JPS59107551A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS59107551A JPS59107551A JP57216921A JP21692182A JPS59107551A JP S59107551 A JPS59107551 A JP S59107551A JP 57216921 A JP57216921 A JP 57216921A JP 21692182 A JP21692182 A JP 21692182A JP S59107551 A JPS59107551 A JP S59107551A
- Authority
- JP
- Japan
- Prior art keywords
- bonding
- semiconductor chip
- wiring
- mounting board
- section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title claims description 36
- 239000000758 substrate Substances 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 239000000919 ceramic Substances 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 241000220317 Rosa Species 0.000 description 1
- 239000011889 copper foil Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/02—Bonding areas ; Manufacturing methods related thereto
- H01L24/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L24/06—Structure, shape, material or disposition of the bonding areas prior to the connecting process of a plurality of bonding areas
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49838—Geometry or layout
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/0555—Shape
- H01L2224/05552—Shape in top view
- H01L2224/05554—Shape in top view being square
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/06—Structure, shape, material or disposition of the bonding areas prior to the connecting process of a plurality of bonding areas
- H01L2224/061—Disposition
- H01L2224/0612—Layout
- H01L2224/0615—Mirror array, i.e. array having only a reflection symmetry, i.e. bilateral symmetry
- H01L2224/06153—Mirror array, i.e. array having only a reflection symmetry, i.e. bilateral symmetry with a staggered arrangement, e.g. depopulated array
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
- H01L2224/491—Disposition
- H01L2224/4912—Layout
- H01L2224/49171—Fan-out arrangements
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
- H01L2224/494—Connecting portions
- H01L2224/4943—Connecting portions the connecting portions being staggered
- H01L2224/49431—Connecting portions the connecting portions being staggered on the semiconductor or solid-state body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
- H01L2224/494—Connecting portions
- H01L2224/4943—Connecting portions the connecting portions being staggered
- H01L2224/49433—Connecting portions the connecting portions being staggered outside the semiconductor or solid-state body
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/1515—Shape
- H01L2924/15153—Shape the die mounting substrate comprising a recess for hosting the device
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/15165—Monolayer substrate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Geometry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Wire Bonding (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
本発明は半導体装置に関し、特に、半導体チップの実装
基板への取付構造に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a semiconductor device, and particularly to a structure for attaching a semiconductor chip to a mounting board.
1つの半導体チップへの回路素子の高集積化あるいは高
密度化に伴い、半導体チップから外部に引出される配線
数が増加する。すなわち、半導体チップに設けられた多
くのポンディングパッドを介してコネクタワイヤによっ
て半導体チップ内の配線を、その外部へと引き出さなけ
ればならない。2. Description of the Related Art As circuit elements become more highly integrated or more densely integrated into one semiconductor chip, the number of wires drawn out from the semiconductor chip increases. That is, the wiring inside the semiconductor chip must be led out to the outside by connector wires through many bonding pads provided on the semiconductor chip.
この場合、半導体チップが実装されるリードフレーム、
プリント基板、セラミックパッケージ基板等の半導体チ
ップ実装基板の配線を如何に高密度に形成するかが課題
となる。この実装基板には、半導体チップに設けられる
多数のポンディングパッドに対応したポンディングパッ
ド部およびこのパッド部から実装基板のピン配置部又は
基板のターミナル部圧延在する配線部を設ける必要があ
るが、実装密度な犬ぎくするためにこれらの部分が高密
度に形成されることが要求される。In this case, the lead frame on which the semiconductor chip is mounted,
The challenge is how to form high-density wiring on semiconductor chip mounting boards such as printed circuit boards and ceramic package boards. It is necessary to provide this mounting board with a bonding pad section corresponding to a large number of bonding pads provided on the semiconductor chip, and a wiring section extending from this pad section to the pin arrangement section of the mounting board or the terminal section of the board. In order to achieve high packaging density, these parts are required to be formed at high density.
