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JPS59144597A - Method and device for pressing - Google Patents

Method and device for pressing

Info

Publication number
JPS59144597A
JPS59144597A JP1682783A JP1682783A JPS59144597A JP S59144597 A JPS59144597 A JP S59144597A JP 1682783 A JP1682783 A JP 1682783A JP 1682783 A JP1682783 A JP 1682783A JP S59144597 A JPS59144597 A JP S59144597A
Authority
JP
Japan
Prior art keywords
sample
samples
air
vacuum
fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1682783A
Other languages
Japanese (ja)
Other versions
JPS6323880B2 (en
Inventor
Kazunori Suzuki
一憲 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP1682783A priority Critical patent/JPS59144597A/en
Publication of JPS59144597A publication Critical patent/JPS59144597A/en
Publication of JPS6323880B2 publication Critical patent/JPS6323880B2/ja
Granted legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B30PRESSES
    • B30BPRESSES IN GENERAL
    • B30B5/00Presses characterised by the use of pressing means other than those mentioned in the preceding groups

Landscapes

  • Liquid Crystal (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)

Abstract

PURPOSE:To press samples under a uniform pressure by the cushion effect of the fluid on the rear of the samples by feeding a fluid between the upper and lower samples and sample fixing base plates to detach the samples from the fixing base plates and pressing the samples. CONSTITUTION:An upper sample 15 is attached along locating pins 9 on an upper sample fixing base plate 1, and the space between the sample 15 and the plate 1 is evacuated to a vacuum through a mouthpiece 11 for air to fix the sample 15. A lower sample 16 is similarly attached to a lower sample fixing base plate 3 and the space therebetween is evacuated to a vacuum through a mouthpiece 12 for air to fix the sample 16. When air is fed to a mouthpiece 14 for force feeding, a vertical driving part 5 ascends and the plate 3 contacts with a timing sensor 17. Then the space between the samples 15, 16 is evacuated to a vacuum through a mouthpiece 13 for evacuation; at the same time the samples 15, 16 are released from the attracted state and this time the air is fed through the mouthpieces 11, 12 to exert a uniform pressure on the rear of the samples. The pressure combined with the suction between the samples 15 and 16 is then exerted on the samples and the samples are pressed.

Description

【発明の詳細な説明】 本発明は、液晶用ガラス等の試料をプレスするためのプ
レス装置及びプレス方法に関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a press apparatus and a press method for pressing samples such as liquid crystal glass.

液晶は近年、表示装置として多用されて℃・るものであ
るが、2枚のガラスを所定ギャップを設けるようにプレ
スし、そのギヤツブに液晶材を流し込んで作成される。
In recent years, liquid crystals have been widely used as display devices and are made by pressing two pieces of glass to create a predetermined gap and pouring liquid crystal material into the gear.

このギャップを設定するためにギャップ量に相当する径
のビーズ状部利とともに2枚のガラスをプレスする方式
がとられて〜・るが、このギャップ量は全面に渡って均
一であることが要求され、また液晶用ガラスは一般に薄
く均一にプレスされな〜・と割れ等が生じ、この為、均
一プレスということが重要視されるに至っている。
In order to set this gap, a method is used in which two pieces of glass are pressed together with a bead-shaped part with a diameter corresponding to the gap amount.However, this gap amount must be uniform over the entire surface. Furthermore, liquid crystal glass is generally not pressed thinly and uniformly, resulting in cracks, etc. Therefore, uniform pressing has become important.

従来、この種のプレス方式としては、グイセット等のよ
うに平行度、平面度及び平面度の優れた機棹を使用して
試料をプレス面にセットして加圧しプレスする場合が多
く用いられていた。
Conventionally, this type of press method has often used a machine rod with excellent parallelism, flatness, and flatness, such as a Gouiset, to set the sample on the press surface and press it. Ta.

この方式の場合、加圧する方法としてはグイセット自身
の重量・によるものと、油圧、墾圧を加えるもの等があ
るが、いずれにしても均一プレス((おいてはグイセッ
ト自身の精度が必要であり、又仮に高精度のグイセット
等であるとしても、試料自身の厚みのバラツキ等によっ
て片当りになり、全面むらなく圧力を#lけることがで
きな〜・。
In the case of this method, there are two ways to pressurize: one using the weight of the Guiset itself, and another using hydraulic pressure and pressure, but in either case, the precision of the Guiset itself is required. Also, even if you use a high-precision goose set, it will hit unevenly due to variations in the thickness of the sample itself, and it will not be possible to apply pressure evenly over the entire surface.

