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JPS58212623A - Manufacture of magnetic recording medium - Google Patents

Manufacture of magnetic recording medium

Info

Publication number
JPS58212623A
JPS58212623A JP57094700A JP9470082A JPS58212623A JP S58212623 A JPS58212623 A JP S58212623A JP 57094700 A JP57094700 A JP 57094700A JP 9470082 A JP9470082 A JP 9470082A JP S58212623 A JPS58212623 A JP S58212623A
Authority
JP
Japan
Prior art keywords
aluminum
magnetic layer
aluminum oxide
substance
evaporated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP57094700A
Other languages
Japanese (ja)
Inventor
Soichi Matsuzaki
松崎 壮一
Seiji Yasui
政治 安井
Minoru Osada
実 長田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lincstech Circuit Co Ltd
Original Assignee
Hitachi Condenser Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Condenser Co Ltd filed Critical Hitachi Condenser Co Ltd
Priority to JP57094700A priority Critical patent/JPS58212623A/en
Publication of JPS58212623A publication Critical patent/JPS58212623A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/62Record carriers characterised by the selection of the material
    • G11B5/72Protective coatings, e.g. anti-static or antifriction
    • G11B5/725Protective coatings, e.g. anti-static or antifriction containing a lubricant, e.g. organic compounds

Landscapes

  • Magnetic Record Carriers (AREA)
  • Lubricants (AREA)

Abstract

PURPOSE:To form an aluminum nitride layer with lubricity and wear resistance on a magnetic layer, by vacuum-depositing a substance for reducing aluminum oxide and aluminum in a gas contg. nitrogen or ammonia and in electric discharge. CONSTITUTION:A ferromagnetic metal such as iron is diagonally deposited on a substrate by vacuum a eposition or other method in a vacuum vessel to form a magnetic layer. A substance for reducing aluminum oxide such as carbon, boron or chronium and aluminum are evaporated from the same evaporation source or different sources and deposited on the surface of the magnetic layer in an atmosphere contg. gaseous nitrogen or ammonia. The deposition is carried out in electric discharge. Since the substance for recucing aluminum oxide is evaporated, the formation of aluminum oxide can be prevented when aluminum is evaporated and deposited on the magnetic layer.

Description

【発明の詳細な説明】 本発明は磁性体層に積層する層を改良した磁気記録媒体
とその製造方法に関するものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a magnetic recording medium with improved layers laminated to a magnetic layer and a method for manufacturing the same.

プラスチックフィルム等の基体に強磁性体金属を斜めに
付着した磁気記録媒体は、高抗磁力かつ高角形比を有し
、磁気記録密度が高く、最近、磁気テープ等として用い
られるようになってきた。
Magnetic recording media, in which ferromagnetic metal is obliquely attached to a substrate such as a plastic film, have high coercive force and a high squareness ratio, and have a high magnetic recording density, and have recently come to be used as magnetic tapes, etc. .

磁気テープ等として用いられる場合、磁気ヘッドが表面
を擦り損傷するのを防止するため、潤滑性や耐摩耗性を
もった窒化アルミニウムの層を設けることがある。窒化
アルミニウムの層は1通常アルミニウムを窒素または7
/モニアガスの雰囲気中かつ放電中において蒸発させて
磁性体層の表面に付着し形成している。この際、雰囲気
中には酸素ガスが微量だが含まれており、そのためアル
ミニウムが蒸発し途中で酸化アルミニウムが生成されて
、窒化アルミニウムの層の中に混入する。
When used as a magnetic tape or the like, a layer of aluminum nitride, which has lubricity and wear resistance, is sometimes provided to prevent the surface of the magnetic head from being scratched and damaged. A layer of aluminum nitride is usually made by combining aluminum with nitrogen or 7
The magnetic layer is formed by being evaporated in an atmosphere of /monia gas and during discharge to adhere to the surface of the magnetic layer. At this time, the atmosphere contains a small amount of oxygen gas, so aluminum evaporates and aluminum oxide is generated during the process, which is mixed into the aluminum nitride layer.

酸化アルミニウムが混入すると窒化アルミニウムの潤滑
性や耐摩耗性が低下する欠点がある。
When aluminum oxide is mixed in, the lubricity and wear resistance of aluminum nitride are reduced.

本発明は1以上の欠点を改良し、潤滑性及び耐摩耗性を
向上しうる磁気記録媒体の製造方法の提供を目的とする
ものである。
It is an object of the present invention to provide a method for manufacturing a magnetic recording medium that can improve one or more of the drawbacks and improve lubricity and wear resistance.