従来の実装基板に半導体チップを取付けた半導体装置と
して第4図のものが周知である。第4図にて、1は、論
理回路およびメモリなどが形成された半導体チップで、
シリコン基板から成る。2は、半導体チップの周辺部に
形成されたポンディングパッド。3は、実装基板で、半
導体チップ1な配設するための溝部4と、ポンディング
パッド部5と、そのパッド部5から延在する配線部6と
を有する。チップ側ポンディングパッド2と、基板側ホ
ンティングパッド5とはコネクタワイヤ7とによって電
気的に接続されている。As a conventional semiconductor device in which a semiconductor chip is mounted on a mounting board, the one shown in FIG. 4 is well known. In FIG. 4, 1 is a semiconductor chip on which a logic circuit, memory, etc. are formed.
Consists of a silicon substrate. 2 is a bonding pad formed on the periphery of the semiconductor chip. Reference numeral 3 denotes a mounting board, which has a groove portion 4 for arranging the semiconductor chip 1, a bonding pad portion 5, and a wiring portion 6 extending from the pad portion 5. The chip side bonding pad 2 and the substrate side bonding pad 5 are electrically connected by a connector wire 7.
この従来の実装構造においては、実装基板側のポンディ
ングパッド5としては所実の横巾(例えば0.2 yn
tn )のものが用いられており、しかも、ボンディン
グ部5に於けるポンディングパッド相互間には必ずある
間隔(例えば0.1511111)をもたせる必要があ
る。すなわち、ボンディングバンドは所定の横巾を必要
とし、また、その相互間には所定の間隔が必要である。In this conventional mounting structure, the bonding pad 5 on the mounting board side has an actual width (for example, 0.2 yn
tn) is used, and it is necessary to provide a certain distance (for example, 0.1511111) between the bonding pads in the bonding portion 5. That is, the bonding bands require a predetermined width and a predetermined spacing between them.
しかも従来の実装基板では、第1図に示すように、ボン
ディング部5と配線部6とが、配線の長さ方向に対し均
一の幅を以って形成されている。従って、かかる実装基
板の形態にあっては多数のポンディングパッドを配する
ことができず、実装基板における多ビン化または多数の
ターミナル化をすることが困難であった。Moreover, in the conventional mounting board, as shown in FIG. 1, the bonding part 5 and the wiring part 6 are formed with a uniform width in the length direction of the wiring. Therefore, in the form of such a mounting board, it is not possible to arrange a large number of bonding pads, and it is difficult to provide a large number of bins or a large number of terminals on the mounting board.
従って、半導体チップの高集積化を図って多ビン化する
には、半導体チップの実装基板の配線構造に制約かあっ
た。Therefore, in order to increase the integration of semiconductor chips and increase the number of bins, there are restrictions on the wiring structure of the semiconductor chip mounting board.
本発明は、半導体チップの高密度化に伴って要求される
多ビン化に適した実装基板を与えることを目的とする。An object of the present invention is to provide a mounting board suitable for increasing the number of bins required as the density of semiconductor chips increases.
以下に本発明を実施例について、図面に基づいて説明す
る。The present invention will be described below with reference to the drawings.
第1図は本発明に係る半導体装置の平面構造を示し、第
2図はその断面構造を示す。第1図および第2図にて、
8は四角形の半導体チップで、シリコン単結晶基板から
成る。周知の技術によってこの半導体チップ内には多数
の回路素子が形成され、1つの回路機能を与えている。FIG. 1 shows a planar structure of a semiconductor device according to the present invention, and FIG. 2 shows its cross-sectional structure. In Figures 1 and 2,
8 is a rectangular semiconductor chip made of a silicon single crystal substrate. A large number of circuit elements are formed within this semiconductor chip using well-known techniques to provide one circuit function.
