JPS5916650B2 - High-speed light intensity change observation device - Google Patents
High-speed light intensity change observation deviceInfo
- Publication number
- JPS5916650B2 JPS5916650B2 JP9425776A JP9425776A JPS5916650B2 JP S5916650 B2 JPS5916650 B2 JP S5916650B2 JP 9425776 A JP9425776 A JP 9425776A JP 9425776 A JP9425776 A JP 9425776A JP S5916650 B2 JPS5916650 B2 JP S5916650B2
- Authority
- JP
- Japan
- Prior art keywords
- point
- light intensity
- light
- observation device
- time
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 claims description 8
- 238000010894 electron beam technology Methods 0.000 claims description 7
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 3
- 238000003384 imaging method Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
Landscapes
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Description
【発明の詳細な説明】
この発明は、高速光量変化を正確に測定するための装置
に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a device for accurately measuring rapid changes in light intensity.
高速光量変化、特に数10μ秒以下の極短時間変化や、
閃光等の光インパルスを測定するために従来は、たとえ
ば光電面において受光量に応じて発生する電子ビームを
時間的に分解して検出する特別の撮像管が使用されてい
たが、その構造は複雑で価格も高く、周辺装置も種々設
けなければならなかつた。High-speed light intensity changes, especially extremely short-time changes of several tens of microseconds or less,
Conventionally, to measure light impulses such as flashes of light, a special image pickup tube has been used that temporally resolves and detects the electron beam generated at the photocathode depending on the amount of light received, but its structure is complex. The price was high, and various peripheral devices had to be installed.
本発明は入射光の時間偏向を行う電子管と、この電子管
の出射あるいは観察窓の前記時間偏向による発光点軌跡
に対応したフォトダイオードアレイからなる固体撮像素
子とを組合せて構造が簡単で分解能の優れた光量変化観
測装置を提供[、ようとするものである。The present invention combines an electron tube that time-deflects incident light and a solid-state imaging device consisting of a photodiode array that corresponds to the trajectory of light emission points caused by the emission of the electron tube or the time-deflection of the observation window, and has a simple structure and excellent resolution. We aim to provide a light intensity change observation device.
第1図は本発明装置の構造を示す線図であり、51は光
を電子ビームの偏向により走査するための電子管、2は
光学レンズ、3は固体撮像素子である。FIG. 1 is a diagram showing the structure of the apparatus of the present invention, in which 51 is an electron tube for scanning light by deflecting an electron beam, 2 is an optical lens, and 3 is a solid-state imaging device.
電子管1は図の上部における入射窓4と、他端の出射窓
5、及び管内において光軸を包囲する集束電極6と、光
軸をはさんで配置された一対の0 偏向電極1とを備え
ている。入射窓4の内側には光電陰極4aが形成され、
出射窓5の内側には対極蛍光面5aが形成されている。
光電陰極4aは高圧電源E1、によつて蛍光面に対し負
に維持されるが、集束電極6は電源E2により光電陰極
4a’5 よりも低電位に維持される。一対の偏向電極
7の一方は光電陰極4aと等電位に維持されるが、他方
は極短時間内において端子11に印加される光電陰極の
電位を上下する走査電位に支配される。かくして矢印8
で代表する入射光が入射窓4のθ 光電陰極面に当たる
と、光量に応じて光電子が放出され、その放出電子は集
束電極6によつて集束ビームとなり、対極蛍光面5aに
向かう。ここで偏向電極□の端子11に第2図に示すよ
うに陰極電位OVを中心として+V1から−V1まで急
激5 に変化する電圧力劾口えられると、この立下がり
期間T=を1時間内において電子ビームは蛍光面5aの
第1図における左端から右端にかけて偏向される。第2
図において、偏向電圧の立下がりが開始す。The electron tube 1 includes an entrance window 4 at the top of the figure, an exit window 5 at the other end, a focusing electrode 6 surrounding the optical axis within the tube, and a pair of deflection electrodes 1 placed across the optical axis. ing. A photocathode 4a is formed inside the entrance window 4,
A counter electrode fluorescent screen 5a is formed inside the exit window 5.
