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JPS5872608U - Film thickness measuring device - Google Patents

Film thickness measuring device

Info

Publication number
JPS5872608U
JPS5872608U JP16776081U JP16776081U JPS5872608U JP S5872608 U JPS5872608 U JP S5872608U JP 16776081 U JP16776081 U JP 16776081U JP 16776081 U JP16776081 U JP 16776081U JP S5872608 U JPS5872608 U JP S5872608U
Authority
JP
Japan
Prior art keywords
film thickness
measuring device
thickness measuring
received light
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16776081U
Other languages
Japanese (ja)
Inventor
鹿島　勝
土田　陽
十川　好志
Original Assignee
ユニチカ株式会社
株式会社島津製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ユニチカ株式会社, 株式会社島津製作所 filed Critical ユニチカ株式会社
Priority to JP16776081U priority Critical patent/JPS5872608U/en
Publication of JPS5872608U publication Critical patent/JPS5872608U/en
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Arrangements For Transmission Of Measured Signals (AREA)
  • Optical Transform (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図および、第２図は、波長に対する受光強度と変調
度をあられすグラフであり、第３図は、本考案の一実施
例に係るフィルム厚み測定装置の模式図である。 １・・・光源部、２，４・・・光ファイバー、３・・・
検出部、１３・・・電子計算機。1 and 2 are graphs showing received light intensity and modulation degree with respect to wavelength, and FIG. 3 is a schematic diagram of a film thickness measuring device according to an embodiment of the present invention. 1... Light source part, 2, 4... Optical fiber, 3...
Detection unit, 13... electronic computer.

Claims (2)

【実用新案登録請求の範囲】[Scope of utility model registration request] （１）厚みを測定されるフィルムを介さないときの、波
長に対する受光強度Ｂ（λ）とフィルムを介するときの
光学的干渉現象に応答する、波長に対する受光強度Ｆ（
入）とを測定する手段と、測定された前記の両方の受光
強度に基づいてフィルムの厚み被測定点における光の変
調信号Ａ（λ）を計測する手段と、光ファイバーを介し
てフィルムに対して光を送受光する手段とを含むことを
特徴とする、フィルムの厚み測定装置。(1) The received light intensity B(λ) with respect to the wavelength when the thickness is not passed through the film and the received light intensity F(λ) with respect to the wavelength in response to the optical interference phenomenon when the thickness is measured via the film.
means for measuring the light modulation signal A(λ) at the film thickness measurement point based on the measured received light intensities, and 1. A film thickness measuring device, comprising: means for transmitting and receiving light. （２）前記実用新案登録請求の範囲第１項に記載のフィ
ルムの厚み測定装置において、前記光ファイバーとして
、ガラス石英ファイバー等の長波長領域において受光強
度の減衰の小さい光ファイバーが選択されて構成されて
いることを特徴とする、フィルムの厚み測定装置。(2) In the film thickness measuring device according to claim 1 of the utility model registration, the optical fiber is configured by selecting an optical fiber having a small attenuation of received light intensity in a long wavelength region, such as a glass quartz fiber. A film thickness measuring device characterized by:
JP16776081U 1981-11-10 1981-11-10 Film thickness measuring device Pending JPS5872608U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16776081U JPS5872608U (en) 1981-11-10 1981-11-10 Film thickness measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16776081U JPS5872608U (en) 1981-11-10 1981-11-10 Film thickness measuring device

Publications (1)

Publication Number Publication Date
JPS5872608U true JPS5872608U (en) 1983-05-17

Family

ID=29959828

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16776081U Pending JPS5872608U (en) 1981-11-10 1981-11-10 Film thickness measuring device

Country Status (1)

Country Link
JP (1) JPS5872608U (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5331157A (en) * 1976-09-03 1978-03-24 Sekisui Chemical Co Ltd Method of measuring size with transmitting
JPS53119076A (en) * 1977-03-26 1978-10-18 Ritsuo Hasumi Optical thicknessmeter for transparent film

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5331157A (en) * 1976-09-03 1978-03-24 Sekisui Chemical Co Ltd Method of measuring size with transmitting
JPS53119076A (en) * 1977-03-26 1978-10-18 Ritsuo Hasumi Optical thicknessmeter for transparent film

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