JPS5883590A - Pulse high voltage generator - Google Patents

Abstract

PURPOSE:To reduce the size of a pulse high voltage generator by forming a pulse forming a pulse line to cover the outer periphery of a multiple type impulse voltage generator. CONSTITUTION:Condensers 7 are charged in parallel through charging resistors 6, 6' and a discharging resistor 18 from a DC high voltage generator 20, and a trigger pulse which is suitably controlled is applied to a discharging switch 8 of the lowermost stage. Thus, the switch 8 is discharged, and the other discharge switch 8' is sequentially discharged by self-explosion from the lower stage with the overvoltage produced by the electrostatically divided voltage of the distributed capacity between the stages and the ground capacity, and all stages are discharged in series, thereby forming a wave forming line 11 and charging a coaxial condenser between the coaxial conductive cylinders 9 and 10. When this voltage reaches the maximum value, a main discharge switch 12 is automatically self-exploded, and the charge stored in the waveform forming line 11 transmits a rectangular wave to the diode 14 of a load side.

Description

[Detailed description of the invention] The present invention relates to a pulse high voltage generator that employs the following.

Pulsed high voltage generators have conventionally been used as relatively small-sized devices in pulsed X-ray generators, relativistic electron beam generators, and the like.

However, the conventional high-voltage power supply unit for pulsed X-ray generation consists of a multistage impulse voltage generator using a Marx circuit, and applies voltage to a diode, which is a surface X-ray emitting unit. The discharge waveform determined by the circuit constants of the circuit and the impedance of the diode is, for example, the first
The voltage waveforms were those with long tails as shown in figure (a), and triangular waveforms as shown in figure (b).

Therefore, when the object is moving, the XSS shape shadow is (a)
In (b), the X-rays are emitted slowly and become blurred, and in (b), the pulse width is triangular wave-like, so the X-ray emission time is not effective and a higher voltage is required. Furthermore, X-ray diffraction has drawbacks such as the inability to absorb effective energy, and it has been hoped that a high-voltage generator capable of producing a square wave such as fIIJ1 (/) could be developed.

Now, as an attempt to shape this kind of pulse voltage into a rectangular wave, there are examples of a phase-determined electronic beam generator and an ion beam generator. FIG. 2 shows an example of these conventional pulse high voltage generators.

The operating principle in this case will be briefly explained. The multi-stage insulator using a Marx circuit)'< /l/l/The Sumie generator 1 is usually oil-insulated because it generates a high voltage.

2 shows a part of a coaxial waveform-shaped line made of metal, and the dielectric material used is oil, water, S F g gas, etc., depending on the impedance value. SoQ
The length of the M path is determined by the required pulse width.

3 is a gas-filled main discharge switch housed in an insulating container, and a two-pole diode section consisting of a γ node and a cathode placed in a four-chamber vacuum chamber.The shape of the electrodes will not be explained here, but An electron beam is emitted when the polarity is MTh, and an ion beam is emitted when the polarity is positive. In operation, the impulse voltage generator 1 is released by a properly controlled trigger pulser.
Once the charge is stored in the waveform forming line #62, and the voltage reaches around the maximum value, the main discharge switch 3, whose pressure has been properly adjusted, self-destructs, and the electric charge is transferred to the diode 4 via the pulse transmission line 5. A rectangular wave based on traveling wave theory is transmitted. In addition, waveform shaping line 2, pulse transmission line 5
The impedance of each is normally designed to have the same value as the diode 4, and impedance machining is performed, so ideally a voltage half the charging voltage of the waveform shaping line 2 is supplied to the diode 4. Become. Although waveform shaping has already been put into practical use, it is generally not possible to use large energy devices such as accelerating voltage (1 to 5).
It is used for MeV, energy (10-200) KJ, pulse width (50-100) is, etc., and is used for pulse 1,
01-1) KJ, Pulse @ (10-30) 111
It is structurally large to be used frequently, and in the case of low impedance, the ratio of the inner and outer diameters of the pulse shaping line becomes small, so if the electric field strength is set to an appropriate value, the diameter will inevitably become large, and the ineffective volume will be reduced. There is a drawback that having a large amount of polycomb results in an unfavorable shape.

The present invention aims to eliminate the above-mentioned drawbacks and provide a pulsed high voltage generator that is compact, economical, and has excellent power and performance.

