JPS58224420A - Magnetic head and its production - Google Patents
Magnetic head and its productionInfo
- Publication number
- JPS58224420A JPS58224420A JP10792282A JP10792282A JPS58224420A JP S58224420 A JPS58224420 A JP S58224420A JP 10792282 A JP10792282 A JP 10792282A JP 10792282 A JP10792282 A JP 10792282A JP S58224420 A JPS58224420 A JP S58224420A
- Authority
- JP
- Japan
- Prior art keywords
- glass
- magnetic
- cut
- film
- magnetic head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 9
- 239000011521 glass Substances 0.000 claims abstract description 31
- 238000002844 melting Methods 0.000 claims abstract description 12
- 230000008018 melting Effects 0.000 claims abstract description 12
- 238000004544 sputter deposition Methods 0.000 claims abstract 3
- 229910000859 α-Fe Inorganic materials 0.000 abstract description 8
- 238000000034 method Methods 0.000 abstract description 6
- 125000006850 spacer group Chemical group 0.000 abstract description 4
- 238000004804 winding Methods 0.000 abstract description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
- 239000010408 film Substances 0.000 description 13
- 239000000696 magnetic material Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 238000005530 etching Methods 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000013590 bulk material Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 229910000702 sendust Inorganic materials 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- UZVNCLCLJHPHIF-NOJKMYKQSA-J zinc;(1e)-2-(ethylcarbamoylamino)-n-methoxy-2-oxoethanimidoyl cyanide;manganese(2+);n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[Zn+2].[S-]C(=S)NCCNC([S-])=S.[S-]C(=S)NCCNC([S-])=S.CCNC(=O)NC(=O)C(\C#N)=N\OC UZVNCLCLJHPHIF-NOJKMYKQSA-J 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Magnetic Heads (AREA)
Abstract
Description
【発明の詳細な説明】 本発明は磁気ヘッドおよびその製造方法に関する。[Detailed description of the invention] The present invention relates to a magnetic head and a method of manufacturing the same.
近年の高密度記録技術の向−トは著しいものがあるが、
その要因として磁気テープの改良が上げられ、その保磁
力の向上が、磁気ヘッド材料の転換をせまっている。即
ち、現在の短波長記録の磁気ヘッドの代表としてあげら
れるビデオ用へ、ドを取り上げると、現在は、その耐摩
性、磁気ギャップの信頼性の点よりガラスモールドをほ
どこした形のフェライトヘッドが主流であるーしかじ、
フェライトの最大磁束密度Bmは、たかだか5000ガ
ウスであり、保磁力が10oOエルステツドを越える磁
気テープに対しては、コアの磁気飽和が記録能率の低下
をきたしている。ここで提案されているのが、フェライ
トよりも最大磁束密度Bmの高い金属磁性材料である。Although the recent trends in high-density recording technology have been remarkable,
Improvements in magnetic tape have been cited as a contributing factor to this, and improvements in its coercive force are prompting a change in magnetic head materials. In other words, when we look at video recording heads, which are representative of current short-wavelength recording magnetic heads, glass-molded ferrite heads are currently mainstream due to their wear resistance and reliability of the magnetic gap. That's right,
The maximum magnetic flux density Bm of ferrite is at most 5000 Gauss, and for magnetic tapes whose coercive force exceeds 10 oOersted, magnetic saturation of the core causes a decrease in recording efficiency. What is proposed here is a metallic magnetic material with a higher maximum magnetic flux density Bm than ferrite.
センダスト、アルパー3ベ−ジ
ムがその候補として考えられているが、両者はいずれも
耐摩耗性が小さいという致命的欠陥を持っている。Sendust and Alper 3 Basem are considered candidates, but both have the fatal defect of low wear resistance.
