JPS58157186A - Gas laser device - Google Patents

Abstract

PURPOSE:To contrive high output and high stabilization and a method wherein, in a gas laser device, a plurality of wave guides wherein both end parts are opened which are surrounded by electrode base side wall surfaces, electrode plates and dielectric plates are formed, then reflection mirrors, total reflection mirrors and semi-transmitting mirrors are provided on the end parts of these wave guides, next a high frequency voltage is impressed between the electrode base and the electrode plate resulting in a discharge, thus a light is excited in the wave guide, and the device is constituted so as to generate a laser light accordingly, and a cooling means is performed. CONSTITUTION:The wave guides 34a-34d are filled with CO2, Ar, Ne, etc. An RF electric field is impressed between the electrode base 31 and the electrode plates 32a-32d, and accordingly the RF discharge is generated in the four wave guides 34a-34d, then the light generated thereat is reflected by each mirror 21-23d and resonated in the wave guides, thereby a laser is excited and outputted. Finally, cooling is performed by providing cooling water holes 31a in the electrode base 31.

Description

DETAILED DESCRIPTION OF THE INVENTION [110 Technical Field] The present invention relates to a waveguide type Gaslade device.

[Invention oPI technical background and gaps]

In recent years, the 4M circuit type Slade device has been developed in recent years, and is a 0-output device.
01 (coal-fired gas) has been applied as a fuel in the 11th year.

CO, REDE O application fields include communication using atmospheric propagation,
There are gauge hooks, radar, etc. Applications to these fields often require broadband y (continuous oscillation) operation and fast repeatable oscillation operation. However, normal CO□
In Rede, the amplification band is 50 kKM by Gutsunobu.
It's only about x.

To widen the band of CO and LED, if the gas pressure is increased, the collision spread due to K (approximately 5 MHz/Torr) t'
However, it is very difficult to obtain a high pressure discharge with a normal CO2 radar.

A waveguide-type Gaslade device has been proposed as a solution to these problems.

The waveguide type gaslade device Fi has a small discharge tube diameter of about 1, and is capable of high-pressure continuous discharge.Recently, 1 GH
A high band CO2 lede of z 4 degrees has been obtained. Nine, this waveguide-type gaslade device has a smaller tube diameter, so a larger gain can be obtained compared to the normal type, and it is possible to
It is also expected to be used as a high-power radar device.

The basic Rade excitation method used in most of the conventional waveguide-type gas Rades is to generate a DC discharge along the longitudinal direction of the device between a pair of 0IEIi provided near both ends of the Rade waveguide. Is going.

Such a device requires a relatively large DC excitation voltage of approximately I Q kV 4 degrees, the necessary voltage source K for this purpose, and an electrical circuit for generating said voltage.

Also, in the aforementioned longitudinal electrical discharge, the various effects occurring in the cathode obstruction region cause several problems.

That is, firstly, the cathode mother, Talingyo'
This will damage the cathode and shorten the life of the device.
9. It is also possible to dissociate the Rede gas in the high electric field in the cathode drop voltage.

Historically, the cathode drop voltage is relatively high, which consumes a significant portion of the input power and reduces operating efficiency. Also, the positive power supply, current generator, and regulator.

Hardware such as stabilizing resistors is also required because the discharge sustaining voltage is high and the impedance of the discharge tube is negative.

On the other hand, in conventional pulsed lateral discharge excitation, the excitation pulse period must be short enough to prevent arcing, and a large and expensive network for generating pulses is required. There were drawbacks.

In order to overcome these problems, a lateral excitation waveguide type gas Rade device has already been devised, which applies a voltage in a direction perpendicular to the direction of Rade oscillation to cause discharge.

In the case of nickel, the distance between the cathode and the anode is sufficiently short, so a high voltage such as the above-mentioned discharge in the horizontal direction is not required.

On the other hand, in addition to the conventional DC discharge and notarus discharge, RF (radio frequency) discharge excitation type has also been devised.

