JPS58198814A - Method of producing touch type coordinate detecting panel - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION (a) Technical Field of the Invention The present invention relates to a method for manufacturing a touch coordinate detection panel, and in particular, a method for manufacturing a touch coordinate detection panel, in which a large number of electrodes arranged in a matrix causes a change in capacitance in the electrodes; The present invention relates to a method of manufacturing a touch-type coordinate detection panel used in a coordinate detection device designed to detect the position of a designated point by detecting the capacitance change.

(b) Background of the technology A device that detects a specified position using a change in capacitance requires only an electrode to be used as a contact point for pointing with a finger, pen, etc., such as the well-known pm-switch. Since no mechanical contacts are required, it is easy to make the coordinate detection panel transparent. Therefore, in recent years, it has attracted attention as an information input means in combination with a display device or the like. In other words, a transparent touch-type coordinate detection panel is installed in front of the display surface of the display device,
Desired information is input by pointing the contact portion corresponding to the information display position.

(e) Prior Art and Problems A touch-type coordinate detection panel used in such a coordinate detection device generally has the following structure. That is, for example, a large number of indigo-touch detection electrodes are arranged in parallel on a glass substrate, a transparent insulating layer is formed on the surface of the glass substrate including the surface of the detection electrodes, and the above-mentioned X
A Y-side touch detection electrode made of a transparent conductive film of ITO is arranged in parallel with the side touch detection electrode in a relationship perpendicular to the side touch detection electrode. Further, a transparent surface insulating layer is formed on the surface of the Y-side touch detection electrode. Then, the touch detection circuit is connected to the terminal part G of the touch detection electrode on the Y side and the Y side, and the operator connects the contact part configured at each intersection of the poles for touch detection on the Y side and the Y side. Performs instructions using fingers, pen, etc.

Conventionally, the following method has been used to form such a touch type coordinate detection panel. That is, first, I was applied to the surface of the glass substrate.
After photolithographically patterning the X-side touch detection electrode of the TO and forming an insulating layer on the surface of the glass substrate other than the terminal portion of the X-side touch detection electrode by mask vapor deposition, the glass substrate is taken out from the vapor deposition tank. ITO to be the touch detection electrode on the Y side is placed in an area narrower than the insulating layer forming area.
The film is formed by mask evaporation. In other words, X side touch detection! An ITO film is formed on the insulating layer so that the ITO film that is to become the touch electrode on the Y side does not adhere to the extreme end. Then, with a vinyl chloride tape pasted on the surface of the exposed end portion of the X-side touch detection electrode, the upper layer ITO film is patterned by photolithography to form a Y-side touch detection electrode, and then the chloride A method has been adopted in which the vinyl tape is peeled off to expose the terminal portion of the X-side touch detection electrode.

By the way, in such a method, after forming an insulating layer on the X-side touch detection electrode, the glass substrate is once taken out from the vapor deposition tank.
I should be put back into the vapor deposition tank and become the Y-side touch detection electrode.
A TO film was deposited using a mask. This has the disadvantage that the number of deposition cycles increases and the time required to manufacture the panel increases.

(d) Purpose of the Invention The present invention has been made in view of the above-mentioned point G, and includes sequentially applying an insulating layer and a transparent conductive film to become the Y-side touch electrode on the X-side touch detection electrode formed on the surface of the insulating layer plate. The object of the present invention is to provide a method that reduces the number of deposition cycles by depositing the liquid, thereby making it possible to manufacture a touch-type coordinate detection panel at low cost.

(e) Structure of the Invention The method for manufacturing a touch coordinate detection panel according to the present invention includes forming a plurality of Y-side light-transmitting touch detection electrodes on the surface of a light-transmitting insulating substrate, and forming terminals of the X-side touch detection electrodes. After coating the first part with a masking material made of a substance that can be removed with a solvent, and then sequentially depositing an insulating layer and a transparent conductive film on the surface of the second insulating substrate, the upper conductive film is patterned to form a plurality of layers. A light-transmitting touch detection electrode on the Y side is formed, and then the masking material is removed with a solvent to expose a terminal portion of each touch detection electrode on the Y side. It is something.

(f) Examples of the invention Embodiments of the present invention will be described below with reference to the drawings.