そのため試料自身の精度に依存することが多く、特に液
晶用ガラス等精度の良いプレスを必要とするものに対し
、満足のいく均一なプレスを行うことができなかった。
Therefore, it often depends on the accuracy of the sample itself, and it has not been possible to perform satisfactory uniform pressing, especially for items that require high-precision pressing, such as glass for liquid crystals.

本発明は斯かる従来例の欠点を除去したプレス装置及び
プレス方法を提供することを目的とする。
An object of the present invention is to provide a press apparatus and a press method that eliminate the drawbacks of the conventional examples.

そしてこの目的を達成するため、本発明においては試料
と固定基板との間に流体を流して試料を固定基板から解
放して、いわばクッション効果をもたせてプレスするこ
とを特徴とする。
In order to achieve this object, the present invention is characterized in that a fluid is caused to flow between the sample and the fixed substrate to release the sample from the fixed substrate, so that the sample is pressed with a so-called cushion effect.

以下本発明の詳細な説明する: 第1図は本発明の実施例である。The present invention will be described in detail below: FIG. 1 shows an embodiment of the invention.

1は上部試料を固定する上部試料固定基板、2は上下試
料固定基板を連結する上下連結軸、6は上下連結軸に従
って摺動し下部試料を固定する下部試料固定基板、4は
ベアリング、5は下部試料固定基板を下からもち上げ、
又は下げる上下駆動部、6は上部試料固定基板と下部試
料固定基板の間の空間を真空状態てする弛めの一ヒT基
板シールドゴム、7及び8は上下それぞれの試料と対応
する試料固定基板との間をシールドする試料シールドパ
ツキン、9及び10は試料の位置決めビン、11及び1
2は上下試料の吸着及び送圧用の空気用口金、13は上
下試料固定基板の間を真空にするための真空用口金、1
4は上下駆動部を作動するためへ送圧用口金、15及び
16は各々上部、下部試料、17は上下基板シールドゴ
ムが下部試料固定基板に接触した時に作動するタイミン
グセンサーである。
1 is an upper sample fixing substrate that fixes the upper sample; 2 is an upper and lower connecting shaft that connects the upper and lower sample fixing substrates; 6 is a lower sample fixing substrate that slides along the upper and lower connecting shafts and fixes the lower sample; 4 is a bearing; and 5 is a Lift up the lower sample fixing substrate from below,
6 is a loose T-substrate shield rubber that creates a vacuum in the space between the upper sample fixing substrate and the lower sample fixing substrate; 7 and 8 are sample fixing substrates corresponding to the upper and lower samples, respectively. 9 and 10 are sample positioning bins, 11 and 1
Reference numeral 2 denotes an air cap for suctioning the upper and lower samples and sending pressure; 13 indicates a vacuum cap for creating a vacuum between the upper and lower sample fixing substrates; 1
Reference numeral 4 designates a pressure feeding cap for operating the vertical drive unit, reference numerals 15 and 16 indicate upper and lower samples, respectively, and reference numeral 17 indicates a timing sensor that operates when the upper and lower substrate shield rubbers come into contact with the lower sample fixing substrate.

ここで上記構成においてプレス動作を説明する。Here, the press operation in the above configuration will be explained.

先ず上部試料固定基板1に上部試料15を位置決めビン
9に溜って取付け、空気用口金11を介して上部試料1
5と上部試料固定基板1との間を真空にし上部試料15
を固定する。
First, attach the upper sample 15 to the upper sample fixing board 1 by collecting it in the positioning bottle 9, and then attach the upper sample 1 to the upper sample fixing board 1 through the air nozzle 11.
A vacuum is created between the upper sample 15 and the upper sample fixing substrate 1.
to be fixed.

同様に下部試料固定基板6にも下部試料16を位置決め
ビン10に沿って取付け、空気用口金12を介して下部
試料16と下部試料固定基板6との間を真空罠し下部試
料16を固定する。
Similarly, the lower sample 16 is attached to the lower sample fixing substrate 6 along the positioning bin 10, and a vacuum is trapped between the lower sample 16 and the lower sample fixing substrate 6 via the air cap 12 to fix the lower sample 16. .