In this method, a frequency of about 30 MHz+s to 3 GHz is generally used. Since no positive space charge is generated, there is no power consumption due to cathode failure, and highly efficient laser discharge can be obtained.

By the way, in general, the output power is approximately proportional to the length of the laser beam.

Therefore, in order to further increase the output without increasing the overall length of the RADE device by 600 degrees, a refractive type system is considered in which multiple waveguides are folded back with a reflecting mirror and connected in series. It is being

One such method is 2. shown in FIG. The shape of the electric wire has been carefully thought out.

That is, an output mirror 1, a total reflection mirror 2, and a folding mirror 3 are arranged so that the optical path is refracted in two shapes, and a waveguide 4 is provided in the reflection optical path portion formed by the two mirrors. When excitation light is applied to the waveguide 4, this light is reflected between each mirror and resonates, and the radar is excited and finally... -7 mirrors pass through the output mirror 1t. The structure is such that an external Herede light 5 is output.

However, this method makes poor use of space and therefore has poor cooling efficiency, so it is not possible to take advantage of the advantages of the four-wave path type radar, such as its small size and high efficiency. The reflection direction of the return mirror 3 is also very sharp.

[Purpose of the invention]

The present invention has been made in view of the above circumstances, and has a small structure in the form of an RF discharge horizontal excitation waveguide.
The purpose of the present invention is to provide a gaslede device that is stable with a large output, and that does not require troublesome adjustment.

[Summary of the invention]

That is, in order to achieve the above-mentioned object, the present invention provides electrode plates that are spaced apart from each other on at least one pair of opposing side wall surfaces of a professional tape-shaped electrode paste having a cooling means, and that the electrode plate and the side A dielectric body 11 is provided facing the wall surface at an appropriate interval to form a plurality of waveguides with openings at both ends surrounded by the electrode plate and the electrode plate and the electric plate. A reflecting mirror is provided at each end with one of the reflecting optical axes aligned with the axis of the waveguide, and the optical axis of the other reflecting mirror is aligned with the reflecting mirror of the waveguide to be connected. At both ends of each waveguide connected in series, one reflector is placed on one side, a semi-transparent mirror is placed on the other side, and the reflector is placed at the same end. The configuration is such that pairs of seasonal parts are held and arranged in the same carrier to prevent the position of each reflecting mirror from being easily misaligned, and cooling is performed using a cooling means to avoid the effects of heat generation due to JC discharge. In order to achieve high output and high stability.

[Embodiments of the invention]

Hereinafter, one embodiment of the present invention will be explained with reference to FIGS. 2 to 8.

FIG. 2 shows the arrangement structure of the mirrors constituting the Rade resonance tN in one embodiment of the present invention, and is an exploded perspective view 69 for explaining the folding method which is the central concept of the present invention.

In this device, each mirror is arranged parallel to each other at each @* position in the longitudinal direction of the virtual rectangular parallelepiped, and is arranged so as to connect the optical paths Ll * L'S * L'S e L4 in series in the n waveguide. It is thrown at both ends of each said ridgeline so that it is in a relationship.

That is, in the figure, the output mirror by 2JFi Hunler etc. is To! reflects some light and allows some light to pass through. 22 is a total reflection mirror, and these output mirrors 2
1 and the total reflection mirror 22 are arranged at both ends of the entire optical path formed by the connected waveguides. 11h, 13
In addition, 2J@ is not refracted but 2-, and the optical path t is refracted, and among these, JJa is the optical path Ll.

and t-connection, 21b is the optical path, and t-connection, 2
1e is provided to connect the optical paths Ls and L4. This folded back mirror JJa.

JJb and jJc are set at Km so that the pair of reflection fllls are placed on an integral holder at exactly right angles to each other, and the position of the reflection mirror is the optical axis position of the two optical paths to be connected.

