JPS58188958U - electrostatic electron lens - Google Patents
electrostatic electron lensInfo
- Publication number
- JPS58188958U JPS58188958U JP8749582U JP8749582U JPS58188958U JP S58188958 U JPS58188958 U JP S58188958U JP 8749582 U JP8749582 U JP 8749582U JP 8749582 U JP8749582 U JP 8749582U JP S58188958 U JPS58188958 U JP S58188958U
- Authority
- JP
- Japan
- Prior art keywords
- electron lens
- electrode
- electrostatic electron
- pair
- external electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Drying Of Semiconductors (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第1図は従来の静電型電子レンズを説明するための要部
断面図、第2図及び第3図は本考案の一実施例を示す要
部断面図である。
図において、1,1′は外部電極、2は中心電極、4,
4′は中間電極を示す。FIG. 1 is a sectional view of a main part of a conventional electrostatic electron lens, and FIGS. 2 and 3 are sectional views of a main part of an embodiment of the present invention. In the figure, 1 and 1' are external electrodes, 2 is a center electrode, 4,
4' indicates an intermediate electrode.
Claims (1)
部電極と互いに絶縁されて配設された中心電極とを有し
、前記一対の外部電極と中心電極との間にそれぞれ中間
電極を付設し、該中間電極の電位が前記外部電極及び中
心電極の電位の中間の電位に保持されたことを特徴とす
る静電型電子レンズ。a pair of external electrodes; a center electrode disposed between the pair of external electrodes and insulated from each other; and an intermediate electrode between the pair of external electrodes and the center electrode. An electrostatic electron lens characterized in that the intermediate electrode is maintained at a potential intermediate between the external electrode and the center electrode.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8749582U JPS58188958U (en) | 1982-06-11 | 1982-06-11 | electrostatic electron lens |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8749582U JPS58188958U (en) | 1982-06-11 | 1982-06-11 | electrostatic electron lens |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS58188958U true JPS58188958U (en) | 1983-12-15 |
JPS6317156Y2 JPS6317156Y2 (en) | 1988-05-16 |
Family
ID=30096205
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8749582U Granted JPS58188958U (en) | 1982-06-11 | 1982-06-11 | electrostatic electron lens |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58188958U (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50106558A (en) * | 1974-01-22 | 1975-08-22 |
-
1982
- 1982-06-11 JP JP8749582U patent/JPS58188958U/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50106558A (en) * | 1974-01-22 | 1975-08-22 |
Also Published As
Publication number | Publication date |
---|---|
JPS6317156Y2 (en) | 1988-05-16 |
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