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JPS58174901A - Optical member which is prevented of reflection - Google Patents

Optical member which is prevented of reflection

Info

Publication number
JPS58174901A
JPS58174901A JP57057802A JP5780282A JPS58174901A JP S58174901 A JPS58174901 A JP S58174901A JP 57057802 A JP57057802 A JP 57057802A JP 5780282 A JP5780282 A JP 5780282A JP S58174901 A JPS58174901 A JP S58174901A
Authority
JP
Japan
Prior art keywords
refractive index
film
sio2
base material
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP57057802A
Other languages
Japanese (ja)
Inventor
Hidetaka Takayama
高山 秀隆
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp, Nippon Kogaku KK filed Critical Nikon Corp
Priority to JP57057802A priority Critical patent/JPS58174901A/en
Publication of JPS58174901A publication Critical patent/JPS58174901A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11Anti-reflection coatings
    • G02B1/113Anti-reflection coatings using inorganic layer materials only
    • G02B1/115Multilayers

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Surface Treatment Of Optical Elements (AREA)

Abstract

PURPOSE:To prevent the generation of variation in reflected color and uneven color by providing an intermediate film between a synthetic resin base material having a refractive index of a specific value or above and a thick film of SiO2 in such a way that the refractive index and film thickness satisfy the specific relation with the refractive index of the synthetic resin base material and the SiO2 film. CONSTITUTION:An intermediate film having 0.3-5mu thickness and a refractive index (Nb) and a film thickness (db) is formed on a synthetic resin base material of >=1.56 refractive index (Ns) by using a material satisfying the relation expressed by the equation (lambda is 450-600nm incident wavelength). The adhesive strength between the base material and the thick film of SiO2 is improved if the intermediate layer having the compsn. of 10-80wt% TiO2, 0.1-10wt% Mo and 20-90wt% SiO2 is provided. An optical member of a lens or the like provided with >=2 layers of reflection preventing layers such an SiO2 layer, ZrO2 layer, SiO2 layer or the like successively on the innermost layer ZrO2 is manufactured on the thick film of SiO2. The generation of the ripple (subwave) on the specular reflectivity characteristic which is conspicuous in the case of the synthetic resin base material having a high refractive index is prevented and the generation of the variation in color and uneven color is prevented.

Description

【発明の詳細な説明】 本発明は、反射防止ll【有すゐ合成樹脂St光学部材
に関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a synthetic resin optical member having anti-reflection.

