JPS59197665A - Movable table apparatus - Google Patents

Abstract

PURPOSE:To permit continuous transfer and positioning by a small-sized captioned apparatus having a high accuracy by forming the nut part of a feed screw from an elastic hinge structure body and connecting it with a slider. CONSTITUTION:Two guiding shafts 2 are fixed in parallel each other onto a base board 1 fixed at both edges onto fixing blocks 3. The guiding shaft 2 penetrates through a slider 4, and in a bearing part 5, fluid static pressure slider 4 floats-up to be shiftable. A screw rod 6 is arranged in parallel to the guide shaft 2, at the center of the guide shaft 2, and the slider 4 is fixed through a nut receiving tool 12 in elastic hinge structure. Said screw rod 6 is supported by the bearings 8 and 11 at the both edges, and the revolution of a motor 10 is transmitted through a coupling 9. Since the nut 7 and the slider 4 are connected by the nut receiving tool 12 in elastic hinge structure, the eccentricity or deflection of the screw rod 6 is not transmitted to the slider 4.

Description

[Detailed Description of the Invention] [Technical field to which the invention pertains] The present invention relates to a microfabrication device for recording master discs of audio and video tapes and pattern drawing of ultra-LSI, and a sample stage for a densification Caloe/σ1 determination device. Binding-C assembling Y Koko 1
This article relates to a store fr and a moving table device.

[Prior art and its points of interest]

Original records of audio and video disks and super LSI
The /l:5 Sen table device, which is incorporated as a sample stand in Masatsuna 9-mechanical equipment for pattern drawing and 4'N precision processing/measuring equipment, is generally used for Alternatively, the sample is microfabricated by positioning it in a fixed position. In this case, if the movement of the table is smooth and does not occur at high altitudes, the accuracy of fine pattern processing may be affected.
'l'l11 Since this causes a significant deterioration of the constant accuracy, static pressure air bearings have been increasingly used to guide table movement in order to obtain high-precision tables. Connect the nut part and the slighter,
When connected with a rigid body (usually the bearings at both ends are fixed in the radial direction), the slider may be damaged due to deflection or eccentricity of the feed screw.
I was making my blue color worse.

In addition, the static air bearing has a suitable clearance between the guide shaft and the 1I receiving part, so when the supply of compressed air is stopped, the slider moves down only outside the clearance, preventing the feed. This causes the nut to receive the load directly, causing negative effects on the screws.711! I was giving l.

[Purpose of the invention]

The present invention improves the drawbacks of the conventional device r (r) described above, and aims to provide a moving table bag that is small and capable of highly accurate continuous movement and determination of position ii'.

[Summary of the invention]

The present invention uses a hydrostatic bearing in which one slider can move in the moving direction using two parallel shafts as guides. On the movable table, a feed screw is placed in the center of the slide parallel to the guide shaft, and both ends of the screw rod are supported on the base by two guide shafts and co-workers, but it is rotatable and the feed screw and screw nut can be rotated. A movable table device in which the part and the slider are connected by an elastic hinge structure, the screw is flexible in the radial direction and rigid in the moving direction, and the slider moves in the feeding direction by the rotation of the threaded rod. It is.

〔Effect of the invention〕

According to the present invention, the feed screw nut and the slider are connected by a structure using an elastic hinge.
Even if there is eccentricity or deflection of the screw, there is no excessive force on the slider, allowing highly accurate movement.

Also, since the positioning of the feed 9 screw is normally done with compressed air being supplied to the slider, i, i,! Even if the compressed air supply is stopped due to a rotation stop, etc., and the slider turns F, the force equivalent to 3.1 will not be applied to the screw ball, and the feed 9 screw 1 drive system can be maintained in a natural state. It is possible to prevent negative effects on the screws.

[Embodiments of the invention]

Next, an embodiment of Motomoto No. 1 will be described using the drawings.

1B1 Figure V As shown, the two guide shafts 2 on the base]
Both ends are identified by l・j constant block 3 in parallel with each other,
I have L. Slider 4 is followed by Taniuchi Φ2: l? D, 111+ At the receiving part 5, the fluid static pressure slider 4 can be moved up 7 to Y. A threaded rod 6 is arranged in the center of the guide shaft 2 parallel to the guide 1tjl+ 2, and the tool 7 is fixed to the slider 4 via 12 Nand receivers made of elastic hinges. When the rotation of the motor 1o is transmitted through the coupling 9 and rotates the screw 6, the slider 4 moves in the moving direction VC.

In this way, it is possible to achieve a small and highly elliptical movable table device in which the cut receiver 2 of the elastic hinge structure is used to connect the nut 7 and the slider 4 using the elasticity of the fiber.

[Other embodiments of the invention]

In the above example, static pressure air! It has a structure using a 140 receiver, but there is a rolling element on the outside and a guide fpH using a guide number.
Moreover, the effects of the present invention do not change even if the feed screw mechanism is placed at a location other than the center of the slider.

In short, the present invention can be implemented with various modifications without departing from the gist thereof.

[Brief explanation of the drawing]

Fig. 1 is a plan view and a sectional view showing the mounting surface of a movable table according to an embodiment of the present invention, and Fig. 2 is a detailed I4B drawing of a nut YSR and an I4B of a hinge structure. 1... Base, 2... Guide shaft, 3... Fixed block, 4... Slider, 5... Bearing part,
6. Sudanji salary, 7. Su note, 8, 11.
((Yuuke, 9... Camp ring, 10 Motor, 12... Nut receiver, 13.14... Elastic hinge.

Claims (1)

[Claims] A moving table device comprising a feed screw in the moving direction in the center of a slider, characterized in that a nut portion of the feed screw is made of an elastic Hinon structure and connected to the slider. Device.