そこで検討されているのが、各種の組成と任意に選べる
アモルファス磁性材料であり、その素材自体もフェライ
トに近い耐摩耗性を有するものが出現している。しかし
アモルファス磁性材料は、その作成過程よりバルク材と
して得られず、薄帯又d1、薄膜状としてしか得られな
いため、磁気へ、ドに作成することが非常に困難であっ
た。Therefore, various compositions and amorphous magnetic materials that can be selected arbitrarily are being considered, and materials that themselves have wear resistance similar to that of ferrite are emerging. However, amorphous magnetic materials cannot be obtained as a bulk material due to the manufacturing process, and can only be obtained in the form of a ribbon, d1, or thin film, and therefore it has been extremely difficult to manufacture magnetically.
本発明は、−]二記従来の問題点に鑑みなされたもので
軟磁性膜、特にアモルファス薄膜で磁気ヘッドを製造す
る方法およびアモルファス薄膜によって構成した磁気ヘ
ッドを提供するものである。The present invention has been devised in view of the above-mentioned two conventional problems, and provides a method for manufacturing a magnetic head using a soft magnetic film, particularly an amorphous thin film, and a magnetic head constructed from the amorphous thin film.
次に本発明の実施例を図面とともに詳細に説明する。Next, embodiments of the present invention will be described in detail with reference to the drawings.
先ず、第1図に示す様な、Mn−Zn多結晶フェライト
コア1をたんざく状にし、同コア1がU字状になるよう
に溝加工を行ない、凹溝の開口部をガラス2で充てA7
する。First, as shown in Fig. 1, a Mn-Zn polycrystalline ferrite core 1 is made into a tanzag shape, a groove is cut into the core 1 so that it becomes U-shaped, and the opening of the groove is filled with glass 2. A7
do.
その時、後工程で使用する巻線窓3にはガラスは充てん
されない。そ17て、コアの開口部4は、十分平担に研
摩を行なう。At that time, the winding window 3 used in the subsequent process is not filled with glass. Then, the opening 4 of the core is polished sufficiently flat.
次に第2図に示すようにこの開口面4上にCo−Nb
を主成分とするアモルファス膜5を高周波スバ5.タリ
ングにより、例ぐば30μm程度の厚みになるよう形成
する6
次に第3図に示すようにこのアモルファス膜5に、トラ
リクノオーマノ]・のマクスを作成し、ドライエ・ノチ
ングにより、必要とするトラック形状を作成する。すな
わち〜第3図において、6は工、チングより取り除かれ
た穴を示し、この穴6は、ガラス2の部分にまで貫通I
2ている一次に、第4図に示すようにこの穴6を充てん
すべく、アモルファス膜5の結晶化温度より低い温度で
、低融点ガラス7を充てんし、かつアモルファス膜5の
上面を被覆(オーバーコート)する。Next, as shown in FIG.
The amorphous film 5 whose main component is a high frequency substrate 5. 6 Next, as shown in FIG. 3, a mask of 30 μm is created on this amorphous film 5, and the required thickness is formed by drying and notching. Create a track shape. In other words, in FIG.
Next, as shown in FIG. 4, in order to fill the hole 6, a low melting point glass 7 is filled at a temperature lower than the crystallization temperature of the amorphous film 5, and the upper surface of the amorphous film 5 is covered ( overcoat).
次に、第5図に示すように低融点ガラス7が形成された
コアブロック1を中心線に沿って切断し、その切断面8
を十分平担に研摩し、その研摩面に6ペ〜ニノ
S 102をギャップスペーサ9としてバッタリングに
より形成し、再度切り離した左右コアを突き合せ、低融
点ガラス7の再溶融により、左右コアを接着する。この
時低融点ガラス7は、エツチング穴6により、低融点ガ
ラスのみでなく、最初モールドしたガラス2の中へも拡
散して行き、ガラス2も左右が再溶融し、接合強度は増
大する。Next, as shown in FIG. 5, the core block 1 on which the low melting point glass 7 is formed is cut along the center line, and the cut surface 8
is sufficiently flattened, 6Pe-Nino S 102 is formed on the polished surface as a gap spacer 9 by battering, the separated left and right cores are butted together, and by remelting the low melting point glass 7, the left and right cores are separated. Glue. At this time, the low melting point glass 7 diffuses not only into the low melting point glass but also into the initially molded glass 2 through the etching holes 6, and the left and right sides of the glass 2 are remelted, increasing the bonding strength.
