JPS584062U

JPS584062U - High frequency induction plasma torch tube

Info

Publication number: JPS584062U
Application number: JP9833281U
Authority: JP
Inventors: 俣野　陽一
Original assignee: 日本ジヤ−レル・アツシユ株式会社
Priority date: 1981-06-30
Filing date: 1981-06-30
Publication date: 1983-01-11

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Brief explanation of drawings]

第１図は従来のＩＣＰトーチ管の要部を孝子断面図、第
２図はその誘導コイルを除く上面図、第３図はその斜視
図、第４図は本考案の第１′の実施例におけるトーチ管
要部の斜視図、第５図は第２の実施例における同様の斜
視図である。１．１′・・・・・・外筒、２・・・・・・中間筒、３
・・・・・・内筒、４・・・・・・誘導コイル、５．５
’、５“・・・・・・冷却ガス入口、６・・・・・・プ
ラズマ保持ガス入口、７・・・・・・キャリーガス入口
、９・・・・・・整流板、１０・・・・・・整流孔。Fig. 1 is a sectional view of the main parts of a conventional ICP torch tube, Fig. 2 is a top view excluding the induction coil, Fig. 3 is a perspective view thereof, and Fig. 4 is a first embodiment of the present invention. FIG. 5 is a similar perspective view of the second embodiment. 1.1'...Outer cylinder, 2...Intermediate cylinder, 3
...Inner cylinder, 4...Induction coil, 5.5
', 5''... Cooling gas inlet, 6... Plasma holding gas inlet, 7... Carry gas inlet, 9... Rectifying plate, 10... ... Rectification hole.

Claims

[Scope of utility model registration request]

(1) An outer cylinder whose open upper end fits into the induction coil, an intermediate cylinder which is placed inside the outer cylinder and has an upper end which is opened at a level directly below the induction coil, and an intermediate cylinder which is almost identical to this inside the intermediate cylinder. The inner cylinder is a carrier gas flow path, the space between the inner cylinder and the first intermediate cylinder is a plasma holding gas flow path, and the space between the intermediate cylinder and the outer cylinder is a cooling gas flow path. In a plasma torch tube having a triple structure as a channel, a rectifying plate having a plurality of rectifying holes is arranged in the cooling gas flow path above the cooling gas inlet provided at the lower end of the outer cylinder at right angles to the cylinder axis direction. High frequency induction plasma torch tube.

(2) The plasma torch tube according to claim (1), which is a registered utility model, characterized in that a second cooling gas inlet is formed in a portion of the outer cylinder above the baffle plate.