JPS59109273A - Nozzle for rotary coater - Google Patents

Abstract

PURPOSE:To coat simultaneously the entire part of a coating surface at the same film thickness and to provide a reduced time for coating and improved quality by making the bore of the small holes provided on the base at the nozzle part having the length corresponding to the length of the coating part successively larger in proportion to the radius of the coating part. CONSTITUTION:The opening of a supply hole 10 is tapered and is tightly fitted onto the top end of a dispenser 7. The coating liquid fed forcibly from the dispenser 7 flows through the supply hole 10 into a cross hole 11, and at the same instant when it fills the hole, the liquid flows from plural small holes 12 and enters a channel part 13. The coating liquid flowing from the adjacent small holes joins to each other until it flows from the part 13 and when it is coated on a work 4, it is spread to the flow of the coating liquid having the width corresponding to the width of the coating part. If the bore of the holes 12 with a circular substrate is changed in proportion to the corresponding radius of the work 4, the entire part of the inside and outside circumferences is coated roughly with a uniform film thickness at the same instant.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present device relates to a coating surface nozzle used in a spin coating device.

Conventional configuration and its problems The configuration of a conventional spin coating device is shown in FIG.

1 is the object to be coated, which is mainly circular. 2 is a coating liquid, and 3 is a nozzle that blows out the coating liquid. As shown in the figure,
While rotating the object to be coated (hereinafter referred to as the work), one nozzle 3 is moved in the radial direction of the work 1 and at the same time the coating liquid 2 is applied.

At this time, the trajectory of the nozzle 30 on the workpiece 1 is spiral-shaped, and if the moving speed of the nozzle 3 is too fast relative to the rotation of the workpiece 1, parts that are not coated will remain every time the workpiece 1 rotates, resulting in a uniform coating. A coating film cannot be obtained. on the other hand,
The rotational speed of the workpiece 1 cannot be increased indefinitely, depending on conditions such as the type and viscosity of the coating liquid, because if it is made too fast, defects such as entrainment of air bubbles will occur. For this reason, in order to apply the coating to a predetermined thickness without uneven coating using the conventional coating method, it is necessary to keep the rotation speed of the workpiece 1 and the moving speed of the nozzle 3 low, which reduces the time required for the coating process. making it difficult.

OBJECTS OF THE INVENTION In view of the above-mentioned drawbacks, the present invention provides a nozzle that does not need to be moved radially during application.

Structure of the Invention 37-2 The present invention comprises: a groove portion having a length corresponding to the radial width of the application portion; a plurality of small holes provided at appropriate intervals on the bottom surface of the groove portion; It has a horizontal hole provided to connect the small holes, and a supply hole provided so that the coating liquid is supplied to an appropriate location of the horizontal hole, and the plurality of small holes correspond to the opening positions. By changing the aperture according to the radius of rotation, a nozzle is provided that can apply a predetermined amount of coating liquid to the entire coating surface caused by the difference in radius, and the coating time can be significantly shortened.

DESCRIPTION OF EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. Figure 2 shows the state in which a circular workpiece is being coated using the nozzle of the present invention.
51ml - coating liquid; 6 is a nozzle; 7 is a dispenser to which the nozzle 6 is attached.

FIG. 3 is a front view of the nozzle of the present invention, where 8 is the nozzle body;
9 is a special screw for fixing the nozzle to the dispenser 7;
It is. FIG. 4 is a plan sectional view of the nozzle of the present invention taken along the line AA in FIG. 3. FIG. Figure 5 shows the same B-B
It is a side sectional view when cut along a plane. In the figure, 10 is a supply hole from a dispenser, and 11 is a horizontal hole that simultaneously sends the coating liquid 5 flowing from the supply hole 1o to a plurality of small holes 12. 1
Reference numeral 2 denotes a small hole through which the coating liquid flows out through the front portion 13.

Next, the operation of each part of the nozzle will be explained while describing the process in which the coating liquid exits from the supply hole 1o through the groove 13 to the outside. A taper is provided at the opening of the supply hole 10, and the taper is fitted to the tip of the dispenser 7 with a gap. The coating liquid fed under pressure from the dispenser 7 flows into the side hole 11 through the supply hole 1o. Since the horizontal hole 11 has a sufficiently larger inner diameter than the small hole 12, the entire horizontal hole 11 is filled with the coating liquid. When the coating liquid fills the horizontal hole 11, it flows out from the plurality of small holes 12 almost simultaneously and enters the groove portion 13.

Here, the coating liquid flowing out from the adjacent small holes joins together at the edge flowing out from the groove 13, and when the workpiece 4 is coated, the coating liquid flows with a width corresponding to the coating area. . If the diameter of the opening 5 of the small hole 12 is varied in proportion to the radius of the workpiece 4 corresponding to the opening position, the thickness of the applied liquid can be made constant. This will be explained using FIG. 6. Now, the radius of the innermost circumference of the application part is rl, and the radius of the outermost circumference is r2.
and the coating thickness of the rl part is 11. Letting the coating thickness of the r2 portion be t2, the relationship between rl and 11 is expressed as follows. Now, assume that a portion rl is to be coated with a nozzle with aperture d, and the amount of coating per unit time is q. Furthermore, if the number of revolutions per unit time of the workpiece 4 is n, the coating thickness t1 is expressed as tl-q/2πr1n. If rl in this equation is changed to r2, t2 can also be naturally obtained.

If r2 is twice rl, then t2 becomes 1/2 of tl, and as shown in FIG. 6, the film thickness decreases from the inner circumference to the outer circumference of the workpiece 4.

In order to make t1 = t2, either increase q in proportion to r or decrease the rotation number n for the outer periphery, but the latter is achieved by simultaneously increasing the inner and outer periphery of the present invention. This is not possible with the painting method. In order to increase q, the diameter of the small hole 12 is changed based on this idea.

Effects of the Invention As described above, the present invention has a groove portion having a length corresponding to the coating portion, a plurality of small holes opened at the bottom of the groove portion, a horizontal hole provided to connect the small holes, and a coating liquid in the horizontal hole. By providing a supply hole and increasing the diameter of each of the small holes in proportion to the radius of the coating section, the entire coating area can be coated at the same time, and the film thickness can be made uniform in the radial direction. Its effects on shortening coating time and improving coating quality are significant.

[Brief explanation of drawings]

FIG. 1 is a perspective view showing a conventional coating method, FIG. 2 is a perspective view showing a coating method in an embodiment of the present invention, FIG. 3 is a front view of a nozzle in an embodiment of the present invention, and FIG. 4 is a third To figure-
FIG. 6 is a side sectional view of the nozzle taken along line B-B in FIG. 3;
FIG. 6 is a conceptual diagram showing the relationship between radius and film thickness. 7 l Sheet 4...Object to be coated, 5...Coating liquid, 6...
... Nozzle, 10 ... Supply hole, 11 ...
...Horizontal hole, 12...Small hole, 13...
・Groove. Name of agent: Patent attorney Toshio Nakao and 1 other person No. 3
Figure 1 Figure 2 Figure 4 Figure 5

Claims (1)

[Claims] A groove with a length corresponding to the radial width of the application area, a plurality of small holes provided at appropriate intervals on the bottom of the groove, and a horizontal hole provided to connect the plurality of small holes. and,
A supply hole is provided so that the coating liquid is supplied to an appropriate location in the horizontal hole, and the diameter of the plurality of small holes is sequentially increased in proportion to the radius of the object to be coated corresponding to the opening position. Nozzle for rotary coating equipment.