以後の工程は通常のフェライトのビデオヘッドの加工法
と同様に、チップ単体に個別切断を行ない、ヘッドの前
面を所定のギャップデプスになるまで研摩を行ない(こ
の場合、ギヤノブデプスはアモルファス膜厚に相当する
)磁気ヘッドを第6図に示すように完成させる。The subsequent process is similar to the processing method for normal ferrite video heads, in which each chip is individually cut, and the front surface of the head is polished to a specified gap depth (in this case, the gear knob depth is equivalent to the amorphous film thickness). ) The magnetic head is completed as shown in FIG.
第6図の磁気ヘッドは、一対のコア1,1′ の切欠部
を有する端面どうじが接合されて窓部3が形成され、前
記窓部3の開口部側にガラス層2が充填され、前記ガラ
ス層2の上面に磁気ギャップ用のスペーサ9を有する軟
磁性アモルファス膜5が形成されたものである。In the magnetic head shown in FIG. 6, a window 3 is formed by joining the cutout end faces of a pair of cores 1 and 1', and a glass layer 2 is filled on the opening side of the window 3. A soft magnetic amorphous film 5 having a spacer 9 for a magnetic gap is formed on the upper surface of a glass layer 2.
1だ、第6図より明らかなように、テープ摺動面はアモ
ルファス膜5と低融点ガラス7で充てんされたエツチン
グ穴6とで形成され、テープ摺動面においてエツチング
穴6内の低融点ガラス部が凹部となり、アモルファス膜
5の上面は凸部となるため伺んらの支障は生じない。捷
だ、最初コア1の溝の開口部に形成したガラス2上に工
、チングパターンを形成しただめ、低融点ガラスの拡散
によりモールドガラス2が再容融し強固な接着が可能と
なり、テープ走行時においても、ギヤツブ崩れの無い信
頼性の高いギヤノブを形成することが出来る。まだ巻線
窓3は、ガラスにより充てんされることなく、巻線は容
易に行なえる。1. As is clear from FIG. 6, the tape sliding surface is formed of an amorphous film 5 and an etched hole 6 filled with low melting point glass 7, and the low melting point glass in the etching hole 6 is formed on the tape sliding surface. Since the upper surface of the amorphous film 5 is a convex portion and the upper surface of the amorphous film 5 is a convex portion, there is no problem with the opening. After forming a molding pattern on the glass 2 formed at the opening of the groove of the core 1, the mold glass 2 re-melts due to the diffusion of the low melting point glass, making strong adhesion possible, and the tape runs. It is possible to form a highly reliable gear knob that does not collapse even under certain conditions. The winding window 3 is not yet filled with glass, and winding can be easily performed.
これらの利点は、U字状コアの溝部の開口部をガラスに
より充てんし、同開口部をアモルファス膜でもって閉磁
路とし、そのガラス部上に、トラックパターンを形成し
た本発明の磁気ヘッドの製造方法を採用することによる
もので、以後の分割、再溶融によるギャップ形成時にお
いても支障が生じない。また、同方法によって得られた
本発明の磁気ヘッドはテープ摺動面に軟磁性膜よりなる
均7ページ
質の材料が形成されているとともにその耐久性にすぐれ
た強度をもつ磁気ギャップを有するものである。These advantages are achieved by manufacturing the magnetic head of the present invention in which the opening of the groove of the U-shaped core is filled with glass, the opening is made into a closed magnetic path with an amorphous film, and a track pattern is formed on the glass. By adopting this method, there will be no problem during subsequent gap formation due to splitting and remelting. In addition, the magnetic head of the present invention obtained by the same method has a uniform 7-page quality material made of a soft magnetic film formed on the tape sliding surface, and has a magnetic gap with excellent durability and strength. It is.