レンズのような合成樹脂製光学部材に、その表面保−又
は反射防止膜の耐久性を向上させる目的で、酸化ケイ素
の膜厚0.Sμ為以上の厚Mt積着した上で、反射防止
膜を施すことは、従米行なわれている。この場合、合成
樹脂基材は、主として屈折率が1.50位のジエチレン
グリコールビスアリルカーボネート−脂いわゆるCR−
59が用いられてき良。しかし最近屈折率が156以上
の合成ms基材か例えばW&跳レンズ用として要用化さ
れ2つつめり、このように屈折率の為い合成樹脂基材t
−便用した場合7に区、第31g1に示すように分光反
射率特性グラフにリッフル(ripple :さざ波)
を生じる。但し、第3図に使用した基材は屈折率1.6
0の[2,2−ビス(4−7クリロキシエトキシー5,
5−ジブロムフェニル)10パンとクロルスチレンとの
70/S 0(li量比)共重合体」でろり、酸化ケイ
膜厚碩の膜厚は1μ鶏、反射防止膜の構成は、最内層;
膜厚町1n暮の酸化ジルコニウム、第2層;膜厚27騙
の酸化ケイ素、第3層;膜厚6gamの酸化ジルコニウ
ム、最外層;膜厚97nmの酸化ケイ素である。そして
、このリップルの例えば山の位置に、酸化ケイ膜厚貞の
微妙な膜厚及び屈折率の変化で相轟にシフトする。とこ
ろで酸化ケイ素4膜の形成は真空蒸iなどによって行な
われるが、厳密な濃厚のコントロールが峻しく、製品こ
との黴妙な”バラツキ及び同一製品でも部位によるバラ
ツキは避けられないし、また蒸着後大気中に取り出した
ときに大気中の湿度に応じた湿気を1&収して屈折率が
製品によって微妙に変化することも避けられない。従っ
て、リップルをそのまま放置しておくと、製品によって
リップルの位置がシフトする仁とにより反射色がバラつ
いたり、単一製品について一換厚の不均一さによる色ム
ラが発生し、このことはIIIIls的には歓迎されて
いない。
For the purpose of improving the durability of the surface protection or anti-reflection coating on synthetic resin optical members such as lenses, a silicon oxide film with a thickness of 0. It is common practice in the United States to apply an antireflection film after depositing Mt to a thickness of Sμ or more. In this case, the synthetic resin base material is mainly diethylene glycol bisallyl carbonate resin with a refractive index of about 1.50, so-called CR-
59 was used well. However, recently, synthetic resin base materials with a refractive index of 156 or more have become necessary, for example, for W & jump lenses, and in this way, synthetic resin base materials with a refractive index of 156 or higher have become necessary.
- When used for convenience, there is a ripple in the spectral reflectance characteristic graph as shown in section 7 and 31g1.
occurs. However, the base material used in Figure 3 has a refractive index of 1.6.
0 of [2,2-bis(4-7 chloroethoxy5,
5-dibromphenyl) 10pan and chlorstyrene 70/S0 (li amount ratio) copolymer, silicon oxide film thickness is 1 μm, anti-reflection film composition is as follows: ;
The second layer is silicon oxide with a thickness of 27 nm, the third layer is zirconium oxide with a thickness of 6 gams, and the outermost layer is silicon oxide with a thickness of 97 nm. Then, at the position of, for example, the peak of this ripple, a shift occurs due to subtle changes in the silicon oxide film thickness and refractive index. By the way, the formation of silicon oxide 4 film is carried out by vacuum evaporation, etc., but strict control of concentration is difficult, and it is inevitable that there will be strange variations in the product and variations in parts of the same product. It is inevitable that the refractive index will change slightly depending on the product as it absorbs moisture depending on the humidity in the atmosphere when taken out.Therefore, if you leave the ripple as it is, the position of the ripple will change depending on the product. The reflected color may vary due to the grains shifting, and color unevenness may occur in a single product due to uneven thickness, which is not welcomed in terms of IIIs.

合成樹脂基材に於いて4IK目立つ分光反射率特性グラ
フ上のリップルを解消した反射防止at有する光学部材
tIl供することKある。
It is possible to provide an optical member having an anti-reflection AT that eliminates the ripples on the 4IK spectral reflectance characteristic graph in a synthetic resin base material.

本発明者は、研究の結果、基材と酸化ケイ素厚膜との界
面で生じる反射光が両者の屈折率の差の増大に伴なって
無視できない程に大きくなり、この反射光が酸化ケイ素
厚膜と反射防止膜との界面での反射光と干渉し合ってリ
ップルが生じることをつきとめ、そこでリップルをなく
すKr1基材と酸化ケイ素との界面での反射光を防止す
ればよいことを着想し、本発明を成すに至り几。
As a result of research, the present inventor found that the reflected light generated at the interface between the base material and the silicon oxide thick film becomes so large that it cannot be ignored as the difference in refractive index between the two increases. After discovering that ripples occur due to interference between the reflected light at the interface between the film and the anti-reflection film, we came up with the idea of eliminating ripples by preventing the reflected light at the interface between the Kr1 base material and silicon oxide. This led to the completion of the present invention.

従って、本発明は基材と酸化ケイ膜厚躾(膜厚0.3〜
5μgh%に1〜5μS)との間に、なる屈折率(Ml
))及び濃厚((LD ) t−!する中間線を設ける
こと1に特徴とする。但し、Ntは酸化ケイ累厚展の屈
折単管、N−は基材の屈折at1λは。
Therefore, the present invention is designed to improve the substrate and silicon oxide film thickness (film thickness 0.3~
The refractive index (Ml
)) and dense ((LD) t-!).However, Nt is a refractive single tube of silicon oxide cumulative extension, and N- is the refraction at1λ of the base material.