ここで上部、下部試料シールドパツキン7.8は真空圧
に耐える材質であるが、真空度の加減による変形を抑え
るべく第2図に示されるように、上部、下部試料固定基
板1,3には溝18が設けられ、この溝18にシールド
パツキン7.8が押込められている。
Here, the upper and lower sample shield packings 7.8 are made of a material that can withstand vacuum pressure, but in order to suppress deformation due to the degree of vacuum, the upper and lower sample fixing substrates 1 and 3 are A groove 18 is provided, into which a shield packing 7.8 is pushed.

次に送圧用口金14へ空気を送り込むど、上下駆動部5
が上昇し下部試料固定基板ろがタイミングセンサー17
に接触する。
Next, air is sent to the pressure feeding mouthpiece 14, and the vertical drive unit 5
The timing sensor 17 rises and the lower sample fixing board lowers.
come into contact with.

この状態では、上下基板シールドゴム6は下部試料固定
基板ろの対応する箇所で充分に接触する。
In this state, the upper and lower substrate shield rubbers 6 are fully in contact with the lower sample fixing substrate filter at corresponding locations.

下部試料固定基板6がタイミングセンサー17に接触し
たことにより、そのオンオフ信号を受けて真空用口金、
1ろを介して上部試料15と下部試料16の間が真空に
引かれる。
When the lower sample fixing substrate 6 comes into contact with the timing sensor 17, the vacuum cap receives the on/off signal.
A vacuum is drawn between the upper sample 15 and the lower sample 16 through the filter 1.

そしてこれに伴なって電磁弁等を介して上部試料15、
下部試料16は吸着状態から解放され、4度は空気用口
金11.12を介して大気圧等を有する空気が送り込ま
れる。
Along with this, the upper sample 15,
The lower sample 16 is released from the adsorbed state, and air having atmospheric pressure or the like is sent in through the air nozzles 11 and 12 four times.

このとき、上下駆動部5には下から圧力がかかつている
ため、上部、下部試料シールドパツキン7゜8は空気漏
れを生じない。
At this time, since pressure is applied to the vertical drive section 5 from below, no air leakage occurs from the upper and lower sample shield packings 7.8.

このようにして、試料背面は試料固定基板から解放され
、すなわち浮上し、また試料背面へは均一な圧力がかか
り上部、下部試料15.1<5間の吸引と合わせた圧力
が試料に加わることになる。
In this way, the back surface of the sample is released from the sample fixing substrate, that is, it floats, and a uniform pressure is applied to the back surface of the sample, and a pressure combined with the suction between the upper and lower samples 15.1<5 is applied to the sample. become.

ここで試料は空気流体によるクッション効果のため、試
料精度に拘らず貼り合わせ面にならって均一にプレスさ
れることとなる。
Here, due to the cushioning effect of the air fluid, the sample is pressed uniformly following the bonding surface regardless of the sample precision.

なお上、部試料、下部試料共に背面に空気流体によるク
ッション効果を与えれば、いずれか一方の試料のみ空気
流体によるクッション効果を与える場合に比べ、試料貼
り合わせ面の傾き調整角は半減し、空気流体系の負担を
軽くできる。
Furthermore, if a cushioning effect is provided by air and fluid on the back surface of both the upper, lower and lower samples, the tilt adjustment angle of the sample bonding surface will be halved compared to when only one of the samples is provided with a cushioning effect by air and fluid. The burden on the fluid system can be reduced.

フエお空気用口金11.12を介して送り込まれる空気
は調整によって任意の圧力に設定でき、これによってプ
レス圧を可変にできる。
The air fed through the air nozzles 11 and 12 can be adjusted to any desired pressure, thereby making the press pressure variable.

第6図は、本発明の異なる実施例で、位置決め機能をも
ったものである。本実施例で下′部試料固定基板3/は
上下連結軸2と切り離され、単独KX。
FIG. 6 shows a different embodiment of the present invention, which has a positioning function. In this embodiment, the lower sample fixing substrate 3/ is separated from the upper and lower connecting shafts 2 and is used as an independent KX.

Y、Z、θ駆動できるようなテーブルになっている。The table can be driven in Y, Z, and θ.

この下部試料固定基板5′には少なくとも2個以上の観
察穴19が設けられ、この穴を通して試料の位置合わせ
マークが読み取られる。
This lower sample fixing substrate 5' is provided with at least two observation holes 19, through which the alignment marks on the sample are read.

上部、下部試料1’5 、16が透明なガラスであれば
、両者に位置合わせマークを設け、この位置ずれを観察
してこれを補正するよう下部試料固定基板6′を移動さ
せる。
If the upper and lower samples 1'5 and 16 are made of transparent glass, positioning marks are provided on both, and the lower sample fixing substrate 6' is moved to observe and correct this positional shift.

