JPS59178900A - Method for manufacturing thin plate form ceramic vibrator - Google Patents

Abstract

PURPOSE:To manufacture a thin plate form ceramic vibrator without polishing processing by inserting a ceramic plate into a couple of jigs spaced and held at an interval by the plate thickness of the product and also forming a profile in matching with the shape of product and baking the ceramic plate. CONSTITUTION:The jig 4 is formed by an upper die 8 forming a projected profile at the mating face and a lower die 9 forming a concaved profile adhered closely to the projected profile of the upper die 8 at the mating face. A spacer 10 having a plate thickness equal to the prescribed plate thickness of the product is inserted to the mating face of the upper die 8 and the lower die 9. The ceramic plate of concaved form having the formed size is inserted between the upper die 8 and the lower die 9, a weight W is applied as shown in Figure and the concaved form ceramic plate 3 is pressed and sandwiched. In baking the plate in a platinum crucible 6 in this state, the concaved ceramic plate 3 is deformed and pressed up to a position being equal to the plate thickness of the spacer 10 and spread and deformed in a direction at the right angle to the pressing direction.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a thin ceramic '7 of about 05 to 0.05 m+n which oscillates at an ultra-high frequency of about 5 to 50 Mll2.
High-frequency oscillation is necessary in cases where ultrasonic waves are used to measure submicron foreign particles in a chemical solution, which is suitable for manufacturing vibrators without polishing. 5
For high frequency oscillation of 50MHz to 0.5m
Thin plate-shaped concave ceramic vibrator 75 with m or 005 throat
: Required. However, with conventional ceramic sensor manufacturing methods, it is difficult to manufacture thin ceramic resonators such as those described above without polishing, and even during the abrasive process, polishing cracks, chips, etc. occur. However, the yield of the product was low, the product was very expensive, and there were many drawbacks.

That is, generally, a concave ceramic resonator is made of a planar ceramic block 1 or a concave ceramic block 2, which is thicker than the product dimensions, as shown in FIGS. 1 and 2.
The material was fired in a platinum crucible 6 as shown in FIG. 4, and then finished to product dimensions by cutting and polishing or simply polishing.

That is, as shown in FIG. 3, the ceramic pack vibrator is formed as described above, after the raw materials are collected, mixed and pulverized, and then subjected to calcination, pulverization, binder mixing, and granulation steps. The molded seven-piece block is made wider than the product size by the shrinkage during firing and the cutting and polishing allowance.

Next, the molded ceramic block is placed in a platinum crucible 6 covered with aluminum 5, as shown in FIG.
The calcined powder is then fired. Next, a process is adopted in which the product is finished to the final product dimensions by polishing, pressing, and cutting as described above, and then electrodes are formed and polarized to complete the product.

As described above, the conventional technology requires only one polishing process, but polishing a thin concave ceramic block in particular requires skill, and as described above, defects such as polishing cracks and chips occur, and depending on the plate thickness. It has become impossible to perform polishing, and it has been considered impossible to produce a thin plate ceramic vibrator capable of producing high frequency oscillations of, for example, 20 to 50 MEZ.

[Purpose of the invention]

The present invention was devised to solve the above-mentioned drawbacks, etc., and its purpose is to manufacture a thin plate-shaped ceramic, 7-piece vibrator without polishing, improve the yield of the product, and reduce the cost. An object of the present invention is to provide a method for manufacturing a thin plate-shaped ceramic resonator that can be manufactured in a number of ways.

[Summary of the invention]

In order to achieve the above object, the present invention forms a thin ceramic plate slightly thicker than the product size, holds the ceramic plate at a distance equal to the thickness of the product, and The ceramic plate is inserted between a pair of jigs that form an outline that matches the product shape, and the ceramic plate is held under pressure by the jig, and fired in this state to form the ceramic plate into a thin plate of a predetermined shape. This is a method for manufacturing a thin ceramic resonator formed in the following manner.

[Embodiments of the invention]

Hereinafter, one embodiment of the present invention will be described based on the drawings.