本発明は、上記の目的を達成するために、基体に磁性体
層を形成後、該磁性体層に、アルミ酸化物を還元する性
質を有する物質とアルミとを一緒に、窒素又はアンモニ
アを含むガス中においてかつ放電中で蒸着させることを
特徴とする磁気記録媒体の製造方法を提供するものであ
る。
In order to achieve the above object, the present invention provides that after forming a magnetic layer on a substrate, the magnetic layer contains nitrogen or ammonia together with a substance having a property of reducing aluminum oxide and aluminum. The present invention provides a method for manufacturing a magnetic recording medium, which is characterized in that deposition is performed in a gas and during discharge.

以下9本発明の詳細な説明する。Hereinafter, nine aspects of the present invention will be described in detail.

に、鉄やコバルト、ニッケル等の強磁性体金属を真空蒸
着法やイオンブレーティング法、スパッタリング法等に
より斜めに所定の入射角度で付着し。
A ferromagnetic metal such as iron, cobalt, or nickel is deposited obliquely at a predetermined incident angle using a vacuum evaporation method, ion blating method, sputtering method, etc.

磁性体層を形成する。Form a magnetic layer.

次に、炭素やホウ素又はクロム等のアルミ酸化物を還元
する性質を有する物質とアルミとを同じ蒸発源からある
いは別々の蒸発源から蒸発して磁性体層の表面に付着す
る。その際、雰囲気中には窒素またはアノモニアガスを
含み、かつ放電中において付着させる。
Next, a substance having the property of reducing aluminum oxide, such as carbon, boron, or chromium, and aluminum are evaporated from the same evaporation source or from separate evaporation sources and deposited on the surface of the magnetic layer. At that time, the atmosphere contains nitrogen or ammonia gas, and the gas is deposited during the discharge.

すなわち、アルミ単独で蒸発させた場合には。That is, when aluminum is evaporated alone.

酸化アルミニウムが生成されるが9本発明によれば同時
に、アルミ酸化物を還元する性質を有する物質を蒸発し
ているために、アルミが蒸発して基体に付着する間に酸
化アルミニウムが生じるのを防止できる。それ故、磁性
体層の表面にはけとんと酸化アルミニウムの含まれな(
・主として窒化アルミニウムからなる層が形成される。
However, according to the present invention, since a substance that has the property of reducing aluminum oxide is evaporated at the same time, the formation of aluminum oxide while the aluminum is evaporated and attached to the substrate is prevented. It can be prevented. Therefore, the surface of the magnetic layer does not contain carbon or aluminum oxide (
- A layer consisting mainly of aluminum nitride is formed.

なお、窒化アルミニウムの潤滑性等を高く維持するため
には、アルミの量に対してアルミ酸化物の還元物質の量
は60チ以下であることが好ましく゛。
In order to maintain high lubricity of aluminum nitride, the amount of the reducing substance of aluminum oxide is preferably 60% or less relative to the amount of aluminum.

以上の通り9本発明によれば、潤滑性や耐摩耗性の防げ
となる酸化アルミニウムの発生を防止できるので、im
滑性の改良された耐久性の良い磁気記録媒体の製造方法
が得られる。
As described above, according to the present invention, it is possible to prevent the generation of aluminum oxide, which impairs lubricity and wear resistance.
A method for producing a highly durable magnetic recording medium with improved lubricity can be obtained.

Claims (1)

【特許請求の範囲】[Claims] +11  基体に強磁性体金属を斜めに付着する磁気記
録媒体の製造方法において、基体に磁性体層を形成後、
該磁性体層にアルミ酸イし物を還元する性質を有する物
質とアルミとを一緒に窒素又はアンモニアを含むガス中
においてかつ放電中で蒸着させることを特徴とする磁気
記録媒体の製造方法。
+11 In a method for manufacturing a magnetic recording medium in which a ferromagnetic metal is obliquely attached to a substrate, after forming a magnetic layer on the substrate,
A method for manufacturing a magnetic recording medium, comprising depositing a substance having a property of reducing aluminum oxide and aluminum together on the magnetic layer in a gas containing nitrogen or ammonia and during discharge.
JP57094700A 1982-06-04 1982-06-04 Manufacture of magnetic recording medium Pending JPS58212623A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57094700A JPS58212623A (en) 1982-06-04 1982-06-04 Manufacture of magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57094700A JPS58212623A (en) 1982-06-04 1982-06-04 Manufacture of magnetic recording medium

Publications (1)

Publication Number Publication Date
JPS58212623A true JPS58212623A (en) 1983-12-10

Family

ID=14117447

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57094700A Pending JPS58212623A (en) 1982-06-04 1982-06-04 Manufacture of magnetic recording medium

Country Status (1)

Country Link
JP (1) JPS58212623A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60145525A (en) * 1984-01-10 1985-08-01 Canon Inc Magnetic recording medium

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60145525A (en) * 1984-01-10 1985-08-01 Canon Inc Magnetic recording medium
JPH0522967B2 (en) * 1984-01-10 1993-03-31 Canon Kk

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