JPS59215644A - infrared cathode ray tube - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a cathode ray tube that generates photons through electron beam excitation, and particularly to a cathode ray tube in which the wavelength of emitted photons is in the infrared region.

[Background of the invention]

The basic structure of conventional cathode pure tone is similar to that used in home television receivers, with three primary colors (red,
The so-called color cathode ray g(
It is also called a color cathode ray tube), but it goes without saying that it may also be monochromatic.

In recent years, monochrome cathode ray tubes (hereinafter abbreviated as CRT) have been widely used as slave computer terminals. It is also well known.

Now, as can be easily concluded from the above facts, C.
The role of RT is to make +[L-like signals visible to the human eye through light emission.

[Purpose of the invention]

The present invention aims to operate as a special light source for CB'l'i-glaze, and goes beyond the conventional light emitting area.
The aim is to provide a photon source with a wavelength of 80° n 111 or more, which is no longer perceptible to human vision.

[Summary of the invention]

Before explaining the present invention itself, why is the present invention necessary?
I will explain the background to why it is effective.

As is widely known, so-called infrared light is often used in the field of optical measurement. For example, a good example is to irradiate a semiconductor wafer such as silicon (Si) with infrared rays, measure the total intensity of the transmitted infrared rays, and measure the amount of carrier a1 in the semiconductor wafer.

FIG. 1 shows the basic configuration of an apparatus for uniformly regulating the carrier density distribution in a Si wafer based on a known example.

In the figure, an infrared beam 2 from an infrared light source 1 is
After being reflected and deflected by the galvanometer mirror 3 and converged by the lens 6, the Si wafer sample 7f is irradiated as a minute spot. The transmitted infrared beam 2' is detected by an infrared detector 11 placed under the Si wafer sample 7, converted into an electrical signal, amplified by an amplifier 12, and supplied to a recording medium 114.

The galvanometer mirror 3 is rotated by a magnetocardial driver 5 via a support rod 4, and deflects the infrared beam 2 in a direction perpendicular to the plane of the paper. The sample 7 is placed on a sample stage 8 and is moved and scanned from side to side by a driver IO via a drive gear 9. The rotation of the galvanometer mirror 3 and the movement of the sample stage 8 are performed by a scanning controller 13, and this signal is also supplied to a recorder 14. With this configuration, the infrared beam 2 can be set at any position on the sample 7, and as a result, the carrier density at any position on the sample can be determined from the intensity change of the transmitted beam 2'. be able to.

The method shown in FIG. 1 is widely used in practice, but when scanning the sample 7 with the infrared beam 2, it relies on the rotation of the galvanometer mirror 3 and the movement of the sample stage 8, that is, mechanical movement. There is.

This fact is a major drawback as a measuring device.

Namely, (1) the sample stage becomes complicated and expensive; (2) the reliability is low because parts such as galvanometer mirrors are easily affected by external vibrations; and (3) the reliability is low.
Samurai has a major drawback in that it cannot move the infrared beam (random access is not possible) at the time of one toy. Furthermore, as a drawback of the mechanical drive system #Q, 1-4) Pulse monitoring is not easy.

The above drawbacks can be easily understood by referring to the historical development of home 14J vision receivers. That is, the first time
In the television experiment of ``1:'', a disk with a hole was mechanically rotated to obtain the effective curve of the photon beam point.However, in modern television, There are no moving or rotating parts. That is, HiJ
) All operations are performed L (L magnetically).

This fact clearly shows that mechanical operation is not suitable for a device 1ffi that requires simple reliability.

If we consider that C'1' functions as an infrared light source, the above-mentioned drawbacks (1) to (4) of the device 1i shown in FIG.
) can be improved using Figure 2.

C1 is also l゛ (19 formation kiJ7: < known, usually a glass eyebrow 15, a tube surface 16 having a fluorescent light 11 (not shown) in VU (tllll), and an electron beam 19 forming an electron beam 19. Basically, it is established from the plan and capital 18.The electron beam 19 can irradiate any point on the fluorescent film (not shown) by means of the electromagnetic deflector 22.23.The irradiation point 17 of the electron beam 19 Assuming that infrared rays are emitted from
When scanning in the Y direction, the focal point 20 of the infrared beam 2 is
It can be moved on the surface of the sample 7.

Thus, in the configuration of FIG. 1, infrared scanning that is dependent on mechanical motion can be performed magnetically, in other words statically, using CfLT. Here, it is clear that by using CR'II' which emits infrared rays, all the drawbacks of conventional measuring devices can be eliminated.

However, 1 Conventionally, CI (,'I
'' does not exist at all, and therefore, the reality is that we have no choice but to use the device shown in Figure 1, even though we are aware of its shortcomings.

