JPS58127714U - piezoelectric tuning fork vibrator - Google Patents
piezoelectric tuning fork vibratorInfo
- Publication number
- JPS58127714U JPS58127714U JP2283182U JP2283182U JPS58127714U JP S58127714 U JPS58127714 U JP S58127714U JP 2283182 U JP2283182 U JP 2283182U JP 2283182 U JP2283182 U JP 2283182U JP S58127714 U JPS58127714 U JP S58127714U
- Authority
- JP
- Japan
- Prior art keywords
- tuning fork
- fork vibrator
- piezoelectric tuning
- piezoelectric
- vibrator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Gyroscopes (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来の圧電音叉振動子を示す斜視図、第２図は
この考案に係る圧電音叉振動子の斜視図、第３図は同上
の使用状態を示す第１の例の正面図、第４図は同第２の
例を示す斜視図、第５図は同第３の例を示す斜視図、第
６図は同じく第４の例を示す斜視図である。
１１・・・金属音叉振動子、１２・・・圧電薄膜、１３
゛・・・上部電極、１４・・・電気絶縁膜、１５・
・・圧電音叉振動子。FIG. 1 is a perspective view showing a conventional piezoelectric tuning fork vibrator, FIG. 2 is a perspective view of a piezoelectric tuning fork vibrator according to the invention, and FIG. 3 is a front view of the first example showing the above usage state. 4 is a perspective view showing the second example, FIG. 5 is a perspective view showing the third example, and FIG. 6 is a perspective view showing the fourth example. 11... Metal tuning fork vibrator, 12... Piezoelectric thin film, 13
゛... Upper electrode, 14... Electrical insulating film, 15...
...Piezoelectric tuning fork vibrator.
Claims (1)
一方に圧電薄膜と上部電極が設けられた圧電音叉振動子
において、金属音叉振動子の駆動面および検出面と隣接
する他の面に電気絶縁膜を設け、 たことを特徴とす
る圧電音叉振動子。In a piezoelectric tuning fork vibrator in which a piezoelectric thin film and an upper electrode are provided on at least one of the drive surface and detection surface of the metal tuning fork vibrator, electrical insulation is provided on the other surface adjacent to the drive surface and detection surface of the metal tuning fork vibrator. A piezoelectric tuning fork vibrator characterized by being provided with a membrane.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2283182U JPS58127714U (en) | 1982-02-22 | 1982-02-22 | piezoelectric tuning fork vibrator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2283182U JPS58127714U (en) | 1982-02-22 | 1982-02-22 | piezoelectric tuning fork vibrator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS58127714U true JPS58127714U (en) | 1983-08-30 |
Family
ID=30034891
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2283182U Pending JPS58127714U (en) | 1982-02-22 | 1982-02-22 | piezoelectric tuning fork vibrator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58127714U (en) |
-
1982
- 1982-02-22 JP JP2283182U patent/JPS58127714U/en active Pending
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