入射ftf)tlL長< 400〜600膜m )tそ
れぞれ表わす。
Incident ftf) tlL length < 400 to 600 film m) t, respectively.

本発明の中間膜は、前記屈折率(nb)及び膜厚(ab
 )t−有すればよいが、合成樹脂基材及び酸化ケイ素
厚膜に対して密着性の嵐いものであることが望ましく、
そのためにはTieaと8101との混合物を使用する
ことが望ましい。Tie、と811との混合物は、電子
ビーム加熱蒸着法を使用するときには、均質な膜を得る
上で、金属モリブデン(MO)を添加しておくことがi
11着しく、特に5i02:20〜90重量− TiO□:10〜80重重嚢 Mo:0.1〜10重量嚢 からなる組成を肩する粉末混合物の真空焼結体を蒸着源
として使用することがill’t L < 、81”r
、TlO2、MOのm#lV4合比により1.47〜1
00の範囲内の任意の屈折率を有する安定な中間膜が倚
られる。
The interlayer film of the present invention has the refractive index (nb) and film thickness (ab
) T-, but it is desirable that it has good adhesion to the synthetic resin base material and the silicon oxide thick film,
For this purpose, it is desirable to use a mixture of Tiea and 8101. When using the electron beam heating evaporation method, it is necessary to add metallic molybdenum (MO) to the mixture of Tie and 811 in order to obtain a homogeneous film.
11. Particularly, a vacuum sintered body of a powder mixture having a composition of 5i02: 20-90 weight - TiO: 10-80 weight sack Mo: 0.1-10 weight sack can be used as a vapor deposition source. ill't L < , 81"r
, TlO2, 1.47 to 1 depending on the m#lV4 combined ratio of MO
A stable interlayer film having any refractive index within the range of 0.00 is used.

酸化ケイ膜厚誤は、従来から行なわれている真空蒸着法
により形成してもよいが、ケイ素アルコキシド81(O
R)4 浴111を塗布し、必要に応じて60〜110
C位で5〜70分位仮焼成した後、7150〜500C
位で20〜70分位焼成することによって形成してもよ
い。後者の方法は、嵩価な真空蒸着装置を必要としない
点で商業的に有利である。
Silicon oxide film thickness error may be formed by the conventional vacuum evaporation method, but silicon alkoxide 81 (O
R) 4 Apply bath 111 and apply 60 to 110 as necessary.
After pre-firing at C for 5-70 minutes, 7150-500C
It may be formed by firing at a temperature of about 20 to 70 minutes. The latter method is commercially advantageous in that it does not require expensive vacuum deposition equipment.

酸化ケイ素厚膜の上に積層させる反射防止膜それ自身は
よく知られており、例えば1〜5層構造のものがある。
The antireflection film itself that is laminated on the silicon oxide thick film is well known, and there are, for example, one to five layer structures.

代表的カ多層構造の反射防止膜は次のとおりでめる・ ここて高、低、中屈折率物質の高、低、中とは相対的な
意味でめるが、具体的には 萬屈折車物質として T101%TagO番、Zr01
.1lfo!低屈折革物質として 810輩、Mg1F
2中屈折率物質、!:LテEliO1C@?8、La#
’4、Y2O。
Typical antireflection coatings with multilayer structures can be classified as follows: High, low, and medium refractive index materials.High, low, and medium are used in a relative sense, but specifically, they have a high refractive index. As car material T101%TagO number, Zr01
.. 1lfo! 810 as a low refractive leather material, Mg1F
2 medium refractive index material,! :LteEliO1C@? 8, La#
'4, Y2O.

などが使用される。etc. are used.

次いで、図l1ilit−引用して実f14例により本
発明を具体的に説明する。
Next, the present invention will be specifically explained by referring to FIG.

