JPS58209296A - Transducer - Google Patents
TransducerInfo
- Publication number
- JPS58209296A JPS58209296A JP9201982A JP9201982A JPS58209296A JP S58209296 A JPS58209296 A JP S58209296A JP 9201982 A JP9201982 A JP 9201982A JP 9201982 A JP9201982 A JP 9201982A JP S58209296 A JPS58209296 A JP S58209296A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- conductive
- film
- ring
- vibrating membrane
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims abstract description 21
- 239000010409 thin film Substances 0.000 claims abstract description 7
- 239000012528 membrane Substances 0.000 claims description 31
- 239000010408 film Substances 0.000 abstract description 12
- 229920000642 polymer Polymers 0.000 abstract description 6
- 239000000853 adhesive Substances 0.000 abstract description 3
- 230000001070 adhesive effect Effects 0.000 abstract description 3
- 238000005452 bending Methods 0.000 abstract description 3
- 238000005476 soldering Methods 0.000 abstract description 2
- 238000009413 insulation Methods 0.000 abstract 3
- 230000010355 oscillation Effects 0.000 abstract 3
- 238000010276 construction Methods 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 description 7
- 125000006850 spacer group Chemical group 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 238000004891 communication Methods 0.000 description 3
- 239000003795 chemical substances by application Substances 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 235000011962 puddings Nutrition 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000002689 soil Substances 0.000 description 1
- 230000005236 sound signal Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R19/00—Electrostatic transducers
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Acoustics & Sound (AREA)
- Signal Processing (AREA)
- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
Abstract
Description
【発明の詳細な説明】
[発明の技術分野]
本発明はコンデンサ・マイクロホン等に好適りるトラン
スジ7−サに関する。DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a transducer suitable for condenser microphones and the like.
1発明の技術的背景]
トランスジJ −+) 、例えばエレクトレット形−1
ンデンサ・マイク[]小ンは、第1図および第2図に示
す゛ように、電極1の一方の主表面にエレクトレッ1へ
化された高分子誘電体層2を形成して構成した固定電極
3を、皿形のU台4の開放11丙側に支持させ、この固
定電極3の[端縁にスペーサリング5を介して振動lI
6の張架された股リング7を順次積重ね、導電性ケース
8をこれらl!9リング7、スペーサリング5および基
台4を覆う、1つに被せて基台4の下面で折曲づるよう
にかしめた構造を有している。1 Technical Background of the Invention] Transdi J −+), for example, electret type-1
As shown in FIGS. 1 and 2, a fixed electrode is constructed by forming a polymer dielectric layer 2, which has been converted into an electret 1, on one main surface of an electrode 1. 3 is supported on the open 11 side of the dish-shaped U stand 4, and vibration lI is applied to the edge of the fixed electrode 3 via a spacer ring 5
6 stretched crotch rings 7 are stacked one after another, and conductive cases 8 are placed on top of these crotch rings 7! It has a structure that covers the ring 7, the spacer ring 5, and the base 4, and is caulked so as to be placed over one and bent at the bottom surface of the base 4.
なお、符号9は固定電極3および基台4に各々穿設され
た連通孔であり、符号10は導電f[ケース8に設けら
れた音通孔、そしく符号11は電極1の裏面から基台4
を目通しく突出する外部出力端子である。Reference numeral 9 indicates a communication hole formed in the fixed electrode 3 and base 4, reference numeral 10 indicates a conductive hole provided in the case 8, and reference numeral 11 indicates a communication hole formed in the fixed electrode 3 and the base 4. stand 4
This is an external output terminal that protrudes clearly.