The present invention will be described below with reference to embodiments shown in FIGS. 3 to 5.

FIG. 3 is a sectional view of the main parts of the pulsed high voltage generator of the present invention,
FIG. 4 is an equivalent circuit diagram thereof, and is an example of a five-stage multistage impulse generator using a Marx circuit. 6 high-voltage side charging resistors, 6' is a low-voltage side charging resistor, and 5 of each are connected in series. 7 is a capacitor, 8 is the lowest bird that forms a tron W switch, 8' is a self-destruct discharge switch, and 9 is a multi-stage "impulse voltage generator" whose main purpose is to cover the outer periphery of the impulse voltage generator. The conductive inner tube 1o is a conductive outer tube that houses all the equipment, and this tube 9 and flllo are arranged coaxially, and the capacitance tllb between the two tubes 9 and 10 is The impedance is determined by the inductance 11&, and the pulse width is determined by the length thereof. That is, a waveform shaping line 11 having a distributed constant circuit as shown in FIG. 4 is formed by the cylinder 9 and cylinder 10. 12
13 is a pulse line that propagates a pulse voltage to a diode 14 on the load side in the vacuum vessel; 5 is a pressure vessel for the main discharge switch 12;
It is also a high pressure output unit as a high pressure generator. Reference numeral 17 is a bolt for tightening various parts of the impulse voltage generator, reference numeral 18 is a discharge resistor, and reference numeral 19 is an insulator selected depending on the purpose, such as oil or SFa gas.

Next, we will explain its operation.g DC high voltage generator 2 (from l, charging resistor 6.6', discharging resistor 18 t-a, after charging each capacitor 7 in parallel, the lowest stage triggertron type discharge Appropriately controlled trigger pulses are given to the switch 8. This discharges the discharge switch 8, and the other discharge switch 8' also discharges due to the overvoltage generated in the electrostatic partial pressure of the distributed capacitance between the crotch and the ground capacitance. Self-destructive discharge occurs one after another from the lower stage, and eventually all stages are discharged in series to charge the coaxial capacitor between the coaxial conductive cylinders 9 and 10 forming the waveform forming line II.

When this voltage reaches its maximum value, the properly adjusted main discharge switch 12 self-destructs, and the charge stored between the waveform-shaped line 11, i.e. the coaxial conductor 1 [wJ9 and 10], is -Loading diode I4 Hebalsura, In13
Through this process, a rectangular wave according to the traveling wave theory is propagated. The selection of circuit constants varies depending on the purpose, but is generally as follows.

> C,...,...,, -41・song・---・song・
-... Song... -... Book - (1) ZL2:ZPF
L・・・・・・・・・・・・－・・・・・・・・・・・・
Song - Song (2) Where, n: Number of stages in the multi-stage impulse voltage generator of the Marx circuit C: Capacitance co of unit capacitor in the Marx circuit = Electrostatic capacity of the waveform forming line Capacitance ZPFL: Impedance of the waveform-shaped line zL: Impedance of the diode section, where: rl: Outer radius of the conductive tube 9 rl: Inner radius of the conductive tube 10 ε: More than the dielectric constant of the insulator inside the conductive tube l As can be seen from equation (3), when the pulsed high voltage generator of the present invention has a particularly low impedance, the inner/outer diameter ratio rz/γ1 becomes smaller, and considering the electric field strength of the coaxial cylinder -2 degrees, If the pulse forming line 11 is
Since the inside of the conductive cylinder 9 constituting the casing 9 is a wasted space, an insulating space is appropriately provided therein to effectively enclose the multistage impulse voltage generator 20 and integrate it. On the other hand, the outer conductive tube 10 constituting the pulse forming line can be used as an outer container, and the capacitance, inductance, and length between the inner conductive tube 9 and the outer conductive tube 10 can be selected as appropriate. In some cases, a different type of dielectric material such as oil or gas may be used as the insulator, and the required rectangular wave pulse can be supplied to the diode 14 on the load side.