FIGS. 1 to 6 are top views of main parts for explaining the method of manufacturing a touch type coordinate detection panel according to the present invention, in which touch detection 1M and pole 2 on the Y side are formed on the surface of a glass substrate 1. These touch detection electrodes 2 on the Y side are connected to the surface of the glass substrate 1.
It is formed by depositing a transparent conductive film of O (indium tin oxide) and then selectively etching the transparent conductive film using a well-known photolithography method. Next, as shown in FIG. 2, the surface of the glass substrate 1 including the surface of the terminal portion 2a of each touch detection electrode 2 is coated with a masking material 3. This masking material 3 is formed by applying, for example, a solution of polyimide resin to a predetermined area with a brush or the like, and then hardening it by heat treatment. Then, such a glass substrate 1 is placed in a vapor deposition tank, and as shown in FIG. ) and ITO transparent conductive film 5
(indicated by diagonal lines) is sequentially deposited. The insulating layer 4
The transparent conductive film 5 is formed by niobbling a part of the masking material 3, and by using the same mask in the same vapor deposition tank and switching the evaporation source, the insulating layer 4 and the transparent film are formed on the entire surface of the continuous masking material 3. The conductive film 5 is not applied because
This is a measure taken to shorten the time required when removing the masking material 3 using a solvent in a later process, and the entire surface of the masking material 3 (the insulating layer 4 and the transparent conductive film 5 is removed using a vapor deposition mask). Of course, it is also possible to evaporate the upper layer transparent conductive film 5 by photolithography to form the X-side touch detection electrode 6 as shown in FIG. Then, by removing the masking material 3 with a solvent such as dimethylacetamide or N-methyl 2-pyrrolidone, the terminal portion 2a of each touch detection electrode 2 on the X side is exposed as shown in FIG.
As shown in FIG. 6, each touch detection electrode 6 on the Y side
A surface insulating layer 7 (indicated by diagonal lines) made of, for example, K1203 or borosilicate glass is formed on the surface of the insulating layer 4 including the front surface by mask vapor deposition, thereby completing a touch-type coordinate detection panel. At this time, the surface insulating layer 7 is Y
Of course, they are formed in areas avoiding the terminal portions 2a and 6a of the side and X side touch electrodes 2 and 6, respectively.

Thus, according to the present invention, the number of deposition cycles can be reduced compared to conventional methods, the manufacturing process of the panel can be simplified, and the time required for manufacturing can also be shortened.

In the above embodiment, the touch detection electrodes 2 and 6 on the X side and the Y side have two linear electrode patterns, but the present invention is not limited to this. A comb-like electrode may be formed near each intersection of each touch detection electrode, and a contact portion may be formed at that portion.

(g) Effects of the Invention As is clear from the above explanation, according to the present invention, the number of vapor deposition cycles can be reduced compared to the conventional method, and the manufacturing process is simplified and the time for manufacturing the saw is not shortened. Get,
It has the advantage of being able to reduce the cost of touch-type coordinate detection panels. .

[Brief explanation of the drawing]

1 to 6 are process diagrams sequentially shown in top views of essential parts for explaining the method for manufacturing a touch type coordinate detection panel according to the present invention. In the figure, 1 is a glass substrate, 2 is an X-side touch detection electrode, 2a is a terminal part of the X-side touch detection electrode, 3 is a masking material, 4 is an insulating layer, 5 is a transparent conductive film, and 6 is an X-side touch detection electrode , 6a indicates the terminal portion of the X-side touch detection electrode, and 7 indicates the surface insulating layer. Figure 1 Figure 2 Figure 3

Claims (1)

[Claims] A plurality of Y-side transparent touch detection electrodes are formed on the surface of the transparent insulating substrate, the terminal portions of the X-side touch detection electrodes are coated with a masking material made of a substance that can be removed with a solvent, and the insulation After sequentially depositing an insulating layer and a translucent conductive film on the substrate surface, the upper conductive film is patterned to form a plurality of Y-side translucent touch detection electrodes, and then the masking material is removed using a solvent. A method for manufacturing a touch hole coordinate detection pallet, characterized in that the terminal portion of each touch detection electrode on the Y side is exposed by removing the touch detection electrode.