このエレクトレット形コンj゛ンリ・ンイク[Jホンは
、電極1の外部出力端子11を一/jの出力端とし、ま
た振動膜6に形成された導電薄膜(第1図および第2図
に、おいて図示省略)に接続した導電性ケース8を他方
の出力端として、振!tlI膜6の振動による固定電極
3と振動膜6間の間隔の変化に応じた容量変化を音声信
号としく外部に出力するものである。This electret-type connector has the external output terminal 11 of the electrode 1 as the output terminal of 1/j, and the conductive thin film formed on the vibrating membrane 6 (see FIGS. 1 and 2). With the conductive case 8 connected to the other output end (not shown), shake! The capacitance change corresponding to the change in the distance between the fixed electrode 3 and the vibrating membrane 6 due to the vibration of the tlI membrane 6 is outputted to the outside as an audio signal.
[#を景技術の問題点1
しかしながら、このように構成された従来のエレクトレ
ット形コンデンサ・マイクロホンは、脱リング7に被せ
て振動膜6の導電薄膜に接続した導電性ケース8を出力
端としているので、膜リング7と導電性ケース8の接触
不良が生じ易く出力が安定しにくいうえ、導電性ケース
8を被せる作業が面倒である。[Problem in technology 1] However, in the conventional electret type condenser microphone configured in this way, the output end is the conductive case 8 which is placed over the de-ring 7 and connected to the conductive thin film of the vibrating membrane 6. Therefore, poor contact between the membrane ring 7 and the conductive case 8 is likely to occur, making it difficult to stabilize the output, and the work of covering the conductive case 8 is troublesome.
また、それぞれ個別に製造された基台4、固定電極3、
スペーリリング5および股リング7を積重ねて導電性ケ
ース8により一体化してなるのC1各構成部品の寸法精
度がばらつき易く、また槓重ねられた各構成部品間の気
密が不十分となることから、感度等の特性が一定しにく
り、最産時に性能が均一どならない欠点がある。In addition, the base 4, fixed electrode 3, and
The spacer ring 5 and the crotch ring 7 are stacked and integrated by the conductive case 8.The dimensional accuracy of each component tends to vary, and the airtightness between the stacked components is insufficient. Characteristics such as sensitivity are not constant, and performance is not uniform at the time of production.
さらにまた、基台4、固定電極3、スペーリリング5、
膜リング7 J5よび導電性クース8等多くの構成部品
からなるので、形状の小形化には限界があるうえ、小さ
な構成部品を組立てる作業が極めて煩雑であることから
、製造コストが上昇し易く組立能率が劣り、量産に適り
るbのて−u /、A−かった。Furthermore, the base 4, the fixed electrode 3, the spacer ring 5,
Since it consists of many components such as membrane ring 7 J5 and conductive coos 8, there is a limit to miniaturization of the shape, and the work of assembling small components is extremely complicated, so manufacturing costs tend to increase and assembly is difficult. It was less efficient and suitable for mass production.
[発明の目的]
本発明はこのような従来の欠員を解消・ノるためになさ
れたもので1.構造が簡単で振動膜り目)のリードの導
出が簡単かつ確実’J kA ll−竹に冨む安価41
トランスジユーサの提供を目的とづる。[Object of the Invention] The present invention has been made in order to eliminate such conventional vacancies.1. The structure is simple and the leads of the vibrating membrane can be easily and reliably derived.
The purpose is to provide transducers.
[発明の概要]
この目的を達成Jるために本発明は、1・面に導この電
極の前面にこの電極と所定の間隔をおいて導電薄膜の形
成された振動膜を<M架し、L配給縁基板の導電層から
接続リードを一体的に延設4るとともにこの接続リード
を上記絶縁iI4扱の1而側に折曲して上記振動膜の導
電i11膜と電気的に接続してなることを特徴とするも
のであり、絶縁基板の下面に形成された導電層の一部を
接続リードどして利用することにより振動膜からの出ツ
ノ導出の簡素化と量産性の向上を図ったものぐある。。[Summary of the Invention] In order to achieve this object, the present invention provides a structure in which a vibrating membrane on which a conductive thin film is formed is mounted on the front surface of the conductive electrode at a predetermined distance from the electrode, A connecting lead is integrally extended 4 from the conductive layer of the L distribution edge board, and this connecting lead is bent to one side of the insulating iI4 to electrically connect it to the conductive i11 film of the vibrating membrane. By using a part of the conductive layer formed on the bottom surface of the insulating substrate as a connection lead, it is possible to simplify the extraction of the horn from the diaphragm and improve mass productivity. There is a tamago. .