なお観察穴190箇所はガラス、アクリル等の透明体2
0でシールドされる。
The 190 observation holes are made of transparent material such as glass or acrylic.
Shielded with 0.

また位置合わせ観察系としては例えば光ファイノ(−2
1で撮像素子22に導き、どれをモニター観察すること
が考えられる。なお位置合わせ観察系としてはこれに限
定されず、顕微鏡観察その他任意の観察が可能である。
In addition, as a positioning observation system, for example, an optical fiber (-2
1 to the image pickup device 22 and which can be observed on a monitor. Note that the alignment observation system is not limited to this, and any other observation such as microscopic observation is possible.

本実施例によれば、液晶用ガラス等の位置合わせ及び均
一プレスを同一装置で行うことができる。
According to this embodiment, alignment and uniform pressing of liquid crystal glass and the like can be performed using the same device.

ところで以上の実施例で空気流体として説明したが、空
気の他、窒素ガス等任意の流体が適用できる。
Incidentally, although the above embodiments have been described using air as a fluid, any other fluid such as nitrogen gas can be used in addition to air.

以上本発明によれば次のような効果がある。As described above, the present invention has the following effects.

1、プレスをするとき、流体が介在し、そのクッション
効果により試料にキズ等を付けることなく、均一な圧力
で試料全面にわたりプレスすることが可能である。
1. When pressing, a fluid is present, and its cushioning effect makes it possible to press the entire surface of the sample with uniform pressure without damaging the sample.

2、また流量の調節により圧力の変化を与えることがで
き、目的′て合わせた圧力制御が可能である。
2. Also, the pressure can be changed by adjusting the flow rate, making it possible to control the pressure according to the purpose.

ろ、上部試料固定基板と下部試料固定基板との間にシー
ルドゴムを用いることにより、プレス時に、使っている
空気を真空用口金を介して外へ引き出し真空にすること
で、上下試料のクッションになっていた空気がなくなり
リンキング状?MKなる。そのためプレス圧力の増大に
つながる。
By using a shield rubber between the upper sample fixing substrate and the lower sample fixing substrate, the air used during pressing is drawn out through the vacuum nozzle and created in a vacuum, creating a cushion for the upper and lower samples. The air that was there is gone and it looks like a linking? MK becomes. This leads to an increase in press pressure.

4゜試料をシールドするシールドパツキン構造いること
により、真空吸着及び流体噴出を同一空間において切換
えるごとが出来る。
By having a shield packing structure that shields the 4° sample, it is possible to switch between vacuum suction and fluid ejection in the same space.

5、さらにシールドバラギンの作用によって試料をプレ
スする時に試料背面にキメ、カケ等の損傷が生じない。
5.Furthermore, due to the action of the shield barragin, no damage such as scratches or chips will occur on the back surface of the sample when the sample is pressed.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の実施例の図、 第2図はシールドパツキン構造の説明図、第6図はアラ
イメント機能を付加し1こ異)よる実施例の図、 図中、1は上部試料固定基板、2は上下連結軸、6は下
部試料固定基板、4はベアリング、5は上下駆動部、6
は上下基板シールドゴム、7は上部状$1シールドパツ
キン、8は下部試料シールトノ(ツキン、9,10は位
置決めビン、11.12は空気用口金、13は真空用口
金、14は送圧用口金、15は上部試料、16は下部試
料、17はタイミングセンサー、18は溝、19は観察
穴、20は透明体、21は光ファイ−<−122は撮像
素子である。 出願人 キャノン株式会社
Fig. 1 is a diagram of an embodiment of the present invention, Fig. 2 is an explanatory diagram of the shield packing structure, Fig. 6 is a diagram of an embodiment with an added alignment function (with 1 difference), and in the figure, 1 is an upper sample fixation. 2 is a substrate, 2 is a vertical connection shaft, 6 is a lower sample fixing substrate, 4 is a bearing, 5 is a vertical drive unit, 6
are the upper and lower substrate shield rubbers, 7 is the upper $1 shield packing, 8 is the lower sample sealing tube, 9 and 10 are the positioning bottles, 11.12 is the air cap, 13 is the vacuum cap, 14 is the pressure feeding cap, 15 is an upper sample, 16 is a lower sample, 17 is a timing sensor, 18 is a groove, 19 is an observation hole, 20 is a transparent body, 21 is an optical fiber.

