JPS58102152A - Ultrasonic microscope - Google Patents

Abstract

PURPOSE:To control a drive means so that, based on an output of a cap sensor, a sample stand is positioned in parallel to a rotary drum, by a method wherein a microscope consists of a sample stand, a drive means for displacing the sample stand in two directions, and the cap sensor which is located facing and opposite to the sample stand. CONSTITUTION:A device is constituted such that a motor 11 is coupled to a rotary drum 13 through a drive shaft 12, a rectilinear reciprocable member of an ultrasonic transmitting and receiving element is situated at the inside of the rotary drum 12, and an ultrasonic beam can be scanned in a spiral on a plane surface of a sample 14. Four gap sensors 16, 17, 18, and 19 are placed on the bottom surface of the rotary drum 13 and in their respective symmetrical position. Comparators 20 and 21 compares the outputs of the corresponding gap sensors, and drive devices 22 and 23 are driven so that the surface of the sample 14 held on the sample table 15 is positioned in parallel to the bottom surface of the rotary drum 13.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an ultrasonic microscope, and particularly relates to an improvement in its scanning weight. Conventional ultrasonic microscopes scan by reciprocating movement by a voice coil and by a motor. I
[In combination with line movement, a minute slit of 1IjiiF waves scans the sample in a raster pattern as shown in FIG. 1. In FIG. 1, an ultrasonic transmitting/receiving device consisting of a transducer and an acoustic lens is placed above the sample l, and connected via a drive shaft δ to a voice coil cloud, that is, an X-direction drive device consisting of the same mechanism as the loudspeaker. The ultrasonic transmitting/receiving element field is caused to reciprocate at high speed in the X direction. In addition, a sample stage 6 that holds the sample l
A two-dimensional scan using ultrasonic waves is performed by moving at a low speed in the X direction using a y-direction moving mechanism C (eg, 41III) using a lead screw or the like.

During scanning, the sample must be placed at a position where the ultrasonic beam is minimized. In other words, when scanning a surface, the plane created by the smallest ultrasonic beam must be parallel to the sample surface of the sample. Therefore, as the sample stage 6, a member is used that can provide parallelism of the surfaces in the X, yf)j directions. Then, in order to make the surface created by the minimum ultrasonic beam parallel to the sample 1, repeat the water drop and adjust the sample stage 6 so as to reduce the interference fringes that appear in the layer image. When the particles disappeared, Sample 1 was to become flat for the first time. Illml of this sample stage 6 is very time-consuming, and if the sample l has a tilt, there is one drawback in using the large and medium observation time for adjustment to bring out the flatness of the grain.

The present invention overcomes the above-mentioned drawbacks and provides:
It is an object of the present invention to provide a device that can easily align the surface where ultrasonic waves are minimized with the sample plane. Swinging a with the axis extending in the eighth orthogonal direction as a control center
a drive means for displacing the second sample stand in the first and @S directions, respectively, and at least eight gap sensors that are thickened on the sample stand and arranged with respect to each other with respect to each other; Specifically, based on the outputs of these gap sensors, the driving means is controlled so that the sample stage is parallel to each other.

The non-invention will be explained in detail with reference to the following figure.

Chapter iv! J is an MA perspective view showing an embodiment of a scanning device for an ultrasound microscope according to the present invention. In this scanning device,
Motor 11 as drive shaft 1! The rotary drum 18 is connected to the rotary drum 18 via the rotary drum 18, and there is a linear reciprocating member (not shown) for an ultrasonic transmitting and receiving element within the rotary drum 18, and the combination of the linear reciprocating movement of this member and the rotational movement of the rotating drum 18 , sample 1
The ultrasonic beam scans the plane No. 4 in a spiral manner.

In this scanning device, the bottom surface of the rotating drum 18 is parallel to the plane that the minimum spot of the ultrasonic beam from the ultrasonic transceiver element would create during scanning. Therefore, the bottom surface of this rotating drum 1δ and the surface of the sample 14 to be observed,
Alternatively, if the sample 14 is not tilted, if the surface of the sample stage 15 is made parallel, the minimum spot of the ultrasonic beam will scan a plane parallel to the surface of the sample 14 during scanning. . The sample stage II on which the sample 14 is placed has a first member that swings around an axis extending in the X direction, a second member that swings around an axis that extends in the y direction, and a fixed part. and the attached IIIa member.

- In order to make the bottom surface of the rotating drum 18 parallel to the surface of the sample 14 held on the sample stage 15, four gap sensors 16 are installed on the bottom surface of the rotating drum 18 with respect to the center of rotation.
One gun, 111.19, is arranged in symmetrical positions. Among these, the gap sensor 161'F detects the flatness in the X direction, and the gap sensors 18.19 detect the flatness in the Y direction. Comparator go is connected to gap sensor 16゜17 and compares its output, comparison #1g1
are in contact with the gap sensors 18 and 19 and compare their outputs, and the comparator ilO is connected to the third member 1 of the sample stage 1s.
50 and swings the eighth member Ilb [!
Similarly, comparison #21 is attached to the ggg material 11sb of the sample stand is, and the j11 member 15a is attached to l1iII.
It is connected to the drive unit @ga that causes I. Rotating drum 1
In the X direction, the gap sensor 16 .
11, the distance between the bottom of the rotating drum 18 and the sample 14t is
The comparator go compares one output with respect to the two points, and the drive device g2 in the X direction is controlled so that the outputs are the same, that is, the layers used are equal at two points. Similarly, in the y-direction, a gap sensor 18.degree. 19 and a comparator 21 control a driving device 88 in the y-direction.

As explained above, according to the fourth invention, before scanning, it is possible to make the minimum suit of the ultrasonic beam parallel to the scanning plane that would be created during scanning and the sample surface, unlike the conventional method. In addition, it is possible to omit the trouble of performing observation adjustments to make the sample surface parallel by performing multiple scans.

Note that the present invention is not limited to the above-described embodiments, but may include numerous modifications and changes. It is. For example, it can be used even in the case of a raster scanning device using a voice coil that does not rely on spiral scanning.

[Brief explanation of the drawing]

The first seagull is 41 diagrams of an example of the scanning fII position of Kazuki's ultrasonic St* mirror! FIG. 2 is a diagrammatic perspective view of an embodiment of the scanning device of the ultrasonic GI mirror according to the present invention. 11...Motor, ls...Drive shaft, 18...
... Rotating drum, 14... Sample, 16... Sample stand, iia... First member of sample stand, 11ib... Eighth member of sample stand, 160... Eighth member of sample stand , 18.11.18.19... gap sensor, 10.
11...Comparison-5"as, sa...Drive device. Patent applicant: Olympus Optical Industry Co., Ltd. Seal chart/

Claims (1)

[Claims] L Swinging FiIw about the shaft extending in the first direction and the axis extending in the direction of the axis perpendicular to this
a sample stand, drive means for displacing the sample stand in the first and first directions, and at least eight gap sensors arranged one-way from each other and facing the front dispensing section. , an ultrasonic m* mirror that is configured to operate the driving means in such a way that the sample stage is parallel to the sample stage based on the outputs of these gap sensors.