First, an overview of this embodiment will be explained.

As shown in FIG. 5, a jig 4, which is a concave ceramic plate 3 formed to be slightly thicker than the product size, is inserted between an upper mold 8 and a lower mold 9. Convex and concave contours matching the shape of the product are respectively formed on the mating surfaces of the upper mold 8 and the lower mold 9.

In addition, the mating surfaces of the upper mold 8 and lower mold 9 have a base plate 10.
The thickness of the product is maintained at a predetermined thickness. Now, with the upper mold 8 and the lower mold 9 pressurized, these are placed into the platinum crucible 6 shown in FIG. It is fired as a concave plate. By forming electrodes on this concave ceramic plate B and polarizing it, a concave thin ceramic plate B is manufactured.

Next, this embodiment will be explained in more detail.

During the firing process, ceramic shrinks in size, so the third concave ceramic plate 6 is slightly thicker than the product size.
Shape according to the manufacturing process shown in the figure. In this case, the plate thickness is also formed to be slightly thicker than the predetermined plate thickness of the product.

The jig 4 is formed of an upper mold 8 which forms a convex contour on the mating surface, and a lower mold 9 which forms a mating surface with a concave contour that can be brought into close contact with the convex contour of the upper mold 8. A spacer 10 having a thickness equal to a predetermined thickness of the product is inserted into the mating surfaces of the upper mold 8 and the lower mold 9.

The molded concave ceramic plate 5 having the above dimensions is placed in an upper mold 8.
and the lower mold 9, apply a load if as shown in the figure,
The concave ceramic plate 6 is clamped under pressure. In this state,
As described above, when placed in the platinum crucible 6 and fired, the concave ceramic plate 5 is deformed and pressurized twice to a position equal to the plate thickness of the spacer 10, and is expanded and deformed in the direction perpendicular thereto. As a result, the thickness of the concave ceramic plate 6 is finished to a predetermined size. Next.

Next, the peripheral edge side of the concave ceramic plate 5 is cut into a predetermined size. There is no problem with the cutting process as it can be carried out relatively easily, but by shaping the concave ceramic plate 5 appropriately, the cutting allowance can be reduced, and depending on the product, cutting may not be necessary. There are cases where it is used as is.

Next, as described above, electrodes are formed and polarized according to the predetermined steps to complete the production of a predetermined thin plate-shaped ceramic sensor.

In the above embodiment, one concave ceramic vibrator was manufactured using one set of jigs 4, but the present invention is not limited to this, and a plurality of concave ceramic plates 5 may be held together under pressure. A jig may be formed to obtain a large number of concave Cerahac vibrators at the same time.

Also, the shape of the ceramic resonator is concave as mentioned above.

It is not limited to those in the form of

〔Effect of the invention〕

As is clear from the above description, according to the present invention, a thin plate-shaped ceramic vibrator can be manufactured without polishing, and the yield of the product can be improved, as well as being manufactured at low cost.

[Brief explanation of drawings]

Fig. 1 is a perspective view showing a planar ceramic block, Fig. 2 is a perspective view showing a planar ceramic block;
Figure 6 is a perspective view showing a concave ceramic block, Figure 6 is a flowchart showing the general process of a conventional ceramic resonator, Figure 4 is a sectional view showing the firing process, and Figure 5 is an embodiment of the present invention. FIG. 7 is a cross-sectional view showing the state of engagement between the jig and the ceramic reel during the firing process. 1... Planar ceramic block, 2... Concave ceramic block, 3... Concave ceramic plate, 4...
・□・Jig, 5... Alumina, 6.・, platinum crucible,
7... Calcined powder, 8... Upper mold, 9... Lower mold, 10.
··Spacer.

Claims (1)

[Claims] A thin ceramic plate slightly thicker than the product size is formed, and the ceramic plate is held between jigs that are held apart by the thickness of the product and form a contour that matches the shape of the product. Pressure clamp and hold the above ceramic in this state.
7. A method for manufacturing a thin plate-like ceramic state element by firing a temporary material.