[Embodiments of the invention]

FIG. 3 shows one embodiment of the present invention. FIG. 3 shows the basic structure of the C-screen of the present invention, and its structure is completely the same as that of a conventional CRT, except for the fluorescent film 27. That is, a glass tube 15 forming a vacuum container;
It consists of a tube surface 16 that supports a fluorescent lamp 27, and has an electron/real part 18 that forms an electron beam (not shown). The electron gun section is excited by supplying an electric signal from the terminal section 24. There is a metal film (aluminum film in Touhama) 26 that holds the fluorescent film 27, and a high voltage (usually 10 kV to 30 kV) that gives energy to the electron beam (not shown) is applied to this part. The voltage is applied from the outside via the terminal 25.

Now, in the example shown in FIG. 3, when the inventors' phosphor was irradiated with an electron beam having an energy of 28 keys, 0.91 μm, l, 97
Since it has been confirmed that infrared light having a wavelength of μsn, 1.3 pm is emitted, in this example, all conventional fluorescent film forming techniques are applied as they are, and Y20s: N'
d 3+ film is completely formed.

According to other experiments by the inventors, although there are changes in luminous efficiency and dominant emission wavelength, Y3AmuO12:N d3
It has been found that fluorescent agents such as + and Y2O28:Nd'' emit infrared light when stimulated with 'sleep radiation.

Now, if Y2O3: Nd"+ gold fluorescent film is used, depending on the purpose of measurement, it may have serious defects as it is. In other words, as mentioned above, if the wavelength is 1.3μ
In addition to m, infrared light with wavelengths of 1.07 μm and 0.91 μm is emitted, the latter two wavelengths having higher energy than the bandgap energy of Si (about 1 eV). Facing,
For carrier density measurement, 1.07μrn, 0.91μm
If these wavelengths are mixed in, the photons of these wavelengths will themselves excite the carrier, making it impossible to perform accurate measurements. Therefore, it is desirable to remove them in advance using a photon total filter with a wavelength of 0.91 μm, 1, and Q7 μIn. For example, 1
．． It is preferable to attach a filter that cuts light with a wavelength of 1 μm or less.

From the above point of view, FIG. 4 shows another embodiment. That is, this is a CRT in which a long wavelength passing filter 28 is installed in advance near the tube surface 16. filter 28
It goes without saying that if an interference type filter is used, it is possible to extract only infrared rays of a specific wavelength.

〔Effect of the invention〕

As already described with reference to FIGS. 1 and 2, according to the present invention, mechanical scanning can be replaced with static electromagnetic scanning in an infrared beam scanning device, which simplifies the device.
Improved reliability and ease of maintenance are significantly improved. Furthermore, regarding the price of the light source, for example, an infrared light source using a gas laser costs about 1 million yen, whereas the cost of the light source according to the present invention is expected to be less than 100,000 yen. Simply speaking, it costs 1/10th the price. In the case of conventional mechanical scanning, a galvanometer mirror drive system and a sample stage drive system were additionally required, whereas according to the present invention, an inexpensive deflection coil for television standards is sufficient. Regarding the adjustment of the device, it is not easy to adjust the optical axis with the galvanometer mirror type, but the C-1 type requires almost no adjustment.

As described above, the application of the present invention makes the conventional apparatus significantly cheaper and simpler, and has enormous industrial advantages.

[Brief explanation of drawings]

Fig. 1 is a block diagram showing an example of a conventional device using infrared rays, Fig. 2 is a block diagram showing the principle of deflection scanning when an infrared cathode ray tube is used as a light source, and Fig. 3 is an embodiment of the present invention. FIG. 4 is a cross-sectional view showing another embodiment of the present invention. DESCRIPTION OF SYMBOLS 1... Infrared light source, 2... Infrared beam, 3... Galvano mirror 14... Galvano mirror support rod, 5...
・Galvano mirror driver, 6...lens, 7...s
i Wafer sample, 8... Sample stage, 9... Drive gear, 1
0..., ringer, 11... infrared detector, 12...
- Amplifier, 13... Scanning controller, 14... Recorder,
15... Glass tube, 16... Tube surface, 17... Electron beam irradiation point, 18... Electron gun section, 19... Electron beam, 2
0...Focusing point, 22.23...Electromagnetic deflector, 24.
...Terminal part, 25...Terminal, 26...Metal A J
1 Figure -14 Figure 2 ■20 Figure fJa Figure

Claims (1)

[Scope of Claims] 1. In a cathode ray tube in which a phosphor is excited by an accelerated electron beam generated in a vacuum container to generate photons, a phosphor that generates photons with a wavelength in the infrared region is used. An infrared cathode ray tube characterized by having a cathode ray/U face plate on the inner surface. 2. Infrared cathode ray u03 according to claim 1, in which a filter for cutting off photons with a wavelength of 800 nm or less is disposed on the face plate surface, upper 4'i2 phosphor t, Y2O3: N d3Z Yskt50sz:
The infrared cathode ray tube according to claim 1 or @2, which is at least one phosphor selected from the group consisting of NdA+ and Y20z8: NdS+. 4. The infrared cathode ray tube according to claim 1 or 3, wherein a filter is disposed on the face plate surface to block photons having a wavelength of 1l100n or less.