
−14− モニア、苛性ソーダを補給した。
In this case, the electrolytic stripping solution is introduced into a sedimentation tank whose internal volume is approximately twice that of the electrolytic stripping tank at a circulation rate such that the electrolytic stripping solution in the electrolytic stripping tank is replaced twice per hour. The cake is separated by sedimentation, the supernatant liquid is returned to the stripping tank, the precipitate in the sedimentation tank is appropriately extracted, and the water in the cake is extruded out by squeezing out the air. The electrolytic stripping solution was supplemented with nitric acid, ammonium oxide, and caustic soda.

次に、前記電解剥離後、ラックを濃硝酸350ν!/!
の浸漬剥離液に浸漬した。この場合、この浸漬剥離液に
は適宜硝酸を補給し、その濃度を200xl、/!以上
に保った。
Next, after the electrolytic stripping, the rack was washed with concentrated nitric acid 350ν! /!
It was immersed in the immersion stripping solution. In this case, the immersion stripping solution is appropriately supplemented with nitric acid, and its concentration is 200xl/! I kept it above that.

前記電解剥離の時間は20分、浸漬剥離の時間は5分と
したが、その結果はラックの銅電着物は完全に剥離除去
されることが認められ、また上記の剥離処理を3ケ月間
に亘って行なったが、その間電解剥離液の廃棄を行なう
ことなく良好な剥離処理が行なわれ、更に12ケ月後に
おいてもラックの銅電着物は完全に剥離除去された。
The time for the electrolytic stripping was 20 minutes and the time for immersion stripping was 5 minutes, and the results showed that the copper electrodeposit on the rack was completely peeled off. During this period, the electrolytic stripping solution was not disposed of and a good stripping process was carried out, and the copper electrodeposit on the rack was completely peeled off even after 12 months.

出願人   三  和  防  錆  株  式  会
  社代理人  弁理士  小 島 隆 司 −15− 515−
Applicant Sanwa Rust Prevention Co., Ltd. Company Representative Patent Attorney Takashi Kojima-15-515-

Claims (1)

【特許請求の範囲】 1、最終のめつき工程後、めっき物が取りはずされため
っき用ラックを電解剥離液中に浸漬してこのラックに析
出された析出物の一部を電解的に剥離し、次に浸漬剥離
液中に浸漬して残った析出物を溶解除去し、この析出物
が完全に除去されたラックを用いてめっきを行なうよう
にしたことを特徴とするめつき方法。 2、電解剥離液として酸化剤、ハロゲン酸又はその塩、
及び短鎖カルボン酸もしくはオキシカルボン酸又はその
塩を含有するものを使用し、この剥離液中に生じる沈殿
物を連続的に除去しつつ温度40〜50℃、陽極電流密
度30〜40A/dm、空気撹拌の条件下で電気銅めっ
きを行なった後のラックに析出した銅電着物を15〜3
0分間電解剥離すると共に、電解剥離機浸漬剥離液と−
1− して濃硝121501!/j以上を含む浸漬剥離液を使
用し、この中にラックを3〜15分間浸漬して残った銅
電着物を溶解除去するようにした特許請求の範囲第1項
記載の方法。
[Claims] 1. After the final plating step, the plating rack from which the plating object has been removed is immersed in an electrolytic stripping solution to electrolytically strip off a portion of the deposits deposited on the rack. A plating method characterized in that the rack is then immersed in an immersion stripping solution to dissolve and remove the remaining precipitates, and plating is performed using the rack from which the precipitates have been completely removed. 2. Oxidizing agent, halogen acid or its salt as electrolytic stripper,
and a short-chain carboxylic acid or oxycarboxylic acid or a salt thereof, and while continuously removing the precipitates generated in this stripping solution, the temperature is 40 to 50 ° C., the anode current density is 30 to 40 A / dm, The copper electrodeposit deposited on the rack after performing electrolytic copper plating under air agitation conditions was 15 to 3
Electrolytic stripping is performed for 0 minutes, and electrolytic stripping machine immersion stripping solution is used.
1- And concentrated salt 121501! 2. The method according to claim 1, wherein the remaining copper electrodeposit is dissolved and removed by using an immersion stripping solution containing at least /j and immersing the rack in this solution for 3 to 15 minutes.
JP10238583A 1983-06-08 1983-06-08 Plating method Pending JPS59229499A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10238583A JPS59229499A (en) 1983-06-08 1983-06-08 Plating method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10238583A JPS59229499A (en) 1983-06-08 1983-06-08 Plating method

Publications (1)

Publication Number Publication Date
JPS59229499A true JPS59229499A (en) 1984-12-22

Family

ID=14325980

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10238583A Pending JPS59229499A (en) 1983-06-08 1983-06-08 Plating method

Country Status (1)

Country Link
JP (1) JPS59229499A (en)

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