When excitation light is applied to the optical path in the waveguide with such a structure, the light is reflected by each mirror and resonates between the output mirror 21 and the total reflection mirror 22,
The light is emitted from the output mirror 21 to the outside as a Rade light beam LB.

Also, with this configuration, the p-light path follows each soft line position of the rectangular parallelepiped, so if the overall size is the same, the light path can be made much longer than the 2-shape light path shown in Figure 1. ,
Moreover, the usage of the space O occupied for forming the optical path also increases.

Figure 3 shows the configuration of the waveguide body in this device.
A cooling water passage hole 31a extending longitudinally inside the tube and communicating with the outside is provided. 32 Hatake, 31b, 31@, 32
d is an electrode plate arranged parallel to the outer surface of the electrode pace J1 in the longitudinal direction with a predetermined distance at, and this electrode @ J x
A to 724 are formed of the electrode paste 31 and a gold plate made of a metal material. Two electrode plates are disposed on the opposite side of the electrode plate J1, and in contact with each other. to 32b, IJ@, jJd, 33., 3
By subtracting Jf, these electrode paces 31 and electrode &J J a ~ J J d , - electric body board J J a
The four rectangular nine gates surrounded by ~J Yes, this waveguide 34a-Jnd
The interior is filled with a gas such as CO2, argon, neon, etc., which is a Rede medium.

In addition, the inner walls of the waveguides 14a to 844 are sufficiently polished, and may be coated with an O thin film such as a tin electric material in order to increase the radar gain depending on the case.

Incidentally, each of the electrode plates jja to 32 is provided with an Ot value connector 15 on the back surface thereof in order to apply an HP electric field.

An RF electric field for exciting a discharge in the cylindrical configuration is applied between electrode pace J1 and electrode plates IIa-Jjd. From this K, the above four waveguides J 4 a −
An IF discharge occurs within the waveguide, and the self-generated light is reflected by the aforementioned lasers 21 to 114 provided at the end of the waveguide, resonates within the waveguide, and excites the radar. and output. The waveguide main body constituent members are heated by the heat generated by the discharge, and the optical axes of the mirrors 21 to 2J- and the central axes of the waveguides 34a to 34- are misaligned due to thermal expansion. As the length changes, fluctuations occur in the radar output.

In order to reduce this fluctuation, in this device, a cooling water passage hole 31*t- is provided in the electrode space 11, and the cooling water (
(Other refrigerants may also be used) Water is passed through the tank for cooling. Therefore, the heat caused by the discharge is suppressed by the efficient wind, and this suppresses the variation in the radar output, so that a highly stable radar output can be obtained.

5wJ shows a cross-sectional view of the waveguide main body having the structure shown in FIG.

Inject 100 Torr of acid into the inside of Wi41. Am gas lede sealed in 4I
- In the case of iron content, the lifespan is affected by the quality of the gas, cleanliness, etc. On the other hand, if the volume of the gas injection container is small, the internal temperature will rise due to the heat generated by the blind electricity, and the gas density distribution inside the lede tube will change, resulting in a decrease in output.

In order to reduce such effects, the outer casing 41 for gas filling is
As shown in Figure 5, the P and 7 A air barriers are set large.

At both ends of the radar waveguide main body as shown in Fig. 3, which is fixed to the outer casing 41, the i21 and 4j, which refract the optical path as shown in the irises 4wJ, are attached. It becomes a structure.

72 - Inside the mount 42.41 are the output mirror 11, total reflection mirror xx, and folding mirrors 13* and 1, which were explained in FIG. 2 so as to reflect and resonate on the optical path as shown in FIG.
3b and 11- are mounted so that the light repeatedly passes through the O optical path within the waveguides 141 to 144. In addition, holes for overwatering 44m, 44, and 41@ are provided at appropriate locations for Mirror 1 und 4x and 4111Cd, respectively.

41b is provided and connected to the cooling water passage hole JJa provided in the electrode space J1 of the waveguide body, and the water passage holes 44m, 44b, 45m are provided.