実施例1 ビス(4−アクリロキシエトキシ−45−ジブロムフェ
ニル)グロバンとクロルスチレンとの70/l (重量
比)共菫曾体からなる合成1IW1基材(屈折41.6
0 >の上に、第1図に示すように、反射防止膜を含む
6鳩を積層した。基材に接する中間−(第1層)は、5
ioa(49,5重1%)、Tie、 (49,51量
%)及びMo (1,Q重量−)からなる混合物t30
X50X20の角臘にブレス成W(5砂−)した後温度
120Orで6時間真空焼結したもの1km子ビームの
加熱で暴 圧力5 X 10 Torrで真空蒸着することにより
形成したが、その膜厚は84鴎で屈折率は1.54でり
つ九。
Example 1 Synthesis 1IW1 base material consisting of a 70/l (weight ratio) copolymer of bis(4-acryloxyethoxy-45-dibromphenyl)globan and chlorstyrene (refraction 41.6)
As shown in FIG. The middle (first layer) in contact with the base material is 5
Mixture t30 consisting of IOA (49,5 1% by weight), Tie (49,51% by weight) and Mo (1,Q by weight -)
After press-forming W (5 sand) on a square frame of X50X20 and vacuum sintering at a temperature of 120 Orr for 6 hours, it was formed by vacuum evaporation at a violent pressure of 5 X 10 Torr by heating with a 1 km beam, but the film thickness was has a refractive index of 84 and a refractive index of 1.54.

第2層は真空蒸着による8102厚−で6り膜厚d1μ
魯、屈折率は1.48でめった。l!5層は膜厚31n
mの酸化ジルコニウム(ZrOa)、第4層は膜厚27
nmのslog、 累5層は膜厚60nmのZrO&蛾
上層ハ膜厚97rmの810.lである。この分光反射
単時性を第2図に示す。第2図の点*riコート恢10
分後K11l定し、実線はコート後24時間後に測定し
九ものである。一方、第5図には、最上層の8108、
TiO2、Mo、の混合物からなる中間膜を施こさず、
合成11m基材の上に上記の第2層目の1μ鶏の810
3の層゛から最上層を同様に施したときの分光反射率特
性を示す。図の点線紘コー)[10分後に測定し、実線
はコート後24時間後に測定したものである。
The second layer is vacuum evaporated with a thickness of 8102-6 and a film thickness of d1μ.
The refractive index was 1.48. l! 5th layer has a film thickness of 31n
m zirconium oxide (ZrOa), the fourth layer has a film thickness of 27
The 5th layer is ZrO with a thickness of 60 nm and the upper layer is 810. nm with a thickness of 97 rm. It is l. This spectral reflection monochronism is shown in FIG. Point in Figure 2 *ri coat 10
The solid line was measured 24 hours after coating. On the other hand, in FIG. 5, the top layer 8108,
Without applying an interlayer film consisting of a mixture of TiO2 and Mo,
The second layer of 1μ chicken 810 above on top of the synthetic 11m substrate
The spectral reflectance characteristics are shown when layers 3 to 3 are applied in the same manner. The dotted line in the figure was measured after 10 minutes, and the solid line was measured 24 hours after coating.

実施例2 合成樹脂基材として屈折率1.57のポリスチレンを用
い、中+4膜(屈折率1.52)を形成す蒸着源物質と
して からなる焼結体を用い、酸化ケイ票厚膜の膜厚  ・を
2.Oμ鶏、中間膜の膜厚t−79mとするほかは、実
施例1と同様に行ない、第4図に示す膜構成tVする光
学部材tf’1Ill L良。
Example 2 Polystyrene with a refractive index of 1.57 was used as a synthetic resin base material, and a sintered body consisting of polystyrene with a refractive index of 1.57 was used as a vapor deposition source material to form a medium +4 film (refractive index of 1.52). Thickness: 2. The same procedure as in Example 1 was carried out except that the thickness of the interlayer film was t-79 m, and an optical member tf'1Ill L good was produced with the film configuration tV shown in FIG. 4.

得られ危光学部材の分光反射特性tMs図に小す。第5
図の点線はコートの10分後Kll定したもので、実線
はコートの24時間後に測定した屯のである。
The obtained spectral reflection characteristic tMs diagram of the optical member is shown below. Fifth
The dotted line in the figure is the Kll value measured 10 minutes after coating, and the solid line is the value measured 24 hours after coating.

