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JPS58121130A - Magnetic disk manufacturing method - Google Patents

Magnetic disk manufacturing method

Info

Publication number
JPS58121130A
JPS58121130A JP95682A JP95682A JPS58121130A JP S58121130 A JPS58121130 A JP S58121130A JP 95682 A JP95682 A JP 95682A JP 95682 A JP95682 A JP 95682A JP S58121130 A JPS58121130 A JP S58121130A
Authority
JP
Japan
Prior art keywords
magnetic disk
burnishing
head
magnetic
load
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP95682A
Other languages
Japanese (ja)
Other versions
JPH0319610B2 (en
Inventor
Tatsuo Kawade
川出 辰男
Tomio Nakamura
富雄 中村
Yuichi Otani
大谷 祐一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP95682A priority Critical patent/JPS58121130A/en
Publication of JPS58121130A publication Critical patent/JPS58121130A/en
Publication of JPH0319610B2 publication Critical patent/JPH0319610B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84Processes or apparatus specially adapted for manufacturing record carriers

Landscapes

  • Manufacturing Of Magnetic Record Carriers (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 本発明は磁気ディスクの製造方法に関し、より詳細には
基板表面に磁性塗膜を形成させた後、バニッシュ工程と
フルーティング・チェック工程とを行う磁気ディスクの
製造方法におけるバニッシュ工程の改良に関する◎ 磁気ディスクは磁気ディスク装置の記録媒体として使用
されるもので、磁気ディスク装置に搭載された磁気ディ
スクは所定の回転数で回転し、この回転により生ずる空
気流で磁気ヘッドを微少なI1間隙全以て浮上させて記
録再生を行う。このため、磁気ディスクの表面に、磁性
塗膜自体に起因する突出物もしくは塵埃等の異物の付着
に起因する突出物が存在すると、磁気ヘッドの浮上に対
する安定性が措なわれ、最悪の場合には磁気ディスク表
面の前記磁性塗膜と磁気ヘッドが損傷する、いわゆるヘ
ッド・クラッシュ現象が発生する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for manufacturing a magnetic disk, and more specifically, a method for manufacturing a magnetic disk in which a burnishing process and a fluting check process are performed after forming a magnetic coating film on the surface of a substrate. Regarding improvement of the burnishing process ◎ A magnetic disk is used as a recording medium in a magnetic disk device.The magnetic disk mounted on a magnetic disk device rotates at a predetermined number of rotations, and the air flow generated by this rotation drives the magnetic head. Recording and reproduction are performed by floating the entire minute I1 gap. Therefore, if there are protrusions on the surface of the magnetic disk caused by the magnetic coating itself or by adhesion of foreign matter such as dust, the stability of the magnetic head when flying will be affected, and in the worst case In this case, a so-called head crash phenomenon occurs in which the magnetic coating film on the surface of the magnetic disk and the magnetic head are damaged.

従来の磁気ディスクの製造方、法においては、工程連中
に、前配磁性塗膜上の突出物を特殊な模擬ヘッドで除去
するバニツシュ工程金加えて平滑性を満足させようとし
ており、模擬ヘッドの形状等も各種のものが考案されて
いる。また、前記バニッシュ工程において突出物が除去
されたかどうかをチェックするため、実際の磁気ディス
ク装置で使用される磁気ヘッドを使用して、実際の値も
しくはそれよりやや小さい浮上量で前記磁気ヘッドを浮
上させ、これに突出的検知センサを搭載して平滑性を検
査する7N2−ティング・チェック工程t−ffってお
り、これに用いる突出的検知センサについても検討が行
われている。
In conventional methods for manufacturing magnetic disks, the process team adds a burnishing process to remove protrusions on the pre-magnetic coating film using a special simulated head to ensure smoothness. Various shapes have been devised. In addition, in order to check whether the protrusions have been removed in the burnishing process, a magnetic head used in an actual magnetic disk device is used to levitate the magnetic head at the actual value or a slightly smaller flying height. A 7N2-ting check process (t-ff) is carried out in which a protrusion detection sensor is mounted on this to inspect the smoothness, and the protrusion detection sensor used in this process is also being studied.

