JPS58113372A - Thin film coating and manufacturing method thereof - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a thin film coating formed by coating thin films on both surfaces of a stretchable substrate, and a method for manufacturing the same.

There are many thin-film coatings that require a high level of flatness, such as magnetic recording media such as high-density magnetic tapes. Although the tape serving as the substrate has microscopic irregularities, the required flatness is obtained by coating the surface with a highly viscous liquid. However, these and other parts require high performance.

It has become impossible to obtain the desired performance using the conventional method of mixing a required material into a liquid and applying the mixture. Recently, a thin film production method using vacuum has been used instead, but it has the drawback that it is impossible to obtain the required flat surface due to microscopic irregularities and wrinkles that exist on the surface of the substrate. .

An object of the present invention is to provide a covering with good flatness that eliminates these drawbacks.

Another object of the present invention is to provide a thin film coating that is less prone to cracking due to scratches or the like.

According to the present invention, in a thin film coated body comprising two resilient substrates and a thin film coated on at least one surface of the substrate, a thin film coated body is obtained in which the substrate is pulled outward in multiple axial directions. In addition, there is obtained a method for producing a thin film coating in which the thin film is deposited while the substrate is stretched in multiple directions in order to obtain a thin film coating such as the one shown in FIG.

Next, a detailed explanation will be given with reference to the drawings.

FIG. 1 is a diagram showing a cross section of the structure of a thin film covering according to an embodiment of the present invention. In the figure, 10 is approximately 20 μm thick
Show me a floppy disk with a film on it.
Reference numeral 1 indicates a polyester film having a thickness of about 20 μm that is elastic and can be stretched in either direction, and 12 and 13 indicate metal magnetic thin films with a thickness of about 1 μm, such as an alloy of cobalt and chromium. A thin film is shown. The substrate 11 is pulled in the direction of the arrow 16 and stretched by about 3%, while the thin films 12 and 13 are subjected to compressive stress 1 in the direction of the arrow 17 due to the pulling force.
However, since the substrate 11 and the like have properties similar to rigid bodies, they do not shrink. Both the tabs support each other.

In the above configuration, the substrate 11 is in a slightly elongated state because, as explained above, the thin film was applied in a state in which it was elongated by about 3% in the multiaxial direction during manufacturing.

Therefore, small irregularities or wrinkles in various directions on the surface of the polyester film are widened and become nearly flat. In other words, the magnetic metal thin film was formed with the polyester film being extremely flat. Furthermore, since the thin films 12 and 13 are subjected to a force in the compressive direction, they have much greater strength against scratches than when tension is applied. The above-mentioned good surface area and resistance to scratching are extremely desirable properties for recording media such as fixed disks, 7O disks, B disks, and magnetic chips. It also becomes longer. The elongation of the substrate 11 due to tension was assumed to be 3 inches above, but experiments have shown that it varies depending on the material, film thickness, etc.

Approximately 1% is effective. The flatness improves as the elongation increases, but due to mechanical constraints that apply tension,
It is practically effective up to about Io%.

Further, the thickness of the substrate film 11 is approximately 5011 m. Furthermore, in the case of a tape, the thickness may be as thin as about 2 μm.

The above description relates to the case where the thin films 12 and 13 are applied to both surfaces of the substrate film 11, although one is not shown in this illustration.

A similar effect can be obtained even when a thin film is applied on only one side. For example, ordinary magnetic tape belongs to this category. Furthermore, does something with this kind of configuration work as well as it does in a free state?

When in use, it will straighten even with weak tension.

There are no particular problems. In the following description, unless otherwise specified, the configuration will be explained as shown in FIG. 1 as described above.

FIGS. 2 and 3 show Suno J's method of manufacturing a thin film coating according to another embodiment of the present invention. FIG. 2 is a diagram showing an outline of the configuration inside the vacuum chamber of the ivy apparatus and an outline of the upper part of the roll and the thin film thereon.

Note that the chamber, vacuum pump, etc. are omitted.

Below, the configuration and operation of the apparatus shown in FIG. 2 will be explained with reference to FIGS. 1 and 3. 10 to 13 are the same as in FIG. The feeding directions of the covering body 10 are shown respectively. 20 is a feeding mechanism for the base film 11 and the thin film coating 10, of which 21 and 24 are feeding rolls, and 22 and 23 are water-cooled rolls. 26 is a groove carved by the roller 23, which will be explained later. 30 is a tension mechanism; 31 to 34;
35 is an O-ring made of rubber,
36 is a roll moving mechanism that applies tension to the O-ring, and 37 applies tension to the O-ring 35 and moves the substrate 11 into the groove 2.
6 indicates the direction of the force that applies tension to the substrate in the direction of the central axis of the rolls 22 and 23 (in the left-right direction in the figure).

In this embodiment, one groove 26 is provided at the end, but if the rolls 22 and 23 have good flatness, they may slip and may not be able to apply sufficient tension. In such cases, it is desirable to make multiple grooves. Tension is applied to the substrate 11 in two axial directions: a force that pulls the film in the film running direction 14→15, and a tension that acts in the central axis direction of the roll.

38a and 38b are sputter target electrodes.

The target power supply is omitted.