他方、第6図は前記実施例で基材に接する本発明の中間
層を設けなかった光学部材の分党反射皐特性を示すグラ
フであり、図中点線はコートの10分後、実線はコート
の24時間後に測定したものでるる。
On the other hand, FIG. 6 is a graph showing the fractional reflection characteristics of the optical member in the above example in which the intermediate layer of the present invention in contact with the base material was not provided, in which the dotted line indicates 10 minutes after coating, and the solid line indicates after coating. Measured 24 hours after.

以上のように本発明によれば、屈折率1.56以上の合
成樹脂基材に対しても分光反射411特性におけるリッ
プルを低減できるから、反射色の経時変化の少ない。ま
た製品間及び四−製品でも部位の這いによる反射色のム
ラの少ない反射防止II[t−有効に施すことができ′
−′るという利点が得られる。
As described above, according to the present invention, ripples in the spectral reflection 411 characteristics can be reduced even for synthetic resin base materials with a refractive index of 1.56 or more, so changes in reflected color over time are small. In addition, anti-reflection II can be effectively applied to reduce unevenness of reflected color due to crawling between products and between products.
- You can get the advantage of

【図面の簡単な説明】[Brief explanation of drawings]

第1図は実施例1の層構成を示す。第2図は実施例1の
分光反射率特性グラフである。第3図は実施例1に対す
る比較例の分光反射′!4%性グラフグラフ。第4図は
実施例2の膜構成4示す。纂5図は実施例2の分光反射
*特性グラフである。第6図は実施例2に対する比較例
の公党反射率特性グラフである。 なお、グラフで点−はコート10分後、実ぜはコート2
4時間後に測定したもので6る。
FIG. 1 shows the layer structure of Example 1. FIG. 2 is a spectral reflectance characteristic graph of Example 1. Figure 3 shows the spectral reflection of a comparative example with respect to Example 1! 4% gender graph graph. FIG. 4 shows membrane structure 4 of Example 2. Figure 5 is a spectral reflection*characteristic graph of Example 2. FIG. 6 is a graph of the public party reflectance characteristics of a comparative example with respect to Example 2. In addition, in the graph, the point - is after 10 minutes of coat, and actually it is coat 2.
The measurement after 4 hours is 6.

Claims (1)

【特許請求の範囲】 1 屈折率(No) 1.56以上の合成樹脂基材の上
に4さ0.3〜5P屈折早社の酸化ケイ膜厚1その上に
反射防止膜を設した光学部材に於いて、前記基材と前記
厚膜との間に、 なる式を満足する屈折率(Wb)及び膜厚((Lb) 
を有する中間膜tW&け九ことt特徴とする光学部材。 2 前記中間膜がsio、、Tie、及びMOの渦合物
からなることt特徴とする特許請求の範囲第1項記載の
光学部材。
[Claims] 1. An optical device having a silicon oxide film thickness of 1 from Reikoku Hayashi Co., Ltd., manufactured by 4P, 0.3 to 5P, on which an antireflection film is provided on a synthetic resin base material having a refractive index (No.) of 1.56 or more. In the member, between the base material and the thick film, there is a refractive index (Wb) and a film thickness ((Lb) that satisfy the following formula.
An optical member characterized by an interlayer film tW & K.K. 2. The optical member according to claim 1, wherein the intermediate film is made of a mixture of sio, , tie, and MO.
JP57057802A 1982-04-07 1982-04-07 Optical member which is prevented of reflection Pending JPS58174901A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57057802A JPS58174901A (en) 1982-04-07 1982-04-07 Optical member which is prevented of reflection

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57057802A JPS58174901A (en) 1982-04-07 1982-04-07 Optical member which is prevented of reflection

Publications (1)

Publication Number Publication Date
JPS58174901A true JPS58174901A (en) 1983-10-14

Family

ID=13066036

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57057802A Pending JPS58174901A (en) 1982-04-07 1982-04-07 Optical member which is prevented of reflection

Country Status (1)

Country Link
JP (1) JPS58174901A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6156302A (en) * 1984-08-28 1986-03-22 Asahi Optical Co Ltd Synthetic resin lens with anti-reflection film

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6156302A (en) * 1984-08-28 1986-03-22 Asahi Optical Co Ltd Synthetic resin lens with anti-reflection film

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