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JPS59112133U - 圧力センサ - Google Patents

圧力センサ

Info

Publication number
JPS59112133U
JPS59112133U JP515783U JP515783U JPS59112133U JP S59112133 U JPS59112133 U JP S59112133U JP 515783 U JP515783 U JP 515783U JP 515783 U JP515783 U JP 515783U JP S59112133 U JPS59112133 U JP S59112133U
Authority
JP
Japan
Prior art keywords
pressure sensor
silicon
sensing element
diaphragm
pressure sensing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP515783U
Other languages
English (en)
Inventor
高寺　賢吉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP515783U priority Critical patent/JPS59112133U/ja
Publication of JPS59112133U publication Critical patent/JPS59112133U/ja
Pending legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。

Description

【図面の簡単な説明】
図面は本考案の実施例を示し、第１図は、圧力センサの
縦断面図、第２図は同平面図である。 １・・・・・・圧力センサ、２・・・・・・ダイヤフラ
１１３・・・・・・基台、４・・・・・・ケース、７．
８・・・・・・アルコキシドガラスの接合層。

Claims (1)

    【実用新案登録請求の範囲】
  1. 半導体単結晶よりなるダイヤフラムと、このダイヤフラ
    ムを支持する基台とがそれぞれ圧力検出素子としてシリ
    コン又はシリコンの酸化物を主成分とする材料で形成さ
    れた圧力センサにおいて、前記圧力検出素子の接合面間
    には両者を一体的に結合するアルコキシドガラスの接合
    層が介設されていることを特徴とする圧力センサ。
JP515783U 1983-01-17 1983-01-17 圧力センサ Pending JPS59112133U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP515783U JPS59112133U (ja) 1983-01-17 1983-01-17 圧力センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP515783U JPS59112133U (ja) 1983-01-17 1983-01-17 圧力センサ

Publications (1)

Publication Number Publication Date
JPS59112133U true JPS59112133U (ja) 1984-07-28

Family

ID=30136753

Family Applications (1)

Application Number Title Priority Date Filing Date
JP515783U Pending JPS59112133U (ja) 1983-01-17 1983-01-17 圧力センサ

Country Status (1)

Country Link
JP (1) JPS59112133U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002036521A1 (fr) * 2000-10-27 2002-05-10 Yamatake Corporation Materiau de jointoiement et procede associe

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5254729A (en) * 1975-10-30 1977-05-04 Ashland Oil Inc Composition of pressure sensitive adhesive
JPS53134847A (en) * 1977-04-28 1978-11-24 Denki Kagaku Kogyo Kk Curable liquid polymer composition
JPS5776431A (en) * 1980-10-30 1982-05-13 Toshiba Corp Semiconductor ressure transducer
JPS5873154A (ja) * 1981-10-26 1983-05-02 Hitachi Chem Co Ltd 半導体組成物

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5254729A (en) * 1975-10-30 1977-05-04 Ashland Oil Inc Composition of pressure sensitive adhesive
JPS53134847A (en) * 1977-04-28 1978-11-24 Denki Kagaku Kogyo Kk Curable liquid polymer composition
JPS5776431A (en) * 1980-10-30 1982-05-13 Toshiba Corp Semiconductor ressure transducer
JPS5873154A (ja) * 1981-10-26 1983-05-02 Hitachi Chem Co Ltd 半導体組成物

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002036521A1 (fr) * 2000-10-27 2002-05-10 Yamatake Corporation Materiau de jointoiement et procede associe

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