JPS5872607U - Film thickness measuring device - Google Patents
Film thickness measuring deviceInfo
- Publication number
- JPS5872607U JPS5872607U JP16775981U JP16775981U JPS5872607U JP S5872607 U JPS5872607 U JP S5872607U JP 16775981 U JP16775981 U JP 16775981U JP 16775981 U JP16775981 U JP 16775981U JP S5872607 U JPS5872607 U JP S5872607U
- Authority
- JP
- Japan
- Prior art keywords
- film thickness
- light source
- optical fiber
- measuring device
- thickness measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Arrangements For Transmission Of Measured Signals (AREA)
- Optical Transform (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は、波長に対する光強度をあられすグラフ、第２
図は、本考案の一実施例に係る装置の模式図である。
１・・・光源部、２．４・・・光ファイバー、３・・・
検出部、５・・・フィルム、６・・・移動台、８，１０
・・・保持棒、９，１１・・・摺部、１２・・・電線、
１３・・・電子計算機、１４・・・固定支柱。Figure 1 is a graph of light intensity versus wavelength;
The figure is a schematic diagram of an apparatus according to an embodiment of the present invention. 1... Light source part, 2.4... Optical fiber, 3...
Detection unit, 5... Film, 6... Moving table, 8, 10
... Holding rod, 9, 11... Sliding part, 12... Electric wire,
13...Electronic computer, 14...Fixed support.
Claims (1)
を、フィルムの厚み測定方向へ一体的に移動させる手段
と、光源部と検出部にそれぞれ一端を接続された複数の
光ファイバーと、光源部と検出部の移動に伴なって移動
する光ファイバーがその移動中に湾曲状態をを保つこと
のできるように光ファイバーを保持する手段とを含むこ
とを特徴とする、フィルムの厚み測定装置。means for integrally moving a white light source section and a detection section for light intensity distribution with respect to wavelength in a film thickness measurement direction; a plurality of optical fibers each having one end connected to the light source section and the detection section; and a light source section. and a means for holding the optical fiber so that the optical fiber can maintain a curved state during the movement of the optical fiber as the detection unit moves.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16775981U JPS5872607U (en) | 1981-11-10 | 1981-11-10 | Film thickness measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16775981U JPS5872607U (en) | 1981-11-10 | 1981-11-10 | Film thickness measuring device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5872607U true JPS5872607U (en) | 1983-05-17 |
| JPS6136883Y2 JPS6136883Y2 (en) | 1986-10-25 |
Family
ID=29959827
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16775981U Granted JPS5872607U (en) | 1981-11-10 | 1981-11-10 | Film thickness measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5872607U (en) |
-
1981
- 1981-11-10 JP JP16775981U patent/JPS5872607U/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6136883Y2 (en) | 1986-10-25 |
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