回路素子は、例えば、絶縁ゲート型電界効果トランジス
タ(MOSトランジスタ)から成り、これらの回路素子
によって、例えば論理回路およびメモリ回路機能が形成
されている。半導体チップの周辺部には、外部と電気的
結合な与えるためのボンディングバンド9が形成されて
いる。このボンディングバンドは例えばアルミニウムの
金属から構成されている。The circuit elements include, for example, insulated gate field effect transistors (MOS transistors), and these circuit elements form, for example, logic circuit and memory circuit functions. A bonding band 9 is formed around the periphery of the semiconductor chip to provide electrical connection with the outside. This bonding band is made of a metal such as aluminum.
10は四角形の実装基板で、例えばセラミックの基板か
ら構成されている。この基板は、樹脂から構成されたプ
リント基板であっても良い。実装基板10は、その中央
部に半導体チップ8を固着している溝部11を有し、さ
らに、半導体チップ8のポンディングパッド9に対応し
て形成された金属のポンディングパッド部12と、これ
らのパッド部から延在する金属の配線部13と、配線部
に一体に接続された金属のターミナル部14とを有する
一実装基板のポンディングパッド部、配線部およびター
ミナル部の金属層としては、セラミック基板を使用する
場合、タングステンまたはモリブテンなどを印刷技術に
よって形成されたものが使用され、また樹脂基板の場合
、銅泊が使用される。特に、ボンディング部12には第
3図に示すように金メッキ12′が施されている。Reference numeral 10 denotes a rectangular mounting board, which is made of, for example, a ceramic board. This board may be a printed board made of resin. The mounting board 10 has a groove part 11 in the center thereof to which the semiconductor chip 8 is fixed, and further includes a metal bonding pad part 12 formed corresponding to the bonding pad 9 of the semiconductor chip 8, and The metal layers of the bonding pad section, the wiring section, and the terminal section of one mounting board have a metal wiring section 13 extending from the pad section and a metal terminal section 14 integrally connected to the wiring section. When a ceramic substrate is used, one made of tungsten or molybdenum using a printing technique is used, and when a resin substrate is used, a copper foil is used. In particular, the bonding portion 12 is plated with gold 12' as shown in FIG.
本発明において、特に、ボンディングバラhJ12およ
び配線部13は、第3図に示すように、配線部13をポ
ンディングパッド部12より幅狭く形成している。配線
部130幅Yは、例えば、0.3朋に形成され、ボンテ
ィングパッド部120幅Xは0.1問に形成されている
。これらのパッド部12ば、アルミニウムまたは金のコ
ネクタワイヤ17によって、半導体チップのポンディン
グパッド部9に電気的接続されている。In the present invention, in particular, the bonding rose hJ12 and the wiring part 13 are formed so that the wiring part 13 is narrower than the bonding pad part 12, as shown in FIG. The width Y of the wiring portion 130 is, for example, 0.3 mm, and the width X of the bonding pad portion 120 is 0.1 mm. These pad portions 12 are electrically connected to the bonding pad portions 9 of the semiconductor chip by aluminum or gold connector wires 17.
第1図及び第2図ではポンディングパッド12の先端部
の四隅を直角と成した例を示しであるが、円孤状等の他
の形状に構成しても差支えない。Although FIGS. 1 and 2 show an example in which the four corners of the tip of the bonding pad 12 are formed at right angles, it may be configured in other shapes such as a circular arc shape.
本発明のボンディング部12は第1図に示すようK、上
記形状のポンディングパッド12を複数個横方向に適宜
間隔を置いて配列し、当該ホンディングパッドから延在
する配線部130幅の狭い部分の相互間に形成された空
間15に同じ形状のボンディングバンドを配列して成る
。As shown in FIG. 1, the bonding part 12 of the present invention has a plurality of bonding pads 12 having the above-mentioned shape arranged at appropriate intervals in the lateral direction, and a wiring part 130 extending from the bonding pad having a narrow width. Bonding bands of the same shape are arranged in spaces 15 formed between the parts.