この7o−ティング・チェック工程における突出動検知
センサについては、磁気ディスクの高配針密度化に伴っ
て小さくなる磁気ヘッドの浮上量に対して、より高感度
の(のが採用される傾向にある。ここで問題となるのは
、上述の如き高感度の突出動検知センサを使用すると、
従来のセンサでは検知できなかった付着物あるいは沈降
塵埃を検知するため、真の突出物(前述の如く、「磁性
塗膜自体に起因する突出物」全いつ。)との区分がつか
なくなるという点である。すなわち、前述・の如き吠態
では、真の突出物の数より多くの突出物が検知され、い
たずらに、磁気ディスクの生産枠全低下させることにな
る。そして、従来のバニッシュ工程で使用されている模
擬ヘッドによる処理を繰返しても、前述の如き付着物あ
るいは沈降塵埃は除去する゛ことはできなかった。
Regarding the protrusion motion detection sensor used in this o-ting check process, there is a tendency to adopt a sensor with higher sensitivity to the flying height of the magnetic head, which is decreasing as the needle arrangement density of the magnetic disk becomes higher. The problem here is that when using a highly sensitive protruding motion detection sensor like the one mentioned above,
Because it detects deposits or settled dust that could not be detected with conventional sensors, it is difficult to distinguish between true protrusions (as mentioned above, protrusions caused by the magnetic coating itself). It is. That is, in the above-mentioned barking state, more protrusions are detected than the true number of protrusions, which unnecessarily reduces the entire production quota for magnetic disks. Even if the processing using the simulated head used in the conventional burnishing process was repeated, the above-mentioned deposits or settled dust could not be removed.

本発明は上記事情に鑑みてなされたもので、その目的と
するところは、従来の磁気ディスクの製造方法における
前述の如き@Mを解消し、単なる付着物や沈降塵#*を
検知することを防止可能どしたバニッシュ工程を有する
磁気ディスクの製造方法全提供することにある。
The present invention has been made in view of the above circumstances, and its purpose is to eliminate the above-mentioned @M in the conventional magnetic disk manufacturing method and to detect mere deposits and settled dust #*. An object of the present invention is to provide a method for manufacturing a magnetic disk having a preventable burnishing process.

本発明の上記目的は、基板表面に磁性塗膜を形成させた
後、バニッシュ工程と70−ティング・チェック工程と
を行う磁気ディスクの#造方法において、前記バニッシ
ュ工程を負荷荷重の異なる2種以上のバニッシュ用ヘッ
ド全交互に作用させる如く構成したことを特徴とする磁
算ディスクの製造方法によって達成される。
The above-mentioned object of the present invention is to provide a magnetic disk manufacturing method in which a magnetic coating film is formed on the surface of a substrate, and then a burnishing process and a 70-ting check process are performed. This is achieved by a method of manufacturing a magnetic disk characterized in that the burnishing heads are all arranged to act alternately.

以下、本発明の実施例を図面に基づいて詳細に説明する
Embodiments of the present invention will be described in detail below with reference to the drawings.

#1図は本発明のバニッシュ工程に使用する模擬ヘッド
のうち負荷荷重の大きいヘッド(以下、「重荷重ヘッド
」という。)4の正面図であり、重荷重スライダ2はバ
ネ1人により約15グラムの荷重全与えられる。また、
第2図は同じく本発明のバニッシュ工程に使用する*i
ヘッドのうち負荷荷重の小さいヘッド(以下、「軽荷重
ヘッド」という。)5の正面図であり、軽荷重スライダ
3人はバネIBにより約15グラムの荷重を与えられ、
チェック・スライダ3Bはバネlaにより約lOダラム
の荷重を与えられる。
Figure #1 is a front view of a head 4 with a large load (hereinafter referred to as "heavy load head") among the simulated heads used in the burnishing process of the present invention, and the heavy load slider 2 has a load of about 15 cm by one spring. The total load in grams is given. Also,
Figure 2 shows the same material used in the burnishing process of the present invention *i
It is a front view of a head 5 with a small load among the heads (hereinafter referred to as a "light load head"), in which three light load sliders are given a load of about 15 grams by a spring IB,
The check slider 3B is given a load of approximately 10 duram by a spring la.

第3図、第4図は本発明のバニッシュ工程を実施する装
置の構成図で、第3図は上面図、第4図は側面図および
制御部の構成を示すプルツク図である。重荷重ヘッド4
および軽荷重ヘッド6は、パルスモータ6によりそれぞ
れ独立して動作するキャリッジ7Aおよび7Bに搭載さ
れ、矢印R方向に回転する磁気ディスク9をバニッシュ
する。
3 and 4 are configuration diagrams of an apparatus for carrying out the burnishing process of the present invention, with FIG. 3 being a top view, and FIG. 4 being a side view and a pull diagram showing the configuration of the control section. Heavy load head 4
The light load head 6 is mounted on carriages 7A and 7B that are each independently operated by a pulse motor 6, and burnishes a magnetic disk 9 rotating in the direction of arrow R.