It should be noted that the embodiment described above couples the pulse shaping line 11 to a multi-stage impulse voltage generator 21, and the generator 2
Although the case has been described in which the present invention is arranged on the outer periphery of the first impulse voltage generator, the same applies to cases in which it is coupled to impulse voltage generators of other types. For example, in a step-up pulse voltage generator using a pulse transformer 22 as shown in FIG. 5, a coaxial 41iiC cylinder 9° 10 is attached to the outer periphery of the pulse transformer 22 as shown in FIG. A similar effect can be obtained by articulating and coupling the pulse shaping lines 11. The operation in this case is to close the charging switch n and charge the capacitor 25 through the charging resistor U using the DC high voltage generator 2 () controlled by the play field. After charging is complete, discharge switch 1
626, the charge in the capacitor 25 is discharged to the pulse transformer fi22, and a voltage proportional to the winding ratio is generated on the secondary side of the transformer, and up to that voltage, the inductance 11
The pulse spiral line 1 shown in FIG. From then on,
When this voltage reaches the maximum value, it is properly adjusted and the No. 1 discharge switch I switch 12 self-destructs, and the charge accumulated in the waveform shaping line 11 is transferred to the diode 14 on the load side in a rectangular shape according to the traveling wave theory. It will propagate waves.

In this way, a multi-stage impulse voltage generator or an integrated pulse high voltage generator in which a pulse shaping line is provided over the outer circumference of a pulse transformer can easily generate a rectangular wave. In addition, it can be made compact, and as shown in Figure 1, compared to the conventional product that combines the independent waveform wire attachment method and the separate attachment method, the volume of the product of the present invention is reduced to 1/2.5, making it more economical. It has also become cheaper.

As described above, the pulsed high voltage generator of the present invention is extremely useful in terms of both structure and performance, and is useful for industrial and practical security purposes as a high voltage power source for pulsed X-ray equipment, relatively small capacity particle beam generators, etc. It is a great thing −

[Brief explanation of drawings]

FIG. 1 is a diagram of various pulsed high voltage waveforms, FIG. 2 is a cutaway diagram of a main part of a conventional pulsed high electron residual device, and FIG. 3 is a cutaway diagram of a main part of an embodiment of a pulsed high voltage generator of the present invention. Figure 4 is a basic circuit diagram of the pulsed high voltage generator of the present invention, and Figure 5 is a schematic diagram of another embodiment of the pulsed high voltage generator of the present invention. 7.25: Capacitor 8, 8', 12: Discharge suidachi 9, Hl: Conductive cylinder: Pulse forming line] 4: Diode on load side 21: , 8 General type impulse voltage generator 22: Pulse transformer patent application Person Nippon Capacitor Industry Co., Ltd. Figure 1 <=r ) (Ni) (7. Figure 2 Figure 3 Figure 4 Figure 5 Supplementary City Paper (self-study) December 1981 1011 Ownership II', 1<'l'; Island 1) Haruki-dono 1
・Jl (10 〇) Table Small Showa 5611 Patent Application No. 178696 Yugo 1 light) 8th pulse il! 6 Voltage generation glare 3, h(i + [,: wo r g $ ('1) Special applicant Oike-dori Karasuma Tokyo University, Nakagyo-ku, Ichibe-shi Hill 3rd Floor [Detailed Explanation of the Invention in the Specification and Drawings] 5. Contents of Amendment (1) Page 9, line 1420 of the specification is corrected as follows: "Nnu 11 a and capacitance 11.What circuit should I put it in, such as b?
(2) Bright #tl* The month line on page 10 is corrected as follows. [And it can be made small, with independent wave formation as shown in Figure 2.'' (3) Figure 3 in the drawing is corrected by 81' as shown in the attached sheet.

Claims (3)

[Claims] (1) A pulse forming line consisting of a coaxial conductive tube connected to the output end of a high voltage generator and placed on the outer periphery of the generator, and a pulse forming line connected in series between the pulse forming line and the load side. A pulsed high voltage generator, comprising a discharge switch connected to the pulsed high voltage generator, and discharges the voltage of the high voltage generator through a pulse shaping line. (2) The pulse high voltage generation device according to claim 1, wherein the high voltage generator is a multistage impulse voltage generator formed by stacking a plurality of capacitors, discharge switches, etc. (3) Claim s characterized in that the high voltage generator has a pulse transformer, and a pulse shaping line made of a coaxial conductive cylinder is arranged on the outer periphery of the pulse transformer.
Pulse high voltage generator described in Section i.