このようにして、第1列群のポンディングパッド間のす
き間に第2列群のバンドを形成することニヨって、実装
基板に多数のボンディングバンドを収容することができ
、多ビン化が容易となる。In this way, by forming the bands of the second row group in the gaps between the bonding pads of the first row group, it is possible to accommodate a large number of bonding bands on the mounting board, and it is easy to increase the number of bins. becomes.
尚、半導体チップ8と実装基板のポンディングパッド部
12とは、第2図に示すように樹脂層16によって保護
される。Incidentally, the semiconductor chip 8 and the bonding pad portion 12 of the mounting board are protected by a resin layer 16 as shown in FIG.
本発明は、例えばウォッチモジュール基板(時計組立用
回路基板)に応用できる。例えば、ガラスエポキシ材料
から成る、ウォッチモジュール用基板は、そこ罠取付け
される半導体チップのために、多くのポンディングパッ
ドを必要とするが、かかる場合にあっても本発明により
多ビン化に対応した半導体装置を提供することができる
。The present invention can be applied to, for example, a watch module board (a circuit board for timepiece assembly). For example, a watch module substrate made of glass epoxy material requires many bonding pads for semiconductor chips to be mounted thereon, but even in such cases, the present invention can accommodate multiple bins. A semiconductor device can be provided.
上述の実施例では、実装基板が配線部のターミナル部で
終端したが、パッケージを構成する場合、ターミナル部
がビンに接続されてもよい。さらに、本発明は、半導体
チップを複数実装する場合の回路基板の一部に、もしく
は、他の電子部品を含む回路基板の一部に、半導体チッ
プを取付けする場合の実装構造として適用できる。また
、半導体チップ部の封止形態は、樹脂封止方式に限らず
、キャップによって保護する方式であっても良い。In the above-described embodiment, the mounting board terminates at the terminal section of the wiring section, but when configuring a package, the terminal section may be connected to the bottle. Furthermore, the present invention can be applied as a mounting structure when a semiconductor chip is attached to a part of a circuit board in which a plurality of semiconductor chips are mounted, or to a part of a circuit board that includes other electronic components. Further, the sealing form of the semiconductor chip portion is not limited to the resin sealing method, and may be protected by a cap.
第1図および第2図は、本発明に伴う半導体装置の部分
的な平面図および断面図をそれぞれ示す。
第3図は、第1図に示したボ/メイングパッド部および
配線部の形状を説明するための略式図を示す。
第4図は従来の半導体装置を示す。
1.8・・・半導体チップ、10・・・実装基板(セラ
ミック基板)、2.g12・・・ポンプイングツくノド
部、13・・・配線部。
第 1 図
ノ/
第 2 図
第 3 図
2
第 4 図
第1頁の続き
0発 明 者 小坂秀樹
小平市上水本町1450番地株式会
社°日立製作所武蔵工場内
0発 明 者 村上元
小平市上水本町1450番地株式会
社日立製作所武蔵工場内
0発 明 者 増田正親
小平市上水本町1450番地株式会
社日立製作所武蔵工場内
0発 明 者 戸井田徳次
小平市上水本町1450番地株式会
社日立製作所武蔵工場内
0出 願 人 日立マイクロコンピュータエンジニアリ
ング株式会社
小平市上水本町1479番地1 and 2 show a partial plan view and a sectional view, respectively, of a semiconductor device according to the present invention. FIG. 3 shows a schematic diagram for explaining the shapes of the main pad section and wiring section shown in FIG. 1. FIG. 4 shows a conventional semiconductor device. 1.8... Semiconductor chip, 10... Mounting board (ceramic board), 2. g12...Pumping throat section, 13...Wiring section. Figure 1 / Figure 2 Figure 3 Figure 2 Figure 4 Continued from page 10 Inventor: Hideki Kosaka, 1450 Kamimizu Honcho, Kodaira City, Musashi Factory, Hitachi, Ltd. 0 Inventor: Motomuramurakami, Kodaira City 1450 Mizuhonmachi, Hitachi, Ltd. Musashi Factory Inventor Masachika Masuda 1450 Kamizu Honmachi, Kodaira City Musashi Factory, Hitachi, Ltd. 0 Inventor Tokuji Toida 1450 Kamizu Honmachi, Kodaira City Musashi, Hitachi, Ltd. 0 applicants within the factory Hitachi Microcomputer Engineering Co., Ltd. 1479 Kamimizu Honmachi, Kodaira City
