JPS59107304A - Semi-transmitting mirror - Google Patents
Semi-transmitting mirrorInfo
- Publication number
- JPS59107304A JPS59107304A JP21755282A JP21755282A JPS59107304A JP S59107304 A JPS59107304 A JP S59107304A JP 21755282 A JP21755282 A JP 21755282A JP 21755282 A JP21755282 A JP 21755282A JP S59107304 A JPS59107304 A JP S59107304A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- semi
- dielectric
- refractive index
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims abstract description 47
- 229910052709 silver Inorganic materials 0.000 claims abstract description 16
- 239000004332 silver Substances 0.000 claims abstract description 16
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims abstract description 15
- 239000010408 film Substances 0.000 claims abstract description 14
- 238000010030 laminating Methods 0.000 claims 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 abstract description 14
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 12
- 239000004408 titanium dioxide Substances 0.000 abstract description 7
- 239000011347 resin Substances 0.000 abstract description 6
- 229920005989 resin Polymers 0.000 abstract description 6
- 235000012239 silicon dioxide Nutrition 0.000 abstract description 6
- 239000000377 silicon dioxide Substances 0.000 abstract description 6
- 230000001678 irradiating effect Effects 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 7
- 230000031700 light absorption Effects 0.000 description 5
- 230000003595 spectral effect Effects 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910000420 cerium oxide Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 229910001610 cryolite Inorganic materials 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 description 1
- 229910001635 magnesium fluoride Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000012788 optical film Substances 0.000 description 1
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 230000001932 seasonal effect Effects 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 150000003378 silver Chemical class 0.000 description 1
- 229910001936 tantalum oxide Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Filters (AREA)
- Optical Elements Other Than Lenses (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は、銀薄膜と誘電体薄膜を組み合わせたＦｓ腰部
が２個の直角プリズムの接合面に介在された半透過鏡に
関し、特に可視域で透過光と反射光との光量比（以下、
単に「光量比」という。）が波長によって変化しない半
透過鏡に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a semi-transmissive mirror in which an Fs waist part made of a combination of a silver thin film and a dielectric thin film is interposed between the joint surfaces of two right angle prisms, and particularly relates to a semi-transmissive mirror in which transmitted light and reflected light are separated in the visible range. light intensity ratio (hereinafter,
It is simply called "light ratio." ) relates to a semi-transmissive mirror that does not change with wavelength.
従来、この種の半透過鏡としては１．薄膜部の構成によ
って大別され、（１）低屈折率誘電体層と高屈折率誘電
体層を交互に数層重ねた誘電体多層膜、（２）クロム、
アルミニウム又は銀等の金属単層膜、（３）アルミニウ
ム、銀等の金属ｗｊｌ１Ｍを誘電体薄膜で挾みこんだ薄
膜部、を有するものが知られている。Conventionally, this type of semi-transparent mirror has 1. They are broadly classified according to the structure of the thin film part, (1) dielectric multilayer film in which several low refractive index dielectric layers and high refractive index dielectric layers are stacked alternately, (2) chromium,
A device having a single layer film of metal such as aluminum or silver, and (3) a thin film portion in which metal wjl1M such as aluminum or silver is sandwiched between dielectric thin films is known.
しかしながら、（１）の誘電体多層膜は、光量比を制御
することが困難であり、更に膜構成が季層膜であること
から、製造原価が高くなる欠点があった。次に、（２）
の金属単層カ染は、例えばクロム又はアルミニウムの金
属単層膜の場合には、光吸収が大きくなることから効率
の低下を招き、鎖車層膜の場合には、光吸収が少なくな
るが、光量比が波長によって著しく変化する欠点があっ
た。However, the dielectric multilayer film of (1) has the disadvantage that it is difficult to control the light intensity ratio and that the film structure is a seasonal film, resulting in high manufacturing costs. Next, (2)
For example, in the case of a metal single layer film of chromium or aluminum, the light absorption increases, resulting in a decrease in efficiency, and in the case of a chain wheel layer film, the light absorption decreases, but However, there was a drawback that the light intensity ratio changed significantly depending on the wavelength.