The photocathode 4a is maintained negative with respect to the phosphor screen by the high-voltage power source E1, while the focusing electrode 6 is maintained at a lower potential than the photocathode 4a'5 by the power source E2. One of the pair of deflection electrodes 7 is maintained at the same potential as the photocathode 4a, but the other is controlled by a scanning potential that is applied to the terminal 11 and changes the potential of the photocathode up and down within a very short time. Thus arrow 8
When incident light, represented by , hits the θ photocathode surface of the entrance window 4, photoelectrons are emitted according to the amount of light, and the emitted electrons are turned into a focused beam by the focusing electrode 6 and directed toward the counter electrode phosphor screen 5a. Here, when a voltage is applied to the terminal 11 of the deflection electrode □, which rapidly changes from +V1 to -V1 with the cathode potential OV as the center, as shown in Fig. 2, this falling period T= is within 1 hour. The electron beam is deflected from the left end to the right end of the phosphor screen 5a in FIG. Second
In the figure, the deflection voltage begins to fall.
るのは、実際にはを=0の時点から極短遅延時間Td
を過ぎた時点tdであり、立下がりの終了点は時点を、
からやはり遅延時間Tdを過ぎた時点を1+ d=をを
+ Tdである。すなわち、遅延時間Tdは光電面から
発射された電子ビームが偏向電5 極1に達するまでの
平均時間であり、したがつて電子ビームはを=0の時点
からtl時点までに入射窓4に入つた光に対応する部分
のみ偏向走査される。すなわち、第2図、詳しくは第3
図に示すとおり電子管1の出射窓5からは蛍光面の励起
発光により、左側a点から右側b点(こかけて走査時間
Tで移動する強度1(t)の点発光が観察される。出射
窓5からの点発光は光学レンズ2によつて固体撮像素子
3の受光帯のa′からb′に順次入射する。固体撮像素
子3の正面(受光窓を省略する)は第4図に示すとおり
であり、フオトダイオードアレイ3aが矩形状本体正面
の長さ方向に沿つて配列されているとともに、本体内部
には、図示しないが、フオトダイオードアレイの各ダイ
オードの光電流を順次読み出していくための走査回路と
、走査回路を外部スタートパルス及びクロツクパルスに
よつてシフト操作するための駆動回路、さらにはフオト
ダイオードの主としてスパイクノイズを相殺するための
ノイズダイオード列等が組み込まれている。In reality, it is an extremely short delay time Td from the time of = 0.
The end point of the fall is the time td, which is past the time td.
Then, the time point when the delay time Td has passed is 1+d=+Td. In other words, the delay time Td is the average time it takes for the electron beam emitted from the photocathode to reach the deflection electrode 1, and therefore the electron beam enters the entrance window 4 from time = 0 to time tl. Only the portion corresponding to the incident light is deflected and scanned. In other words, see Figure 2, and see Figure 3 for details.
As shown in the figure, from the emission window 5 of the electron tube 1, due to the excited emission of the phosphor screen, a point emission with an intensity of 1(t) moving from point a on the left side to point b on the right side (from point a to right side) in a scanning time T is observed. The point light emitted from the window 5 is sequentially incident on the light-receiving zone a' to b' of the solid-state image sensor 3 by the optical lens 2.The front of the solid-state image sensor 3 (the light-receiving window is omitted) is shown in FIG. The photodiode array 3a is arranged along the length of the front of the rectangular main body, and inside the main body, although not shown, the photocurrent of each diode of the photodiode array is sequentially read out. A scanning circuit, a driving circuit for shifting the scanning circuit using an external start pulse and a clock pulse, and a noise diode array for canceling out mainly spike noise of photodiodes are incorporated.
かくして、固体撮像素子3において、a′−b′間に連
続的に位置する各フオトダイオードの出力が、たとえば
第5図のような曲線として現れたときは、a′〜B5間
の出力信号変化がそのまま、電子管1に入射したt=o
からt1時間までの時間幅Tにおける光量変化を意味す
るものである。Thus, in the solid-state image sensor 3, when the output of each photodiode successively located between a' and b' appears as a curve as shown in FIG. 5, the output signal changes between a' and B5. is incident on the electron tube 1 as it is t=o
It means the change in light amount in the time width T from t1 to time t1.