Claims (1)

【特許請求の範囲】 1、所定試料をプレスする方法において、該試料と固定
基板との間に流体を流して試料を固定基板から解放して
プレスすることを特徴とするプレス方法。 2、第1の試料と第2の試料を各々対応する固定基板か
ら解放してプレスする特許請求の範囲第1項記載のプレ
ス方法。 3、第1の試料の背面と該試料固定基板との間をシール
ドする第1シールド手段と、第2の試料の背面と該試料
固定基板との間をシールドする第2シールド手段と、第
1の試料と第2の試料の間を真空にシールドする手段と
、前記第1又は第2シールド手段の設けられる閉じた空
間に対し11選択的に真空吸着又は流体噴出する手段を
有することを特徴とするプレス装置。 4、前記第1.第2シールド手段は第1.第2試料固定
基板の溝−に押入れられる特許請求の範囲第6項記載の
プレス装置。 5、第1.第2の試料固定基板間隔カニ所定イ直となる
ことを検知する検知手段を有し、該検知手段出力により
真空吸着から流体°噴出に切換わる特許請求の範囲第ろ
項記載のプレス装置。 6、第1.第2の試料の相対的な位置合わせを観察する
手段を有する特許請求の範囲第6項貫己載のプレス装置
。 7、第1又は第2の試料固定基板が並進又は回転可能で
ある特許請求の範囲第ろ項R己載のプレス装置。
[Claims] 1. A pressing method for pressing a predetermined sample, characterized in that a fluid is caused to flow between the sample and a fixed substrate to release the sample from the fixed substrate before pressing. 2. The pressing method according to claim 1, wherein the first sample and the second sample are released from their respective fixed substrates and then pressed. 3. a first shield means for shielding between the back surface of the first sample and the sample fixing substrate; a second shield means for shielding between the back surface of the second sample and the sample fixing substrate; and a means for vacuum-shielding between the sample and the second sample, and a means for selectively vacuum suction or ejecting fluid into the closed space in which the first or second shielding means is provided. press equipment. 4. Said 1. The second shielding means is the first shielding means. The press device according to claim 6, which is pressed into the groove of the second sample fixing substrate. 5. 1st. The press apparatus according to claim 1, further comprising a detection means for detecting that the distance between the second sample fixing substrates becomes a predetermined distance, and switching from vacuum suction to fluid jetting according to the output of the detection means. 6. 1st. 7. A self-mounted press apparatus as claimed in claim 6, further comprising means for observing the relative alignment of the second sample. 7. A self-mounted press device, in which the first or second sample fixing substrate is translatable or rotatable.
JP1682783A 1983-02-03 1983-02-03 Method and device for pressing Granted JPS59144597A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1682783A JPS59144597A (en) 1983-02-03 1983-02-03 Method and device for pressing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1682783A JPS59144597A (en) 1983-02-03 1983-02-03 Method and device for pressing

Publications (2)

Publication Number Publication Date
JPS59144597A true JPS59144597A (en) 1984-08-18
JPS6323880B2 JPS6323880B2 (en) 1988-05-18

Family

ID=11927013

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1682783A Granted JPS59144597A (en) 1983-02-03 1983-02-03 Method and device for pressing

Country Status (1)

Country Link
JP (1) JPS59144597A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01292316A (en) * 1988-05-19 1989-11-24 Mitsubishi Electric Corp Thermal press-sticking device
JPH06235896A (en) * 1993-02-08 1994-08-23 Ropuko:Kk Contactless pressure sticking method
JP2006184807A (en) * 2004-12-28 2006-07-13 Shibaura Mechatronics Corp Substrate bonding apparatus and substrate bonding method

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04105777U (en) * 1991-02-20 1992-09-11 日本電気ホームエレクトロニクス株式会社 satellite receiver

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5417199A (en) * 1977-07-06 1979-02-08 Hauni Werke Koerber & Co Kg Tobacco cutting apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5417199A (en) * 1977-07-06 1979-02-08 Hauni Werke Koerber & Co Kg Tobacco cutting apparatus

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01292316A (en) * 1988-05-19 1989-11-24 Mitsubishi Electric Corp Thermal press-sticking device
JPH06235896A (en) * 1993-02-08 1994-08-23 Ropuko:Kk Contactless pressure sticking method
JP2006184807A (en) * 2004-12-28 2006-07-13 Shibaura Mechatronics Corp Substrate bonding apparatus and substrate bonding method

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JPS6323880B2 (en) 1988-05-18

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