This device is operated in the same manner as a normal sputtering device, and when power (DC or AC) is supplied to the target electrodes 38a and 38b and sputtering begins, the polyester film 11 is released from two unwinding rolls (not shown) by arrows. It is sent in the direction of 14, and is sent to 381L.
A thin film indicated by 2 is deposited on the surface of the substrate. The coated body to which the thin film has been attached is further coated with a thin film indicated by 13 by a roller 40b, and the finished product, the thin film coated body 10, is sent in the direction of the arrow 15 and placed on a winding roll (not shown). It is wound up. When attaching a thin film, as described above, the substrate film 11 is attached in the direction of movement of the substrate (arrow 14.
15) and a direction perpendicular to this (direction of the central axis of the rolls 22 and 23). Therefore, the surface of the substrate 11, that is, the surfaces of the thin films 12 and 13, maintains good smoothness.

In the completed thin film coating 10, when the external tension is removed, the substrate 11' of the three layers tends to shrink.

Due to the presence of thin films 12 and 13, it cannot shrink.

Therefore, the substrate 16 is subjected to a tension force 16 in a stretched state, while the thin films 12 and 13 are subjected to a stress 17.

Therefore, a thin film coating with a smooth surface and less prone to scratches as described above can be obtained.

FIG. 4 shows an outline of a mechanism for applying tension in still another embodiment of the present invention. In this embodiment, the substrate film 11 is gripped by the chuck 41 and the arrow 4
A configuration is shown in which tension is applied in the axial direction (left-right direction in the figure) of the seal roll 23 by pulling it in the direction 11. In addition to pulling in the direction in which the substrate travels, tension in multiple axial directions is applied.

FIG. 5 schematically shows a tensioning mechanism in another embodiment of the invention. In this embodiment, a small roll 42 in contact with the substrate 11 is rotated in the direction of an arrow 421 on a rotating shaft to apply tension to the substrate 11 in the axial direction of the roll 23. If the film 11 is sputtered while being stretched in the direction of the arrow 43 (direction 14.degree. 15 in FIG. 1), the film 11 will be sputtered while being subjected to tension in biaxial (multiaxial) directions.

It goes without saying that in order to apply tension in multiple axial directions to the substrate, tension may be applied to the film-like substrate itself.

An example is shown below.

FIGS. 6 and 7 show a top view and a portion of a mechanism for applying tension in a further embodiment of the present invention.
The long and relatively strong ribs 44 are attached to the substrate film 11 using an adhesive or mechanical method while applying tension in the width direction of the film (horizontal direction in the figure). It's a great thing. Then, sputtering is performed while being stretched in the direction of movement of the film, that is, in the direction of arrow 43, thereby obtaining a thin film covering in which tension is applied in the multiaxial directions of the hood substrate. Note that the substrate 11 itself may be altered in quality to form a lip-like shape as a substitute for attaching the ribs 44.

FIG. 8 shows a tension applying mechanism in another embodiment of the present invention, in which the film 11 is sandwiched between the metal fitting 450, the part 45' that touches the base film 11, and the metal fitting 46, and the elasticity of the upper part of the metal fitting 45 is A certain hanging portion 45' applies tension to the left and right as shown in the figure.

Parts of FIG. 9 and FIG. 10 show a top view and a cross-sectional view of a mechanism for applying tension according to still another embodiment of the present invention, in which frames 47 and 48 are sandwiched between base films 11. By fitting it in, it is possible to obtain tension in multiple axial directions.

Although several embodiments have been given above, these are not meant to be limiting in any way, and it goes without saying that many modifications are possible. The important point is to attach a thin film to a resilient substrate while applying appropriate tension in two or more multiaxial directions, thereby obtaining a coated body with good flatness and resistance to scratches. The specific method is not limited to the embodiments described here, but various methods are possible.Even when depositing a thin film, various conventionally known methods and conditions can be used.

[Brief explanation of the drawing]

FIG. 1 is a sectional view of the structure of the thin film coating according to the present invention, and FIG.
The figure shows an outline of the internal structure of a vacuum device in a thin film coating manufacturing apparatus according to another embodiment of the present invention, and FIG. 3 shows the apparatus shown in FIG. 2. A partial sectional view of the upper part of the roll 23, FIG.
5 and 6 are diagrams showing the main points of W providing tension in other embodiments of the present invention, and FIG.
A-A' sectional view of a part of the figure, FIGS. 8 and 9 are diagrams showing an outline of the mechanism for applying tension in another embodiment of the semi-invention, and FIG. -B' cross-sectional views are shown respectively. Explanation of symbols = 10 is a thin film coating, 11 is a base (film), 12 and 13 are thin films, 14 and 15 are arrows indicating the direction of tension, 20 is a feeding mechanism, 21 is a feeding roll, 22 and 2
3 is a (water-cooled) roll. 26 is a groove, 31-34 is a feed roll, 35 is an O-ring, 36 is a moving mechanism, 38 is a sputter target, 41 is a chuck, 42 is a roll, and 43 is an arrow indicating the direction of tension. −4(

Claims (1)

[Claims] 1. A thin film coating comprising a resilient substrate and a thin film coated on at least one surface of the substrate. 2, such that the substrate is pulled outward in a multiaxial direction;
In a method for manufacturing a thin film coating by depositing a thin film on at least one surface of a resilient substrate, the substrate is stretched in multiple axes when the thin film is deposited on the surface of the substrate. A method for producing a thin film coating, characterized in that the coating is applied using a thin film.