[発明の実施例] 以下本発明の詳細を図面を参照しつつ説明する。[Embodiments of the invention] The details of the present invention will be explained below with reference to the drawings.
なお従来例と共通する部分には同一の符号を付10第3
図は本発明のトランスジューサの一実施例をエレクトレ
ット形コンデンサ・マイクロホンを例にして示1縦断面
図である。In addition, the same reference numerals are given to the parts common to the conventional example.
The figure is a longitudinal sectional view showing an embodiment of the transducer of the present invention using an electret type condenser microphone as an example.
図にJ3いて偏平な円板状の絶縁基板12の一方の主表
面(図中上面)の中央には、絶縁基板12より小径な電
極1が被描されており、この電極1の上面にはエレクト
レット化された高分子誘電体層2が被着されて固定電極
3が構成されている。An electrode 1 having a smaller diameter than the insulating substrate 12 is drawn at the center of one main surface (upper surface in the figure) of a flat disk-shaped insulating substrate 12 at J3 in the figure. A fixed electrode 3 is constructed by depositing an electret polymer dielectric layer 2 .
絶縁基板12の上面において固定電極3の外周には、こ
れを所定の間隔をおいて囲むように導電性の支持リング
13が被着されている。この支持リング13は、電極1
と同材料で固定電極3よりし厚みが厚(形成されでおり
、その先端には、絶縁フィルl\14の上面に導電簿膜
15を蒸着等により形成した振動膜6が、絶縁フィルム
14を支持リング13に当接づるとともに固定電極3の
前面にこれと所定の間隔を隔てるようにして張架されて
いる。A conductive support ring 13 is attached to the outer periphery of the fixed electrode 3 on the upper surface of the insulating substrate 12 so as to surround it at a predetermined interval. This support ring 13 supports the electrode 1
The fixed electrode 3 is made of the same material as the fixed electrode 3 and is formed with a thicker thickness, and at its tip, a vibrating membrane 6 with a conductive film 15 formed by vapor deposition or the like on the upper surface of the insulating film 14 is connected to the insulating film 14. It abuts the support ring 13 and is stretched over the front surface of the fixed electrode 3 with a predetermined distance therebetween.
絶縁基板12の他方の主表面(下面> 1.=は、独立
した出力電極16とこれを囲むアース市44.! 17
を形成したフレキシブルプリン1〜機18が被着されて
いる。このフレキシブルシリンド板1 Bの端縁からは
、第4図に示す如き細長い接続リード19が突設されて
おり、この接続リード19は絶縁基板12および支持リ
ング13の側面を11¥(振動16の導電薄膜15上に
延び、−での先端か117曲されてアース電極17と振
動膜(5の)9電薄flu 1 りが半田20により接
続されている。The other main surface (lower surface>1.= of the insulating substrate 12) includes an independent output electrode 16 and a surrounding earth electrode 44.!17
Flexible puddings 1 to 18 having been formed are adhered thereto. From the edge of the flexible cylinder plate 1B, a long and thin connection lead 19 as shown in FIG. It extends over the conductive thin film 15, and its tip at - is bent 117, and the ground electrode 17 and the vibrating membrane (5) are connected by solder 20.
また、固定電極3、絶縁基板12JjJ、びフレ↓。In addition, the fixed electrode 3, the insulating substrate 12JjJ, and the frame ↓.
シブルプリント板18に1よスルー小−ル21が穿設さ
れており、このスルー小−ル21に充填された導電性接
着剤22によって固定電極3の電極1とフレキシブルプ
リンt−4N18の出力電44! 16が電気的に接続
されている。A small through hole 21 is bored in the flexible printed board 18, and a conductive adhesive 22 filled in this small through hole 21 connects the output voltage between the electrode 1 of the fixed electrode 3 and the flexible print T-4N18. 44! 16 are electrically connected.
