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JPS5819244U - Leak test equipment - Google Patents

Leak test equipment

Info

Publication number
JPS5819244U
JPS5819244U JP11405381U JP11405381U JPS5819244U JP S5819244 U JPS5819244 U JP S5819244U JP 11405381 U JP11405381 U JP 11405381U JP 11405381 U JP11405381 U JP 11405381U JP S5819244 U JPS5819244 U JP S5819244U
Authority
JP
Japan
Prior art keywords
pressure
throttle valve
pressure gauge
converts
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11405381U
Other languages
Japanese (ja)
Inventor
小寺 節夫
Original Assignee
株式会社島津製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社島津製作所 filed Critical 株式会社島津製作所
Priority to JP11405381U priority Critical patent/JPS5819244U/en
Publication of JPS5819244U publication Critical patent/JPS5819244U/en
Pending legal-status Critical Current

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  • Examining Or Testing Airtightness (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はこの考案の一実施例のリーク試験装置を示すブ
ロック図、第2図はこの考案に使用されるスロットルバ
ルブの構成を示す断面図である。 1:ピストン、2ニジリンダの排気側、3:負圧側排気
口、5:軸、6:ベローズ、7:弁座、8ニスプリング
、9:管路入口、10:管路出口、11:二−ドル弁、
15:第2の圧力計、16:第1の圧力計、17:検出
器、19. 20. 21:回転形真空ポンプ、23:
被検体。
FIG. 1 is a block diagram showing a leak test device according to an embodiment of this invention, and FIG. 2 is a sectional view showing the configuration of a throttle valve used in this invention. 1: Piston, 2 Exhaust side of cylinder, 3: Negative pressure side exhaust port, 5: Shaft, 6: Bellows, 7: Valve seat, 8 Spring, 9: Pipe inlet, 10: Pipe outlet, 11: Two- dollar valve,
15: second pressure gauge, 16: first pressure gauge, 17: detector, 19. 20. 21: Rotary vacuum pump, 23:
Subject.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] リーク検出用ガス雰囲気内の被検体を真空に排気し、そ
の被検体に接続されて所定の気圧以下で動作させるガス
検出器により、被検体内へリークした検出用ガスの有無
を調べるリーク試験装置において、前記被検体とガス検
出器との間にばね力を利用した常閉形スロットルバルブ
と、このスロットルバルブの入口圧を電気信号に変換す
る第1の圧力計と、同じくスロットルバルブの出口圧を
電気信号に変換する第2の圧力計と、前記第1の圧力計
の出力信号により前記被検体の圧力に対応して前記スロ
ットルバルブを開く側へ制御し、前記第2の圧力計の出
力信号により前記断検出器の圧力に対応して前記スロッ
トルバルブを閉の側へ制御するサーボ機構とを備え、前
記ガス検出器へのガス圧をすくなくとも前記の所定の気
圧以下に自動的に維持することを特徴としたリーク試験
装置。
A leak test device that evacuates a test object in a leak detection gas atmosphere and uses a gas detector connected to the test object to operate at a predetermined atmospheric pressure or lower to check for the presence or absence of detection gas leaking into the test object. , a normally closed throttle valve that uses spring force is connected between the subject and the gas detector, a first pressure gauge that converts the inlet pressure of the throttle valve into an electric signal, and a first pressure gauge that converts the inlet pressure of the throttle valve into an electric signal. a second pressure gauge that converts into an electrical signal; and a second pressure gauge that controls the throttle valve to open in response to the pressure of the object based on the output signal of the first pressure gauge; and a servo mechanism that controls the throttle valve to the closed side in response to the pressure of the disconnection detector, and automatically maintains the gas pressure to the gas detector at least below the predetermined atmospheric pressure. A leak test device featuring:
JP11405381U 1981-07-30 1981-07-30 Leak test equipment Pending JPS5819244U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11405381U JPS5819244U (en) 1981-07-30 1981-07-30 Leak test equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11405381U JPS5819244U (en) 1981-07-30 1981-07-30 Leak test equipment

Publications (1)

Publication Number Publication Date
JPS5819244U true JPS5819244U (en) 1983-02-05

Family

ID=29908341

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11405381U Pending JPS5819244U (en) 1981-07-30 1981-07-30 Leak test equipment

Country Status (1)

Country Link
JP (1) JPS5819244U (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59171182U (en) * 1983-04-30 1984-11-15 森 七郎 spring device
JPS6087986U (en) * 1983-11-25 1985-06-17 ワイケイケイ株式会社 Spring force adjustment device for torsion springs in lifting balancers
JPS6234072U (en) * 1985-08-19 1987-02-28

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59171182U (en) * 1983-04-30 1984-11-15 森 七郎 spring device
JPS6087986U (en) * 1983-11-25 1985-06-17 ワイケイケイ株式会社 Spring force adjustment device for torsion springs in lifting balancers
JPH0320469Y2 (en) * 1983-11-25 1991-05-01
JPS6234072U (en) * 1985-08-19 1987-02-28

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