また、（３）の薄膜部も（２）の鎖車層膜の場合と同様
、光量比が波長によって変化する欠点があった。いり“
れにせよ、従来の半透過鏡は、光量比の波長依存性を改
善するまでには至っていなかつＩこ 。Further, the thin film portion (3) also has a drawback that the light amount ratio changes depending on the wavelength, as in the case of the chain wheel layer film (2). “Iri”
In any case, conventional semi-transmissive mirrors have not yet improved the wavelength dependence of the light intensity ratio.
第１図は、鎖車Ｗ７ｊｌｌＪからなる薄膜部を使用した
従来の半透過鏡を示し、この半透過鏡は、鎖車層膜１を
接着剤２と共に、２個の直角プリズム３．４の対向平面
に介在させて接合してなる。イして、入射光ｒはプリズ
ム３を通って銀ψ層Ｉｌ＊１によって反射光Ｒと透過九
王とに分りられる。この半透過鏡は、可視域の中心波長
６００ ＩＩ ｍにＪ３いて光量比をほば１：１に調整
したものの、その分光特性は第２図の反射光曲線「と透
過光曲線ｔで示されるように、その光量比が波長によっ
て著しく変化し、かつ光吸収率が７〜１０％も占めるこ
とになる。FIG. 1 shows a conventional semi-transmissive mirror using a thin film part consisting of a chain wheel W7jllJ, in which a chain wheel layer film 1 is attached together with an adhesive 2 to two rectangular prisms 3.4 facing each other. It is joined by interposing it on a plane. Then, the incident light r passes through the prism 3 and is separated into reflected light R and transmitted light by the silver ψ layer Il*1. Although this semi-transmissive mirror has a center wavelength of 600 II m in the visible range and the light intensity ratio is adjusted to approximately 1:1, its spectral characteristics are shown by the reflected light curve ``and transmitted light curve t'' in Figure 2. As such, the light quantity ratio changes significantly depending on the wavelength, and the light absorption rate accounts for 7 to 10%.
本発明は、以上の欠点を除去するためになされたもので
゛あり、薄膜部が、反射光の通る一方の直角プリズムか
ら透過光の通る他方の直角プリズムに向かって順に、第
１誘電体薄膜と、前記第１誘電体薄膜の屈折率よりも低
い屈折率を有する第２誘電体Ｎ膜と、銀薄膜とを積層し
てなることから、光吸収を少なくし、かつ光量比の波長
依存性を少なくした半透過鏡を提供することを目的とし
ている。The present invention has been made in order to eliminate the above-mentioned drawbacks, and the thin film portion is formed of a first dielectric thin film in order from one right-angle prism through which reflected light passes to the other right-angle prism through which transmitted light passes. A second dielectric N film having a refractive index lower than that of the first dielectric thin film, and a silver thin film are laminated to reduce light absorption and increase the wavelength dependence of the light quantity ratio. The purpose of the present invention is to provide a semi-transmissive mirror with reduced transmission.
以下、本発明を実施例図面を参照して詳細に説明づ゛る
。Hereinafter, the present invention will be explained in detail with reference to embodiment drawings.
第３図は本発明による半透過鏡の一実施例を示す断面図
である。先ず、硝種ＢＫ−７（屈折率ｎ＝ １．５２
）からなる光学ガラスを索材にして、断面を直角ニー等
辺三角形に成型研磨加工した２個のプリス゛ム５．６を
用意し、一方のプリズム６を洗浄後、真空蒸着装置内に
設置して、１ Ｘ１Ｏ−５１−Ｏｒｒ程度に排気づる。FIG. 3 is a sectional view showing an embodiment of a semi-transmissive mirror according to the present invention. First, glass type BK-7 (refractive index n = 1.52
) are used as cable material, and two prisms 5 and 6 are prepared which are shaped and polished to have a right-angled equilateral triangular cross section, and after cleaning one of the prisms 6, they are placed in a vacuum evaporation device. Exhaust to about 1 X1O-51-Orr.
