JPS5814500A - Electrode supporting device - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an electrode support device used in a vacuum container, and relates to an electrode support device that allows electrodes to be easily exchanged and their positions changed.

For example, in a plasma generator, a discharge device, etc., an electrode support device is required to identify the electrode at a predetermined position within the vacuum container and to supply power to the electrode. This type of conventional electrode support device consists of a 100a connection unit 1 which is integrally attached to an electrode mounting part in a vacuum container (not shown), and one end of the 100a connection unit 1, as shown in FIG. 1, for example. A cylindrical insulator 2 integrally connected to the connecting body 2, a 9th 20 connecting body 3 integrally connected to the other end of this j8I & body 2, and an integrally connected to this second connecting body 3. The first connecting body 11iD has a hollow portion extending through the first connecting body 1 along its axis at the center thereof.

In addition, the electric rod 6 of the electrode holding part 5 is connected to the first connecting body 1, the insulator 2, and the second ! It is connected to the power supply section 4 by loosely fitting the I-insert body 3 thereinto. The nine metal parts carrying the electric wire A7 are formed at the inner end of the conductive rod 6 through the connection plate 9 and are fastened to the nine male screw parts with nuts, and the electrode 7 is attached to the outer end of the power supply part 4. It is fastened with a nut to the section and is supplied with power from a power source (not shown) through a highly conductive plate 10.

However, in the conventional electrode support device illustrated in item 1g, the nut must be moved in order to replace or change the position of the electrode, which is cumbersome and time consuming.

Before loosening the nut, it is easy to apply a strong shock to the electrode.
In particular, if such a shock is applied after the electrode has been discharged and has reached a high temperature, the electrode may be damaged.

There are various inconveniences such as.

Therefore, the purpose of the present invention tp1o is to solve the various inconveniences mentioned above, to easily change the position of the Jζ electrode without applying shock to the electrode, and to easily replace the electrode. Provides support equipment.

An embodiment of the present invention will be described below with reference to FIG. 2 and FIG. 3.

In the jI2 diagram, numeral 1 indicates the first connection body.

The recommended connecting body 1 in the illustrated embodiment is, for example, a stepped cylindrical body, and its large diameter portion is integrally attached to an electrode mounting portion in a vacuum container (not shown).

A chuck 13 is attached to the first connecting body 1 via an insulating cylinder 11 and a second connecting body 3 coaxially attached to the inner cylinder portion thereof.

In the illustrated embodiment, the insulating cylinder 11 is a stepped cylinder having a flange formed in its large diameter part and an inner cylinder part that slidably fits into the electrode 7. By inserting it into the cylindrical part of the connecting body 1, one large diameter part of the above-mentioned rib part is MI! It is fitted into the small diameter part of the continuous gun body.

Regarding the collar of insulation #11, the other large diameter part.

Stepped cylindrical second II! The large diameter part of the continuous gun body is fitted. Note that the material of the insulation 11ilff11o# is preferably made of, for example, ceramics.

A chuck 13 is integrally fitted into the small diameter portion of the second connecting body 3. As shown in FIGS. 2 and 183, this chuck 13 has, for example, a stepped portion on the outer surface 1g of the front end connected to the gun body 3, and a pear 16 along the axis line on the rear end. A tapered portion whose diameter gradually increases toward the rear end is formed on the outer surface of the +O rear end.

A power supply block 17 is slidably fitted into the tapered portion of the chuck 13, for example, by bolting a pair of conductors each having a groove with a semicircular cross section on both sides of the groove 60. The outer surface ζζ of the chuck 13 between the pulley chuck 17 and the stepped portion is such that the compression coil spring 19
I have been published.

Note that the power supply block 17 is connected to the 5 through the power supply line 18.
A high voltage power supply number ζ (not shown) is connected.

An example number ζ of nine books 1jli configured as above
To attach the electrode 7 to the electrode support device, after shutting off the high-voltage power supply (not shown), turn off the compression coil spring 1.
9, move the power supply block 17 toward the insulating tube 11 (
(to the right in Figure 2). Then, the opening on the rear end surface of the chuck 130 (between the left ends in FIG. 2) expands, so insert the tip of the electric fi 17 forward through the
The tip of the electrode 70 is set at a predetermined position within the vacuum container by inserting the inner cylinder portion. When the power supply block 17 is then released, the power supply block 17 moves along the tapered portion at the rear end of the chuck due to the elasticity of the compression coil spring 190.
The wedging effect caused by this movement causes the inner diameter of the rear end of the chuck to decrease, resulting in it being gripped by the electrode 7Fi chuck.

When the electrode 117 is fixed in this way, the electrode 7 is insulated from the first connection body or the electrode attachment part, as is clear from Figure @2, and can be discharged if the high voltage power is turned on thereafter.

When changing the installation position of power supply block 1
7 in the direction of the insulating cylinder 11. Then, the wrinkled portion at the rear end of the chuck 13 expands due to its own elasticity. Therefore, when the electrode 7 is directly operated to determine its relative position with respect to the chuck 13 and the power supply block 17 is released, the electrode 7 is directly identified at the set position.

The electrode 7 can be easily replaced in the same way. Since the chuck is attached via the tube and the second connecting body and the electrode is detachably held by the chuck, the position of the electrode can be changed and replaced very easily.

Furthermore, simply loosening the chuck releases the electrode and makes it movable, so there is no shock applied to the electrode -ζ.

Furthermore, the structure of the device is simple and there is little risk of failure, among other advantages.

Note that the chuck in the above explanation is of type O, which is always automatically tightened by the elasticity of a compression coil spring; Of course, the present invention-ζ can also be applied to , or other abdominal type chucks.

[Brief explanation of the drawing]

1g1 is a side view showing an example of a conventional electrode support device, FIG. 2 is a longitudinal sectional view of an electrode support device according to an embodiment of the present invention, and FIG. 3 is a front view thereof. l...first connection body, 3...second connection body, 7...
・Electrode, 11... Insulating cylinder, 13... Chuck, 16
...Slot, 17...Power supply block, 19...
Compression coil spring.

Claims (1)

[Scope of Claims] 1. The first connecting body integrally attached to the electrical 41 mounting part of the vacuum test equipment, the insulating cylinder to which this 10 * cable body number ζ is attached with scissors, and this insulating Tube J (Wire attached to the 9th and 20th connection body, and a chuck attached to this 20th! An electrode support device comprising: an electrode; 2. The chuck has a cylindrical portion with a tapered portion formed on the outer surface thereof, and an IK-fitted block that is slidable on the tapered portion; Claim 1 characterized in that the body is lowered so as to hold the electrode at all times by pressing the body in a large direction toward the tip of the body due to the elasticity of the spring.
0 electrode support device.