,/
本発明の装置は以上のとおりであり、電子偏向管により
、ミラー操作等の光学走査手段では達せられない極短時
間内の正確な偏向走査を行うとともに、フオトダイオー
ドアレイにより、その走査発光点を正確に極微の時分割
単位において検知することが可能となつた。, / The apparatus of the present invention is as described above, and uses an electron deflection tube to perform accurate deflection scanning within an extremely short time that cannot be achieved by optical scanning means such as mirror operation, and a photodiode array to perform the scanning light emission. It has become possible to accurately detect points in microscopic time division units.
また、固体撮像素子には光電子電荷の蓄積作用があるの
で、その読み出し走査は、電子管の偏向走査速度とは関
係なく、比較的低速で行うことができ、信号処理にとつ
てきわめて有利である。なお、入射光量が少いときは、
電子管の観察窓と、固体撮像素子との間に、画像増幅器
を介在させると、より高感度な測定が可能となる。Furthermore, since the solid-state image sensor has the function of accumulating photoelectronic charges, its readout scan can be performed at a relatively low speed regardless of the deflection scanning speed of the electron tube, which is extremely advantageous for signal processing. Note that when the amount of incident light is small,
If an image amplifier is interposed between the observation window of the electron tube and the solid-state image sensor, measurement with higher sensitivity becomes possible.
第1図は本発明の実施例を略示する線図、第2図は偏向
電極電圧を示すグラフ、第3図は電子管出射窓の表面を
示す略図、第4図は固体撮像素子の要部を示す正面図、
第5図は固体撮像素子の出力曲線を示すグラフである。
1・・・・・・電子管(電子ビーム式光走査管)、2・
・・・・・光学レンズ、3・・・・・・固体撮像素子、
3a・・・・・・フオトダイオードアレイ、4・・・・
・・入射窓、5・・・・・・出射窓、6・・・・・・集
束電極、7・・・・・・偏向電極。Fig. 1 is a diagram schematically showing an embodiment of the present invention, Fig. 2 is a graph showing the deflection electrode voltage, Fig. 3 is a schematic diagram showing the surface of the electron tube exit window, and Fig. 4 is a main part of the solid-state image sensor. A front view showing
FIG. 5 is a graph showing the output curve of the solid-state image sensor. 1... Electron tube (electron beam type optical scanning tube), 2.
...Optical lens, 3...Solid-state image sensor,
3a...Photodiode array, 4...
... Entrance window, 5 ... Output window, 6 ... Focusing electrode, 7 ... Deflection electrode.
Claims (1)
光面上の一点から他の点に向かつて偏向走査するように
した電子ビーム式光走査管と、前記走査管の蛍光面にお
ける一点から他の点への移動点発光に対応して配置され
たフォトダイオードアレイからなり、前記走査時間内の
受光量変化に対応する電気信号列を発生するための固体
撮像素子とを備えたことを特徴とする高速光量変化観測
装置。1. An electron beam type optical scanning tube configured to deflect and scan a photoelectron beam emitted from a photocathode surface from one point on a counter electrode phosphor screen to another point; It is characterized by comprising a photodiode array arranged to correspond to the movement of point light emission to a point, and comprising a solid-state image sensor for generating an electric signal train corresponding to a change in the amount of received light within the scanning time. High-speed light intensity change observation device.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9425776A JPS5916650B2 (en) | 1976-08-06 | 1976-08-06 | High-speed light intensity change observation device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9425776A JPS5916650B2 (en) | 1976-08-06 | 1976-08-06 | High-speed light intensity change observation device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5319879A JPS5319879A (en) | 1978-02-23 |
JPS5916650B2 true JPS5916650B2 (en) | 1984-04-17 |
Family
ID=14105224
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9425776A Expired JPS5916650B2 (en) | 1976-08-06 | 1976-08-06 | High-speed light intensity change observation device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5916650B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61172567A (en) * | 1985-01-29 | 1986-08-04 | 竹間 藤一 | Electromagnetic coil sedative treatment tool |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6510848B1 (en) | 1998-04-22 | 2003-01-28 | Mallinckrodt, Inc. | Disposable active humidifier for the mechanical ventilation of a patient |
-
1976
- 1976-08-06 JP JP9425776A patent/JPS5916650B2/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61172567A (en) * | 1985-01-29 | 1986-08-04 | 竹間 藤一 | Electromagnetic coil sedative treatment tool |
Also Published As
Publication number | Publication date |
---|---|
JPS5319879A (en) | 1978-02-23 |
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