JPS59178646U - exposure equipment - Google Patents
exposure equipmentInfo
- Publication number
- JPS59178646U JPS59178646U JP7340183U JP7340183U JPS59178646U JP S59178646 U JPS59178646 U JP S59178646U JP 7340183 U JP7340183 U JP 7340183U JP 7340183 U JP7340183 U JP 7340183U JP S59178646 U JPS59178646 U JP S59178646U
- Authority
- JP
- Japan
- Prior art keywords
- convex lens
- space
- exposure apparatus
- gas
- pattern mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Light Sources And Details Of Projection-Printing Devices (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来の露光装置の構成説明図、第２図は本考案
に係る露光装置の一実施例の構成説明図を示す。 。
図中、１：ランプハウス、２：水銀ランプ、３：凸レン
ズ、４：パターンマスク、５：カラス基板、６：″ラン
プハウス、７：水銀ランプ、８：凸レンズ、９：□’Ｑ
ＩＪング、１０：リフレクタ−，１１：パターンマスク
、１２：パターンマスク固定用ホルダー、１３：下板、
１４：０リング、１５：密閉空間、１６：ガラス基板、
１７：バルブ、１８ニアダブター、１９：シャワーノズ
ル、２０：排気孔、２１ニアダブター、２２：バルブ、
２３：排気ポンプ。FIG. 1 is an explanatory diagram of the configuration of a conventional exposure apparatus, and FIG. 2 is an explanatory diagram of the configuration of an embodiment of the exposure apparatus according to the present invention. . In the figure, 1: lamp house, 2: mercury lamp, 3: convex lens, 4: pattern mask, 5: glass substrate, 6: "lamp house, 7: mercury lamp, 8: convex lens, 9: □'Q
IJ ring, 10: Reflector, 11: Pattern mask, 12: Pattern mask fixing holder, 13: Lower plate,
14: 0 ring, 15: closed space, 16: glass substrate,
17: Valve, 18 Near doublet, 19: Shower nozzle, 20: Exhaust hole, 21 Near doublet, 22: Valve,
23: Exhaust pump.
Claims (1)
集束せしめる凸レンズと、パターンマスクと、感光剤を
塗布した転写物とがこの順に配置され、 前記凸レンズと前記パターンマスクの間の空間か塵埃に
対して密閉されてなることを特徴とする露光装置。 ２ 前記凸レンズと前記パターンマスクの間の空間にＨ
２ガス若しくはクリーンエアーを導入する機構及び前記
空間から前記Ｎ２ガス若しくはクリーンエアーを強制的
に排気する機構とを備えてなることを特徴とする実用新
案登録請求の範囲第１項記載の露光装置。[Claims for Utility Model Registration] 1. A mercury lamp serving as a light source, a convex lens that focuses the irradiation light of the silver lamp, a pattern mask, and a transfer material coated with a photosensitizer are arranged in this order, and the convex lens and An exposure apparatus characterized in that the space between the pattern masks is sealed against dust. 2 H in the space between the convex lens and the pattern mask
2. The exposure apparatus according to claim 1, further comprising a mechanism for introducing N2 gas or clean air, and a mechanism for forcibly exhausting the N2 gas or clean air from the space.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7340183U JPS59178646U (en) | 1983-05-16 | 1983-05-16 | exposure equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7340183U JPS59178646U (en) | 1983-05-16 | 1983-05-16 | exposure equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS59178646U true JPS59178646U (en) | 1984-11-29 |
Family
ID=30203524
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7340183U Pending JPS59178646U (en) | 1983-05-16 | 1983-05-16 | exposure equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59178646U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07201728A (en) * | 1993-12-03 | 1995-08-04 | Asm Lithography Bv | Illumination unit |
| JP2015126044A (en) * | 2013-12-26 | 2015-07-06 | ウシオ電機株式会社 | Vacuum-ultraviolet light irradiation processing apparatus |
-
1983
- 1983-05-16 JP JP7340183U patent/JPS59178646U/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07201728A (en) * | 1993-12-03 | 1995-08-04 | Asm Lithography Bv | Illumination unit |
| JP2015126044A (en) * | 2013-12-26 | 2015-07-06 | ウシオ電機株式会社 | Vacuum-ultraviolet light irradiation processing apparatus |
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