このエレクトレット形コンチンIJ −マイクロホンは
、固定電極3の電極1とフレキシブルプリント板18の
出力電極16が接続される一1j 、振動l116の導
電wIWA15とフレキシブルプリン1へ根18のアー
ス電極17が接続されているので、振動膜6の振動変位
に応じた固定電極3と振動膜6間の容量変化に対応づる
当市出力信号が、これらの出力電極16およびアース電
極17から出力される。In this electret type Contin IJ-microphone, the electrode 1 of the fixed electrode 3 and the output electrode 16 of the flexible printed board 18 are connected, and the ground electrode 17 of the root 18 is connected to the conductive wIWA 15 of the vibration l 116 and the flexible printed board 1. Therefore, an output signal corresponding to a capacitance change between the fixed electrode 3 and the vibrating membrane 6 in accordance with the vibrational displacement of the vibrating membrane 6 is outputted from these output electrodes 16 and the earth electrode 17.
イして、このように構成された本発明のエレクトレット
形コンデンサ・マイクロホンは、絶縁基板12の下面に
被着されたフレキシブルプリン1〜板18から延設され
た接続リード1つを折曲してその先端のアース電極17
を振動膜6の導電i1膜15に接続してなるので・、極
めて曲中に導電11915からリードを導出することが
可能となる。しかも、固定電極3およびスベーザを兼ね
る支持リング13ぼ絶縁基&12の土面に形成されるの
で、部品点数が大幅に減少して構造が極めて簡単かつ薄
形となる。Thus, the electret condenser microphone of the present invention constructed as described above is constructed by bending one connecting lead extending from the flexible print 1 to the plate 18 attached to the lower surface of the insulating substrate 12. Earth electrode 17 at the tip
Since the lead is connected to the conductive i1 film 15 of the vibrating membrane 6, it is possible to lead out the lead from the conductive 11915 during the song. Moreover, since the support ring 13 which also serves as the fixed electrode 3 and the scrubber is formed on the soil surface of the insulating base &12, the number of parts is greatly reduced and the structure becomes extremely simple and thin.
次に、本発明のエレク1−レット形コンデン1ノ・マイ
クロホンの製GB法の一実施例を説明する。Next, an embodiment of the GB method for manufacturing the electronic 1-let type condenser microphone of the present invention will be described.
まず、第5図に示づように、絶縁基板12の1゜面に導
電層23を被着した円形のプリント基板24を用意する
。そして、第6図に示すように、導電層2つを従来公知
のフォトエツチング等の化学的処理や切削等の機械的処
理により、電極IF3よびこれを所定の間隔で囲む支持
リング13を形成する。First, as shown in FIG. 5, a circular printed circuit board 24 having a conductive layer 23 coated on a 1° surface of an insulating substrate 12 is prepared. Then, as shown in FIG. 6, the two conductive layers are subjected to a conventionally known chemical treatment such as photoetching or mechanical treatment such as cutting to form an electrode IF3 and a support ring 13 surrounding the electrode IF3 at a predetermined interval. .
その後、第7図に示すように、電極1の上面をエツチン
グ等により削って支持リング13よりも低くした後、こ
の電極1の上面にエレクトレット化された高分子誘電体
層2を被着して固定電極3を構成する。なお、高分子誘
導体層2は電極1に被着してから加圧してエレクトレッ
ト化することもできる。Thereafter, as shown in FIG. 7, the upper surface of the electrode 1 is etched to make it lower than the support ring 13, and then an electret polymer dielectric layer 2 is deposited on the upper surface of the electrode 1. A fixed electrode 3 is configured. Note that the polymeric derivative layer 2 can also be applied to the electrode 1 and then pressurized to form an electret.