次に、銀をタングステン製のボードにて電熱により加熱
蒸発させ、プリズム６の直角部に対向りる平面上に銀薄
膜７（膜厚ｄ−１５ｒｕｎ）を１層する。次に、この銀
薄膜７上に二酸化ケイ素（ＳｉＯｚ＞を電子銃により蒸
着させて二酸化ケイ素薄膜８（光学的膜厚ｎｄ＝ １
．４６ｘ６８？ １００ｒ＋ｍ）を積層する。次に、同
様にしてこの二酸化ケイ素薄ＩＩ＊８上に二酸化チタン
（’ｒ’ ｉ ０２）薄膜９（光学的膜厚ｎｄ＝＝ ２
，３ｘ４３ ’＝ １０１００ｎを積層覆る。Next, silver is heated and evaporated using electric heat using a tungsten board, and one layer of silver thin film 7 (film thickness d-15 runs) is formed on the plane facing the right angle part of prism 6. Next, silicon dioxide (SiOz) is deposited on this silver thin film 7 using an electron gun to form a silicon dioxide thin film 8 (optical thickness nd=1).
．． 46x68? 100r+m) are laminated. Next, in the same manner, a titanium dioxide ('r' i 02) thin film 9 (optical film thickness nd == 2
, 3x43' = 10100n.
そして、プリズム５．６の屈折率（１１＝ １．５２
）とほぼ等しい屈折率を有する紫外線硬化樹脂１０は、
二酸化チタン薄膜９の表面と、これと銀薄膜７及び二酸
化ケイ素薄膜８の各外側面とを包囲づるように塗布され
、他方のプリズム５をこの樹脂１０の表面に重ね、紫外
線を照射しＣ接合する。Then, the refractive index of prism 5.6 (11 = 1.52
) The ultraviolet curing resin 10 has a refractive index almost equal to
It is applied so as to surround the surface of the titanium dioxide thin film 9 and the outer surfaces of the silver thin film 7 and silicon dioxide thin film 8, and the other prism 5 is placed on the surface of this resin 10, and ultraviolet rays are irradiated to form a C bond. do.
以」この構造で注目されるのは、プリズム５側からプリ
ズム６側に向かって順に、第１誘電体薄膜としＣ比較的
高屈折率を有する二酸化チタン薄膜９、第２誘電体薄膜
として比較的低屈折率を右する二酸化ケイ素薄膜８、次
いで銀ＩＮ！０７を積層している。このような積層構造
は、各種実験を行つＩこ結果、本発明の目的を達成する
ために、最適な積層構造を見出して選定している。What is noteworthy about this structure is that in order from the prism 5 side to the prism 6 side, the first dielectric thin film C is a titanium dioxide thin film 9 having a relatively high refractive index, and the second dielectric thin film is a relatively high titanium dioxide thin film 9. Silicon dioxide thin film 8, which has a low refractive index, and then silver IN! 07 is laminated. As a result of various experiments, the most suitable laminated structure was found and selected in order to achieve the object of the present invention.
本例の半透過鏡の分光特性は、第４図の反射光曲線１・
及び入射光曲線【に示すように波長依存性が極めて少な
く、まｌ〔合成曲線（ｒ ＋ｔ ＞に示すように光吸収
を５〜７％にまで少なくさせている。The spectral characteristics of the semi-transparent mirror in this example are reflected light curve 1 and
As shown in the incident light curve, the wavelength dependence is extremely low, and the light absorption is reduced to 5 to 7% as shown in the composite curve (r + t >).
したがって、本発明によれば、光量比が可視域において
はば１：１となる優れた半透過鏡が実現できる。また、
薄膜部は紫外線硬化樹脂により密封されていることから
、本発明による半透過鏡は、化学的及び機械的な耐久性
にも優れている。Therefore, according to the present invention, an excellent semi-transmissive mirror with a light quantity ratio of 1:1 in the visible range can be realized. Also,
Since the thin film portion is sealed with an ultraviolet curing resin, the semi-transparent mirror according to the present invention also has excellent chemical and mechanical durability.