Cooling water is allowed to flow to the outside of the electrode space J1 via 46e.

Incidentally, the 4σ in the 2-ray mount 42 is formed by dispersing the central axis at the optical axis of the output mirror 2).

By configuring the device in this way, it is possible to create an optical path with high space utilization efficiency, and the optical path length can be made very short, so that it is possible to obtain the optical output LED light.

In other words, in this device, the main optical path is
Since the shape is along the four longitudinal edges of the layered rectangular parallelepiped and the optical paths are connected by mirrors, the optical path length is long (nl) and the utilization rate of the occupied space is low.

In addition, in this device, a folding mirror that connects the intermediate optical path is fixed to the south face of a holding base using a pair of reflecting mirrors, and the opposing faces are opened at 90 degrees.
Since it is fixed to J and 47, there is no concern that once the optical axis between the waveguide and the waveguide is installed, the optical axis may shift due to vibration during transportation. In addition to eliminating the need for optical axis adjustment at fk increments, the waveguide body has a hole through which the cold #ll tube passes and sends the cold tI&, thereby performing p cooling. 2) Since the generated heat is also suppressed, the expansion of the structure due to the heat generated during operation is also suppressed, and the optical axis shift caused by these is also suppressed.

In addition, since the waveguide body is small in comparison to the possible optical path length, even if the outer casing 41 for bus insertion surrounding the waveguide body is relatively large compared to the waveguide body, the device will not be large. 〉
Since problems such as overheating do not occur, the internal space can be enlarged, and the density distribution of Rede gas is less likely to be affected, resulting in stable Rade output. The resulting RF discharge machine excitation waveguide structure is obtained.

It should be noted that the present invention is not limited to the embodiments described above and shown in the drawings, but can be implemented with appropriate modifications within the scope of the gist thereof. The governor configuration shown in Figures 6 to 8 is as follows.

That is, in the ssg, the electrode plates 32a to JJd, which were separated in FIG.
4d is oaked to simplify the structure.

Further, FIG. 7 shows a pair of electrode spaces 71 with a cross-sectional shape.
72, the electrode spaces 7J and 72 are assembled to form a rectangular tube shape, and the rectangular tube shape t- is used as a pole base body 73, and a waveguide 341. It is a friend that forms 34d.

As in the case of FIG. 3, electrode plates 32h and 32b are placed on the inner facing surface of the electrode base main body 73 at a distance of about 1 m.

32c, 32dt- are disposed, and the gap between the electrode plates 32, ~Jjd and the inner wall surface of the electrode pace main body 73 is closed from both sides to form waveguides 34&, ~J4d, and the electrode plates 321~ Dielectric plates 1 331 to 331 are provided to electrically insulate jJd and the electrode paste main body 73.

With such a configuration, the electrolytic base body 73t can also function as an outer casing for the waveguide body, making the structure even simpler.

It should be noted that the joint part 74 of the electrode base 77 and 72 needs to have a sealed structure of tsFi, and good results can be obtained by performing electron beam welding or laser welding for this purpose.
these#! In addition to the bonding method, a bonding method that does not leave thermal strain inside the material may be used.
, 7Jb.

r2 and 7Jb are holes through which the refrigerant passes.

FIG. 8 shows an example in which waveguides are formed at equal division angles, for example, in 60° increments, on the circumference of a circle with an arbitrary radius 'f:* within a certain size range.

That is, a circle is drawn around the center S of the electrode space a1 on the four longitudinal sides of the rectangular pro-shaped electrode space 8, and the circumference is divided into 60° increments so that waveguides are formed at the dividing positions. A dielectric plate 82 and an electrode plate 83 are provided, and the basic structure is the same as that in FIG. 3.

In the case of the configuration shown in FIG. 8, the number of waveguides Fi is six, so folding multiplexing is further performed, and the length of the waveguide becomes longer. Note that all are holes for refrigerant circulation.