そして、第8図に示すように、プリント基板24の裏面
に、上記第4図に余す如き出力電極16およびアース電
極17を形成しかつ接続リード1つを設けたフレキシブ
ルプリント板18を、接続リード19がプリント基板2
4から突出するように被着する一方、第3図のような振
動Ml 6を支持リング13に張架する。Then, as shown in FIG. 8, a flexible printed board 18 on which the output electrode 16 and the ground electrode 17 as shown in FIG. 19 is printed circuit board 2
On the other hand, a vibration Ml 6 as shown in FIG. 3 is stretched over the support ring 13.
その後、第9図に示すように、固定電極3、絶縁基板1
2およびフレキシブルプリント基板18を貫通するスル
ーホール21を穿設し、このスルーホール21に導電性
接着剤22を充填して電極1と出力電極16を接続する
。After that, as shown in FIG. 9, the fixed electrode 3, the insulating substrate 1
2 and the flexible printed circuit board 18 are formed, and the through holes 21 are filled with a conductive adhesive 22 to connect the electrodes 1 and the output electrodes 16.
ぞして、フレキシブルプリント板18の接続リード19
をプリント基板24の上面側に立ち上るように折曲させ
、その先端をさらに振動膜6上に折曲げて振#JJl!
6の導電層Il!15とフレキシブルプリント板18の
アース電極17先端を半田20で接続して完成する。From there, the connection lead 19 of the flexible printed board 18
Bend it so that it stands up on the top side of the printed circuit board 24, and then bend the tip further onto the vibrating membrane 6 and shake #JJl!
6 conductive layer Il! 15 and the tip of the ground electrode 17 of the flexible printed board 18 are connected with solder 20 to complete the process.
この製造方法からも明らかなように、本発明のエレクト
レット形コンデンサ・マイクロホンは、絶縁基板12の
下面に被着したフレキシブルプリント基板18の接続リ
ード19を折曲して半田付けするだけで、振動膜6から
のリードの導出が可能となって組立てが容易となる。さ
らに、導電塗料などを絶縁基板12や支持リング13側
面に塗布してリードを導出する場合に比べても、断線が
生じにくく信頼性が良好となる。As is clear from this manufacturing method, the electret condenser microphone of the present invention can be manufactured by simply bending and soldering the connecting leads 19 of the flexible printed circuit board 18 attached to the lower surface of the insulating substrate 12. It becomes possible to lead out the lead from 6, which facilitates assembly. Furthermore, compared to the case where the leads are drawn out by applying conductive paint or the like to the side surface of the insulating substrate 12 or the support ring 13, disconnection is less likely to occur and reliability is improved.
また、プリント基板24の導電層23を加工することに
より電極1および振動膜6の張架される支持リング13
の形成が可能であるから、これら電極1や支持リング1
3の寸法精度を一定に保つことが可能となり、これらと
絶縁基板12間の気密を十分保つことができるので、特
性が均一となるばかりかプリント基板23に多数の電極
1および支持リング13の形成が可能となり量産性が良
好となる。Further, by processing the conductive layer 23 of the printed circuit board 24, the support ring 13 on which the electrode 1 and the vibrating membrane 6 are stretched
It is possible to form these electrodes 1 and support ring 1.
3 can be kept constant, and the airtightness between them and the insulating substrate 12 can be maintained sufficiently. This not only makes the characteristics uniform, but also makes it possible to form a large number of electrodes 1 and support rings 13 on the printed circuit board 23. This makes it possible to improve mass productivity.
なお、プリント基板23に多数の電極1や支持リング1
3を形成する場合には、ミシン目等の分割手段をプリン
ト基板23に設けることにより、簡単に分割可能である
。Note that a large number of electrodes 1 and support rings 1 are mounted on the printed circuit board 23.
3, the printed circuit board 23 can be easily divided by providing dividing means such as perforations on the printed circuit board 23.