なお、本発明は実施例に挙げたものに限定されず、第１
誘電体薄膜物質としては二酸化チタンの代わりに、酸化
セリウム（ｎ ＝ ２．３） 、酸化ジルコニウム（ｎ
＝ ２．０）又は酸化タンタル（ｎ−２，０）などで
もよく、第２誘電体ＩＩＩ！物質としては二酸化ケイ素
の代わりに弗化マグネシウム（１１−１，３８）、クリ
オライト（、Ｊｌ ＝ １．３２ ） 、チオライト（
ｎ ＝ １．３２ ）などでもよい。また、実施例では
光量比を１：１のものを挙げたが、この光量。Note that the present invention is not limited to those listed in the examples, but
Instead of titanium dioxide, cerium oxide (n = 2.3) and zirconium oxide (n
= 2.0) or tantalum oxide (n-2,0), etc., and the second dielectric III! As substances, instead of silicon dioxide, magnesium fluoride (11-1,38), cryolite (, Jl = 1.32), thiolite (
n = 1.32). In addition, in the example, the light amount ratio was 1:1, but this light amount.
比については、銀薄膜の膜厚を調整することにより、容
易に変化させることがで、きる。更に、２個の直角プリ
ズムの接合構造については、実施例に示しｋもの以外に
、第５図に示すようにプリズム５の直角部に対向！ｌ−
る平面と、プリズム１１の一方の傾斜面とを接合しても
よく、本例の透過光Ｔはプリズム１１の他方の傾斜面に
て反射する。The ratio can be easily changed by adjusting the thickness of the silver thin film. Furthermore, regarding the joining structure of two right-angled prisms, in addition to the one shown in the embodiment, as shown in FIG. l-
The plane may be joined to one inclined surface of the prism 11, and the transmitted light T in this example is reflected by the other inclined surface of the prism 11.
第１図は従来の半透過鏡を示す断面図、第２図は前回に
よる半透過鏡の分光特性図、第３図は本発明の実施例に
よる半透過鏡を示す断面図、第４図は前実施例による半
透過鏡の分光特性図及び第５図は本発明の他の実施例に
よる半透過鏡を示す断面図である。
５．６．１１・・・直角プリズム、７・・・銀薄膜、８
・・くＪ化りイ索薄膜、９・・・二酸化チタン薄膜、１
０・・・紫外線硬化樹脂
第２１カ
派畏入 °″”３
％今回
凌五入Fig. 1 is a sectional view showing a conventional semi-transmissive mirror, Fig. 2 is a spectral characteristic diagram of the semi-transmissive mirror according to the previous example, Fig. 3 is a sectional view showing a semi-transmissive mirror according to an embodiment of the present invention, and Fig. 4 is a sectional view showing a semi-transmissive mirror according to an embodiment of the present invention. The spectral characteristic diagram of the semi-transmissive mirror according to the previous embodiment and FIG. 5 are cross-sectional views showing the semi-transmissive mirror according to another embodiment of the present invention. 5.6.11... Right angle prism, 7... Silver thin film, 8
...J-shaped wire thin film, 9...Titanium dioxide thin film, 1
0...Ultraviolet curing resin 21st class °''”3% this time
Claims (1)
過用の薄膜部を介在してなる半透過鏡において、前記薄
膜部が、前記薄膜部によって反射される反射光の通る一
方の前記直角プリズムがら前記薄膜部を透過する透過光
の通る他方の前記直角プリズムに向かって順に、第１誘
電体薄膜と、前記第１誘電体薄膜の屈折率よりも低い屈
折率を有する第２誘電体薄膜と、銀薄膜とを積層してい
ることを特徴とする半透過鏡。(1) In a semi-transmitting mirror formed by interposing a thin film part for semi-transmitting light on the joint surface of two right-angle prisms, the thin film part is connected to one of the two rectangular prisms through which the reflected light reflected by the thin film part passes. A first dielectric thin film and a second dielectric having a refractive index lower than the refractive index of the first dielectric thin film in order from the right angle prism toward the other right angle prism through which the transmitted light passing through the thin film portion passes. A semi-transparent mirror characterized by laminating a thin film and a thin silver film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21755282A JPS59107304A (en) | 1982-12-10 | 1982-12-10 | Semi-transmitting mirror |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21755282A JPS59107304A (en) | 1982-12-10 | 1982-12-10 | Semi-transmitting mirror |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS59107304A true JPS59107304A (en) | 1984-06-21 |