Claims (1)
在する配線部を前記ボンディング部の幅より小さくし、
該配線部間に第2群のボンディング部を形成して成り、
前記第1群および第2群のボンディング部に半導体チッ
プに対するワイヤをボンディングして成ることを特徴と
する半導体装置、A wiring portion extending from the first group of bonding portions formed on the mounting board is made smaller than the width of the bonding portion;
A second group of bonding parts is formed between the wiring parts,
A semiconductor device, characterized in that wires for a semiconductor chip are bonded to the bonding portions of the first group and the second group,
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57216921A JPS59107551A (en) | 1982-12-13 | 1982-12-13 | Semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57216921A JPS59107551A (en) | 1982-12-13 | 1982-12-13 | Semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS59107551A true JPS59107551A (en) | 1984-06-21 |
Family
ID=16696008
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP57216921A Pending JPS59107551A (en) | 1982-12-13 | 1982-12-13 | Semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS59107551A (en) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4868638A (en) * | 1986-11-15 | 1989-09-19 | Matsushita Electric Works, Ltd. | Plastic molded pin grid chip carrier package |
JPH0334337A (en) * | 1990-06-06 | 1991-02-14 | Seiko Epson Corp | semiconductor integrated circuit |
EP0382445A3 (en) * | 1989-02-10 | 1991-04-17 | Honeywell Inc. | High density bond pad design |
JPH0348230U (en) * | 1989-09-16 | 1991-05-08 | ||
US5117275A (en) * | 1990-10-24 | 1992-05-26 | International Business Machines Corporation | Electronic substrate multiple location conductor attachment technology |
US5229328A (en) * | 1990-10-24 | 1993-07-20 | International Business Machines Corporation | Method for bonding dielectric mounted conductors to semiconductor chip contact pads |
US5233221A (en) * | 1990-10-24 | 1993-08-03 | International Business Machines Corporation | Electronic substrate multiple location conductor attachment technology |
US5359227A (en) * | 1991-07-12 | 1994-10-25 | Vlsi Technology, Inc. | Lead frame assembly and method for wiring same |
-
1982
- 1982-12-13 JP JP57216921A patent/JPS59107551A/en active Pending
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4868638A (en) * | 1986-11-15 | 1989-09-19 | Matsushita Electric Works, Ltd. | Plastic molded pin grid chip carrier package |
EP0382445A3 (en) * | 1989-02-10 | 1991-04-17 | Honeywell Inc. | High density bond pad design |
JPH0348230U (en) * | 1989-09-16 | 1991-05-08 | ||
JPH0334337A (en) * | 1990-06-06 | 1991-02-14 | Seiko Epson Corp | semiconductor integrated circuit |
US5117275A (en) * | 1990-10-24 | 1992-05-26 | International Business Machines Corporation | Electronic substrate multiple location conductor attachment technology |
US5229328A (en) * | 1990-10-24 | 1993-07-20 | International Business Machines Corporation | Method for bonding dielectric mounted conductors to semiconductor chip contact pads |
US5233221A (en) * | 1990-10-24 | 1993-08-03 | International Business Machines Corporation | Electronic substrate multiple location conductor attachment technology |
US5359227A (en) * | 1991-07-12 | 1994-10-25 | Vlsi Technology, Inc. | Lead frame assembly and method for wiring same |
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