本発明のエレクトレット形コンデンサ・マイクロホンに
あっては、プリント基板24の下面にフレキシブルプリ
ント板18を被着する場合に限らず、第10図に示すよ
うに、絶縁基板12の下面に単なる導電!25を被着し
、その導電層25に設けた接続リード26を折曲げるよ
うにして振動膜6の導電薄膜15に接続することも可能
であり、このような構造にあっては、両面プリント基板
の使用が可能であるのでより簡単に量産できる。The electret type condenser microphone of the present invention is not limited to the case where the flexible printed board 18 is attached to the lower surface of the printed circuit board 24, as shown in FIG. It is also possible to bend the connection lead 26 provided on the conductive layer 25 and connect it to the conductive thin film 15 of the vibrating membrane 6. In such a structure, a double-sided printed circuit board is used. can be used, making it easier to mass-produce.
本発明のエレクトレット形コンデンサ・マイクロホンは
、接続リード19.20を振動膜6の導電簿膜15に直
接接続する構成のほか支持リング13への接続を介して
導電簿膜15に接続することも可能であり、高分子誘電
体層2についても電極1に形成′する場合に限らず、振
動膜6側に形成する構造においても実施できることはい
うまでもない。The electret type condenser microphone of the present invention has a configuration in which the connection leads 19 and 20 are directly connected to the conductive membrane 15 of the vibrating membrane 6, and can also be connected to the conductive membrane 15 through connection to the support ring 13. Therefore, it goes without saying that the polymer dielectric layer 2 can be formed not only on the electrode 1 but also in a structure where it is formed on the vibrating membrane 6 side.
また、エレクトレット形コンデンサ・マイクロホンに限
らず電極と振動膜を組合せたトランスジューサに広く応
用可能である。Moreover, it can be widely applied not only to electret-type condenser microphones but also to transducers that combine electrodes and vibrating membranes.
[発明の効果1
以上説明したように本発明のトランスジューサは、下面
に導電層を形成した絶縁基板の上面に電極を形成し、こ
の電極の前面に導電S膜の形成された振動膜を張架し、
その絶縁基板下面の導電層から接続リードを一体的に延
設するとともにこの接続リードをその絶縁基板の上面側
に折曲して上記振動膜と電気的に接続してなるので、振
動膜6からのリードの導出が極めて簡単な構造により実
現し、他の電子部品等との接触によるリードの断線も生
じにくく信頼性が良好となる。[Effect of the invention 1 As explained above, the transducer of the present invention has an electrode formed on the upper surface of an insulating substrate with a conductive layer formed on the lower surface, and a vibrating membrane on which a conductive S film is formed on the front surface of the electrode. death,
A connecting lead is integrally extended from the conductive layer on the lower surface of the insulating substrate, and this connecting lead is bent toward the upper surface of the insulating substrate to be electrically connected to the vibrating membrane. The leads can be led out using an extremely simple structure, and the leads are less likely to be disconnected due to contact with other electronic components, resulting in good reliability.
また、絶縁基板12の主4表面において固定電極3およ
び振動膜6の張架される支持層としての支持リング3の
形成が可能であるので構成部品が減少し、安価1小形特
に薄形化が達成されるうえ、プリント基板を利用してこ
れら電極1や支持リングの形成が可能であるので極めて
量産性に適する。Furthermore, since it is possible to form the support ring 3 as a support layer on which the fixed electrode 3 and the vibrating membrane 6 are stretched on the main four surfaces of the insulating substrate 12, the number of components can be reduced, making it possible to reduce the cost, size, and especially thickness. In addition, since the electrode 1 and the support ring can be formed using a printed circuit board, it is extremely suitable for mass production.
ざらに、絶縁基板の下面に導電層としての接続リードを
有するフレキシブルプリント板を被着し、その接続リー
ドを折曲して振動膜に接続するならば、組立てが容易で
接続リードの機械的強度がさらに向上して、耐久性に優
れたものとなる。Generally speaking, if a flexible printed board with connection leads as a conductive layer is attached to the bottom surface of the insulating substrate and the connection leads are bent and connected to the vibrating membrane, assembly is easy and the mechanical strength of the connection leads is improved. is further improved, resulting in excellent durability.