このとき、重荷重ヘッドキで1〜2回バニッシュした後
、軽荷重ヘッド6で1回バニッシュする。
At this time, the heavy load head 6 is used to burnish once or twice, and then the light weight head 6 is used once to burnish.

この軽荷重ヘッドδには、突出物検知用のチェック・ス
ライダ3Bが搭載されており、キャリッジ7Bによる1
往復の動作の復路で検知センサ10で突出動全検知し、
この検出信号全アンプ11で増幅し信号処紳部12に送
って信号処理を行い、前記突出物の位置の計算全行うと
ともに計数全行い、結果全プリンタ14に打出すように
する。そして、この結果により前述の工程を繰返し、突
出物の数が炉中範囲に入った時点で処理を終了する・b
第6図〜第7図は種々のバニッシュ工程の効果を比較し
た図で、第5図は重荷重ヘッドのみによるバニッシュ全
行った場合番、第6図は軽荷重ヘッドのみによるバニッ
シュを行った場合を、そして第7図は本発明による重荷
重ヘッドと軽荷重ヘッドとを交互に作用させるバニッシ
ュを行った場合を示している。
This light load head δ is equipped with a check slider 3B for detecting protrusions, and the carriage 7B
On the return trip of the reciprocating movement, the detection sensor 10 detects all the protruding movements,
This detection signal is amplified by all the amplifiers 11 and sent to the signal processing section 12 for signal processing, and the position of the protrusion is fully calculated and counted, and the results are outputted to all the printers 14. Then, based on this result, the above-mentioned process is repeated, and the process is terminated when the number of protrusions falls within the range of the furnace.
Figures 6 and 7 are diagrams comparing the effects of various burnishing processes. Figure 5 is the case where all burnishing is performed with only the heavy load head, and Figure 6 is the case where the burnishing is performed with only the light load head. FIG. 7 shows a case where a burnishing process according to the present invention is performed in which a heavy load head and a light load head are applied alternately.

第6図に示す重荷重ヘッドのみでバニッシュを行った場
合では、付着物あるいは沈降Inを除去できないため、
突出物検知数は一定数以下にはならない。第6図に示す
軽荷重ヘッドのみでバニッシュを行った場合では、磁気
ディスクの磁性塗膜自体に起因する突出物が残るので、
やはり突出物検知数は一定数以下にならない。これに対
して、第7図に示す重荷重ヘッドによるバニッシュと軽
荷重ヘッドによるバニッシュとの組合せ(ここでハ各バ
ニッシュ′t−1回ずつ行うのを1サイクルとして、横
軸はサイクル数で示している。)を行った場合では、2
サイクルで突出物検知数がOとなっており、本発明の効
果の大きいこと全物語つている。
If burnishing is performed only with the heavy-load head shown in Figure 6, deposits or precipitated In cannot be removed.
The number of detected protrusions does not fall below a certain number. If burnishing is performed using only the light load head shown in Figure 6, protrusions caused by the magnetic coating film of the magnetic disk will remain.
After all, the number of detected protrusions does not fall below a certain number. On the other hand, the combination of burnishing by a heavy-load head and burnishing by a light-load head as shown in Fig. 7 (where each burnish 't-1 time is considered to be one cycle), and the horizontal axis shows the number of cycles. ), 2
The number of protrusions detected during the cycle was O, which fully demonstrates the great effects of the present invention.

上記実施例においては、軽荷重ヘッドbにはバニッシュ
用の軽荷重スライダ3人と突出動検知用のチェック・ス
ライダ3Bとが搭載され1つのキャリッジ7Bで移動す
るように構成されているが、これは各々専用のキャリッ
ジに搭ψするようにしても良いことは言うまでもない。
In the above embodiment, the light load head b is equipped with three light load sliders for vanishing and a check slider 3B for detecting protrusion movement, and is configured to move by one carriage 7B. Needless to say, each may be mounted on a dedicated carriage.