第1図、第2図、第3図、第4図および第5図は本発明
の一実施例における磁気ヘッドの製造方法を説明するだ
めの斜視図、第6図は本発明の一実施例による磁気ヘッ
ドの斜視図である。
1・・・・・・U字状フェライトコア、2・・・・・・
充てんガラス、3 s@same巻線窓、4・0Il・
・アモルファススハノタ面、5 ””・・アモルファス
膜、6−・・・・・エツチング穴、7や・・・・・低融
点ガラス、8・・・・・・ギヤノブ面、90・・・eギ
ャップスペーサ。
代理人の氏名 弁理士 中 尾 敏 男 ほか1名@1
図1, 2, 3, 4, and 5 are perspective views for explaining a method of manufacturing a magnetic head according to an embodiment of the present invention, and FIG. 6 is an embodiment of the present invention. FIG. 1...U-shaped ferrite core, 2...
Filled glass, 3s@same wire wound window, 4.0Il.
・Amorphous surface, 5 ””...Amorphous film, 6-...Etched hole, 7...Low melting point glass, 8...Gear knob surface, 90...e gap spacer. Name of agent: Patent attorney Toshio Nakao and 1 other person @1
figure
Claims (1)
されて窓部が形成され、前記窓部の開口部側にガラス層
が充填され、前記ガラス層の上面に磁気ギヤ、2プを有
する軟磁性膜が形成された磁気ヘッド。 (勢 軟磁性膜が軟磁性アモルファスよりなることを特
徴とする特許請求の範囲第1項記載の磁気ヘッド。 (橋 溝の開口部がガラスで充てんされたU字状コアに
閉磁路を形成するように軟磁性膜を設け、前記軟磁性膜
にトラックパターン形成用の穴を形成した後、低融点ガ
ラスにより前記軟磁性膜の穴を充てんし、前記U字状コ
アを分割し、磁気ギヤツブ閉ガラスを介して分割したコ
アを再接合することを特徴とする磁気ヘッドの製造方法
。 (に)軟磁性膜が軟磁性アモルファスをスパッタリング
することにより形成されることを特徴とする特許請求の
範囲第3項記載の磁気へリドの製造方法。(1) The end faces of a pair of cores having notches are joined to form a window, a glass layer is filled on the opening side of the window, and a magnetic gear is placed on the top surface of the glass layer, and two plate A magnetic head on which a soft magnetic film is formed. A magnetic head according to claim 1, characterized in that the soft magnetic film is made of soft magnetic amorphous. After forming a hole for forming a track pattern in the soft magnetic film, the hole in the soft magnetic film is filled with low melting point glass, the U-shaped core is divided, and the magnetic gear is closed. A method of manufacturing a magnetic head characterized by rejoining split cores through glass.(Claim 1) Claim 1, characterized in that the soft magnetic film is formed by sputtering soft magnetic amorphous. 3. The method for producing a magnetic helide according to item 3.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10792282A JPS58224420A (en) | 1982-06-23 | 1982-06-23 | Magnetic head and its production |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10792282A JPS58224420A (en) | 1982-06-23 | 1982-06-23 | Magnetic head and its production |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS58224420A true JPS58224420A (en) | 1983-12-26 |
JPH0345442B2 JPH0345442B2 (en) | 1991-07-11 |
Family
ID=14471445
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10792282A Granted JPS58224420A (en) | 1982-06-23 | 1982-06-23 | Magnetic head and its production |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58224420A (en) |
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61129717A (en) * | 1984-11-26 | 1986-06-17 | Sharp Corp | Production of magnetic head |
JPS62183012A (en) * | 1986-02-05 | 1987-08-11 | Matsushita Electric Ind Co Ltd | Magnetic head and its manufacture |
JPS62212905A (en) * | 1986-03-12 | 1987-09-18 | Matsushita Electric Ind Co Ltd | Magnetic head and its production |
JPH02501962A (en) * | 1987-10-27 | 1990-06-28 | トムソン‐セーエスエフ | Recording/reproducing magnetic head and its manufacturing method |
US6356419B1 (en) | 1999-07-23 | 2002-03-12 | International Business Machines Corporation | Antiparallel pinned read sensor with improved magnetresistance |
US7218197B2 (en) | 2003-07-16 | 2007-05-15 | Marvell World Trade Ltd. | Power inductor with reduced DC current saturation |