第1図および第2図は従来のトランスジューサを示す断
面図および分解斜視図、第3図は本発明のトランスジュ
ーサの一実施例を示す縦断面図、第4図は第3図に示す
トランスジューサの導電層の展開図、第5図〜第9図は
第3図に示す本発明のトランスジューサの製造方法の一
実施例を示す工程図、第10図は本発明のトランスジュ
ーサのの他の実施例を示す縦断面図である。
1・・・・・・・・・・・・電 極
2・・・・・・・・−・・・高分子誘電体層3・・・・
・・・・・・・・固定電極
4・・・・・・・・・・・・基台
5・・・・・・・・・・・・スペーサリング6・・・・
・・・・・・・・振動膜
7・・・・・・・・・・・・膜リング
8・・・・・・・・・・・・導電性ケース9・・・・・
・・・・・・・連通孔
12・・・・・・・・・・・・絶縁基板13・・・・・
・・・・・・・支持リング16・・・・・・・・・・・
・出力電極(外部出力電極)17・・・・・・・・・・
・・アース電極〈外部出力電極)18・・・・・・・・
・・・・フレキシブルプリント基板(導電層)
19.26・・・接続リード
21・・・・・・・・・・・・スルーホール22・・・
・・・・・・・・・導電1ノi接ン」剤25・・・・・
・・・・・・・導電層
代理人弁理十 須 +h III第1図
第2図
第4図1 and 2 are a sectional view and an exploded perspective view showing a conventional transducer, FIG. 3 is a longitudinal sectional view showing an embodiment of the transducer of the present invention, and FIG. 4 is a conductive view of the transducer shown in FIG. 3. Developed views of the layers, FIGS. 5 to 9 are process diagrams showing one embodiment of the method for manufacturing the transducer of the present invention shown in FIG. 3, and FIG. 10 shows another embodiment of the transducer of the present invention. FIG. 1... Electrode 2... Polymer dielectric layer 3...
......Fixed electrode 4...Base 5...Spacer ring 6...
..... Vibration membrane 7 ..... Membrane ring 8 ..... Conductive case 9 ....
...... Communication hole 12 ...... Insulating board 13 ...
......Support ring 16...
・Output electrode (external output electrode) 17...
...Earth electrode (external output electrode) 18...
...Flexible printed circuit board (conductive layer) 19.26...Connection lead 21...Through hole 22...
・・・・・・・・・Conductive 1noi contact agent 25・・・・・・
・・・・・・Conductive layer agent patent attorney 10+h III Figure 1 Figure 2 Figure 4
Claims (1)
し、この電極の前面にこの電極と所定の間隔をおいて導
電?l?膜の形成された振動膜を張架し、前記絶縁基板
の導電層から接続リードを一体的に延設するとともにこ
の接続リードを前記絶縁基板の上面側に折曲して前記振
動膜の導電薄膜と電気的に接続してなることを特徴とす
るトランスジ7−サ。An electrode is formed on the - side of an insulating M plate with a conductive layer formed on the lower surface, and a conductive layer is placed in front of this electrode at a predetermined distance from the electrode. l? The vibrating membrane on which the membrane has been formed is stretched, connecting leads are integrally extended from the conductive layer of the insulating substrate, and the connecting leads are bent toward the upper surface of the insulating substrate to connect the conductive thin film of the vibrating membrane. A transformer characterized in that it is electrically connected to.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9201982A JPS58209296A (en) | 1982-05-29 | 1982-05-29 | Transducer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9201982A JPS58209296A (en) | 1982-05-29 | 1982-05-29 | Transducer |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS58209296A true JPS58209296A (en) | 1983-12-06 |
Family
ID=14042817
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9201982A Pending JPS58209296A (en) | 1982-05-29 | 1982-05-29 | Transducer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58209296A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013201488A (en) * | 2012-03-23 | 2013-10-03 | Yamaha Corp | Electrostatic transducer |
-
1982
- 1982-05-29 JP JP9201982A patent/JPS58209296A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013201488A (en) * | 2012-03-23 | 2013-10-03 | Yamaha Corp | Electrostatic transducer |
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