JPS59116374A - Vapor deposition device - Google Patents

Abstract

PURPOSE:To provide a titled device which enables vapor deposition with good thermal efficiency in a stable temp. state by the constitution wherein a raw material for vapor deposition is heated and melted in a crucible formed of a heat transmittable metal formed with an aperture for supplying the raw material in the bottom, provided with a ceramic layer on the inside peripheral surface and having a cooling means. CONSTITUTION:A crucible 9 of a vapor deposition device is constituted of a crucible body 9a consisting of a heat transmittable metal, such as copper. Holes 9c for circulating a refrigerant and an aperture 9d for supplying a raw material are provided in the prescribed position in the bottom of said crucible. A ceramic layer 9b is formed on the inside peripheral surface thereof. A rod 9e of cobalt which is a raw material for vapor deposition is inserted into the crucible 9 through the aperture 9d and is heated by an electron gun (not shown) to form and evaporate molten cobalt 5. The raw material rod 9e is supplied from below in the above-mentioned constitution while the leakage of the molten cobalt 5 through the aperture 9d and the disturbance in the temp. state in the crucible 9 are averted by the cooling means and further the temp. state is stably maintained by the layer 9b.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a vapor deposition apparatus suitable for use, for example, in manufacturing magnetic tape.

Background Art and Points of Interest Conventionally, a magnetic tape evaporation apparatus is used to obliquely evaporate a metal magnetic material onto a non-magnetic support within a predetermined incident angle range and form a gold R magnetic layer on the non-magnetic support. Something like the one shown in Figure 1 was proposed.

In FIG.
The inside of the magnetic tape deposition apparatus (1) is evacuated by a vacuum pump 0 (2). (3) indicates a non-magnetic support, for example a polyethylene terephthalate film tape having a thickness of 12 μm, and this non-magnetic support (3) is coated with a pack coat. still,
This non-magnetic support (3) is wound around a cooling can (4) for a predetermined length, which rotates around a rotation shaft (4a) and is cylindrical in appearance and cooled to lower its temperature. and moves in the direction indicated by the arrow at a predetermined speed. Here, the non-magnetic support (3) is supplied from the non-magnetic support supply roll (3a), wound around the cooling can (4) by a predetermined length, and then supplied to the take-up roll (3b). has been done. (5) represents molten cobalt, and this molten cobalt (5) is placed in a crucible (6) made of a thermally conductive metal, such as copper. When the molten cobalt in the crucible (6) is heated by an electron gun (not shown), the vacuum pump (2)
Molten cobalt (5) evaporates and jumps out inside the magnetic tape evaporator (1a) in which a vacuum layer of torr is applied, and the cobalt as a metal magnetic material is transferred to the non-magnetic support (3).
It is made to be vapor deposited on top. On the other hand, the incident angle θ, which is the angle between the normal direction of the circumference as a horizontal cross section of the cooling can (4) and the direction in which cobalt (5) flies to the non-magnetic support (3), is determined as the predetermined incident angle. In order to obliquely evaporate cobalt only within the corner range, evaporation area defining masks (7a) (7h) (7c) and
ζ arrival area defining plates (8a), (8b), and (8c) are provided as shown. Here, the regulation plates (8a) and (8b)
define the interval in the longitudinal direction of the tape so as to define the area around the incident angle of 9·b in the vapor deposition region, the gradation plate (8c) defines the lower part in the tape width direction, and the upper part is ttq, not shown. A regulating plate is also provided corresponding to the regulating plate (8c).

Also, masks (7a) (7b) (7c) (d: ,
＋ g Provided in an arc shape close to the support body, with a mask (
7λ) and (7b) to determine the i41 interval in the longitudinal direction in order to define the range of the incident angle, and the mask (7c) determines one side in the tape width direction. A mask defining the other direction is provided corresponding to the mask (7c). Therefore, these regulation plates (8a) (
8b) (8c) and the opposing layers of the mask (7a) (7b) (7c), the cooling can (4), and the crucible (6), the co-gurt on the non-magnetic support (3) is The incident angle can be limited and desired oblique deposition can be achieved. According to this old vapor deposition method, a metal magnetic layer of magnetic powder with a good acicular ratio is formed, and the coercive force Hc of the manufactured magnetic tape is reduced, making it possible to record short wavelength signals and achieve high density. It is known that the performance of magnetic tapes can be improved, such as by making recording possible.