US7489219B2 (en) | 2003-07-16 | 2009-02-10 | Marvell World Trade Ltd. | Power inductor with reduced DC current saturation |
US7679347B2 (en) | 2004-07-13 | 2010-03-16 | Marvell World Trade Ltd. | Closed-loop digital control system for a DC/DC converter |
US7760525B2 (en) | 2003-08-21 | 2010-07-20 | Marvell World Trade Ltd. | Voltage regulator |
US7872454B2 (en) | 2003-08-21 | 2011-01-18 | Marvell World Trade Ltd. | Digital low dropout regulator |
US8035471B2 (en) * | 2003-07-16 | 2011-10-11 | Marvell World Trade Ltd. | Power inductor with reduced DC current saturation |
US8324872B2 (en) | 2004-03-26 | 2012-12-04 | Marvell World Trade, Ltd. | Voltage regulator with coupled inductors having high coefficient of coupling |
-
1982
- 1982-06-23 JP JP10792282A patent/JPS58224420A/en active Granted
Cited By (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61129717A (en) * | 1984-11-26 | 1986-06-17 | Sharp Corp | Production of magnetic head |
JPS62183012A (en) * | 1986-02-05 | 1987-08-11 | Matsushita Electric Ind Co Ltd | Magnetic head and its manufacture |
JPS62212905A (en) * | 1986-03-12 | 1987-09-18 | Matsushita Electric Ind Co Ltd | Magnetic head and its production |
JPH02501962A (en) * | 1987-10-27 | 1990-06-28 | トムソン‐セーエスエフ | Recording/reproducing magnetic head and its manufacturing method |
US6356419B1 (en) | 1999-07-23 | 2002-03-12 | International Business Machines Corporation | Antiparallel pinned read sensor with improved magnetresistance |
US7849586B2 (en) | 2003-07-16 | 2010-12-14 | Marvell World Trade Ltd. | Method of making a power inductor with reduced DC current saturation |
US8028401B2 (en) | 2003-07-16 | 2011-10-04 | Marvell World Trade Ltd. | Method of fabricating a conducting crossover structure for a power inductor |
US7489219B2 (en) | 2003-07-16 | 2009-02-10 | Marvell World Trade Ltd. | Power inductor with reduced DC current saturation |
US8098123B2 (en) | 2003-07-16 | 2012-01-17 | Marvell World Trade Ltd. | Power inductor with reduced DC current saturation |
US7307502B2 (en) | 2003-07-16 | 2007-12-11 | Marvell World Trade Ltd. | Power inductor with reduced DC current saturation |
US7218197B2 (en) | 2003-07-16 | 2007-05-15 | Marvell World Trade Ltd. | Power inductor with reduced DC current saturation |
US7868725B2 (en) | 2003-07-16 | 2011-01-11 | Marvell World Trade Ltd. | Power inductor with reduced DC current saturation |
US8035471B2 (en) * | 2003-07-16 | 2011-10-11 | Marvell World Trade Ltd. | Power inductor with reduced DC current saturation |
US7882614B2 (en) | 2003-07-16 | 2011-02-08 | Marvell World Trade Ltd. | Method for providing a power inductor |
US7987580B2 (en) | 2003-07-16 | 2011-08-02 | Marvell World Trade Ltd. | Method of fabricating conductor crossover structure for power inductor |
US7760525B2 (en) | 2003-08-21 | 2010-07-20 | Marvell World Trade Ltd. | Voltage regulator |
US7872454B2 (en) | 2003-08-21 | 2011-01-18 | Marvell World Trade Ltd. | Digital low dropout regulator |
US8299763B2 (en) | 2003-08-21 | 2012-10-30 | Marvell World Trade Ltd. | Digital low dropout regulator |
US8324872B2 (en) | 2004-03-26 | 2012-12-04 | Marvell World Trade, Ltd. | Voltage regulator with coupled inductors having high coefficient of coupling |
US7679347B2 (en) | 2004-07-13 | 2010-03-16 | Marvell World Trade Ltd. | Closed-loop digital control system for a DC/DC converter |
Also Published As
Publication number | Publication date |
---|---|
JPH0345442B2 (en) | 1991-07-11 |
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