By each of these methods, the structure of the main body of the 4ffij1 can be simplified or the length of the conductor can be extended.

In addition, in the above embodiment, the electrode base is cooled by circulating a coolant such as cooling water, but is it possible to use a semiconductor cooling element during heat or heat exchange? A cooling structure may also be used.

[@Ming effect]

As described in detail above, the present invention provides a gas-rede device having at least one pair of facing electrodes having a cooling means and a rib-shaped electrode plate. Electrodes are placed on each surface of the electrode plate, and the electrode plate and the
A value ti (D4tiL path) is formed between the electrode space side wall surface, the electrode plate, and the dielectric plate, which face each other at an appropriate interval, and is opened at both ends. A reflecting mirror is installed at the end of the waveguide so that one of the reflected optical axes t coincides with the axis of the waveguide, and the other reflected light 1lIi is reflected with the optical axis t aligned with the reflecting mirror of the waveguide. - Each waveguide is connected in series by connecting each waveguide, and a total reflection mirror is provided at one end of the waveguides connected in series, and a semi-transmission mirror is provided at the other end, and the said reflection mirror is The pair of electrodes on the same end side are held by the same holder, and a high frequency voltage is applied between the electrode pace and the electrode plate to cause discharge. Excite light into the waveguide,
Since the LED light is generated, the discharge distance is short and the frequency is high, so high voltage is not required for discharge.
In addition, multiple waveguides are provided on at least two opposing walls of the electrode space, and these are optically connected in series, so even if the device length is short, a long waveguide length can be obtained and high output can be obtained, as well as space utilization efficiency. Therefore, it is possible to reduce the wrinkles even more with the conventional method and with the output power, and since the pair of reflecting mirrors are fixed to the same holder, it is less susceptible to mechanical vibrations. The optical axis does not shift strongly, and since the electrode space is configured to be cooled, the effect of heat generation due to discharge is minimized, and the optical axis and waveguide central axis are prevented from misalignment due to thermal expansion of the device. It is possible to provide a waveguide-type gas Raded device having excellent properties such as being able to obtain stable Raded light by suppressing .

[Brief explanation of the drawing]

11i 1EFi A diagram showing the optical path configuration of the conventional method, FIG. 2 is a diagram for explaining the arrangement and structure of the O optical path configuration of the device of the present invention, and FIG. 3 is a diagram showing the structure of the waveguide body in the device of the present invention. FIG. 4 is a perspective view showing the overall configuration of the IjI of the present invention, FIG. 5 is a diagram showing the cross-sectional structure of FIG. FIG. 1.21... Output mirror, 2.21... Total reflection mirror, J, J J a, j J b, j J
c - folding mirror, 31, 71.72. al・
...electrode pace, Ila, rlm, 11b, 12a, r
lb. l 1 g-・one hole, jJa, Jjb, li@, J
Jd. 61.62. III... Electrode plate, 31m, ~311°al... Dielectric plate, 41... Housing.

Claims (1)

[Claims] In the Gaslade device, an electrode plate is arranged spaced apart from each other on at least a pair of opposing sides of the f-shaped O electrode plate having a cooling means, and between the O electrode plate and the wall mural on the Yaki side. The dielectric plates facing each other are provided at appropriate intervals to form a plurality of 01IIIL paths surrounded by the electrode space side wall surface, the electrode plate, and the dielectric plate and open at both ends. Provide a reflecting mirror with one axis aligned with the axis of the waveguide, and the optical axis of the other reflecting mirror should be aligned with the Sobube sound waveguide O reflecting mirror. The waveguides are connected in series, and at both ends of the waveguides connected in ζO series there is a total reflection mirror that totally reflects the light on one side, and on the other side there is a total reflection mirror. The two electrodes are arranged so that they are held in the same holding body with the pair on the same end side, and a high frequency voltage is applied between the electrode plate and the electrode plate to cause discharge. A gas Rede device that uses K to excite Rede light.