By the way, in such a vapor deposition apparatus, cobalt as a raw material is replenished from the upper part of the crucible (6).
6) was placed in the vapor deposition apparatus, which caused constraints in terms of distribution, and there were cases in which diagonal vapor deposition at the last position was difficult to perform on actual rice. Therefore, an attempt was made to provide an opening at the bottom Dr position of the crucible (6) and insert a cobalt rod in the form of a solid rod through the opening. However, in order to prevent the cobalt once melted in the u-shaped chamber (6) from leaking out from the opening again, a configuration is required in which the cooling means travels through the conductive metal forming the external field (6). However, there was a problem in that the thermal efficiency of the heat used to evaporate cobalt deteriorated, increasing manufacturing costs. Furthermore, the temperature inside the crucible (6) becomes unstable, and therefore the evaporation h1 of cobalt becomes unstable, causing a problem of variations in quality of magnetic tapes manufactured by vapor deposition.

OBJECTS OF THE INVENTION In view of the above-mentioned problems, the present invention aims to provide a vapor deposition apparatus that allows trial fitting in a stable warm state with good thermal efficiency.

Summary of the Invention E The inventive mounting device has a crucible made of a thermally conductive metal that is provided with a cooling means and has an opening for supplying raw materials at a predetermined position at the bottom, and is configured to form a ceramic layer on the inner circumferential surface of the crucible. It is designed to allow vapor deposition to occur at a constant rate of thermal power under a stable temperature condition.

7ijl of the wood invention vapor deposition apparatus with reference to Figure 2 below.
Let's talk about example i. In FIG. 2, parts corresponding to those in FIG. 1 are designated by the same reference numerals, and detailed explanation thereof will be omitted.

This Figure @2 shows the crucible (9) in this example as a whole. (9a) is made of a thermally conductive metal provided with cooling means. Here, (9c) is a hole in the cold sand circulation shell.

In addition, (9d) shows a raw material supply opening provided at a predetermined position on the bottom of the crucible (9), and a cobalt rod (
9e) can be inserted at a predetermined speed.

171 Cobalt in this crucible (9) is heated by the electron beam of one electron gun (not shown) to form a cobalt rod (9e).
) is melted and this molten cobalt (5) is made to emit blue light and fly out. In addition, the other parts are Akira's complete page.
It shall be constructed in the same way as a punch.

In this embodiment, the molten cobalt is evaporated from the crucible (9) and vacuum bonding is performed as in the conventional method, but unlike the conventional method, the cobalt rod (9e) is released from the bottom of the crucible Cobalt is once melted inside the crucible (9) by heating one of the crucibles (9). Here, since the pot crucible (9) is equipped with a cooling means, the cobalt once melted leaks from the raw material supply opening (9d). When the cobalt is heated to a predetermined temperature, it evaporates and flies out.

At this time, since the inner layer of the crucible (9) is made of ceramic, the temperature is stable, and the h eruption 41+- becomes a stable ice cube 18.

In this way, according to this @%1 example, the inner circumference of the crucible (9) is one heramic, so the abyss 11)' is stable 17, and there is a benefit of 11 that can make the cobalt issue stable 6. Since we have set up a means, we will have Cobalt on our shoulders (9) once a month, and we will mutually agree on the salary (9).
) 2 sounds l', to supply the co-malt to the crucible (9) (2) to heat the pot to melt it, and to emit it (11), since the same crucible can be used, the thermal efficiency can be improved! There is a benefit. It is possible to supply cobalt to the crucible (9) without mixing oil from the bottom.
There is also the advantage that the degree of freedom in arranging and purchasing crucible (6) is increased compared to the case where the arrangement head of crucible (6) has to be placed above crucible (6).

Note that the present invention is not limited to the above-described embodiments, but may be modified to other configurations without departing from the spirit of the present invention.
It's a no-brainer.

Effects of the Invention As described above, the present invention has the advantage of being able to perform vapor deposition with high thermal efficiency while keeping the temperature stable.

Further, there is an advantage that a vapor deposition apparatus having a degree of freedom in the arrangement of the crucible can be obtained.

[Brief explanation of the drawing]

FIG. 2 is a cross-sectional view showing an example of a vapor deposition apparatus from the first explanation, and FIG. 2 is an enlarged cross-sectional view of a main part of an embodiment of the vapor deposition apparatus of the present invention. (5) is molten cobalt, (9) is a crucible, (9a) is a crucible body, (9b) is a ceramic layer, (9d) is a raw material supply opening, and (9e) is a cobalt rod.・0・y 1 Figure 2 Inside Sony Magne Products Co., Ltd., 6-5-6 Kitashinagawa, Shinagawa-ku, Tokyo

Claims (1)

[Claims] A vapor deposition method comprising a crucible made of a thermally conductive metal which is provided with a cooling means and has an opening for supplying raw material at a predetermined position in the hood, and a ceramic layer is formed on the inner peripheral surface of the crucible. Device.