Family
ID=16706043
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21755282A Pending JPS59107304A (en) | 1982-12-10 | 1982-12-10 | Semi-transmitting mirror |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59107304A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63147106A (en) * | 1986-12-10 | 1988-06-20 | Matsushita Electric Ind Co Ltd | Optical parts |
| JPS63223702A (en) * | 1987-03-13 | 1988-09-19 | Matsushita Electric Ind Co Ltd | Optical member |
| WO2004074887A1 (en) * | 2003-02-21 | 2004-09-02 | Mitsui Chemicals, Inc. | Reflector and application thereof |
| JP2012108508A (en) * | 2010-11-15 | 2012-06-07 | Leica Microsystems Cms Gmbh | Optical element for light distribution |
| JP2017138544A (en) * | 2016-02-05 | 2017-08-10 | リコーイメージング株式会社 | Optical instrument and prism |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5627106A (en) * | 1979-08-10 | 1981-03-16 | Canon Inc | Beam splitter |
-
1982
- 1982-12-10 JP JP21755282A patent/JPS59107304A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5627106A (en) * | 1979-08-10 | 1981-03-16 | Canon Inc | Beam splitter |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63147106A (en) * | 1986-12-10 | 1988-06-20 | Matsushita Electric Ind Co Ltd | Optical parts |
| JPS63223702A (en) * | 1987-03-13 | 1988-09-19 | Matsushita Electric Ind Co Ltd | Optical member |
| WO2004074887A1 (en) * | 2003-02-21 | 2004-09-02 | Mitsui Chemicals, Inc. | Reflector and application thereof |
| US7224527B2 (en) | 2003-02-21 | 2007-05-29 | Mitsui Chemicals, Inc. | Reflector and application thereof |
| JP2012108508A (en) * | 2010-11-15 | 2012-06-07 | Leica Microsystems Cms Gmbh | Optical element for light distribution |
| CN102540479A (en) * | 2010-11-15 | 2012-07-04 | 徕卡显微系统复合显微镜有限公司 | Optical element for distributing light |
| JP2017138544A (en) * | 2016-02-05 | 2017-08-10 | リコーイメージング株式会社 | Optical instrument and prism |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4367921A (en) | Low polarization beam splitter | |
| US5061050A (en) | Polarizer | |
| JPH01315704A (en) | Dielectric laminate analyzer | |
| JP3153334B2 (en) | Multilayer filter for ultraviolet irradiation equipment | |
| JPS59107304A (en) | Semi-transmitting mirror | |
| JP3222546B2 (en) | Multilayer reflector of ultraviolet irradiation device and ultraviolet irradiation device | |
| JP3153333B2 (en) | Multilayer filter for ultraviolet irradiation equipment | |
| JPH0528361B2 (en) | ||
| JP2566634B2 (en) | Multi-layer antireflection film | |
| JPS62297800A (en) | Multilayer-film reflecting mirror for x-ray | |
| JPS6028603A (en) | Prism type beam splitter | |
| JPH0242201B2 (en) | ||
| JPS6238402A (en) | Optical filter | |
| JPS6239801A (en) | Semi-transparent mirror | |
| JPS6340289B2 (en) | ||
| JPS6239401B2 (en) | ||
| JPH0223301A (en) | Adhesive strength intensifying structure of optical parts | |
| JPS6028601A (en) | Prism type beam splitter | |
| JPS62187802A (en) | Beam splitter | |
| JP3002059B2 (en) | Optical filter | |
| JPS61145501A (en) | Total reflection metallic mirror | |
| JPH03295834A (en) | Heat ray reflecting glass | |
| JPS62234105A (en) | Light and radio wave separating film | |
| JPH06167604A (en) | Ir tranmission and visible ray reflection type mirror | |
| JPH01287503A (en) | Light beam splitter |