JPS58144832U - Reduction projection exposure equipment - Google Patents
Reduction projection exposure equipmentInfo
- Publication number
- JPS58144832U JPS58144832U JP4174882U JP4174882U JPS58144832U JP S58144832 U JPS58144832 U JP S58144832U JP 4174882 U JP4174882 U JP 4174882U JP 4174882 U JP4174882 U JP 4174882U JP S58144832 U JPS58144832 U JP S58144832U
- Authority
- JP
- Japan
- Prior art keywords
- projection exposure
- reduction projection
- power
- exposure apparatus
- power consumption
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Alarm Systems (AREA)
- Control By Computers (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来の電力測定法説明図、第２図は本
□考案による電力測定装置の構成図、第３図は電力測定
回路図である。
１・・・ランプ電源、２・・・ランプ、ａ・・・電力計
、４・・・電流検出抵抗、５・・・電力変換器、６・・
・Ａ／Ｄ変換器、７・・・制御計算機、８・・・表示装
置、９・・・電流増幅器、１０・・・電圧増幅器、１１
・・・掛算器、１２・・・比較器、１８・・・設定値。Figure 1 is an explanatory diagram of the conventional power measurement method, Figure 2 is the book
□A configuration diagram of the invented power measuring device, and FIG. 3 is a power measuring circuit diagram. DESCRIPTION OF SYMBOLS 1... Lamp power supply, 2... Lamp, a... Wattmeter, 4... Current detection resistor, 5... Power converter, 6...
・A/D converter, 7... Control computer, 8... Display device, 9... Current amplifier, 10... Voltage amplifier, 11
...Multiplier, 12...Comparator, 18...Setting value.
Claims (1)
た電力をＡ／Ｄ変換する手段を有する縮小投影露光装置
において、消費電力を制御部に読み取り、あらかじめ指
定された寿命電力と比較し、寿命電力に達した時、ラン
プ変換の警告を与え、装置を停止させ得る構成を採った
ことを特徴とする縮小投影露光装置。 ２ 第１項において、消費電力と寿命電力を比較し得る
機構をそなえ、寿命電力に達した時、制御部に伝えるこ
とを特徴とする縮小投影露光装置。 ３ 第１項において常時消費電力を計測することを特徴
とする縮小投影露光装置。 ４ 第１項において、稼動直前に消費電力を計測するこ
とを特徴とする縮小投影露光装置。[Claims for Utility Model Registration] 1. In a reduction projection exposure apparatus having means for measuring the power consumption of a lamp and means for A/D converting the measured power, the power consumption is read into the control unit and 1. A reduction projection exposure apparatus, characterized in that the reduction projection exposure apparatus is configured to compare with a lifespan power, and when the lifespan power is reached, a lamp conversion warning is given and the apparatus can be stopped. 2. The reduction projection exposure apparatus according to item 1, characterized in that it is equipped with a mechanism that can compare power consumption and lifetime power, and notifies the controller when the lifetime power is reached. 3. A reduction projection exposure apparatus characterized in that the power consumption is constantly measured in item 1. 4. The reduction projection exposure apparatus according to item 1, characterized in that power consumption is measured immediately before operation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4174882U JPS58144832U (en) | 1982-03-26 | 1982-03-26 | Reduction projection exposure equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4174882U JPS58144832U (en) | 1982-03-26 | 1982-03-26 | Reduction projection exposure equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS58144832U true JPS58144832U (en) | 1983-09-29 |
Family
ID=30052924
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4174882U Pending JPS58144832U (en) | 1982-03-26 | 1982-03-26 | Reduction projection exposure equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58144832U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01243427A (en) * | 1988-03-24 | 1989-09-28 | Tokyo Electron Ltd | Aligner for semiconductor wafer |
| JPH02230711A (en) * | 1989-03-03 | 1990-09-13 | Canon Inc | Semiconductor exposing apparatus |
-
1982
- 1982-03-26 JP JP4174882U patent/JPS58144832U/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01243427A (en) * | 1988-03-24 | 1989-09-28 | Tokyo Electron Ltd | Aligner for semiconductor wafer |
| JPH02230711A (en) * | 1989-03-03 | 1990-09-13 | Canon Inc | Semiconductor exposing apparatus |
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