以上跡べた如く、本発明によれば、基板表面に磁性′#
111gを形成させた後、バニッシュ工程と70−ティ
ング・チェック工程とを行う磁気ディスゲ1のw遣方法
において、前記バニツシュエ稈全負荷荷重の異なる2種
以上のバニッシュ用−\ラドを交互に作用させる如く構
成したので、真の突出動数が把握でき、安定した品質の
磁気ディスクの生産が可能になるというWI41Lな効
果¥を妻するものである。
As described above, according to the present invention, the substrate surface has magnetic
After forming 111g, in the method of using magnetic disk 1, which performs a burnishing process and a 70-ting check process, two or more types of burnishing -\rads having different total loads on the burnishing culm are alternately applied. With this structure, it is possible to grasp the true number of protrusions, thereby achieving the WI41L effect of making it possible to produce magnetic disks of stable quality.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図、第2図は本発明の方法において、バニッシュT
ilに使用するヘッドの正面図、第3図。 第4図はバニッシュ装flfk示す図、第6図〜第7図
は樒々のバニッシュ工程の効果を比較した図で量ある。 LA、IBI  1a:バネ、2:重荷重スライダ、3
A:@荷重スライダ、3B:チェック・スライダ、4:
重荷重ヘッド、5二軽荷重へ゛ラド、6:パルスモータ
、7A、7B:キャリッジ、8:ノぜルスモータ制御部
、9:磁気ディスク、10:検知センサ、11:アンプ
、12:信号処理部、13計数部、14:プリンタ、1
5−回転数検出用円特許出一大 株式会社 日立製作所 第1図 第3図 第4図 第5図 第7図 バニッシュサイクル繰返数− 第6図
FIGS. 1 and 2 show that the method of the present invention is applied to vanish T.
FIG. 3 is a front view of the head used for il. FIG. 4 is a diagram showing the vanishing process flfk, and FIGS. 6 and 7 are diagrams comparing the effects of various vanishing processes. LA, IBI 1a: Spring, 2: Heavy load slider, 3
A: @Load slider, 3B: Check slider, 4:
Heavy load head, 5 light load head, 6: Pulse motor, 7A, 7B: Carriage, 8: Nozzle motor control section, 9: Magnetic disk, 10: Detection sensor, 11: Amplifier, 12: Signal processing section, 13 counter, 14: printer, 1
5 - Largest circle patent for rotational speed detection Hitachi, Ltd. Figure 1 Figure 3 Figure 4 Figure 5 Figure 7 Vanish cycle repetition rate - Figure 6

Claims (1)

【特許請求の範囲】 基板表面に磁性塗膜を形成させた後、バニツシ−。 ユニ程とフローティング・チェック工程とを行う゛磁気
ディスクの製造方法において、前記バニツシュエat負
荷荷重の興なる2種以上のバニッシュ゛用ヘッドを交互
に作用させる如く構成したことを特徴とする磁気ディス
クの製造方法。
[Claims] Burnishing after forming a magnetic coating film on the surface of a substrate. A method for manufacturing a magnetic disk, which comprises a uni process and a floating check process, characterized in that two or more types of burnishing heads, which generate the burnishing force and the load, are configured to act alternately. Production method.
JP95682A 1982-01-08 1982-01-08 Magnetic disk manufacturing method Granted JPS58121130A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP95682A JPS58121130A (en) 1982-01-08 1982-01-08 Magnetic disk manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP95682A JPS58121130A (en) 1982-01-08 1982-01-08 Magnetic disk manufacturing method

Publications (2)

Publication Number Publication Date
JPS58121130A true JPS58121130A (en) 1983-07-19
JPH0319610B2 JPH0319610B2 (en) 1991-03-15

Family

ID=11488114

Family Applications (1)

Application Number Title Priority Date Filing Date
JP95682A Granted JPS58121130A (en) 1982-01-08 1982-01-08 Magnetic disk manufacturing method

Country Status (1)

Country Link
JP (1) JPS58121130A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61271622A (en) * 1985-05-28 1986-12-01 Hitachi Ltd Residue removal mechanism for punch processing
JPS62234238A (en) * 1986-04-04 1987-10-14 Fuji Photo Film Co Ltd Production of magnetic recording medium

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58113869A (en) * 1981-12-28 1983-07-06 Fujitsu Ltd Magnetic recording media inspection equipment
JPS58105037U (en) * 1981-12-29 1983-07-16 富士通株式会社 Magnetic disk substrate burnishing and runout measuring device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58113869A (en) * 1981-12-28 1983-07-06 Fujitsu Ltd Magnetic recording media inspection equipment
JPS58105037U (en) * 1981-12-29 1983-07-16 富士通株式会社 Magnetic disk substrate burnishing and runout measuring device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61271622A (en) * 1985-05-28 1986-12-01 Hitachi Ltd Residue removal mechanism for punch processing
JPS62234238A (en) * 1986-04-04 1987-10-14 Fuji Photo Film Co Ltd Production of magnetic recording medium

Also Published As

Publication number Publication date
JPH0319610B2 (en) 1991-03-15

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