JPS582241A - Manufacture of transparent patterned electrode - Google Patents

Abstract

PURPOSE:To form a transparent patterned electrode with high precision in simplified stages by depositing an electrically conductive metal on a substrate, patternwise irradiating the metal with electron beams, locally exfoliating it, and oxidizing the remaining metal. CONSTITUTION:An electrically conductive metal or metallic salt 2' which is made transparent by oxidation, e.g., tin or tin chloride is deposited on a substrate 1 of glass or the like. The metal (salt) is irradiated with electron beams 9 through a negative pattern, and the unnecessary part is locally exfoliated. The patternwise remaining metal (salt) 2' is then oxidized by heating to a high temp. in an oxidizing atmosphere to obtain a transparent patterned electrode. By this method the distance between lines of a patterned electrode and the width of the lines can be controlled easily, and a patterned electrode with high precision can be obtd.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for manufacturing transparent pattern electrodes on insulating substrates used in liquid crystal displays and the like.

Metal oxides such as tin oxide and indium oxide have stable chemical properties and are transparent, making them ideal for transparent electrodes. It was difficult to obtain a transparent patterned electrode without going through a complicated process.

For example, the conventional method for forming a transparent pattern electrode of tin oxide is as shown in Fig. 1: (5) Prepare a glass substrate fil, and apply tin chloride (2) on this glass substrate (1). , C) This is heated to high temperature in an oxidizing atmosphere such as oxygen to convert it into tin chloride (211!: tin oxide (3), and D) A photosensitive agent (4) is applied on this tin oxide film (3). ) is coated and dried, then a positive image of the pattern (E) is projected, the photosensitive agent (4) is partially cured, and the mask pattern (5) is exposed.
■ In a reducing atmosphere such as hydrogen, change the tin oxide film (3) that is coming out into metallic tin (6), remove the metallic tin (6) by etching, and then temporarily mask·
By peeling off the pattern (5), a transparent butter/electrode of tin oxide (3) was obtained.

However, according to such conventional manufacturing methods, the photosensitizer (
4) to form a mask pattern (5), and required oxidation and reduction processes.

Therefore, the present invention was devised to solve these manufacturing process problems, and involves attaching transparent and conductive metals or metal salts to a glass substrate after oxidation. , irradiate this metal or metal salts with an electron beam in a negative pattern to locally peel them off, and then
By heating the remaining metal or metal salts in a positive pattern to high temperature in an oxidizing atmosphere such as oxygen to form a transparent pattern electrode, the manufacturing process can be simplified and manufacturing costs can be reduced. , pattern■・ Improved accuracy has been achieved.

As shown in FIG. 2, the method for manufacturing a transparent pattern electrode of the present invention includes: (4) preparing a glass substrate (1); , a transparent and conductive metal or metal salt f2)1 is attached, and an electron beam (9) is irradiated onto the metal or metal salt (2) in a negative cross-section. If unnecessary parts are locally peeled off and the remaining metal or metal salts (2)° in a Bon pattern are oxidized by heating to high temperature in an oxidizing atmosphere such as oxygen, it becomes transparent. A patterned electrode can be obtained.

In addition, the deflection and change of electronic beam-1, +9)! # can be easily implemented using the same principle as a cathode ray tube.

As explained above, according to the manufacturing method of this invention,
Since the manufacturing process is simplified, manufacturing costs can be reduced.

Furthermore, high energy can be obtained by focusing and accelerating the electron beam, making it possible to remove unnecessary metals or metal salts in a short time, and making it easier to control the line spacing and line width of pattern electrodes. , it is possible to obtain highly accurate patterned electrodes without deviation.

[Brief explanation of the drawing]

FIG. 1 is a sectional view showing a conventional method for manufacturing a transparent pattern electrode in the order of steps, and FIG. 2 is a cross-sectional view showing an embodiment of the manufacturing method of the present invention. 1...Glass substrate 2°...Metal or metal salts that are transparent and conductive after oxidation 3...Transparent conductive film 9...Electron beam 1 other person

Claims (1)

[Claims] A first step of depositing a transparent and conductive metal or metal salts on an insulating substrate such as glass after oxidation, and applying an electron beam to the metal or metal salts in a pattern. A transparent pattern characterized by comprising: a second step of locally peeling off by irradiation; and a sixth step of oxidizing the metal or metal salts remaining without being peeled off in the second step. Method of manufacturing electrodes.