JPS59155734U - alignment mark - Google Patents
alignment markInfo
- Publication number
- JPS59155734U JPS59155734U JP2124283U JP2124283U JPS59155734U JP S59155734 U JPS59155734 U JP S59155734U JP 2124283 U JP2124283 U JP 2124283U JP 2124283 U JP2124283 U JP 2124283U JP S59155734 U JPS59155734 U JP S59155734U
- Authority
- JP
- Japan
- Prior art keywords
- alignment mark
- alignment
- abstract
- semiconductor wafer
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案の半導体ウェーハ上の位置合わせマーク
、第２図はフォトマスク上の位置合わせパターン、第３
図は半導体ウェーハ上の位置合わせマークとフォトマス
ク上の位置合わせパターンとの位置合わせを説明する図
である。図において１・２・３は半導体ウェーハ上の位
置合わせマーク、４・５・６はフォトマスク上の位置合
わせパターンを示す。Figure 1 shows the alignment mark on the semiconductor wafer of the present invention, Figure 2 shows the alignment pattern on the photomask, and Figure 3 shows the alignment mark on the semiconductor wafer of the present invention.
The figure is a diagram illustrating alignment between alignment marks on a semiconductor wafer and alignment patterns on a photomask. In the figure, 1, 2, and 3 indicate alignment marks on the semiconductor wafer, and 4, 5, and 6 indicate alignment patterns on the photomask.
Claims (1)
ける位置合わせマークであって、各製造工程の位置合わ
せマークのすべてが同−領域上に複数重ねとして設けら
れたことを特徴とする位置合わせマーク。1. An alignment mark provided on a semiconductor wafer in a method for manufacturing a semiconductor device, characterized in that all the alignment marks for each manufacturing process are provided in a plurality of layers on the same region.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2124283U JPS59155734U (en) | 1983-02-15 | 1983-02-15 | alignment mark |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2124283U JPS59155734U (en) | 1983-02-15 | 1983-02-15 | alignment mark |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59155734U true JPS59155734U (en) | 1984-10-19 |
| JPS6334266Y2 JPS6334266Y2 (en) | 1988-09-12 |
Family
ID=30152369
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2124283U Granted JPS59155734U (en) | 1983-02-15 | 1983-02-15 | alignment mark |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59155734U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7059188B2 (en) | 1993-03-30 | 2006-06-13 | Kazuhiro Okada | Angular velocity sensor |
| US7360455B2 (en) | 1990-10-12 | 2008-04-22 | Kazuhiro Okada | Force detector and acceleration detector and method of manufacturing the same |
| US7533582B2 (en) | 1990-10-12 | 2009-05-19 | Kazuhiro Okada | Force detector and acceleration detector and method of manufacturing the same |
-
1983
- 1983-02-15 JP JP2124283U patent/JPS59155734U/en active Granted
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7360455B2 (en) | 1990-10-12 | 2008-04-22 | Kazuhiro Okada | Force detector and acceleration detector and method of manufacturing the same |
| US7533582B2 (en) | 1990-10-12 | 2009-05-19 | Kazuhiro Okada | Force detector and acceleration detector and method of manufacturing the same |
| US7059188B2 (en) | 1993-03-30 | 2006-06-13 | Kazuhiro Okada | Angular velocity sensor |
| US7363814B2 (en) | 1993-03-30 | 2008-04-29 | Kazuhiro Okada | Multi-axial angular velocity sensor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6334266Y2 (en) | 1988-09-12 |
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