JPS58140741U - thermal head - Google Patents
thermal headInfo
- Publication number
- JPS58140741U JPS58140741U JP1982038329U JP3832982U JPS58140741U JP S58140741 U JPS58140741 U JP S58140741U JP 1982038329 U JP1982038329 U JP 1982038329U JP 3832982 U JP3832982 U JP 3832982U JP S58140741 U JPS58140741 U JP S58140741U
- Authority
- JP
- Japan
- Prior art keywords
- thermal head
- insulating layer
- heating resistor
- electrode
- protective layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010410 layer Substances 0.000 claims description 7
- 238000010438 heat treatment Methods 0.000 claims description 4
- 239000011241 protective layer Substances 0.000 claims description 3
- 238000004544 sputter deposition Methods 0.000 claims description 2
- 239000011229 interlayer Substances 0.000 claims 1
Landscapes
- Electronic Switches (AREA)
- Non-Adjustable Resistors (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図はサーマルヘッドの要部平面図、第２図は本考案
による要部断面図、第３図はマスクを用いたスパッタリ
ングによる絶縁層形成後の断面図。
１．２・・・発熱抵抗体、３．４・・・選択電極、５゜
６・・・電極の接続部、７・・・上層電極、８・・・電
極間絶縁層、１０・・・上地、１１・・・発熱抵抗体、
１２・・・保護層、１３．１５・・・電極、１４・・・
電極間絶縁層、１７・・・マスク、１８・・・スパッタ
形成した絶縁層。FIG. 1 is a plan view of the main part of a thermal head, FIG. 2 is a sectional view of the main part according to the present invention, and FIG. 3 is a sectional view after forming an insulating layer by sputtering using a mask. 1.2... Heating resistor, 3.4... Selection electrode, 5゜6... Electrode connection portion, 7... Upper layer electrode, 8... Inter-electrode insulating layer, 10... Upper part, 11... heating resistor,
12... Protective layer, 13.15... Electrode, 14...
Interelectrode insulating layer, 17...mask, 18... sputter-formed insulating layer.
Claims (2)
、電極層間絶縁層が、発熱抵抗体上部に形成された保護
層と同一の膜で形成されていることを特徴とするサーマ
ルヘッド。(1) A thermal head in which the electrodes have a multilayer structure, characterized in that the electrode interlayer insulating layer is formed of the same film as the protective layer formed on the heating resistor.
クを用いたスパッタリング法により同時に形成されてい
ることを特徴とする実用新案登録Ｈａ求の範囲第１項記
載のサーマルヘッド。(2) The thermal head according to item 1 of the patent application, wherein the protective layer on the heating resistor and the inter-electrode insulating layer are simultaneously formed by a sputtering method using a mask.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1982038329U JPS58140741U (en) | 1982-03-17 | 1982-03-17 | thermal head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1982038329U JPS58140741U (en) | 1982-03-17 | 1982-03-17 | thermal head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS58140741U true JPS58140741U (en) | 1983-09-21 |
Family
ID=30049676
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1982038329U Pending JPS58140741U (en) | 1982-03-17 | 1982-03-17 | thermal head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58140741U (en) |
-
1982
- 1982-03-17 JP JP1982038329U patent/JPS58140741U/en active Pending
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